JP2002076806A - Method for manufacturing vibration reed, the vibration reed, vibrator having the vibration reed, oscillator and mobile phone - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a vibration reed where defects such as projection hardly take place, and to provide the vibration reed, a vibrator having the vibration reed, an oscillator and a mobile phone. SOLUTION: This invention provides the method for manufacturing the vibration reed consisting of a base and at least a plurality of vibration thin rods projected from the base and each of which is formed with a groove 120a. The manufacturing method is characterized by that a process where the external shape of the vibration reed having the base 130 and the vibration thin rods 120 is formed and a process where each groove 120a is formed to each of the vibration thin rod are separately performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a resonator element made of, for example, quartz, a resonator element, a resonator having the resonator element, a transmitter, and a portable telephone having the resonator.

[0002]

2. Description of the Related Art Conventionally, a vibrating piece, for example, a tuning-fork type quartz vibrating piece is configured as shown in FIG. 15, for example.

That is, the tuning-fork type quartz vibrating reed 10 has a base 11 and two arms 12 and 13 formed so as to protrude from the base 11. The two arms 12 and 13 are provided with a groove 12a and a groove 13a.

The grooves 12a and 13a are similarly provided on the back surfaces of the arms 12, 13 which are not shown in FIG.

For this reason, as shown in FIG. 16, which is a cross-sectional view taken along the line AA ′ of FIG. 15, the arms 12 and 13 have a substantially H-shaped cross-sectional shape.

[0006] Such a substantially H-shaped tuning-fork type quartz vibrating reed 10
Has a characteristic that the vibration loss of the arms 12 and 13 is low and the CI value (crystal impedance or equivalent series resistance) can be kept low even if the resonator element is downsized.

For this reason, the substantially H-shaped tuning-fork type quartz vibrating piece 10
Has a resonance frequency of 32.7, which is a high-precision vibrator, for example.
It is often used as a vibrating piece of a 68 kHz vibrator, and such a high-precision vibrator is used for precision equipment such as a timepiece.

By the way, the above-mentioned substantially H-shaped tuning-fork type quartz vibrating piece 10 is manufactured through the following steps.

First, a metal film 15 of Cr (chromium) or Au (gold) or the like is formed on the front and back surfaces of the quartz substrate 14 by sputtering or the like. The metal film 15 and the like are substantially H
The shape of the tuning-fork type quartz vibrating piece 10 is formed.

In this state, as shown in FIG.
The quartz substrate 14 is half-etched.

Next, etching for forming portions corresponding to the grooves 12a and 13a in FIG. 16 is performed, and at the same time, penetration etching is performed for the half-etched portions in FIG. 17A. .

Through these steps, a substantially H-shaped tuning-fork type quartz vibrating piece 10 as shown in FIG. 15 is manufactured.

[0013]

By the way, on the substantially H-shaped tuning-fork type quartz vibrating piece 10 manufactured through such a process, a fin-like projection 14a is formed as shown in FIG. 17 (b). Would.

On the other hand, if time is taken for etching so that the projections 14a can be removed, FIG.
The grooves 12a and 13a in are deeper than necessary,
Alternatively, a problem arises in that the grooves 12a and 13a become through holes, and the protrusion 14a cannot be easily removed.

When the substantially H-shaped tuning-fork type quartz vibrating piece 10 having the projections 14a is installed in a package or the like and used as a vibrator, the following problems occur.

That is, a substantially H-shaped tuning-fork type quartz vibrating piece 10
Is vibrated inside a package or the like, the vibration is not stable because the protrusions 14a are large and the right and left balance of the tuning fork is poor.
There is a problem that frequency stability is poor.

Further, there is a problem that the protrusion 14a increases the vibration leakage of the substantially H-shaped tuning-fork type quartz vibrating piece 10, increases the vibration loss, and increases the CI value.

Therefore, the substantially H-shaped tuning-fork type crystal vibrating piece 10 having the projections 14a exhibits a desired function even when used as a vibrating piece of a vibrator having a resonance frequency of 32.768 kHz, which is a high-precision vibrator. There was a problem that you can not.

In view of the above, it is an object of the present invention to provide a method of manufacturing a vibrating reed that is unlikely to cause defects such as protrusions, a vibrating reed, a vibrator having the vibrating reed, an oscillator, and a portable telephone device.

[0020]

According to a first aspect of the present invention, there is provided a base, at least a plurality of vibrating rods protruding from the base, and a plurality of vibrating rods. A method of manufacturing a vibrating reed in which a groove is formed, wherein a step of forming an outer shape of the vibrating reed having the base and the plurality of vibrating fine rods, and a step of forming a groove in the plurality of vibrating fine rods, Are achieved in separate steps, respectively.

According to the configuration of the first aspect, the step of forming the outer shape of the vibrating reed having the base and the plurality of vibrating rods and the step of forming a groove in the plurality of vibrating rods are separately performed. In the step of forming the outer shape of the vibrating reed having the base and the plurality of vibrating fine rods, the outer shape can be formed sufficiently long so that no protrusions or the like remain. Further, in the step of forming a groove in the plurality of vibrating fine bars different from this step, the groove can be formed at an appropriate depth. Therefore, a high-quality vibrating reed can be manufactured.

Preferably, according to the second aspect of the present invention, in the configuration of the first aspect, the grooves formed in the plurality of vibrating rods are formed on the front surface and the back surface of each of the plurality of vibrating rods. In addition, when the cross-section of each of the vibrating rods is formed in the depth direction of the groove, the cross-section is formed to be substantially H-shaped.

According to the second aspect of the present invention, the groove is formed on the front surface and the back surface of each of the plurality of vibrating rods, and the cross section of each of the vibrating rods is formed in the depth direction of the groove. In this case, in the resonator element having a substantially H-shaped cross section, the groove can be accurately formed in the depth direction of the groove, so that, for example, a through hole can be prevented.

Preferably, according to a third aspect of the present invention, there is provided the method for manufacturing a resonator element according to the first or second aspect, further comprising a step of forming an electrode in the groove.

According to the third aspect of the present invention, in the step of forming an electrode in the groove, the electrode can be formed accurately in the groove formed precisely.

Preferably, according to a fourth aspect of the present invention, in the configuration according to any one of the first to third aspects, the step of forming the outer shape of the vibrating piece includes forming the outer shape of the vibrating piece by etching. A step of forming a groove in the plurality of vibrating rods is a step of forming a groove by etching in the plurality of vibrating rods. .

According to the fourth aspect of the present invention, the step of forming the outer shape of the vibrating reed is a step of forming the outer shape of the vibrating reed by etching, and forming a groove in the plurality of vibrating fine rods. The step is a step of forming a groove in the plurality of vibrating rods by etching. Therefore,
In the manufacturing process using etching, the outer shape of the resonator element can be formed with high accuracy, and the groove can be formed with high accuracy by etching.

Preferably, according to a fifth aspect of the present invention, in the configuration of the fourth aspect, a step of forming a metal film on the surface of the plate-like substrate, a step of forming a photoresist layer on the metal film, A step of externally patterning the photoresist layer into the shape of the resonator element, a step of removing the metal film in a portion where the photoresist layer has been removed in the previous step by etching, and a step of removing all the remaining photoresist layer, Further, a step of forming a photoresist layer on the substrate and peeling the photoresist layer so that the outer shape of the vibrating piece remains, and peeling off the photoresist layer of a portion corresponding to the groove of the vibrating fine rod of the vibrating piece. The step of causing
Forming a profile of the vibrating reed by etching, removing a metal film corresponding to a groove of the vibrating rod, forming a groove on the plurality of vibrating rods by etching, Removing the resist layer and the metal film.

According to a fifth aspect of the present invention, a step of forming a photoresist layer on a substrate, a step of peeling off the photoresist layer so that the outer shape of the vibrating piece remains, and a groove of the vibrating fine rod of the vibrating piece. And a step of peeling off the photoresist layer in a portion corresponding to the above. Therefore, the photoresist for forming the groove and the photoresist for the outer shape of the resonator element can be formed in the same step.

Conventionally, a photoresist for outer shape is applied,
After the outer shape was formed by etching or the like, the photoresist for forming the groove was applied. Therefore, it was difficult to apply the photoresist in the case of a vibrating piece having an extremely small area for applying the photoresist for forming the groove. . However, according to the configuration, in a single step, the photoresist layer is peeled off so that the outer shape of the vibrating piece remains, and the photoresist corresponding to the groove of the vibrating fine rod of the vibrating piece is removed. Since the layer is peeled off, it is not necessary to apply a photoresist to a small area, and a photoresist film for forming a groove can be easily formed.

Further, according to the above configuration, the step of forming the outer shape of the vibrating reed by etching and the step of etching to remove a metal film corresponding to the groove of the vibrating rod are different steps. Therefore, in the etching step, the outer shape of the resonator element can be formed with high accuracy, and the groove can be formed with high accuracy.

According to a sixth aspect of the present invention, in the configuration of the fifth aspect, after the step of removing the remaining resist layer and the metal film, an electrode is formed in a region including a groove formed in the plurality of vibrating fine rods. Forming a metal film, forming a photoresist layer on the metal film, removing the portion of the photoresist layer from which the metal film is to be removed, and removing the portion of the photoresist layer from which the photoresist layer has been removed by etching. A method for manufacturing a resonator element, comprising: a step of removing a metal film; and a step of removing all remaining photoresist layers.

According to the structure of claim 6, a step of forming a metal film to be an electrode in a region including the groove formed in the plurality of vibrating rods, and a step of forming a photoresist layer on the metal film Since the method includes a step of removing the photoresist layer in a portion where the metal film is removed, a step of removing the metal film in a portion where the photoresist layer is removed by etching, and a step of removing all the remaining photoresist layer. In addition, an electrode can be accurately formed in a region including the groove.

According to a seventh aspect of the present invention, a base, at least a plurality of vibrating rods protruding from the base, and grooves are formed in each of the plurality of vibrating rods. A vibrating reed, wherein the outer shape of the vibrating reed having the base and the plurality of vibrating fine rods is formed, and a groove is formed in the plurality of vibrating fine rods in a different process from the vibrating reed. This is achieved by the vibrating piece that has been set.

According to the seventh aspect of the present invention, the outer shape of the vibrating reed having the base and the plurality of vibrating rods is formed, and the grooves are formed in the plurality of vibrating rods in a different process. The vibrating reed has no protruding portion or the like formed on the reed. Further, since the vibrating reed has a groove formed at an appropriate depth, a high-quality vibrating reed is obtained.

Preferably, according to the invention of claim 8, in the structure of claim 7, the grooves formed in the plurality of vibrating rods are formed on the front surface and the back surface of each of the plurality of vibrating rods. In addition, when the cross section of each of the vibrating fine rods is formed in the depth direction of the groove, the cross section is formed in a substantially H shape.

According to the eighth aspect of the present invention, the groove is formed on the front and back surfaces of each of the plurality of vibrating rods, and the cross section of each of the vibrating rods is formed in the depth direction of the groove. In this case, in the resonator element having a substantially H-shaped cross section, the groove can be accurately formed in the depth direction of the groove, so that the resonator element can be prevented from becoming a through hole, for example. It is.

Preferably, according to the ninth aspect of the present invention, there is provided the resonator element according to the seventh or eighth aspect, wherein an electrode is formed in the groove.

According to the ninth aspect of the present invention, there is provided a vibrating reed in which an electrode is formed with high accuracy in the groove.

Preferably, in the invention of claim 10,
The vibrating reed according to any one of claims 7 to 9, wherein the vibrating reed is formed of a tuning-fork type quartz vibrating reed.

According to the structure of the tenth aspect, the tuning-fork type quartz vibrating reed has no protruding portion and the like, and has a groove formed at an appropriate depth. .

According to the eleventh aspect, the object is as follows.
A vibrating reed having a base, at least a plurality of vibrating rods protruding from the base, and grooves formed on each of the plurality of vibrating rods, and the vibrating reed is housed in a package. The vibrator element is formed by forming an outer shape of a vibrating reed having the base and the plurality of vibrating fine rods, and forming a groove in the plurality of vibrating fine rods in a different process from the vibrating piece. This is achieved by a vibrator characterized by being performed.

According to the eleventh aspect, the outer shape of the vibrating reed having the base and the plurality of vibrating rods is formed, and the grooves are formed in the plurality of vibrating rods in a process different from that of the vibrating bar. The vibrator has a vibrating reed in which a protrusion or the like is not formed on the reed. In addition, since the vibrating reed has a groove formed at an appropriate depth, the vibrator has a high-quality vibrating reed.

Preferably, according to the twelfth aspect of the invention,
12. The configuration according to claim 11, wherein the grooves formed in the plurality of vibrating rods are formed on the front surface and the back surface of each of the plurality of vibrating rods, and the cross section of each of the vibrating rods is formed as a groove. When formed in the depth direction, the vibrator is characterized in that its cross section is formed in a substantially H-shape.

According to the structure of claim 12, the groove portion is
When the cross-section of each of the plurality of vibrating rods is formed in the depth direction of the groove while being formed on the front and back surfaces of each of the plurality of vibrating rods, a vibrating reed whose cross section is formed substantially in an H shape is formed. The vibrator has a vibrating reed that can form a groove accurately in the depth direction of the groove, and thus can prevent a through hole, for example.

Preferably, according to the invention of claim 13,
An oscillator according to claim 11 or 12, further comprising a step of forming an electrode in said groove.

According to a thirteenth aspect of the present invention, there is provided a vibrator having a vibrating reed in which an electrode is accurately formed in the groove.

Preferably, according to the invention of claim 14,
In any one of claims 11 to 13,
A vibrator having a vibrator, wherein the vibrating piece is formed of a tuning-fork type quartz vibrating piece.

According to the fourteenth aspect of the present invention, there is provided a vibrator having a tuning-fork type crystal vibrating piece in which a projection or the like is not formed and a groove is formed at an appropriate depth. A vibrator having a vibrating piece is obtained.

Preferably, according to the invention of claim 15,
According to a fourteenth aspect of the present invention, there is provided a vibrator characterized in that a resonance frequency of the tuning-fork type quartz vibrating piece is approximately 32 kHz.

According to the fifteenth aspect, since the resonance frequency of the tuning-fork type quartz vibrating piece is approximately 32 kHz,
The vibrator has a vibrating reed that can sufficiently exhibit the function of a small and high-precision vibrator.

Preferably, according to the invention of claim 16,
In any one of claims 11 to 15,
A vibrator, wherein the package is formed in a box shape.

According to the configuration of claim 16, the package can be applied to a vibrator having a box shape.

Preferably, according to the seventeenth aspect,
In any one of claims 11 to 15,
A vibrator, wherein the package is formed in a so-called cylinder type.

According to the configuration of claim 17, the package can be applied to a vibrator having a so-called cylinder type.

According to the eighteenth aspect of the present invention,
A vibrating reed having a base, at least a plurality of vibrating rods protruding from the base, and grooves formed on each of the plurality of vibrating rods, wherein the vibrating reed and the integrated circuit are packaged; An oscillator housed therein, forming an outer shape of the vibrating reed having the base and the plurality of vibrating fine rods, and forming a groove in the plurality of vibrating fine rods in a different process from the vibrating reed. Is achieved by an oscillator characterized in that

According to the eighteenth aspect, the outer shape of the vibrating reed having the base and the plurality of vibrating rods is formed, and the grooves are formed in the plurality of vibrating rods in a process different from that of the vibrating bar. The oscillator has a vibrating reed in which a projection or the like is not formed on the reed. Further, since the resonator element has a groove formed at an appropriate depth, the oscillator has a high-quality resonator element.

According to the nineteenth aspect of the present invention,
A vibrating reed having a base, at least a plurality of vibrating rods protruding from the base, and grooves formed on each of the plurality of vibrating rods, and the vibrating reed is housed in a package. A vibrator which is connected to a control unit and uses the vibrator to form an outer shape of a vibrating reed having the base and the plurality of vibrating rods. A vibrating reed is formed by forming grooves in the plurality of vibrating rods in the step, thereby achieving a mobile phone device.

According to the structure of the nineteenth aspect, since the outer shape of the vibrating piece having the base and the plurality of vibrating rods is formed, and the grooves are formed in the plurality of vibrating rods by a different process, the vibration is reduced. The mobile phone device includes a vibrator having a vibrating reed in which a protrusion or the like is not formed on the reed. In addition, since the vibrating reed has a groove formed at an appropriate depth, the mobile phone device includes a vibrator having a high-quality vibrating reed.

[0060]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a substantially H-shaped tuning fork type quartz vibrating piece manufactured by the method for manufacturing a substantially H-shaped tuning fork type quartz vibrating piece according to the embodiment of the present invention. FIG. 2 is a schematic perspective view showing a shaped crystal vibrating piece 100.

As shown in FIG. 1, a substantially H-shaped tuning-fork type quartz vibrating piece 100 is cut out of, for example, a single crystal of quartz and processed into a tuning fork type. This substantially H-shaped tuning fork type quartz vibrating piece 10
0 is cut out of a single crystal of quartz such that the X axis is the electric axis, the Y axis is the mechanical axis, and the Z axis is the optical axis, as shown in FIG. By arranging the electric axis in the X-axis direction in this manner, a substantially H-shaped tuning-fork type crystal vibrating piece 100 suitable for electronic devices such as a mobile phone device requiring high accuracy is obtained.

When cutting from a single crystal of quartz, X-axis, Y-axis and Z-axis
A substantially H-shaped tuning-fork type quartz vibrating piece 100 is formed as a so-called quartz Z plate in which an XY plane including an X axis and a Y axis is inclined about 1 to 5 degrees counterclockwise around the axis.

This tuning-fork type quartz vibrating piece 100 has a base 13
0 and arm portions 120 and 12 which are, for example, two vibrating rods formed to protrude from the base portion 130 in the Y-axis direction.
0.

On the surface side of the two arms 120, 120, a groove 120 a is formed in each of the arms 120, 120. This groove portion has two arms 120, 120
Are formed in the same manner on the back side (not shown).

The electrode 140 is formed on the substantially H-shaped tuning-fork type quartz vibrating piece 100 formed in this manner in a portion shown by oblique lines in FIG. That is, the electrode 140
The electrodes 140 are also arranged from the base 130 to the two arms 120, 120, and the electrodes 140 are also arranged on the side surfaces of the arms 120, 120 and the groove 120a.

The electrodes 140 arranged as described above generate an electric field when a current is applied from the outside, and vibrate the arms 120, 120 of the quartz crystal which is a piezoelectric body.

The substantially H-shaped tuning-fork type quartz vibrating piece 100 formed as described above has, for example, a resonance frequency of 32.76.
Despite 8 kHz, there is no conventional groove 32.
As compared with a 768 kHz tuning-fork type quartz vibrating piece, the size is smaller, and for example, it is configured as shown in FIG.

That is, the length of the substantially H-shaped tuning-fork type quartz vibrating piece 100 shown in FIG. 3 in the Y-axis direction is, for example, about 2.2 mm.
The width of the substantially H-shaped tuning-fork type quartz vibrating piece 100 in the X-axis direction is about 0.56 mm. This dimension is the dimension of the conventional tuning-fork type quartz vibrating piece 10 having no groove, for example, 3.6 mm (Y-axis direction), 0.69 m
m (in the X-axis direction).

The length of the arms 120 shown in FIG. 3 in the Y-axis direction is, for example, about 1.6 mm.
Is, for example, about 0.1 mm. The size of such an arm 120 is the same as that of the conventional arm 12.
2.4 mm (Y-axis direction), 0.23 mm
(In the X-axis direction).

On the other hand, the substantially H-shaped tuning-fork type quartz vibrating piece 10
The thickness in the Z-axis direction of 0 is, for example, about 0.1 mm, which is substantially the same as the thickness of a conventional tuning-fork type quartz vibrating piece without a groove.

However, the arm 120 of the substantially H-shaped tuning-fork type quartz vibrating piece 100 shown in FIG.
a is formed, and the groove 120 a
For example, about 1.3 mm in the Y-axis direction
It is formed to a length of about.

The width of the groove 120a in the X-axis direction is as shown in FIG.
For example, as shown in FIG.
The axial depth is, for example, about 0.02 to 0.045 mm
It has become about. Next, FIG. 4 shows a cross section of the arm portion 120 of the small and substantially H-shaped tuning-fork type quartz vibrating piece 100 as described above.

As shown in FIG.
Since a is provided in the vertical direction in the figure, the cross-sectional shape is substantially H-shaped. Since this cross-sectional shape is substantially H-shaped, it is called a substantially H-shaped tuning-fork type quartz vibrating piece.

The two groove portions 120a have:
Each is provided with an electrode 140. The arm 20
The electrodes 140 are also provided on both side surfaces of the.

The electrodes 140 are connected to a power source (not shown), and are connected to the electrodes 14 on the side surfaces thereof.
Voltages having different polarities are alternately applied to 0 and the electrode 140 on the groove side. Then, for example, when a positive voltage is applied to the electrode 140 on the groove side and a negative voltage is applied to the electrode 140 on the side surface, an electric field is generated.

The generation of this electric field causes the arm 12
0 vibrates, but this substantially H-shaped tuning-fork type quartz vibrating piece 10
0 has a groove 120a, and the electrode 140 is provided in the groove 120a.
Since it is widely distributed inside 0, the vibrating reed can reduce the vibration loss of the arm 120 and suppress the CI value. Therefore, as described above, the vibrating reed has a small size and high accuracy as compared with the conventional tuning-fork type vibrating reed having no groove.

(Ceramic Package Tuning Fork Vibrator, Cylinder Type Tuning Fork Vibrator, Tuning Fork Crystal Oscillator and Digital Mobile Phone) Such a substantially H-shaped tuning fork crystal vibrating piece 1
In the following, a description will be given of a ceramic package tuning fork type vibrator, a cylinder type tuning fork type vibrator, a tuning fork crystal oscillator, and a digital mobile phone as an example using 00.

FIG. 5 is a schematic sectional view showing the structure of the ceramic package tuning fork vibrator 200. As shown in FIG. 5, the ceramic package tuning fork vibrator 200 has a box-shaped package 210 having a space inside. The package 210 has a base 211 at the bottom. The base portion 211 is formed of, for example, ceramics such as alumina.

A sealing portion 212 is provided on the base portion 211. The sealing portion 212 is provided on the base portion 211.
It is formed from the same material as. Also, this sealing part 2
A lid 213 is placed on the base 12 and these bases 2
11, the sealing portion 212 and the lid 213 form a hollow box.

The package 21 thus formed
The package-side electrode 214 is provided on the 0 base portion 211. An end portion of the substantially H-shaped tuning-fork type quartz vibrating piece 100 on which the electrode 140 is formed is fixed on the package-side electrode 214 via a conductive adhesive or the like.

This substantially H-shaped tuning-fork type quartz vibrating piece 100 is
When a constant drive voltage is applied from the package-side electrode 214, it vibrates.

The resonance frequency is 32.768 kHz.
As an example using the substantially H-shaped tuning-fork type quartz vibrating piece 100 of
There is a digital mobile phone 300 shown in FIG.

FIG. 6 is a schematic diagram showing circuit blocks of digital mobile phone 300. As shown in FIG. 6, when transmitting with the digital mobile phone 300, when the user inputs his / her voice into the microphone, the signal passes through the block of the pulse width modulation / coding and the block of the modulator / demodulator. The signal is transmitted from the antenna via the transmitter and the antenna switch.

On the other hand, a signal transmitted from another person's telephone is
The signal is received by an antenna, passes through an antenna switch, a reception filter, and the like, and is input from a receiver to a modulator / demodulator block. Then, the modulated or demodulated signal is output to a speaker as a voice through a block of pulse width modulation / coding.

A controller is provided for controlling the antenna switch, the modulator / demodulator block, and the like.

In addition to the above-described controller, the controller includes an LCD as a display unit, a key as an input unit for numbers and the like, and a RA.
In order to control the M, ROM, and the like, high precision is required.
00 will be used.

By the way, the substantially H-shaped tuning-fork type quartz vibrating piece 100 of the ceramic package tuning-fork vibrator 200 shown in FIG.
When the integrated circuit 410 is arranged below the base unit 211 and on the base unit 211 as shown in FIG.

That is, in the tuning-fork crystal oscillator 400, the substantially H-shaped tuning-fork type quartz vibrating piece 100
Is vibrated, the vibration is input to the integrated circuit 410, and then a predetermined frequency signal is taken out, thereby functioning as an oscillator.

FIG. 8 shows a cylinder type tuning fork vibrator 50.
FIG. 2 is a schematic diagram showing a configuration of a zero.

As shown in FIG. 8, a cylinder type tuning fork vibrator 500 has a substantially H-shaped tuning fork type quartz vibrating piece 1 inside.
00 is provided with a metal cap 530 for accommodating 00. The cap 530 is press-fitted into the stem 520, and the inside thereof is kept in a vacuum state.

A lead 51 for holding the substantially H-shaped tuning-fork type quartz vibrating piece 100 housed in the cap 530 is provided.
Two 0s are arranged.

Such a cylinder type tuning fork vibrator 5
When a current or the like is externally applied to 00, the arm portion 120 of the substantially H-shaped tuning-fork type quartz vibrating piece 100 vibrates, and functions as a vibrator.

(Manufacturing method of a substantially H-shaped tuning fork type quartz vibrating piece)
As described above, the ceramic package tuning fork vibrator 20
A method of manufacturing the substantially H-shaped tuning-fork crystal vibrating piece 100 used for the digital mobile phone 300, the tuning-fork crystal oscillator 400, and the cylinder-type tuning-fork vibrator 500 will be described below.

First, as shown in FIG. 9A, a substrate of a quartz Z plate is processed into a plate shape. As described above, when the quartz Z plate is cut from a single crystal of quartz, an XY plane including the X axis and the Y axis is formed around the X axis in the orthogonal coordinate system including the X axis, the Y axis, and the Z axis. It is inclined about 1 to 5 degrees counterclockwise.

Next, Cr (chromium), Au
A (gold) metal film 102 is formed.

Then, the metal film 102 thus formed is formed.
As shown in FIG. 9C, the photoresist layer 103
To form

Next, the photoresist layer is partially removed such that the photoresist 103 remains on the inner side 104 and the frame 105 of the outer shape of the substantially H-shaped tuning-fork type quartz vibrating piece 100 shown in FIG. . FIG. 10D shows this state in a cross section, and FIG. 11 shows a perspective view in a perspective view.
(A).

In this state, as shown in FIG. 11A, a photoresist layer 103 is formed so as to make the substantially H-shaped tuning-fork type quartz vibrating piece 100 of FIG. 3 stand out.

Next, as shown in FIG.
In (d), the metal film 102 where the photoresist layer 103 is not formed is removed by etching.

Therefore, as shown in FIG. 11B, the portion where the metal film 102 has been removed is
Will appear.

Next, as shown in FIG.
The photoresist layer 103 remaining in (e) is entirely removed.

Next, as shown in FIG.
A photoresist layer 103 is formed on the entire surface of the plate substrate 101.

Then, as shown in FIG. 12H, a part of the photoresist layer 103 is removed. In particular,
In addition to removing the photoresist layer 103 in a portion other than the inside 104 and the frame 105 of the outer shape of the substantially H-shaped tuning-fork type quartz vibrating piece 100 shown in FIG. 3, the photoresist layer 103 in a portion corresponding to the groove 120a in FIG. A groove patterning for removing 103 is also performed.

In this embodiment, the groove 1 has already been formed in this step.
The photoresist layer 103 to be used in the 20a etching has been formed.

Therefore, when the photoresist is applied after the outer shape of the vibrating reed has been finished and the arms 120 have already been formed thinner as in the prior art, the most widely used photoresist is applied by a spin coater. And the above-mentioned photoresist layer 103 could not be formed. On the other hand, it is possible to form the above-described photoresist layer 103 by applying a photoresist using a spray coater or the like, but in this case, the uniformity of the thickness of the photoresist is poor, and an advanced coating technique is used. However, there is a problem that the cost of the apparatus is high and the cost is greatly increased.

On the other hand, in this embodiment, since the most widely used photoresist can be applied by the spin coater, the photoresist layer 103 can be formed accurately and easily, and the quality of the product can be improved. Not only improves the productivity, but also the productivity.

Next, as shown in FIG. 12 (i), outer shape etching is performed. That is, the outer shape etching is performed while leaving only the inner side 104 and the frame portion 105 of the outer shape of the substantially H-shaped tuning-fork type quartz vibrating piece 100 of FIG.

At this time, the substantially H-shaped tuning-fork type quartz vibrating reed 10
Etching is performed for a sufficient time so that fins, which are protrusions, do not remain on the outer shape of 0.

In the present embodiment, in the outer shape etching step, since the etching is not performed to form the groove 120a of the arm 120, the groove 120a may be formed too deep or may be erroneously formed as in the related art. Sufficient etching can be performed without considering that the through hole is formed.

Subsequently, as shown in FIG.
Groove 120 of arm 120 of tuning-fork type quartz vibrating piece 100
The portion of the metal film 120 corresponding to a is removed.

Then, as shown in FIG.
The plate substrate 101 is etched to a depth of, for example, about 0.02 to 0.045 mm as described above to form the groove 12
Oa is formed on both sides, and the cross-sectional shape is substantially H-shaped as shown in the figure.

Thus, the substantially H-shaped tuning-fork type quartz vibrating piece 100 shown in FIG. 1 is substantially completed.

Next, a process of forming the electrode 140 shown in FIG. 2 will be described with reference to a cross-sectional view of one of the arms 120.

First, as shown in FIG. 14A, a metal film 102 is formed on the entire surface of the substantially H-shaped tuning-fork type quartz vibrating piece 100 by sputtering or the like.

Then, a photoresist layer 103 is provided on the metal film 102 formed in FIG.
(B)).

Next, a portion of the photoresist layer corresponding to a portion where the electrode 140 is not formed in FIG. 2 is removed (FIG. 14).
(C)). Then, when the etching is performed, a portion of the metal film 102 where the photoresist layer is not provided is removed.

Finally, by peeling off the remaining photoresist layer 103, an electrode 140 can be formed as shown in FIGS.

Then, the substantially H-shaped tuning-fork type quartz vibrating piece 100 on which the electrode 140 is formed is separated from the frame portion 105, whereby the substantially H-shaped tuning fork-type quartz vibrating piece 100 is manufactured.

The manufactured substantially H-shaped tuning-fork type quartz vibrating piece 10
In the case of No. 0, since no fin or the like as a projection is formed, the characteristics inherent to the substantially H-shaped tuning-fork type quartz vibrating piece 100 can be sufficiently exhibited. Further, the tuning fork type crystal vibrating piece 100 manufactured as described above is used as the above-mentioned ceramic package tuning fork vibrator 200, digital mobile phone 300, tuning fork crystal oscillator 400, and cylinder type tuning fork vibrator 500.
By applying the present invention to a high-precision ceramic package tuning fork resonator 200, a digital cellular phone 300, a tuning fork crystal oscillator 400, and a cylinder type tuning fork resonator 500
And so on. In the present embodiment, 32.738 kHz is used.
The tuning fork type crystal resonator described above is described as an example,
It is clear that the present invention can be applied to a 55-kHz tuning-fork type crystal resonator.

The substantially H-shaped tuning-fork type quartz vibrating piece 100 according to the above-described embodiment can be used not only in the above-described example but also in other electronic devices, portable information terminals, televisions, video devices, so-called radio-cassettes. It is obvious that the present invention is also used for a clock built-in device such as a personal computer and a clock.

Further, the present invention is not limited to the above embodiment, and various changes can be made without departing from the scope of the claims. The configuration of the above embodiment can be partially omitted or changed to another arbitrary combination not described above.

[0123]

According to the present invention, a method of manufacturing a vibrating reed which is unlikely to cause defects such as protrusions, a vibrating reed, a vibrator having a vibrating reed,
An oscillator and a mobile phone device can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a substantially H-shaped tuning-fork type quartz vibrating piece before forming an electrode, which is manufactured by a method for manufacturing a substantially H-shaped tuning fork-type quartz vibrating piece according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view showing a state in which electrodes are formed on the substantially H-shaped tuning-fork type quartz vibrating piece of FIG.

FIG. 3 is a schematic view showing dimensions of the substantially H-shaped tuning-fork type quartz vibrating piece shown in FIG.

4 is a schematic cross-sectional view of an arm portion of the substantially H-shaped tuning-fork type quartz vibrating piece of FIG.

FIG. 5 is a schematic sectional view showing a configuration of a ceramic package tuning fork vibrator.

FIG. 6 is a schematic diagram showing circuit blocks of a digital mobile phone.

FIG. 7 is a schematic sectional view showing a configuration of a tuning fork crystal oscillator.

FIG. 8 is a schematic diagram showing a configuration of a cylinder type tuning fork vibrator.

FIG. 9 is a schematic cross-sectional view showing specific steps of a method of manufacturing a substantially H-shaped tuning-fork type quartz vibrating piece.

FIG. 10 is a schematic sectional view showing a step after FIG. 9;

FIG. 11 is a schematic perspective view showing specific steps of a method for manufacturing a substantially H-shaped tuning-fork type quartz vibrating piece.

FIG. 12 is a schematic sectional view showing a step after FIG. 10;

FIG. 13 is a schematic sectional view showing a step after FIG. 12;

FIG. 14 is a schematic cross-sectional view of an arm showing a step of forming the electrode shown in FIG. 2;

FIG. 15 is a schematic view showing a configuration of a conventional tuning-fork type quartz vibrating piece.

FIG. 16 is a sectional view taken along line A-A ′ of FIG. 15;

FIG. 17 is a schematic view showing a part of a manufacturing process of a conventional tuning-fork type quartz vibrating piece.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100: substantially H-shaped tuning-fork type crystal vibrating piece 101: crystal Z plate substrate 102: metal film 103: photoresist layer 104: inside of outer shape of vibrating piece 105: frame portion 120 ... arm part 120a ... groove part 130 ... base part 140 ... electrode 200 ... ceramic package tuning fork vibrator 210 ... package 211 ... base part 212 ... sealing part 213 ..Lid 214 ... Package side electrode 300 ... Digital mobile phone 400 ... Tuning fork crystal oscillator 410 ... Integrated circuit 500 ... Cylinder type tuning fork vibrator 510 ... Lead 520 ... Stem 530 cap

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme coat ゛ (Reference) H01L 41/22 Z F Term (Reference) 5J108 BB02 CC06 CC09 CC12 EE03 EE04 EE07 EE18 FF10 FF11 GG03 GG06 GG12 GG15 GG16 GG20 JJ04 KK01 MM08

Claims (19)

[Claims] 1. A method of manufacturing a vibrating reed in which a base, at least a plurality of vibrating rods protruding from the base, and a groove is formed in each of the plurality of vibrating rods, the method comprising: A step of forming an outer shape of the vibrating reed having the plurality of vibrating fine rods; and a step of forming a groove in the plurality of vibrating fine rods. Production method. 2. A groove formed in the plurality of vibrating rods is formed on the front and back surfaces of each of the plurality of vibrating rods, and a cross section of each of the vibrating rods is formed by a depth of the groove. The method for manufacturing a resonator element according to claim 1, wherein when formed in the vertical direction, the cross section is formed in a substantially H shape. 3. The method for manufacturing a resonator element according to claim 1, further comprising a step of forming an electrode in the groove. 4. The step of forming the outer shape of the vibrating reed includes the step of forming the outer shape of the vibrating reed by etching, and the step of forming a groove in the plurality of vibrating fine rods comprises the steps of: The method for manufacturing a resonator element according to claim 1, wherein a groove is formed in the thin rod by etching. 5. A step of forming a metal film on a surface of a plate-like substrate, a step of forming a photoresist layer on the metal film, a step of externally patterning the photoresist layer into a shape of a resonator element. Removing, by etching, the metal film in the portion where the photoresist layer has been removed, removing all of the remaining photoresist layer, further forming a photoresist layer on the substrate, Removing the photoresist layer so that the outer shape remains, removing the photoresist layer at a portion corresponding to the groove of the vibrating bar of the vibrating reed; and etching the outer shape of the vibrating reed, An etching step of removing a metal film corresponding to a groove of the vibrating rod, a step of forming a groove in the plurality of vibrating rods by etching, Resist layer and a manufacturing method of the vibrating element according to claim 4, characterized in that it comprises a step of removing the metal film. 6. After the step of removing the remaining resist layer and the metal film, a step of forming a metal film to be an electrode in a region including a groove formed in the plurality of vibrating rods; Forming a photoresist layer, removing the portion of the photoresist layer from which the metal film is removed, removing the portion of the metal film from which the photoresist layer has been removed by etching, and removing the remaining photoresist layer. The method for manufacturing a resonator element according to claim 5, further comprising a step of removing all of the elements. 7. A vibrating reed having a base, at least a plurality of vibrating rods protruding from the base, and a groove formed in each of the plurality of vibrating rods, wherein the base and the plurality of vibrating bars are provided. A vibrating reed having the outer shape of the vibrating reed having the vibrating fine rod, and forming grooves in the plurality of vibrating fine rods in a different process. 8. A groove formed in the plurality of vibrating rods is formed on the front and back surfaces of each of the plurality of vibrating rods, and a cross section of each of the vibrating rods is formed in a depth of the groove. The vibrating reed according to claim 7, wherein when formed in the vertical direction, the cross section is formed in a substantially H shape. 9. The resonator element according to claim 7, wherein an electrode is formed in the groove. 10. The vibrating reed is formed of a tuning-fork type quartz vibrating reed.
The resonator element according to any one of the above. 11. A base, at least a plurality of vibrating rods protruding from the base, a groove formed in each of the plurality of vibrating rods,
A vibrating piece housed in a package, wherein the vibrating piece forms an outer shape of the vibrating piece having the base and the plurality of vibrating fine rods, and the plurality of vibrating pieces are formed in different steps. A vibrator characterized in that a vibrating reed is formed by forming a groove in the vibrating thin rod of (1). 12. A groove formed in each of the plurality of vibrating rods is formed on the front and back surfaces of each of the plurality of vibrating rods, and a cross section of each of the vibrating rods is formed in a depth of the groove. The vibrator according to claim 11, wherein when formed in the vertical direction, the cross section is formed in a substantially H shape. 13. The vibrator according to claim 11, further comprising a step of forming an electrode in the groove. 14. The vibrator according to claim 11, wherein said vibrating piece is formed of a tuning-fork type quartz vibrating piece. 15. The vibrator according to claim 14, wherein a resonance frequency of the tuning-fork type quartz vibrating piece is approximately 32 kHz. 16. The vibrator according to claim 11, wherein said package is formed in a box shape. 17. The vibrator according to claim 11, wherein the package is formed in a so-called cylinder type. 18. A base, at least a plurality of vibrating rods protruding from the base, a groove formed in each of the plurality of vibrating rods,
A vibrating reed having the vibrating reed and an integrated circuit housed in a package, wherein the vibrating reed has an outer shape of the vibrating reed having the base and the plurality of vibrating rods, and is formed in a different process An oscillator, wherein a resonator element is formed by forming a groove in the plurality of vibrating rods. 19. A base, at least a plurality of vibrating rods protruding from the base, a groove formed in each of the plurality of vibrating rods,
A vibrating piece having the vibrating piece housed in a package; and a mobile phone device using the vibrator connected to a control unit. A mobile phone device comprising a vibrating reed formed by forming an outer shape of a vibrating reed having a fine rod and forming grooves in the plurality of vibrating fine rods in a process different from that of the vibrating reed.