JP2002136046A5 - - Google Patents

Description

[0011]
[Means for Solving the Problems]
In order to achieve the above object, a magnetic bearing motor according to the present invention is a magnetic bearing motor in which a motor for rotationally driving a rotating body and a magnetic bearing for floatingly supporting the rotating body are provided. A first partition made of a thin-walled cylindrical nonmagnetic metal material, and an inner peripheral surface of the inductive displacement sensor for detecting the position of the rotary member of the magnetic bearing is made of a thin-walled cylindrical nonmagnetic metal material; It is characterized in that each is individually sealed airtight with the partition wall of The motor for driving the rotating body and the magnetic bearing for floating and supporting can be disposed adjacent to each other in the magnetic bearing motor.

[0013]
The excimer laser device according to the present invention comprises a laser container for sealing a laser gas, a pair of main discharge electrodes disposed in the laser container for obtaining a discharge enabling oscillation of laser light, and a rotating shaft. a circulation fan that produces a high-speed laser gas flow between the main discharge electrodes, you; and a magnetic bearing motor according to any one of the lectures Motomeko 1 to 5 for rotating the rotary shaft.

Claims (6)

In a magnetic bearing motor in which a motor for rotationally driving a rotating body and a magnetic bearing for floatingly supporting the rotating body are arranged,
The inner circumferential surface of the motor stator of the motor is a first partition made of a thin cylindrical nonmagnetic metal material, and the inner circumferential surface of the inductive displacement sensor for detecting the position of the rotor of the magnetic bearing is a thin cylinder A magnetic bearing motor characterized by being individually airtightly sealed with second partitions made of a nonmagnetic metal material in the shape of a circle. The first partition is fixed by welding both ends to a motor housing main body accommodating the motor stator and a side plate disposed inside the motor housing main body, and the second partition accommodates the inductive displacement sensor 2. A magnetic bearing motor according to claim 1, wherein both ends are welded and fixed to the bearing housing main body and the side plate disposed inside the bearing housing main body. The magnetic bearing motor according to claim 1 or 2, wherein an iron core of an electromagnet of the magnetic bearing penetrates through the first partition wall and an inner peripheral surface of the iron core is exposed. The magnetic bearing motor according to claim 3, wherein the first partition wall and the iron core of the electromagnet are joined by welding. 5. A magnetic recording medium according to any one of claims 1 to 4, wherein a sealing material is interposed between the motor housing main body housing the motor stator and the bearing housing main body housing the induction type displacement sensor. Bearing motor. A laser container for sealing a laser gas;
A pair of main discharge electrodes disposed in the laser vessel for obtaining a discharge enabling oscillation of laser light;
A circulating fan having an axis of rotation and producing a high velocity laser gas flow between the pair of main discharge electrodes;
An excimer laser device comprising: the magnetic bearing motor according to any one of claims 1 to 5, which rotationally drives the rotating shaft.