JP2002123190A5 - - Google Patents

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Publication number
JP2002123190A5
JP2002123190A5 JP2001169394A JP2001169394A JP2002123190A5 JP 2002123190 A5 JP2002123190 A5 JP 2002123190A5 JP 2001169394 A JP2001169394 A JP 2001169394A JP 2001169394 A JP2001169394 A JP 2001169394A JP 2002123190 A5 JP2002123190 A5 JP 2002123190A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001169394A
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Japanese (ja)
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JP4741110B2 (ja
JP2002123190A (ja
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Priority to JP2001169394A priority Critical patent/JP4741110B2/ja
Priority claimed from JP2001169394A external-priority patent/JP4741110B2/ja
Publication of JP2002123190A publication Critical patent/JP2002123190A/ja
Publication of JP2002123190A5 publication Critical patent/JP2002123190A5/ja
Application granted granted Critical
Publication of JP4741110B2 publication Critical patent/JP4741110B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001169394A 2000-06-05 2001-06-05 検査装置、発光装置の作製方法 Expired - Fee Related JP4741110B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001169394A JP4741110B2 (ja) 2000-06-05 2001-06-05 検査装置、発光装置の作製方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000168143 2000-06-05
JP2000-168143 2000-06-05
JP2000168143 2000-06-05
JP2001169394A JP4741110B2 (ja) 2000-06-05 2001-06-05 検査装置、発光装置の作製方法

Publications (3)

Publication Number Publication Date
JP2002123190A JP2002123190A (ja) 2002-04-26
JP2002123190A5 true JP2002123190A5 (enrdf_load_stackoverflow) 2008-05-29
JP4741110B2 JP4741110B2 (ja) 2011-08-03

Family

ID=26593349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001169394A Expired - Fee Related JP4741110B2 (ja) 2000-06-05 2001-06-05 検査装置、発光装置の作製方法

Country Status (1)

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JP (1) JP4741110B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI272556B (en) 2002-05-13 2007-02-01 Semiconductor Energy Lab Display device
JP4791023B2 (ja) 2004-11-08 2011-10-12 インターナショナル・ビジネス・マシーンズ・コーポレーション Tftの検査装置および検査方法
KR102350618B1 (ko) * 2021-05-31 2022-01-13 유정구 통합 led모듈 검사장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575676A (en) * 1983-04-04 1986-03-11 Advanced Research And Applications Corporation Method and apparatus for radiation testing of electron devices
DE3342531A1 (de) * 1983-11-24 1985-06-05 Max Planck Gesellschaft Verfahren und einrichtung zum erzeugen von kurz dauernden, intensiven impulsen elektromagnetischer strahlung im wellenlaengenbereich unter etwa 100 nm
JPH0614259B2 (ja) * 1984-03-21 1994-02-23 株式会社半導体エネルギ−研究所 表示装置
US5179279A (en) * 1991-01-25 1993-01-12 Rensselaer Polytechnic Institute Non-contact electrical pathway
JPH05109484A (ja) * 1991-10-17 1993-04-30 Tohoku Pioneer Kk Elデイスプレイユニツト
US5202623A (en) * 1992-02-26 1993-04-13 Digital Equipment Corporation Laser-activated plasma chamber for non-contact testing
JPH07140209A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路配線基板の検査装置およびその検査方法
JP2002513157A (ja) * 1998-04-27 2002-05-08 エクサイト エレクトロ−オプティカル システムズ リミテッド 相互接続回路網の試験装置及び試験方法

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