JP2002136046A5 - - Google Patents

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Publication number
JP2002136046A5
JP2002136046A5 JP2000324526A JP2000324526A JP2002136046A5 JP 2002136046 A5 JP2002136046 A5 JP 2002136046A5 JP 2000324526 A JP2000324526 A JP 2000324526A JP 2000324526 A JP2000324526 A JP 2000324526A JP 2002136046 A5 JP2002136046 A5 JP 2002136046A5
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JP
Japan
Prior art keywords
motor
magnetic bearing
main body
housing main
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000324526A
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English (en)
Japanese (ja)
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JP4049531B2 (ja
JP2002136046A (ja
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Priority to JP2000324526A priority Critical patent/JP4049531B2/ja
Priority claimed from JP2000324526A external-priority patent/JP4049531B2/ja
Publication of JP2002136046A publication Critical patent/JP2002136046A/ja
Publication of JP2002136046A5 publication Critical patent/JP2002136046A5/ja
Application granted granted Critical
Publication of JP4049531B2 publication Critical patent/JP4049531B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000324526A 2000-10-24 2000-10-24 磁気軸受モータおよびエキシマレーザ装置 Expired - Lifetime JP4049531B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000324526A JP4049531B2 (ja) 2000-10-24 2000-10-24 磁気軸受モータおよびエキシマレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000324526A JP4049531B2 (ja) 2000-10-24 2000-10-24 磁気軸受モータおよびエキシマレーザ装置

Publications (3)

Publication Number Publication Date
JP2002136046A JP2002136046A (ja) 2002-05-10
JP2002136046A5 true JP2002136046A5 (OSRAM) 2005-02-10
JP4049531B2 JP4049531B2 (ja) 2008-02-20

Family

ID=18802041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000324526A Expired - Lifetime JP4049531B2 (ja) 2000-10-24 2000-10-24 磁気軸受モータおよびエキシマレーザ装置

Country Status (1)

Country Link
JP (1) JP4049531B2 (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5027473B2 (ja) * 2006-10-11 2012-09-19 カヤバ工業株式会社 サスペンション装置
US7847454B2 (en) * 2007-03-08 2010-12-07 General Electric Company Encapsulated stator assembly and process for making
US8593024B2 (en) * 2010-04-12 2013-11-26 Hamilton Sundstrand Space Systems International, Inc. Implementation of a non-metallic barrier in an electric motor
JP2013038964A (ja) * 2011-08-09 2013-02-21 Ulvac Japan Ltd 位置検出器および真空モータ
EP2887022B1 (en) * 2013-12-20 2016-09-07 Skf Magnetic Mechatronics Rotor sensor target for magnetic bearings
JP2021055613A (ja) * 2019-09-30 2021-04-08 ダイキン工業株式会社 ターボ圧縮機
JP7766079B2 (ja) 2021-03-24 2025-11-07 ギガフォトン株式会社 チャンバ装置、ガスレーザ装置、及び電子デバイスの製造方法

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