JP2002067334A - Water repellent goods and method for manufacturing the same, ink jet head and method for manufacturing the same, and ink jet printer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide water repellent goods and a method for manufacturing the goods, an ink jet head and an ink jet printer which makes it possible to enhance a durability of the water repellency as well as an increase of the water repellency. SOLUTION: An indium and tin oxidized film 12 is formed on a face of an ink discharge side of a base material having nozzles. Then a water repellent film 13 is formed by combining a water repellent material having a part which can react with a hydroxyl group on the film 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water-repellent article having excellent water-repellent properties, a method of manufacturing the same, an ink jet head, a method of manufacturing the same, and an ink jet printer.

[0002]

2. Description of the Related Art Materials such as glass and metal are used as constituent materials of an ink ejection surface of an ink jet printer head. When using water-based or oil-based ink in an ink jet head, if the water repellency of the nozzle surface is insufficient, ink droplets are likely to adhere, thereby impairing the rectilinearity of the ejected ink droplets and causing print disorder. Is more likely to occur. Since the constituent material of the ink ejection surface of the ink jet head is easily wetted by the ink, a water repellent treatment is performed on the surface of the nozzle, which is the portion from which the ink is ejected, in order to prevent the adhesion of aqueous or oily ink. .

For example, JP-A-6-143586 discloses that when silicon or silicon oxide is used as a constituent material of an ink ejection surface, a fluoroalkylsilane-based compound is adhered to the ink ejection surface by vacuum evaporation. Water repellent methods have been proposed.

However, this technique has a problem that the performance of the water-repellent film on the ink ejection surface is deteriorated for the following reasons. (1) The pH of the ink is adjusted to be slightly alkaline within a range that does not affect the human body in order to stably disperse the coloring material. When silicon or silicon oxide is a constituent material of the ink ejection surface, the weakly alkaline ink that has penetrated the water-repellent film dissolves silicon or silicon oxide. As a result, the water-repellent film may fall off from the ink ejection surface, and the durability of the water-repellent film may be reduced. (2) When the nozzle constituent material is stainless steel, resin or a hybrid material thereof, the adhesion to the fluoroalkylsilane-based compound is poor, and the long-term use of the inkjet head deteriorates the water-repellent durability of the ink ejection surface. There was a case.

Therefore, the inventor has devised a method of forming an indium / tin oxide intermediate film between a substrate and a water repellent film by a sputtering method using an indium / tin target. It has become possible to improve the durability quality of the water film. (A) Indium tin oxide is a substance which is hardly corroded in an acid or alkaline environment except strong acids. Therefore, when indium / tin oxide was formed on the substrate, the water-repellent film formed thereon did not fall off, and the water-repellent performance was maintained for a long time. (B) Indium tin oxide has strong adhesion to a substrate such as silicon, silicon oxide, and stainless steel, and therefore does not fall off the substrate even when left for a long time. In addition, since indium tin oxide compounds have hydroxyl groups on the surface,
Adhesion with the fluoroalkylsilane-based compound was good, and high water repellency was maintained for a long time. (C) As the oxygen concentration during sputtering of indium tin oxide increased, higher wear resistance was obtained, and high water repellency was maintained for a long period of time.

[0006]

However, the conventional technique devised by the inventor has a problem that the performance of the water-repellent film on the ink ejection surface is reduced over a long period of use for the following reasons. (1) Since the indium-tin oxide film is a material on which gas components are easily adsorbed, the reaction bond with the water-repellent substance formed thereon may be incomplete, and the durability of the water-repellent film is poor. Was sometimes reduced. (2) Since the fluoroalkylsilane-based compound has a group capable of reacting with a hydroxyl group, it is likely to be adsorbed to the dye in the ink, and the performance of the water-repellent film may be reduced. (3) In the case of discharging an ink in which a hard dye such as a pigment is dispersed, it is necessary to increase the oxygen gas concentration during sputtering in order to improve the abrasion resistance of the indium tin oxide film. However, the sputtering method using the indium / tin target that has already been devised has a long processing time because the sputter rate is reduced due to the influence of oxygen gas, thereby lowering the productivity.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and has a water-repellent article which has improved water-repellent performance and has improved durability and productivity of the water-repellent performance, and a method of manufacturing the same. It is an object to provide an ink jet head, a method of manufacturing the same, and an ink jet printer.

[0008]

(1) A water-repellent article according to one embodiment of the present invention has an indium tin oxide film formed on the surface of a base material, and further has a site capable of reacting with a hydroxyl group thereon. A water-repellent article having a water-repellent film formed by bonding a water-repellent substance having the water-repellent film, wherein the water-repellent film is formed on the indium tin oxide film which has been cleaned by ultraviolet rays. . (2) In the water-repellent article according to another embodiment of the present invention, an indium-tin oxide film is formed on the surface of the substrate, and a water-repellent substance having a site capable of reacting with a hydroxyl group is further bonded thereon. In a water-repellent article having a water-repellent film formed thereon, the water-repellent film is formed on the indium / tin oxide film cleaned by plasma. (3) In the water-repellent article according to another aspect of the present invention, an indium-tin oxide film is formed on the surface of the substrate, and a water-repellent substance having a site capable of reacting with a hydroxyl group is further bonded thereon. In a water-repellent article having a water-repellent film formed thereon, the water-repellent film is formed by stabilizing a portion capable of reacting with a hydroxyl group of the water-repellent substance in a high-temperature and high-humidity environment. (4) In the water-repellent article according to another aspect of the present invention, an indium-tin oxide film is formed in a gas atmosphere in which the oxygen concentration of a sputtering gas is 30% or more, and furthermore, a portion capable of reacting with a hydroxyl group thereon. A water-repellent film is formed by bonding a water-repellent substance having the following. (5) The oxygen concentration is preferably 40% or more. (6) A method for producing a water-repellent article according to another aspect of the present invention includes:
An indium tin oxide film is formed on a surface of a base material, and further, the method for manufacturing a water-repellent article in which a water-repellent material having a site capable of reacting with a hydroxyl group is bonded thereon, wherein the water-repellent film is formed. First, the indium-tin oxide film is washed with ultraviolet light. (7) A method for producing a water-repellent article according to another aspect of the present invention includes:
An indium tin oxide film is formed on a surface of a base material, and further, the method for manufacturing a water-repellent article in which a water-repellent material having a site capable of reacting with a hydroxyl group is bonded thereon, wherein the water-repellent film is formed. First, the indium-tin oxide film is cleaned with plasma. (8) A method for manufacturing a water-repellent article according to another aspect of the present invention includes:
An indium tin oxide film is formed on the surface of the substrate, and further thereon, a method for manufacturing a water-repellent article that forms a water-repellent film by bonding a water-repellent substance having a site capable of reacting with a hydroxyl group, After the formation of the water-repellent film, a portion capable of reacting with a hydroxyl group of the water-repellent material is stabilized in a high-temperature and high-humidity environment. (9) A method for producing a water-repellent article according to another aspect of the present invention uses an indium-tin oxide target on a surface of a base material and a sputter gas with an oxygen concentration of 30% or more and indium-tin oxide. An oxide film is formed, and a water-repellent substance having a site capable of reacting with a hydroxyl group is bonded thereon to form a water-repellent film. (10) The oxygen concentration is preferably 40% or more. (11) In an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least a surface of an ink ejection side of a base material having a nozzle, and a portion capable of reacting with a hydroxyl group is further formed thereon. An ink-jet head having a water-repellent film formed by bonding a water-repellent substance to the ink-jet head, wherein the water-repellent film is formed on the indium-tin oxide film which has been cleaned by ultraviolet rays. (12) In an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least a surface of a base material having a nozzle on an ink ejection side, and a portion capable of reacting with a hydroxyl group is further formed thereon. An ink jet head having a water-repellent film formed by bonding a water-repellent substance to the ink-jet head, wherein the water-repellent film is formed on the indium tin oxide film cleaned by plasma. (13) In an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink ejection side, and a portion capable of reacting with a hydroxyl group is further formed thereon. In an inkjet head having a water-repellent film formed by bonding a water-repellent material having the water-repellent film, a portion capable of reacting with a hydroxyl group of the water-repellent material is stabilized in a high-temperature and high-humidity environment. Be formed. (14) In an ink jet head according to another aspect of the present invention, an indium / tin oxide film is formed in a gas atmosphere having an oxygen concentration of 30% or more on at least a surface of a substrate having a nozzle on an ink ejection side, and A water-repellent film having a water-repellent substance having a site capable of reacting with a hydroxyl group is formed thereon. (15) The oxygen concentration is preferably 40% or more. (16) In the method for manufacturing an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink discharge side, and furthermore, it is possible to react with a hydroxyl group thereon. In the method for manufacturing an ink jet head having a water-repellent film formed by bonding a water-repellent substance having various parts, the indium tin oxide film is washed with ultraviolet rays before the water-repellent film is formed. (17) In the method for manufacturing an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least the surface of the substrate having nozzles on the ink ejection side, and furthermore, it is possible to react with a hydroxyl group thereon. In the method for manufacturing an ink jet head having a water repellent film formed by bonding a water repellent substance having various parts, the indium tin oxide film is washed with plasma before forming the water repellent film. (18) In a method of manufacturing an ink jet head according to another aspect of the present invention, an indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink discharge side, and furthermore, it is possible to react with a hydroxyl group thereon. In a method for manufacturing an ink jet head having a water-repellent film formed by bonding a water-repellent substance having a different part, after the water-repellent film is formed, a part capable of reacting with a hydroxyl group of the water-repellent substance is heated to a high temperature. Stabilize in a moist environment. (19) An inkjet head according to another aspect of the present invention includes the inkjet head according to any one of (11) to (15).

In the present invention, the indium-tin oxide film between the substrate and the water-repellent film is washed with ultraviolet rays or plasma, and the water-repellent film formed thereon is subjected to a high-temperature and high-humidity treatment after being formed. Since the tin oxide film is formed from the indium / tin oxide target at an oxygen gas concentration of 30% or more during sputtering, the durability of the water-repellent film can be improved for the following reasons. (A) The indium / tin oxide compound has a hydroxyl group on the surface, so that the adhesion to the fluoroalkylsilane-based compound is improved. However, by cleaning the surface with ultraviolet or plasma having a wavelength of 200 nm or less, As a result, contaminants adhering to the surface are removed, the adhesion is further improved, and the water repellency is increased. (B) The high-temperature and high-humidity treatment stabilizes the reactive group that has not contributed to the binding of the fluoroalkylsilane-based compound, so that the ink adsorbability is suppressed and high water repellency can be maintained for a long time. (C) Since the oxygen concentration of the sputtering gas is specified to be 30% or more, more desirably 40% or more, it is possible to obtain high water repellency and to improve water repellency durability for the pigment ink. . In addition, indium
For sputtering using a tin oxide target,
The processing time is shorter and the productivity is higher than when using an indium / tin target.

Further, the indium tin oxide film according to the present invention has a high adhesiveness regardless of the constituent material of the ink ejection surface of the ink jet head, and has a chemical-repellent film and a water-repellent film due to the reasons (a) to (c). Because of the coupling, in any type of head (face eject type, edge eject type), it is possible to improve the water repellency and the durability of the water repellency. For this reason, the straightness of the ejected ink liquid is excellent, and troubles such as printing disorder can be avoided.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. FIG. 2 is a perspective view of the inkjet head according to the first embodiment of the present invention. This ink jet head has a first plate 1 in which a pressure chamber 4 for discharging ink by vibration of PZT or the like and a flow path 5 through which ink passes are formed, and a nozzle hole 6 formed in a direction perpendicular to the flow path 5. It has a structure in which a nozzle plate 2 called a nozzle plate is joined. Then, the indium tin oxide film and the water repellent film of the present embodiment are formed on the surface of the nozzle plate 2.

FIG. 1 is a process explanatory view of a method of manufacturing the nozzle plate 2 of FIG. (A) First, the indium-tin oxide film 1 is formed by sputtering on the surface of the silicon substrate 11 in which the nozzle holes 6 have been processed (FIG. 1A).
3 is formed to about 100 nanometers (FIG. 1B). The indium / tin oxide film 13 is formed by a sputtering method using an indium / tin oxide target, and is formed by adjusting the oxygen concentration of the sputtering gas to 30% or more. (B) Next, the surface of the indium tin oxide film 13
Ultraviolet light having a wavelength of nanometers or less is irradiated to form a fluoroalkylsilane-based water-repellent film 14 on the indium-tin oxide film 13 by a vacuum deposition method (FIG. 1).
(C)). (C) Finally, after leaving the nozzle plate 2 generated as described above in a constant temperature and humidity chamber of 70 ° C. and a relative humidity of 80% for about 2 hours, the first plate 1 is joined, and the ink jet recording head is mounted. Finalize.

Next, the above-described conditions and characteristics when the indium-tin oxide film 13 is formed in the manufacturing process of FIG. 1 will be described.

FIG. 3 is a characteristic diagram showing the relationship between the UV cleaning time of the indium tin oxide film and the ink repellency recovery time after immersion in 60 ° C. ink for 5 days. As shown in the figure, it can be seen that the higher the irradiation time of the ultraviolet light, the higher the water repellency is obtained. In addition, the ink-repellent revival time refers to a time required for immersing a 1 cm ² substrate in water, pulling up the substrate surface in a vertical state, and then removing water from the entire surface of the substrate to remove the water. The shorter the time, the higher the water repellency.

FIG. 4 is a characteristic diagram showing the relationship between the time of the high-temperature and high-humidity treatment after the formation of the water-repellent film and the time of the ink-repellency restoration. As shown in the figure, it can be seen that the ink-repellent recovery time is improved under the condition that the high-temperature and high-humidity processing time is 1 hour or more.

FIG. 5 shows the relationship between the oxygen concentration at the time of sputtering and the consumption of the indium tin oxide film after 3,000 wipings with the pigment ink. FIG. 6 shows the oxygen concentration at the time of sputtering and the ink contact angle before and after the wiping. FIG. 4 is a characteristic diagram showing a relationship with a difference between the two. As shown in FIG. 5, in the tested pigment inks, the higher the oxygen concentration, the higher the abrasion resistance was obtained, and the desired abrasion resistance was obtained in a region of 30% or more, and more preferably 40% or more. You can see that.

Further, as shown in FIG. 6, it can be seen that the difference in the contact angle before and after the wiping decreases as the oxygen concentration increases, and the water repellency is maintained. Further, since the sputtering target is indium / tin oxide, the processing time is shorter than that of the indium / tin target.

Therefore, the desired water repellency can be obtained by washing the surface of the indium tin oxide film with ultraviolet rays before the water repellency treatment, and the water repellency can be improved by the high temperature and high humidity treatment after the water repellency treatment. When the oxygen concentration of sputtering is 30% or more, the water repellency and abrasion resistance to the pigment ink are satisfied.

Embodiment 2 FIG. In the first embodiment, the method of cleaning the surface of the indium / tin oxide film using ultraviolet rays has been described as an example. However, an inert gas such as argon,
Exposure to plasma of oxygen gas or a mixed gas of oxygen gas and inert gas may be sufficient as long as the surface can be cleaned.

In the first embodiment, an example in which a fluoroalkylsilane-based water-repellent film is used has been described. However, as long as the material of the material includes a group capable of chemically reacting with a hydroxyl group, other materials may be used. A water repellent may be used. The material of the nozzle plate is not limited to the silicon substrate, but may be a metal material such as stainless steel, or an organic polymer material such as glass or polysulfone.

Furthermore, although the face eject head has been described in the first embodiment, the edge eject head also exhibits excellent durability because of good adhesion between the indium tin oxide and the substrate. I do.

[0022]

As described above, according to the present invention, the surface of the indium tin oxide film is dry-cleaned, subjected to a high-temperature and high-humidity treatment after a water-repellent treatment, or the sputter gas has an oxygen concentration of 30%.
As described above, it is possible to improve the water repellency and the durability of the pigment ink.

[Brief description of the drawings]

FIG. 1 is a process explanatory view of a method for manufacturing a nozzle plate according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the inkjet head according to the first embodiment of the present invention.

FIG. 3 is a characteristic diagram showing a relationship between an ultraviolet cleaning time of an indium tin oxide film and an ink repellency recovery time after immersion in ink at 60 degrees Celsius for 5 days according to the first embodiment of the present invention.

FIG. 4 is a characteristic diagram showing a relationship between a high-temperature and high-humidity processing time after forming a water-repellent film according to the first embodiment of the present invention and an ink-repellent property restoring time.

FIG. 5 is a characteristic diagram showing a relationship between an oxygen concentration at the time of sputtering according to the first embodiment of the present invention and a wear amount of an indium / tin oxide film after 3,000 wipings with a pigment ink.

FIG. 6 is a characteristic diagram showing a relationship between an oxygen concentration during sputtering and a difference between ink contact angles before and after wiping according to the first embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st plate 2 Nozzle plate 4 Pressure chamber 5 Flow path 6 Nozzle hole 11 Silicon substrate 13 Indium tin oxide film 14 Water repellent film

Claims (19)

[Claims] 1. A water-repellent article in which an indium-tin oxide film is formed on the surface of a base material, and a water-repellent film having a water-repellent substance having a site capable of reacting with a hydroxyl group is formed thereon. , Wherein the water-repellent film is formed on the indium-tin oxide film which has been cleaned by ultraviolet rays. 2. A water-repellent article in which an indium-tin oxide film is formed on the surface of a base material, and a water-repellent film is further formed thereon by bonding a water-repellent substance having a site capable of reacting with a hydroxyl group. , Wherein the water-repellent film is formed on the indium-tin oxide film cleaned by plasma. 3. A water-repellent article in which an indium-tin oxide film is formed on the surface of a base material, and a water-repellent film formed by bonding a water-repellent substance having a site capable of reacting with a hydroxyl group is further formed thereon. Wherein the portion capable of reacting with a hydroxyl group of the water-repellent substance is placed in a high-temperature and high-humidity environment to form the stabilized water-repellent film. 4. A water-repellent material in which an indium-tin oxide film is formed in a gas atmosphere in which the oxygen concentration of a sputtering gas is 30% or more, and on which a water-repellent substance having a site capable of reacting with a hydroxyl group is bonded. A water-repellent article characterized by having a film formed. 5. The water repellent material according to claim 4, wherein the oxygen concentration is preferably 40% or more. 6. A method for producing a water-repellent article, wherein an indium-tin oxide film is formed on a surface of a substrate, and further a water-repellent substance having a site capable of reacting with a hydroxyl group is bonded thereon.
A method for manufacturing a water-repellent article, comprising washing the indium-tin oxide film with ultraviolet light before forming the water-repellent film. 7. A method for producing a water-repellent article, wherein an indium-tin oxide film is formed on a surface of a substrate, and further a water-repellent substance having a site capable of reacting with a hydroxyl group is bonded thereon.
A method for manufacturing a water-repellent article, comprising cleaning the indium-tin oxide film with plasma before forming the water-repellent film. 8. Production of a water-repellent article in which an indium-tin oxide film is formed on the surface of a substrate, and a water-repellent substance having a site capable of reacting with a hydroxyl group is further bonded thereon to form a water-repellent film. In the method, after the water-repellent film is formed, a portion capable of reacting with a hydroxyl group of the water-repellent substance is placed in a high-temperature and high-humidity environment to stabilize the water-repellent article. 9. An indium / tin oxide film is formed on the surface of a base material using an indium / tin oxide target under the condition that the oxygen concentration of a sputtering gas is 30% or more, and then reacts with a hydroxyl group on the indium / tin oxide film. A method for producing a water-repellent article, comprising forming a water-repellent film by bonding a water-repellent substance having a possible site. 10. A method for producing a water-repellent article, wherein the oxygen concentration is preferably 40% or more. 11. An indium tin oxide film is formed on at least the surface of the substrate having a nozzle on the ink ejection side,
Further, there is provided an ink-jet head having a water-repellent film formed by bonding a water-repellent substance having a site capable of reacting with a hydroxyl group, wherein the water-repellent film is formed on the indium-tin oxide film washed with ultraviolet rays. An ink-jet head comprising a film formed thereon. 12. An indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink ejection side,
Further, there is provided an ink-jet head having a water-repellent film formed by bonding a water-repellent substance having a site capable of reacting with a hydroxyl group, wherein the water-repellent film is formed on the indium tin oxide film cleaned by plasma. An ink-jet head comprising a film formed thereon. 13. An indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink ejection side,
Furthermore, in the ink jet head having thereon a water repellent film formed by bonding a water repellent substance having a part capable of reacting with a hydroxyl group, a part capable of reacting with the hydroxyl group of the water repellent substance is provided in a high temperature and high humidity environment. Wherein the water-repellent film, which is stabilized by the method described above, is formed. 14. An indium-tin oxide film is formed in a gas atmosphere having an oxygen concentration of 30% or more on at least a surface of an ink discharge side of a substrate having a nozzle, and further has a site capable of reacting with a hydroxyl group. An ink jet head comprising a water repellent film formed by bonding a water repellent substance having the following. 15. An ink jet head, wherein the oxygen concentration is preferably 40% or more. 16. An indium tin oxide film is formed on at least a surface of the substrate having a nozzle on the ink ejection side,
Further, there is provided a method of manufacturing an ink jet head having a water repellent film formed by bonding a water repellent material having a site capable of reacting with a hydroxyl group, wherein the indium tin oxide film is formed before the water repellent film is formed. And a method for manufacturing an ink jet head, comprising: 17. An indium tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink ejection side,
Further, there is provided a method of manufacturing an ink jet head having a water repellent film formed by bonding a water repellent material having a site capable of reacting with a hydroxyl group, wherein the indium tin oxide film is formed before the water repellent film is formed. A method for manufacturing an ink jet head, comprising: cleaning a substrate with plasma. 18. An indium-tin oxide film is formed on at least a surface of a substrate having a nozzle on an ink ejection side,
Furthermore, there is provided a method of manufacturing an ink jet head having a water-repellent film formed by bonding a water-repellent material having a site capable of reacting with a hydroxyl group thereon, wherein the water-repellent film is formed, A method for manufacturing an ink jet head, comprising stabilizing a site capable of reacting with a hydroxyl group by placing it in a high-temperature and high-humidity environment. 19. An ink jet printer comprising the ink jet head according to claim 11.