JP2002134858A - Copper foil for printed boards - Google Patents

Copper foil for printed boards

Info

Publication number
JP2002134858A
JP2002134858A JP2000325485A JP2000325485A JP2002134858A JP 2002134858 A JP2002134858 A JP 2002134858A JP 2000325485 A JP2000325485 A JP 2000325485A JP 2000325485 A JP2000325485 A JP 2000325485A JP 2002134858 A JP2002134858 A JP 2002134858A
Authority
JP
Japan
Prior art keywords
copper foil
roughened
roughening
plating
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000325485A
Other languages
Japanese (ja)
Inventor
Muneo Kodaira
宗男 小平
Toshinori Ozaki
敏範 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP2000325485A priority Critical patent/JP2002134858A/en
Publication of JP2002134858A publication Critical patent/JP2002134858A/en
Pending legal-status Critical Current

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Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a copper foil for printed boards which maintains a stable adequate electrodeposition grain shape even on a rolled copper foil having a nonuniform surface condition, and forms a desired uniform roughened plating of electrodeposition grains on the nonuniformly conditioned surface of the rolled copper foil, thereby improving the adhesion of the roughened electrodeposition plating copper foil to a resin board. SOLUTION: The copper foil for printed boards has a roughened plating surface. Prior to the roughening plating, the foil surface is pre-roughened into a pre-roughened surface having a roughness Ra of 200 nm or more but less than 500 nm in measurement using an interatomic force microscope. The copper foil is dipped in a specified treating solution and set to a negative electrode to apply electrodeposition metal grains preferably such as copper grains of 1-3 μm onto the pre-roughened surface, thereby forming a roughened plating surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、プリント回路基
板用の銅箔、特に圧延銅箔の表面に、粗化めつきを施こ
して用いるプリント基板用銅箔に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copper foil for a printed circuit board, and more particularly to a copper foil for a printed circuit board which is used by roughening the surface of a rolled copper foil.

【0002】[0002]

【従来の技術】プリント回路基板に用いられる銅箔は、
樹脂基材と積層する銅箔の接着性を良好にするために、
銅箔の被接着面に粗化めっきの処理が施こされる。銅箔
の粗化めっき処理は、従来、電気めっきによって金属銅
を電着する方法が取られている。すなわち、電着は、電
解液に硫酸を適量加えた硫酸銅水溶液を用い、液温40
℃前後で、銅箔を負極にして電解することにより、銅箔
の表面に粗い金属粒子を電着させるものである。
2. Description of the Related Art Copper foils used for printed circuit boards are:
In order to improve the adhesiveness of the copper foil to be laminated with the resin substrate,
The surface to be bonded of the copper foil is subjected to a roughening plating process. Conventionally, a method of electrodepositing metallic copper by electroplating has been used for roughening plating of copper foil. That is, the electrodeposition is performed using an aqueous solution of copper sulfate obtained by adding an appropriate amount of sulfuric acid to the electrolytic solution at a liquid temperature of 40%.
Electrolysis is carried out at about ° C. using a copper foil as a negative electrode to cause coarse metal particles to be electrodeposited on the surface of the copper foil.

【0003】銅箔表面への金属粒子の電着において、粗
化された銅箔と樹脂基板の接着力を向上させるには、銅
箔の表面に電着させる粗い金属粒子の電着粒子形状の厳
密な制御が非常に重要である。この背景には、第1に、
電着銅粒子が微細すぎると、粗化表面が平滑な銅めっき
状態に仕上がるために、接着性を向上させるアンカー効
果が期待できないという事情があり、第2に、電着銅粒
子の形状は、粗化めっきの電流密度と密接に関係してお
り、電流密度が低いと微粒子が電着し、平滑なめっき面
になり、逆に、高すぎると、いわゆる粗化めっきにな
り、電着粒子自体が剥がれ落ちやすくなるという事情が
ある。一方、ブラシやバフを用いて機械的に粗化する研
磨法も提唱されているが、強度が小さい銅箔ヘの適用が
困難であり、必ずしも均一な仕上がりにならない。ま
た、研磨粉が粗化めっき液に混入して粗化めっき不良の
原因となる惧れがあるため、適切な粗化法ではない。
[0003] In the electrodeposition of metal particles on the copper foil surface, in order to improve the adhesion between the roughened copper foil and the resin substrate, the shape of the electrodeposited particles of the coarse metal particles to be electrodeposited on the copper foil surface is improved. Tight control is very important. In this context, first,
If the electrodeposited copper particles are too fine, the roughened surface is finished in a smooth copper plating state, and there is a situation that an anchor effect for improving the adhesiveness cannot be expected. Second, the shape of the electrodeposited copper particles is as follows. It is closely related to the current density of roughening plating.If the current density is low, fine particles are electrodeposited and a smooth plating surface is formed. Conversely, if the current density is too high, so-called roughening plating occurs, and the electrodeposited particles themselves are formed. There is a situation that it is easy to peel off. On the other hand, a polishing method of mechanically roughening using a brush or a buff has also been proposed, but it is difficult to apply the method to a copper foil having low strength, and a uniform finish is not always obtained. Further, the polishing powder is not an appropriate roughening method because there is a possibility that the polishing powder is mixed into the roughening plating solution and causes a rough plating failure.

【0004】[0004]

【発明が解決しようとする課題】しかし、従来の電着法
による銅箔表面への粗化めっきによると、電着粒子形状
を制御したとしても、銅箔の圧延時において、圧延ロー
ルと銅箔の接触状態が必ずしも均一でないために、その
影響が銅箔の表面状態にも現われてしまい、圧延銅箔の
表面を微細に見た場合、銅箔の表面粗さが不均一に仕上
がっているという問題があった。従って、圧延銅箔の表
面に一定条件の下で電着による粗化めっき処理を施こし
ても、銅箔の表面位置によって電着粒子状態が不均一と
なり、この不均一な電着粒子が、電着粗化めっきの銅箔
と樹脂基板との接着性不良の原因を招くという課題があ
り、その解決策が要望されていた。
However, according to the rough plating on the surface of the copper foil by the conventional electrodeposition method, even if the shape of the electrodeposited particles is controlled, the rolling roll and the copper foil can be used during the rolling of the copper foil. Because the contact state of the copper foil is not necessarily uniform, the effect also appears on the surface state of the copper foil, and when the surface of the rolled copper foil is viewed finely, the surface roughness of the copper foil is said to be unevenly finished. There was a problem. Therefore, even if the surface of the rolled copper foil is subjected to roughening plating by electrodeposition under certain conditions, the state of the electrodeposited particles becomes uneven depending on the surface position of the copper foil, and the uneven electrodeposited particles are There is a problem of causing a cause of poor adhesion between the copper foil of the electrodeposition-roughening plating and the resin substrate, and a solution has been demanded.

【0005】それ故、本発明の目的は、圧延銅箔の表面
の形態が不均一な状態にある基板用銅箔においても、安
定した適切な電着粒子形状を維持できるプリント基板用
銅箔を提供することにある。
Therefore, an object of the present invention is to provide a copper foil for a printed circuit board that can maintain a stable and appropriate electrodeposited particle shape even in a copper foil for a board in which the surface morphology of the rolled copper foil is uneven. To provide.

【0006】本発明の他の目的は、不均一な状態にある
圧延銅箔の表面に、所望の均一な電着粒子の粗化めっき
の形成が可能であり、電着粗化めっきの銅箔と樹脂基板
との接着性を改善したプリント基板用銅箔を提供するこ
とにある。
Another object of the present invention is to provide a method of forming a roughened plating of desired uniform electrodeposited particles on the surface of a rolled copper foil in an uneven state, and to provide a copper foil of electrodeposited roughened plating. To provide a printed circuit board copper foil having improved adhesiveness between the resin and a resin substrate.

【0007】[0007]

【課題を解決するための手段】この発明は、上記の目的
を達成するため、表面に粗化めっきを施こすプリント回
路基板用の銅箔において、前記粗化めっきを施こす前
に、前記銅箔の表面に施こされた予備粗化処理によって
形成された予備粗化処理面を備えていることを特徴とす
るプリント基板用銅箔を提供する。
In order to achieve the above object, the present invention provides a copper foil for a printed circuit board whose surface is subjected to roughening plating, wherein the copper foil is formed before the roughening plating is performed. A copper foil for a printed circuit board, comprising a pre-roughened surface formed by a pre-roughening treatment applied to a surface of a foil.

【0008】また、この発明は、上記の目的を達成する
ため、前記予備粗化処理面は、前記銅箔の表面に於ける
原子間力顕微鏡の測定値で、粗化処理粗さRaが、20
0nm以上、500nm未満になる予備粗化処理によっ
て形成されていることを特徴とし、前記予備粗化処理面
は、前記銅箔の最終圧延工程に於いて用いられた所定の
粗化処理粗さRaを表面に設けた圧延ロールによる前記
銅箔の圧延時の予備粗化処理によって施こされているこ
とを特徴とするプリント基板用銅箔を提供する。
According to the present invention, in order to achieve the above object, the pre-roughened surface has a roughened surface roughness Ra measured by an atomic force microscope on the surface of the copper foil. 20
It is characterized by being formed by a preliminary roughening treatment of not less than 0 nm and less than 500 nm, wherein the preliminary roughened surface has a predetermined roughness Ra used in the final rolling step of the copper foil. Provided by a preliminary roughening treatment at the time of rolling the copper foil by a rolling roll provided on the surface thereof.

【0009】さらに、この発明は、上記の目的を達成す
るため、前記予備粗化処理面は、前記銅箔を陽極とした
前記銅箔表面の電解脱脂による予備粗化処理によって施
こされていることを特徴とし、前記予備粗化処理面は、
前記銅箔を陽極とした前記銅箔表面の微細な電解研磨に
よる予備粗化処理によって施こされていることを特徴と
し、前記予備粗化処理面は、前記銅箔を浸漬酸洗して前
記銅箔の表面脱脂による予備粗化処理によって施こされ
ていることを特徴とし、前記予備粗化処理面は、前記銅
箔を浸漬酸洗し前記銅箔を陽極とした前記銅箔の表面溶
解除去による予備粗化処理によって施こされていること
を特徴とするプリント基板用銅箔を提供する。
Further, in order to achieve the above object, the present invention is characterized in that the preliminary roughening surface is subjected to a preliminary roughening treatment by electrolytic degreasing of the copper foil surface using the copper foil as an anode. Characterized in that the preliminary roughened surface,
The copper foil as an anode is characterized by being subjected to a preliminary roughening treatment by fine electrolytic polishing of the copper foil surface, and the preliminary roughened surface is immersed and pickled in the copper foil. It is characterized by being subjected to a preliminary roughening treatment by degreasing the surface of the copper foil, wherein the preliminary roughened surface is immersed in the copper foil and pickled, and the surface of the copper foil is dissolved using the copper foil as an anode. Provided is a copper foil for a printed circuit board, which has been subjected to preliminary roughening treatment by removal.

【0010】さらに、この発明は、上記の目的を達成す
るため、前記銅箔を負極とする金属粒子の電着によって
形成された粗化めっき面を、前記予備粗化処理面の上に
有することを特徴とし、前記銅箔を負極として粒径1μ
mないし3μmの銅粒子の電着によって形成された粗化
めっき面を、前記予備粗化処理面の上に有することを特
徴とするプリント基板用銅箔を提供する。
Further, in order to achieve the above object, the present invention has a roughened plating surface formed by electrodeposition of metal particles using the copper foil as a negative electrode on the preliminary roughened surface. Characterized in that the copper foil is used as a negative electrode and has a particle size of 1 μm.
A copper foil for a printed circuit board, characterized by having a roughened plating surface formed by electrodeposition of copper particles of m to 3 μm on the preliminary roughened surface.

【0011】[0011]

【発明の実施の形態】この発明の実施の形態として、プ
リント回路用基板に最も多く使用されている圧延ロール
により仕上げられたプリント基板用銅箔、あるいは無酸
素銅のプリント基板用銅箔について説明する。これらの
銅箔は、通常、表面粗さが通常の圧延ロール、および平
滑に仕上げた圧延ロールを使用して、最終圧延が行われ
ており、原子間力顕微鏡の測定による銅箔の表面粗さ
(Ra)も、Ra=100前後と、不均一な凹凸部分を
有する不十分な表面の銅箔であるのが一般的である。本
発明の実施の形態では、不均一な凹凸部分を有する圧延
銅箔の表面に粗化めっきを施こすプリント回路基板用の
銅箔において、粗化めっきを施こす前に、銅箔の表面に
施こされた予備粗化処理によって形成された予備粗化処
理面を備えており、つぎに、予備粗化処理面の上に、プ
リント回路の構成に必要な粗化めっきを施こしている。
本発明の実施の形態によると、不均一な凹凸部分を有す
る圧延銅箔の表面に、初めに予備粗化処理によって形成
された予備粗化処理面を施こし、予備粗化処理面の上の
粗化めっきは、銅箔を負極とする金属粒子の電着によっ
て予備粗化処理面の上に施こされているから、圧延銅箔
表面の不均一な凹凸部分は、最初の予備粗化処理により
形成される予備粗化処理面によって、銅箔表面が均一な
所定の表面粗さRaを有するものとなり、均一な表面粗
さRaを有する予備粗化処理面の上に施こされる粗化め
っき面も、所望の表面粗さRaを有する粗化めっきに仕
上げることが実現される。
BEST MODE FOR CARRYING OUT THE INVENTION As an embodiment of the present invention, a copper foil for a printed circuit board finished by a rolling roll or a copper foil for an oxygen-free copper printed circuit board which is most frequently used for a printed circuit board will be described. I do. These copper foils are usually subjected to final rolling using a roll having a normal surface roughness, and a roll having a smooth finish, and the surface roughness of the copper foil measured by an atomic force microscope. (Ra) is also generally about Ra = 100, and is generally a copper foil with an insufficient surface having uneven portions. In the embodiment of the present invention, in the copper foil for a printed circuit board subjected to roughening plating on the surface of the rolled copper foil having non-uniform irregularities, before roughening plating, on the surface of the copper foil It has a pre-roughened surface formed by the applied pre-roughening process, and then roughening plating necessary for the configuration of a printed circuit is applied on the pre-roughened surface.
According to the embodiment of the present invention, on the surface of the rolled copper foil having non-uniform irregularities, first subjected to the pre-roughened surface formed by the pre-roughening treatment, The roughening plating is performed on the pre-roughened surface by electrodeposition of metal particles with the copper foil as the negative electrode. The copper foil surface has a uniform predetermined surface roughness Ra by the preliminary roughening surface formed by the above, and the roughening performed on the preliminary roughening surface having the uniform surface roughness Ra It is realized that the plated surface is also finished to a roughened plating having a desired surface roughness Ra.

【0012】特に本発明によると、従来のプリント基板
用銅箔に於いては、銅箔の表面粗さと、粗化めっきの電
着物形態の関係が十分把握されていなかったために、銅
箔表面と樹脂基板との接着性不良の原因解明が遅れてい
たが、本発明者らは、表面粗さが不均一な圧延銅箔に施
こす粗化めっきの電着粒子の大きさが、粗化された銅箔
と樹脂基板の接着力の向上に大きく左右していることの
知見に基づいて、銅箔に電着する金属粒子のサイズを、
望ましくは粒径1μmないし3μmの範囲に仕上げるこ
とが最適であることを見い出すに至ったものである。
In particular, according to the present invention, in the conventional copper foil for printed circuit boards, the relationship between the surface roughness of the copper foil and the form of the electrodeposited material of the roughening plating has not been sufficiently grasped, so that Although elucidation of the cause of the poor adhesion to the resin substrate was delayed, the present inventors found that the size of the electrodeposited particles of the rough plating applied to the rolled copper foil having an uneven surface roughness was roughened. The size of the metal particles electrodeposited on the copper foil,
Desirably, it has been found that it is optimal to finish the particle size in the range of 1 μm to 3 μm.

【0013】本発明において、予備粗化処理面の上に施
こされる粗化めっきは、銅箔を負極とする金属粒子の電
着によって形成されており、その場合、予備粗化処理面
の上に施こされる粗化めっきは、銅箔を負極として望ま
しくは粒径1μmないし3μmの銅粒子などの電着金属
粒子によって形成されていることが特徴である。本発明
の実施の形態によると、圧延銅箔の表面に予め適量予備
粗化処理を施こして予備粗化処理面を形成することによ
り、圧延銅箔表面の凹凸が、均一に、かつ細かく分布す
るようになり、この細かい均一な凹凸が、銅箔に施こさ
れる粗化めっき時の電流密度の高い部分と低い部分の分
布にもそのまま反映させることができ、したがって、粗
化めつきの銅粒子は銅箔全面に均一に分布する高電流密
度部分に電着し、その結果、均一な粗化めっき面を得る
ことが出来る。
In the present invention, the roughening plating applied on the pre-roughened surface is formed by electrodeposition of metal particles having a copper foil as a negative electrode. The roughening plating applied thereon is characterized by being formed of electrodeposited metal particles such as copper particles having a particle diameter of preferably 1 μm to 3 μm using a copper foil as a negative electrode. According to the embodiment of the present invention, by applying an appropriate amount of preliminary roughening treatment in advance to the surface of the rolled copper foil to form a pre-roughened surface, the unevenness of the surface of the rolled copper foil is uniformly and finely distributed. The fine and uniform irregularities can be directly reflected in the distribution of the high and low current density portions during the roughening plating performed on the copper foil. The particles are electrodeposited on the high current density portions uniformly distributed on the entire surface of the copper foil, and as a result, a uniform roughened plating surface can be obtained.

【0014】本発明の実施の態様において、表面不均一
な状態にある圧延銅箔の表面に、粗化めっき前に予め施
こす予備粗化処理面を形成するための予備粗化処理法と
しては、所定の表面粗さ(原子間力顕微鏡測定値Ra)
を有する適度な予備粗化処理、銅箔を陽極とした脱脂も
しくは酸洗による適度な予備粗化処理、銅箔を陽極とし
た溶解除去による適度な予備粗化処理、あるいは適度に
表面粗化した圧延ロールによる予備粗化処理などがある
が、これらはプリント基板用銅箔の種類、用途により適
宜使い分けられる。
In an embodiment of the present invention, a pre-roughening method for forming a pre-roughened surface to be preliminarily applied before roughening plating on the surface of a rolled copper foil in an uneven surface state includes: , Predetermined surface roughness (atomic force microscope measured value Ra)
Moderate preliminary roughening treatment with copper foil, moderate preliminary roughening treatment by degreasing or pickling using copper foil as anode, moderate preliminary roughening treatment by dissolving removal using copper foil as anode, or moderate surface roughening There are pre-roughening treatments using rolling rolls and the like, and these can be appropriately used depending on the type and use of the copper foil for printed circuit boards.

【0015】この発明において、銅箔の表面に予備粗化
処理を施こして形成される予備粗化処理面は、銅箔の表
面に於ける原子間力顕微鏡の測定で、粗化処理粗さRa
が、定量的に200nm以上、500nm未満になるよ
うに形成することが望まれる。これは、予備粗化処理面
の予備粗化処理量が、200nm未満では粗化めっき均
一化の効果が小さく、500nm以上では粗化めっき均
一化の効果が飽和してしまい、それ以上の処理は経済的
でない。この発明における予備粗化処理面の予備粗化処
理法の一つとして、少なくとも銅箔の最終圧延工程に於
いて用いられる圧延ロールの表面に、所定の粗化処理粗
さRa(例えば、200nm以上、500nm未満)を
設けた圧延ロールによって銅箔を圧延することにより、
所望の予備粗化処理を施こすことができ、所定の予備粗
化処理面が形成される。
In the present invention, the pre-roughened surface formed by performing the pre-roughening treatment on the surface of the copper foil is determined by measuring the roughness of the surface of the copper foil by an atomic force microscope. Ra
Is desirably formed so as to be quantitatively at least 200 nm and less than 500 nm. This is because when the preliminary roughening treatment amount of the preliminary roughening treatment surface is less than 200 nm, the effect of roughening plating uniformity is small, and when it is 500 nm or more, the effect of roughening plating uniformity is saturated. Not economic. As one of the pre-roughening treatment methods of the pre-roughened surface in the present invention, at least the surface of a rolling roll used in the final rolling step of a copper foil has a predetermined roughness Ra (for example, 200 nm or more). , Less than 500 nm) by rolling the copper foil with a rolling roll provided with
A desired preliminary roughening process can be performed, and a predetermined preliminary roughening surface is formed.

【0016】この発明において、銅箔の表面に予備粗化
処理を施こして予備粗化処理面を形成する粗化処理用圧
延ロール法以外の他の具体的な方法としては、次のよう
な方法が挙げられる。これらは単独、または適宜な組み
合わせにより適用することが可能である。 (1)銅箔を陽極とした銅箔表面の電解脱脂により形成
する。 (2)銅箔を陽極とした銅箔表面の微細な電解研磨によ
り形成する。 (3)銅箔を浸漬酸洗して銅箔の表面脱脂により形成す
る。 (4)銅箔を浸漬酸洗中で陽極として銅箔の表面を溶解
除去により形成する。
In the present invention, a specific method other than the rolling roll method for roughening treatment for forming a preliminary roughened surface by performing a preliminary roughening treatment on the surface of a copper foil is as follows. Method. These can be applied alone or in an appropriate combination. (1) The copper foil surface is formed by electrolytic degreasing using the copper foil as an anode. (2) The copper foil surface is formed by fine electrolytic polishing using the copper foil as an anode. (3) The copper foil is formed by immersing and pickling and then degreasing the surface of the copper foil. (4) The surface of the copper foil is formed by dissolving and removing the copper foil as an anode during immersion and pickling.

【0017】また、この発明において、銅箔表面に施こ
した予備粗化処理面の上に形成する粗化めっきの形成法
としては、銅箔を所定の処理溶液に浸漬して銅箔を負極
にして望ましくは粒径1μmないし3μmの銅粒子の電
着金属粒子を施こすことにより形成されるが、銅粒子以
外の銀粒子などの電着金属粒子を施こすことによっても
予備粗化処理面の上に粗化めっき面を形成することがで
きる。
Further, in the present invention, as a method of forming a roughened plating formed on a pre-roughened surface applied to a copper foil surface, the copper foil is immersed in a predetermined processing solution to convert the copper foil into a negative electrode. It is preferably formed by applying electrodeposited metal particles of copper particles having a particle size of 1 μm to 3 μm, but also by applying electrodeposited metal particles such as silver particles other than copper particles. A roughened plating surface can be formed on the substrate.

【0018】[0018]

【実施例】(本発明の実施例1)表1の実施例1の欄
は、本発明の実施例によるプリント基板用銅箔を示して
いる。実施例1の試料の作成は、表面粗さを変えて仕上
げた最終圧延ロールを用いて圧延することにより銅箔の
表面に施こされた予備粗化処理によって形成された予備
粗化処理面を備えている銅箔を供試材として、銅箔を陽
極とする電解脱脂により圧延加工油を除去した後、表1
記載の条件による所定の粗化めっきを施こして、銅箔の
表面に予備粗化処理面と、粗化めっき面とを有するプリ
ント基板用銅箔を得た。表1に、原子間力顕微鏡により
測定した表面粗さRa(nm)と粗化めつきの条件、お
よび目視観察による粗化均一性の評価結果を示した。
(Embodiment 1) The column of Embodiment 1 in Table 1 shows a copper foil for a printed circuit board according to an embodiment of the present invention. The preparation of the sample of Example 1 was performed using a pre-roughening surface formed by a pre-roughening treatment applied to the surface of the copper foil by rolling using a final rolling roll finished with a changed surface roughness. After using the provided copper foil as a test material and removing the rolling oil by electrolytic degreasing using the copper foil as an anode, Table 1
Predetermined roughening plating was performed under the described conditions to obtain a copper foil for a printed circuit board having a pre-roughened surface and a roughened plated surface on the surface of the copper foil. Table 1 shows the surface roughness Ra (nm) measured by an atomic force microscope, the conditions for roughening, and the results of evaluation of the roughness uniformity by visual observation.

【0019】[0019]

【表1】 [Table 1]

【0020】(比較例1、比較例2)表1の比較例1、
比較例2の欄は、比較のために作成された基板用銅箔を
示している。比較例の試料の作成は、表面粗さを平滑に
仕上げた圧延ロール、および通常の圧延ロールを使用し
て、最終圧延した銅箔を供試材とした。銅箔の表面粗さ
Raは、Ra=100nm前後である。粗化めっきは、
従来行われている所定の方法により施こした。
(Comparative Example 1, Comparative Example 2)
The column of Comparative Example 2 shows a copper foil for a substrate prepared for comparison. For the preparation of the sample of the comparative example, using a roll having a smooth surface roughness and a normal roll, a finally rolled copper foil was used as a test material. The surface roughness Ra of the copper foil is around Ra = 100 nm. Rough plating is
This was performed by a predetermined method conventionally performed.

【0021】表1によると、本発明の実施例1の銅箔表
面には、予め所定の表面粗さを圧延ロールに設けた仕上
げ圧延ロールによって施こされ、原子間力顕微鏡測定値
による銅箔表面粗さRaが200nmを超える予備粗化
処理面(Ra=221nm)が形成されており、その上
に所定の粗化めっきが施こされているから、銅箔表面に
は均一な粗化めっき処理が形成されて、良好な粗化状態
であることが判る。特に、通常よりも粗く仕上げた圧延
ロールを用いた実施例1の銅箔表面は、銅箔の表面粗さ
が200nm(原子間力顕微鏡測定によるRa値)を超
え、均一な粗化処理が可能になったことを示している。
According to Table 1, the surface of the copper foil of Example 1 of the present invention was given a predetermined surface roughness by a finishing roll provided on a roll in advance, and the copper foil was measured by an atomic force microscope. A preliminary roughened surface (Ra = 221 nm) having a surface roughness Ra of more than 200 nm is formed, and a predetermined roughening plating is applied thereon, so that the copper foil surface has a uniform roughened plating. It can be seen that the treatment has been formed and is in a good roughened state. In particular, the surface of the copper foil of Example 1 using a roll more finished than usual had a surface roughness of the copper foil exceeding 200 nm (Ra value measured by an atomic force microscope), and a uniform roughening treatment was possible. It has become.

【0022】これに対して、平滑に仕上げた圧延ロール
を使用し場合(表1の比較例1)は、銅箔表面粗さRa
が76nmと小さく、また、表面粗さが通常の圧延ロー
ルを使用した場合(表1の比較例2)は、銅箔表面粗さ
Raが120nmであり、粗化めっきの均一性も不十分
なものであることが判る。
On the other hand, when a smooth rolled roll is used (Comparative Example 1 in Table 1), the copper foil surface roughness Ra
In the case of using a normal rolling roll having a small surface roughness of 76 nm (Comparative Example 2 in Table 1), the copper foil surface roughness Ra was 120 nm, and the uniformity of rough plating was insufficient. It turns out to be something.

【0023】[0023]

【実施例】(本発明の実施例2ないし実施例5)表2の
実施例2ないし実施例5の欄は、本発明の実施例による
プリント基板用銅箔を示している。実施例の試料には、
銅箔(無酸素銅、厚さ25μm、焼純材)を用いた。ま
ず、予備粗化処理は、電解脱脂で表面を脱脂した後、過
酸化水素水溶液(35%)を3%添加した1%硫酸水溶
液中(表2記載)に所定時間浸漬することによって施こ
された予備粗化処理面を備えた銅箔を得た。この予備粗
化処理面を施こした銅箔に、表2記載の条件による所定
の粗化めっきを施こして、銅箔の表面に予備粗化処理面
と、粗化めっき面とを有するプリント基板用銅箔を作成
した。表2に、予備粗化処理の条件、原子間力顕微鏡に
より測定(AFM)した表面粗さRa(nm)、粗化め
つきの条件、および目視観察による粗化均一性の評価結
果の関係を示した。
(Embodiments 2 to 5 of the Present Invention) The columns of Embodiments 2 to 5 in Table 2 show copper foils for printed circuit boards according to embodiments of the present invention. Examples of the sample include:
Copper foil (oxygen-free copper, thickness 25 μm, pure material) was used. First, the preliminary roughening treatment is performed by degreasing the surface by electrolytic degreasing, and then immersing it in a 1% aqueous sulfuric acid solution (described in Table 2) to which 3% of a hydrogen peroxide aqueous solution (35%) has been added (described in Table 2) for a predetermined time. A copper foil provided with a pre-roughened surface was obtained. The copper foil which has been subjected to the preliminary roughening treatment is subjected to predetermined roughening plating under the conditions shown in Table 2, and a print having a preliminary roughening treated surface and a roughened plating surface on the surface of the copper foil. A copper foil for a substrate was prepared. Table 2 shows the relationship between the conditions for the preliminary roughening treatment, the surface roughness Ra (nm) measured by an atomic force microscope (AFM), the conditions for roughening, and the results of evaluation of the roughness uniformity by visual observation. Was.

【0024】[0024]

【表2】 [Table 2]

【0025】((比較例3ないし比較例5))表2の比
較例3ないし比較例5の欄は、比較のために作成された
基板用銅箔を示している。比較例の試料の作成は、表面
粗さを平滑に仕上げた圧延ロール、および通常の圧延ロ
ールを使用して、最終圧延した銅箔を供試材とした。銅
箔の表面粗さRaは、Ra=100nm前後である。粗
化めっきは、従来行われている所定の方法により施こし
た。比較例の試料には、銅箔(無酸素銅、厚さ25μ
m、焼純材)を用い、予備粗化処理の無い銅箔(比較例
3)、電解脱脂で表面を脱脂した後、過酸化水素水溶液
(35%)を3%添加した1%硫酸水溶液中に所定時間
浸漬した銅箔(比較例4、比較例5)を作成した。次
に、表2に記載の粗化めっき条件により粗化めっきを施
こして、肉眼で粗化の均一性を評価した。表2に、原子
間力顕微鏡により測定した表面粗さRa(nm)と粗化
めつきの条件、および目視観察による粗化均一性の評価
結果を併記した。
(Comparative Examples 3 to 5) The columns of Comparative Examples 3 to 5 in Table 2 show copper foils for substrates prepared for comparison. For the preparation of the sample of the comparative example, using a roll having a smooth surface roughness and a normal roll, a finally rolled copper foil was used as a test material. The surface roughness Ra of the copper foil is around Ra = 100 nm. The roughening plating was performed by a conventional method. The sample of the comparative example includes copper foil (oxygen-free copper, thickness 25 μm).
m, pure material), copper foil without pre-roughening treatment (Comparative Example 3), after degreasing the surface by electrolytic degreasing, in 1% sulfuric acid aqueous solution to which 3% of hydrogen peroxide aqueous solution (35%) was added A copper foil (Comparative Example 4, Comparative Example 5) immersed in a predetermined time was prepared. Next, roughening plating was performed under the roughening plating conditions shown in Table 2, and the uniformity of the roughening was visually evaluated. Table 2 also shows the surface roughness Ra (nm) measured by an atomic force microscope, the conditions for roughening, and the evaluation results of the roughness uniformity by visual observation.

【0026】表2によると、本発明の実施例2ないし実
施例5の銅箔表面には、予め、原子間力顕微鏡測定値に
よる銅箔表面粗さRaが200nmを超える所定の予備
粗化処理によって形成された予備粗化処理面を備えてお
り、その上に所定の粗化めっきが施こされているから、
銅箔表面は銅粒子が均一に電着した粗化めっき処理が可
能になり、粗化も均一に形成されて良好な状態であるこ
とが判る。なお、予備粗化処理が60分以上(実施例
4、実施例5)になると、その効果が飽和して処理時間
が延びるだけなので、それ以上の処理は必要ないことが
分かる。
According to Table 2, the copper foil surfaces of Examples 2 to 5 of the present invention were previously subjected to a predetermined preliminary roughening treatment in which the copper foil surface roughness Ra measured by an atomic force microscope exceeded 200 nm. Since it has a preliminary roughened surface formed by the above, and given a roughening plating on it,
It can be seen that the surface of the copper foil can be subjected to a roughening plating process in which copper particles are uniformly electrodeposited, and that the roughening is uniformly formed and is in a good condition. Note that if the preliminary roughening process is performed for 60 minutes or more (Examples 4 and 5), the effect is saturated and only the processing time is extended, so that it is understood that no further processing is required.

【0027】これに対して、表2の比較例3ないし比較
例5は、原子間力顕微鏡による表面粗さ測定値Raが2
00nm未満であり、銅箔の位置により、銅粒子の折出
が密な所と疎な所が存在し、粗化めっきの均一性は不十
分であった。
On the other hand, in Comparative Examples 3 to 5 in Table 2, the measured surface roughness Ra by the atomic force microscope was 2%.
The thickness was less than 00 nm, and depending on the position of the copper foil, there were places where copper particles were densely and partly sparse, and the uniformity of roughening plating was insufficient.

【0028】[0028]

【発明の効果】本発明のプリント基板用銅箔によると、
表面不均一な状態にある圧延銅箔の表面に、粗化めっき
前に、予め、所定の粗さ(Ra)を有する適度な予備粗
化処理によって形成された予備粗化処理面を施こして、
銅箔の表面を予め適度に粗化した上に、所定の粗化めっ
きを施こしているから、適度な予備粗化処理によって形
成された予備粗化処理面を備えている銅箔表面への粗化
めっきは、粗化めっきにおける銅粒子の電着が安定化
し、良好な粗化めっきを形成できるという効果がある。
特に、表面不均一な状態にある圧延銅箔の表面を、予め
適度な予備粗化処理による予備粗化処理面を形成するこ
とによって、銅箔表面の凹凸が均一、かつ細かく分布す
るようになり、これが粗化めっき時の電流密度の高い部
分と低い部分の分布にもそのまま反映される。したがっ
て、粗化めっきの銅粒子は、銅箔全面に均一に分布する
高電流密度部分に電着して、結果的に均一な粗化めっき
面を得ることが出来る。
According to the copper foil for printed circuit boards of the present invention,
Before roughening plating, the surface of the rolled copper foil having an uneven surface is subjected to a preliminary roughening surface having a predetermined roughness (Ra) formed by an appropriate preliminary roughening process. ,
Since the surface of the copper foil has been appropriately roughened in advance and subjected to a predetermined roughening plating, the copper foil surface having a pre-roughened surface formed by an appropriate preliminary roughening process The rough plating has an effect that the electrodeposition of copper particles in the rough plating is stabilized, and good rough plating can be formed.
In particular, the surface of the rolled copper foil having an uneven surface is preliminarily roughened by an appropriate preliminary roughening treatment, so that the unevenness of the copper foil surface is uniformly and finely distributed. This is directly reflected in the distribution of the high and low current densities during rough plating. Therefore, the copper particles of the rough plating are electrodeposited on the high current density portion uniformly distributed over the entire surface of the copper foil, and as a result, a uniform rough plating surface can be obtained.

【0029】また、本発明のプリント基板用銅箔による
と、圧延によって生じていた銅箔の表面の凹凸が、予備
粗化処理面の形成によって予め適度に粗化されているた
め、銅箔表面に粗化めっきの電着を施こすときの電流密
度分布が、圧延時に生じた銅箔表面の凸部分に電流が集
中して大きな銅粒子が析出する現象、並びに、圧延時に
生じた銅箔表面の凹部分の電流密度が低くなって凹部分
が微細な銅粒子となる現象は、共に解消されるという特
異な効果が得られる。この結果、適度な予備粗化処理面
の上に施こされる電着による粗化めっきは、不均一な表
面状態にある圧延銅箔においても、安定した所望の均一
な電着粒子の粗化めっきの形成が可能となり、電着粗化
めっき面の銅箔と樹脂基板との接着性を改善したプリン
ト基板用銅箔を提供できる。
Further, according to the copper foil for a printed board of the present invention, the surface irregularities of the copper foil caused by the rolling are appropriately roughened in advance by forming the preliminary roughened surface. The current density distribution when roughening plating electrodeposition is applied, the phenomenon that current concentrates on the convex part of the copper foil surface generated during rolling and large copper particles precipitate, and the copper foil surface generated during rolling The phenomenon that the current density of the concave portion becomes low and the concave portion becomes fine copper particles can be eliminated. As a result, roughening plating by electrodeposition applied on an appropriate preliminary roughening treatment surface is effective for stable and uniform roughening of electrodeposited particles even in a rolled copper foil having an uneven surface state. Plating can be formed, and a copper foil for printed circuit boards having improved adhesion between the copper foil on the electrodeposited roughened plating surface and the resin substrate can be provided.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4E351 CC19 DD04 DD54 DD55 GG02 4K024 AA09 AA10 BA09 BB11 BC02 DA01 DA02 DA03 DA04 DA05 5E343 AA02 AA11 AA12 BB24 BB67 EE52 EE55 GG02 GG04  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4E351 CC19 DD04 DD54 DD55 GG02 4K024 AA09 AA10 BA09 BB11 BC02 DA01 DA02 DA03 DA04 DA05 5E343 AA02 AA11 AA12 BB24 BB67 EE52 EE55 GG02 GG04

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】表面に粗化めっきを施こすプリント回路基
板用の銅箔において、 前記粗化めっきを施こす前に、前記銅箔の表面に施こさ
れた予備粗化処理によって形成された予備粗化処理面を
備えていることを特徴とするプリント基板用銅箔。
1. A copper foil for a printed circuit board having a surface subjected to roughening plating, wherein the copper foil is formed by a preliminary roughening treatment applied to the surface of the copper foil before the roughening plating is applied. A copper foil for a printed circuit board, comprising a pre-roughened surface.
【請求項2】前記予備粗化処理面は、前記銅箔の表面に
於ける原子間力顕微鏡の測定値で、粗化処理粗さRa
が、200nm以上、500nm未満になる予備粗化処
理によって形成されていることを特徴とする請求項1記
載のプリント基板用銅箔。
2. The pre-roughened surface is measured by an atomic force microscope on the surface of the copper foil, and the roughened surface
2. The copper foil for a printed circuit board according to claim 1, wherein the copper foil is formed by a preliminary roughening treatment of not less than 200 nm and less than 500 nm.
【請求項3】前記予備粗化処理面は、前記銅箔の最終圧
延工程に於いて用いられた所定の粗化処理粗さRaを表
面に設けた圧延ロールによる前記銅箔の圧延時の予備粗
化処理によって施こされていることを特徴とする請求項
1あるいは請求項2記載のプリント基板用銅箔。
3. The pre-roughened surface is a pre-roughened surface when a predetermined roughening surface roughness Ra used in the final rolling step of the copper foil is rolled by a rolling roll provided on the surface. The copper foil for printed circuit boards according to claim 1 or 2, wherein the copper foil is applied by a roughening treatment.
【請求項4】前記予備粗化処理面は、前記銅箔を陽極と
した前記銅箔表面の電解脱脂による予備粗化処理によっ
て施こされていることを特徴とする請求項1あるいは請
求項2記載のプリント基板用銅箔。
4. The pre-roughening surface is subjected to a pre-roughening treatment by electrolytic degreasing of the surface of the copper foil using the copper foil as an anode. The printed circuit board copper foil described in the above.
【請求項5】前記予備粗化処理面は、前記銅箔を陽極と
した前記銅箔表面の微細な電解研磨による予備粗化処理
によって施こされていることを特徴とする請求項1ある
いは請求項2記載のプリント基板用銅箔。
5. The pre-roughening surface is subjected to a pre-roughening treatment by fine electrolytic polishing of the surface of the copper foil using the copper foil as an anode. Item 3. A copper foil for a printed circuit board according to item 2.
【請求項6】前記予備粗化処理面は、前記銅箔を浸漬酸
洗して前記銅箔の表面脱脂による予備粗化処理によって
施こされていることを特徴とする請求項1あるいは請求
項2記載のプリント基板用銅箔。
6. The pre-roughened surface is preliminarily roughened by immersing and pickling the copper foil and degreasing the surface of the copper foil. 2. The copper foil for printed circuit boards according to 2.
【請求項7】前記予備粗化処理面は、前記銅箔を浸漬酸
洗し前記銅箔を陽極とした前記銅箔の表面溶解除去によ
る予備粗化処理によって施こされていることを特徴とす
る請求項1あるいは請求項2記載のプリント基板用銅
箔。
7. The pre-roughening surface is subjected to a pre-roughening treatment by immersing and pickling the copper foil and dissolving and removing the surface of the copper foil using the copper foil as an anode. 3. The copper foil for a printed circuit board according to claim 1 or claim 2.
【請求項8】前記銅箔を負極とする金属粒子の電着によ
って形成された粗化めっき面を、前記予備粗化処理面の
上に有することを特徴とする請求項1ないし請求項7の
何れか1つに記載のプリント基板用銅箔。
8. The pre-roughened surface has a roughened plating surface formed by electrodeposition of metal particles using the copper foil as a negative electrode. The copper foil for a printed board according to any one of the above.
【請求項9】前記銅箔を負極として粒径1μmないし3
μmの銅粒子の電着によって形成された粗化めっき面
を、前記予備粗化処理面の上に有することを特徴とする
請求項1ないし請求項8の何れか1つに記載のプリント
基板用銅箔。
9. The method according to claim 1, wherein said copper foil is used as a negative electrode and has a particle size of 1 μm to 3 μm.
9. The printed circuit board according to claim 1, further comprising a roughened plating surface formed by electrodeposition of copper particles having a thickness of μm on the preliminary roughened surface. 10. Copper foil.
JP2000325485A 2000-10-25 2000-10-25 Copper foil for printed boards Pending JP2002134858A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000325485A JP2002134858A (en) 2000-10-25 2000-10-25 Copper foil for printed boards

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006210689A (en) * 2005-01-28 2006-08-10 Fukuda Metal Foil & Powder Co Ltd Copper foil for high frequency printed wiring board and its production method
JP2008174794A (en) * 2007-01-18 2008-07-31 Nippon Mektron Ltd Pretreatment method to plating for printed circuit board
JP2011084801A (en) * 2009-10-19 2011-04-28 Furukawa Electric Co Ltd:The Method and apparatus for manufacturing surface roughened copper plate
JP2012112009A (en) * 2010-11-26 2012-06-14 Hitachi Cable Ltd Copper foil, and method for producing copper foil
JP5481591B1 (en) * 2012-09-11 2014-04-23 Jx日鉱日石金属株式会社 Copper foil with carrier
JP5481577B1 (en) * 2012-09-11 2014-04-23 Jx日鉱日石金属株式会社 Copper foil with carrier
JP2018021221A (en) * 2016-08-02 2018-02-08 古河電気工業株式会社 Silver coated material
CN113083897A (en) * 2021-04-07 2021-07-09 太原晋西春雷铜业有限公司 Preparation method of high-uniformity surface of copper or copper alloy strip

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006210689A (en) * 2005-01-28 2006-08-10 Fukuda Metal Foil & Powder Co Ltd Copper foil for high frequency printed wiring board and its production method
JP2008174794A (en) * 2007-01-18 2008-07-31 Nippon Mektron Ltd Pretreatment method to plating for printed circuit board
JP4531777B2 (en) * 2007-01-18 2010-08-25 日本メクトロン株式会社 Pre-plating method for printed wiring boards
JP2011084801A (en) * 2009-10-19 2011-04-28 Furukawa Electric Co Ltd:The Method and apparatus for manufacturing surface roughened copper plate
JP2012112009A (en) * 2010-11-26 2012-06-14 Hitachi Cable Ltd Copper foil, and method for producing copper foil
JP5481591B1 (en) * 2012-09-11 2014-04-23 Jx日鉱日石金属株式会社 Copper foil with carrier
JP5481577B1 (en) * 2012-09-11 2014-04-23 Jx日鉱日石金属株式会社 Copper foil with carrier
JP2014139338A (en) * 2012-09-11 2014-07-31 Jx Nippon Mining & Metals Corp Copper foil with carrier
JP2018021221A (en) * 2016-08-02 2018-02-08 古河電気工業株式会社 Silver coated material
CN113083897A (en) * 2021-04-07 2021-07-09 太原晋西春雷铜业有限公司 Preparation method of high-uniformity surface of copper or copper alloy strip
CN113083897B (en) * 2021-04-07 2022-12-27 太原晋西春雷铜业有限公司 Preparation method of high-uniformity surface of copper or copper alloy strip

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