JP2003063014A - Method for manufacturing nozzle plate for ink jet printer - Google Patents
Method for manufacturing nozzle plate for ink jet printerInfo
- Publication number
- JP2003063014A JP2003063014A JP2001254183A JP2001254183A JP2003063014A JP 2003063014 A JP2003063014 A JP 2003063014A JP 2001254183 A JP2001254183 A JP 2001254183A JP 2001254183 A JP2001254183 A JP 2001254183A JP 2003063014 A JP2003063014 A JP 2003063014A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- nozzle
- nozzle plate
- jet printer
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、インクジェットプ
リンタ用ノズルプレートの製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a nozzle plate for an ink jet printer.
【０００２】[0002]
【従来の技術】従来技術のインクジェットヘッドにおい
ては、ノズルよりインク滴を吐出させる際、インクの溢
れ出しやインクミストが付着する等ノズル表面の濡れや
汚れが発生し、それらに吐出するインク滴が影響を受け
飛翔方向曲がりや、最悪の場合不吐出ノズルが発生し、
印刷品質が低下するという問題を抱えている。2. Description of the Related Art In a conventional ink jet head, when ink droplets are ejected from a nozzle, wetting or dirt of the nozzle surface occurs such as ink overflow or ink mist adhering to the ink droplets ejected. It is affected by bending in the flight direction, and in the worst case, a non-ejection nozzle occurs,
There is a problem that print quality is degraded.
【０００３】ノズルプレートは、ガラス、金属、樹脂等
の材料で構成されており、それらの部材に撥インク処理
を施し、ノズルプレート表面の濡れを防止することが一
般的である。代表例として特開平9-267478号公報に記載
されている、ノズル表面に撥インク膜を形成し、撥イン
ク膜の表面に撥インク膜の親インク化を防ぐためゴム状
の弾性体を貼付し、活性ガス雰囲気へさらして流路を親
インク化する方法などが提案されている。The nozzle plate is made of a material such as glass, metal or resin, and it is common to apply an ink repellent treatment to these members to prevent the nozzle plate surface from getting wet. As a typical example, in JP-A-9-267478, an ink repellent film is formed on the nozzle surface, and a rubber-like elastic body is attached to the surface of the ink repellent film to prevent the ink repellent film from becoming ink-philic. , A method of exposing a flow path to an ink by exposing it to an active gas atmosphere has been proposed.
【０００４】しかし上記方法では、ノズルプレート表面
にのみ撥インク処理が施されるため、インクメニスカス
がほぼノズルプレート表面に形成される。撥インク処理
が施されていない状態と比較すればノズルプレート表面
の濡れは改善されるが、ノズルプレート表面にメニスカ
スが形成されていることで、紙紛や異物が付着しやすく
汚れやすい。However, in the above method, since the ink repellent treatment is applied only to the nozzle plate surface, the ink meniscus is formed almost on the nozzle plate surface. Although the wetting of the nozzle plate surface is improved as compared with the state in which the ink repellent treatment is not applied, the formation of the meniscus on the nozzle plate surface makes it easier for paper dust or foreign matter to adhere and stain easily.
【０００５】このような問題に対して、インクが吐出す
るノズル表面及びある所定の範囲でノズル内面に撥イン
ク膜を形成することで、インクがノズル表面に溢れ出す
ことを防止し、ノズル内のメニスカス形成位置を安定さ
せインクの飛翔方向の曲がりを防止することが可能であ
る。To solve such a problem, by forming an ink repellent film on the nozzle surface from which ink is ejected and on the inner surface of the nozzle in a predetermined range, the ink is prevented from overflowing to the nozzle surface, and the inside of the nozzle is prevented. It is possible to stabilize the meniscus formation position and prevent the ink from bending in the flight direction.
【０００６】[0006]
【発明が解決しようとする課題】本発明の課題は、イン
クジェットプリンタ用ノズルプレートにおいて、ノズル
プレート表面のインクによる汚れを防止し、インク直進
飛行性向上及びノズル内のインクの挙動を安定化し、高
印字品質の印字ができるノズルプレートを提供すること
にある。また、本発明においては、簡便なノズルプレー
トを製造する方法を提供することを課題とする。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention An object of the present invention is to prevent ink stains on the surface of a nozzle plate in an ink jet printer nozzle plate, improve straight flight performance of ink, and stabilize the behavior of ink in the nozzle. An object of the present invention is to provide a nozzle plate capable of printing with print quality. Another object of the present invention is to provide a simple method for manufacturing a nozzle plate.
【０００７】[0007]
【課題を解決するための手段】本発明は、このような課
題を達成するためインクを吐出するノズル表面及びノズ
ル内部が所定の深さまで撥インク処理され、それ以外の
インク流路が親インク処理されたインクジェットプリン
タ用ノズルプレートの製造方法において、ノズルプレー
ト全面に撥インク処理した後、ノズル表面及びノズル内
部の所定の深さまで感光性樹脂によりマスク処理を施
し、プラズマ照射により流路の親インク処理を行う。According to the present invention, in order to achieve the above object, the nozzle surface for ejecting ink and the inside of the nozzle are subjected to an ink repellent treatment to a predetermined depth, and the other ink flow paths are treated with an ink-philic treatment. In the method for manufacturing a nozzle plate for an inkjet printer described above, after ink-repellent treatment is applied to the entire surface of the nozzle plate, mask treatment is performed with a photosensitive resin to a predetermined depth on the nozzle surface and inside the nozzle, and plasma-irradiated ink-treatment of the flow path is performed. I do.
【０００８】[0008]
【発明の実施の形態】以下、本発明を説明するが、本発
明はこれによって限定されるものではない。
（実施例１）図１は、本発明の一例となるインクジェッ
トプリンタ用ノズルプレートの製造方法について説明し
たものである。BEST MODE FOR CARRYING OUT THE INVENTION The present invention is described below, but the present invention is not limited thereto. (Embodiment 1) FIG. 1 illustrates a method for manufacturing a nozzle plate for an inkjet printer, which is an example of the present invention.
【０００９】図１の（ａ）において、ノズルプレート１
はステンレスで形成され、ノズル部は、プレスによって
裏面に開いた漏斗状に形成される。本例では、プレート
厚８０μm、インク吐出側穴径４０μm、インク供給側穴
径８０μm、材質ＳＵＳ３０４のものを用いた。In FIG. 1A, the nozzle plate 1
Is made of stainless steel, and the nozzle portion is formed in a funnel shape opened on the back surface by pressing. In this example, a plate having a thickness of 80 μm, an ink discharge side hole diameter of 40 μm, an ink supply side hole diameter of 80 μm, and a material of SUS304 was used.
【００１０】なお、本例では、ノズルプレート1の材質
をステンレスとしたが、その他の金属、セラミック、シ
リコン、ガラス、プラスチック樹脂などで形成しても問
題はない。また、ノズル部も電鋳、機械加工、ドライエ
ッチングなどの方法を用いても何ら問題はない。Although the nozzle plate 1 is made of stainless steel in this example, it may be formed of other metal, ceramic, silicon, glass, plastic resin, or the like. Further, there is no problem even if the nozzle portion is formed by using a method such as electroforming, machining, dry etching or the like.
【００１１】次に、（ｂ）でノズルプレート１の全面に
撥インク膜２を形成する。例としてフッ素系高分子を用
いて撥インク膜を形成した。また、ノズルプレート１の
全面に撥インク膜２を形成するとしたが、ノズルプレー
ト表面とノズル内部に撥インク膜が形成されていればノ
ズルプレート裏面に撥インク膜の形成が無くとも何ら問
題はない。Next, in (b), the ink repellent film 2 is formed on the entire surface of the nozzle plate 1. As an example, an ink repellent film was formed using a fluorine-based polymer. Although the ink repellent film 2 is formed on the entire surface of the nozzle plate 1, there is no problem even if the ink repellent film is not formed on the back surface of the nozzle plate as long as the ink repellent film is formed on the nozzle plate surface and inside the nozzle. .
【００１２】マスクは、スピンコーターを用い、感光性
樹脂３（例えば東京応化（株）製ネガ型フォトレジスト
ＯＭＲ８３）を基板４（例えばシリコンウェハ）にコー
トし、ポストベークしたものを使用した。なお、本例で
は、ネガ型フォトレジストをコートする基板をシリコン
ウェハとしたが、金属、セラミック、ガラス、プラスチ
ック樹脂など平行度が高く表面が平滑で且つ高硬度な部
材であれば何ら問題ない。As the mask, a substrate was coated with a photosensitive resin 3 (for example, a negative photoresist OMR83 manufactured by Tokyo Ohka Kogyo Co., Ltd.) on a substrate 4 (for example, a silicon wafer) using a spin coater and post-baked. In this example, the substrate coated with the negative photoresist is a silicon wafer, but there is no problem as long as it is a member having a high degree of parallelism, a smooth surface and a high hardness, such as metal, ceramic, glass or plastic resin.
【００１３】続いて、ノズルプレート１と基板４上にス
ピンコートした感光性樹脂３を温度９０℃、圧力３kg/c
m2、時間3分間の条件でプレスし、（ｃ）のようにノズ
ル内へ入り込ませ、インク供給側から紫外線を１２mW/c
m2照射しプラズマに十分耐えうるマスクを形成した。Then, the photosensitive resin 3 spin-coated on the nozzle plate 1 and the substrate 4 is heated at a temperature of 90 ° C. and a pressure of 3 kg / c.
Press under the condition of m 2 for 3 minutes, let it enter the nozzle as shown in (c), and apply ultraviolet rays of 12 mW / c from the ink supply side.
A mask capable of sufficiently withstanding the plasma was formed by irradiation with m 2 .
【００１４】更に、ベルジャー方式プラズマ発生装置を
用い酸素プラズマ雰囲気中にさらし、（ｄ）のようにマ
スクされた以外の撥インク膜を除去する。本例では、真
空度0.1Torr（酸素導入後0.5Torr）高周波電源出力300W
処理時間3分の条件で行った。本例ではプラズマとなる
ガスに酸素を用いたが、窒素、アルゴン等でも撥インク
膜が除去可能なガスであれば何ら問題はない。Further, the ink repellent film other than the masked layer as shown in (d) is removed by exposing it to an oxygen plasma atmosphere using a bell jar type plasma generator. In this example, the degree of vacuum is 0.1 Torr (0.5 Torr after oxygen is introduced) High frequency power output 300W
The processing time was 3 minutes. In this example, oxygen is used as the gas that becomes plasma, but there is no problem as long as it is a gas that can remove the ink repellent film, such as nitrogen or argon.
【００１５】その後、マスクを除去し（ｅ）のノズルプ
レートを得た。本例では、１００℃に加熱したＯＭＲ８
３用剥離液５０２Ａ中に（ｄ）で得られたノズルプレー
ト一式を浸漬し超音波洗浄機で１５分間処理を行った。After that, the mask was removed to obtain a nozzle plate (e). In this example, OMR8 heated to 100 ° C
The set of nozzle plates obtained in (d) was immersed in the stripping solution 502A for 3 and treated with an ultrasonic cleaner for 15 minutes.
【００１６】上記方法で得られたノズルプレート表面の
純水に対する接触角は１１５〜１２０°、流路となる裏
面の純水に対する接触角は５〜１０°となり、ノズルプ
レート表面は十分な撥インク性を有し、裏面の流路は十
分な親インク性を有していた。また、非接触式３次元測
定機を用いノズルの流路側からインクを充填しメニスカ
スの位置を測定し、ノズルプレート表面から２±０．５
μm入り込んで形成したことを確認した。
（実施例２）図２は、実施例１でスピンコートしたネガ
型フォトレジストＯＭＲ８３に代えて、ドライフィルム
レジストを用いた本発明の他の例となるインクジェット
用ノズルプレートの製造方法について説明したものであ
る。The contact angle of pure water on the surface of the nozzle plate obtained by the above method is 115 to 120 °, and the contact angle of pure water on the rear surface to be the flow path is 5 to 10 °, and the surface of the nozzle plate is sufficiently ink repellent. And the flow path on the back surface had sufficient ink affinity. In addition, using a non-contact type three-dimensional measuring machine, ink is filled from the flow path side of the nozzle and the position of the meniscus is measured.
It was confirmed that the film was formed by entering μm. (Embodiment 2) FIG. 2 illustrates a method for manufacturing an inkjet nozzle plate, which is another example of the present invention, using a dry film resist in place of the negative photoresist OMR83 spin-coated in Embodiment 1. Is.
【００１７】図２の（ｇ）撥インク処理工程までは、実
施例１（ｂ）と同様に行った。The procedure up to the ink repellent treatment step (g) in FIG. 2 was performed in the same manner as in Example 1 (b).
【００１８】マスクは、感光性樹脂フィルム５、一例と
してDupont社製ドライフィルムレジストＦＸ１３０を１
１０℃、４kg/cm2の条件でラミネートし（ｈ）のように
ノズル内へ入り込ませ、該ドライフィルムレジストに３
２０〜４００nmの長波長紫外線を照射し、プラズマに十
分耐えうるマスクを形成した。The mask is a photosensitive resin film 5, for example, a dry film resist FX130 manufactured by Dupont Co., Ltd.
Laminate it under the conditions of 10 ° C and 4 kg / cm 2 and let it enter the nozzle as shown in (h), and apply 3 to the dry film resist.
Irradiation with long wavelength ultraviolet rays of 20 to 400 nm was performed to form a mask sufficiently resistant to plasma.
【００１９】それを（ｉ）の工程にて、実施例１同様、
酸素プラズマ処理を行った。In the step (i), as in Example 1,
Oxygen plasma treatment was performed.
【００２０】その後、マスクを除去し、（ｊ）に示すノ
ズルプレートを得た。本例では、５０℃に加熱した濃度
５％の水酸化ナトリウム水溶液中に（ｉ）で得られたノ
ズルプレート一式を浸漬し超音波洗浄機で１５分間処理
を行った。After that, the mask was removed to obtain a nozzle plate shown in (j). In this example, the set of nozzle plates obtained in (i) was immersed in an aqueous solution of sodium hydroxide having a concentration of 5% and heated at 50 ° C., and treated with an ultrasonic cleaner for 15 minutes.
【００２１】上記方法で得られたノズルプレート表面の
純水に対する接触角は１１５〜１２０°、流路となる裏
面の純水に対する接触角は５〜１０°となり、ノズルプ
レート表面は十分な撥インク性を有し、裏面の流路は十
分な親インク性を有していた。また、非接触式３次元測
定機を用いノズルの流路側からインクを充填しメニスカ
スの位置を測定し、ノズルプレート表面から５±０．５
μm入り込んで形成したことを確認した。The contact angle of pure water on the surface of the nozzle plate obtained by the above method is 115 to 120 °, and the contact angle of pure water on the back surface to be the flow path is 5 to 10 °, and the surface of the nozzle plate is sufficiently ink repellent. And the flow path on the back surface had sufficient ink affinity. In addition, using a non-contact type three-dimensional measuring machine, ink is filled from the flow path side of the nozzle and the position of the meniscus is measured, and it is 5 ± 0.5 from the nozzle plate surface.
It was confirmed that the film was formed by entering μm.
【００２２】表１は、本発明の実施例１、２で得られた
ノズルプレートをピエゾ駆動方式のオンデマンド型イン
クジェットプリントヘッドに装着して、インク吐出側穴
径が４０μmのノズル１００個から２０ｋＨｚの駆動周
波数で３０分連続吐出を行った時に発生した不吐出や曲
がりなどの吐出不良の発生回数を従来方法の処理なし品
と比較したものである。Table 1 shows that the nozzle plates obtained in Examples 1 and 2 of the present invention were mounted on a piezo drive type on-demand type ink jet print head, and 20 kHz from 100 nozzles having an ink discharge side hole diameter of 40 μm. This is a comparison of the number of occurrences of ejection failure such as non-ejection and bending that occurred when continuous ejection was performed for 30 minutes at the driving frequency of the conventional method with no treatment.
【００２３】[0023]
【表１】 [Table 1]
【００２４】この結果より、本発明の撥インク膜形成を
施したノズルプレートは、不吐出や曲がりなどの吐出不
良が発生し難くいことが分かった。From these results, it was found that the nozzle plate provided with the ink repellent film of the present invention is less likely to cause ejection failure such as non-ejection or bending.
【００２５】この様に感光性樹脂は、被覆時に適度にノ
ズル内に入り込み確実に入り込み量を制御可能であり、
その後、紫外線照射によって硬化しプラズマに耐え得る
マスク材となりバラツキの少ない安定した境界を得るこ
とが出来る。As described above, the photosensitive resin can appropriately enter into the nozzle at the time of coating and reliably control the entering amount.
After that, it becomes a mask material that is hardened by ultraviolet irradiation and can withstand plasma, and stable boundaries with less variation can be obtained.
【００２６】[0026]
【発明の効果】本発明によれば、インクを吐出するノズ
ル表面及びノズル内部の所定の深さまで撥インク膜を感
光性樹脂によって保護し、それ以外のインク流路部をプ
ラズマによって親インク処理することにより、ノズルプ
レート表面はインクで汚れることなく、吐出するインク
は直進飛行性に優れノズル内のインクの挙動が安定し、
信頼性が高く高印字品質の印字ができるノズルプレート
を形成することができる。According to the present invention, the ink repellent film is protected by the photosensitive resin up to a predetermined depth inside the nozzle for ejecting ink and the inside of the nozzle, and the other ink flow passages are treated with ink by plasma. As a result, the surface of the nozzle plate is not contaminated with ink, the ejected ink has excellent straight flight performance, and the behavior of the ink in the nozzle is stable,
It is possible to form a nozzle plate having high reliability and capable of printing with high printing quality.
【図１】 本発明の一例となるノズルプレートの製造工
程を示す図。FIG. 1 is a diagram showing a manufacturing process of a nozzle plate as an example of the present invention.
【図２】 本発明の他の例となるノズルプレートの製造
工程を示す図。FIG. 2 is a diagram showing a manufacturing process of a nozzle plate which is another example of the present invention.
１はオリフィスプレート、２は撥インク膜、３は感光性
樹脂、４は基板、５は感光性樹脂フィルムである。1 is an orifice plate, 2 is an ink repellent film, 3 is a photosensitive resin, 4 is a substrate, and 5 is a photosensitive resin film.
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2C057 AF43 AP13 AP43 AP57 AP59 AP60 AQ06 ─────────────────────────────────────────────────── ─── Continued front page F-term (reference) 2C057 AF43 AP13 AP43 AP57 AP59 AP60 AQ06
Claims (4)
部が所定の深さまで撥インク処理され、それ以外のイン
ク流路が親インク処理されたインクジェットプリンタ用
ノズルプレートの製造方法において、 ノズルプレート全面に撥インク処理した後、ノズル表面
及びノズル内部の所定の深さまで感光性樹脂によりマス
ク処理を施し、プラズマ照射により流路の親インク処理
を行うことを特徴とするインクジェットプリンタ用ノズ
ルプレートの製造方法。1. A method for manufacturing a nozzle plate for an inkjet printer, wherein the nozzle surface for ejecting ink and the inside of the nozzle are subjected to an ink repellent treatment to a predetermined depth, and the other ink flow paths are treated to be ink-philic. A method for manufacturing a nozzle plate for an inkjet printer, comprising performing a mask treatment with a photosensitive resin up to a predetermined depth on the nozzle surface and inside the nozzle after the ink repellent treatment, and performing an ink-affinity treatment of the flow path by plasma irradiation.
あることを特徴とする請求項１記載のインクジェットプ
リンタ用ノズルプレートの製造方法。2. The method of manufacturing a nozzle plate for an ink jet printer according to claim 1, wherein the thickness of the photosensitive resin is 100 μm or less.
たインクジェットプリンタ用ノズルプレートを用いたこ
とを特徴とするインクジェットプリンタ用ヘッド。3. A head for an ink jet printer, characterized by using a nozzle plate for an ink jet printer obtained by the manufacturing method according to claim 1.
ヘッドを搭載したインクジェットプリンタ。4. An ink jet printer equipped with the ink jet printer head according to claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001254183A JP4374811B2 (en) | 2001-08-24 | 2001-08-24 | Method for manufacturing nozzle plate for inkjet printer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001254183A JP4374811B2 (en) | 2001-08-24 | 2001-08-24 | Method for manufacturing nozzle plate for inkjet printer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003063014A true JP2003063014A (en) | 2003-03-05 |
| JP4374811B2 JP4374811B2 (en) | 2009-12-02 |
Family
ID=19082377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001254183A Expired - Lifetime JP4374811B2 (en) | 2001-08-24 | 2001-08-24 | Method for manufacturing nozzle plate for inkjet printer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4374811B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006175604A (en) * | 2004-12-20 | 2006-07-06 | Seiko Epson Corp | Film formation method, liquid feeding head and liquid feeder |
| US7232206B2 (en) | 2003-05-09 | 2007-06-19 | Ricoh Printing Systems, Ltd. | Ink-jet head, ink-jet printer using the same, and process for producing ink-jet head |
| JP2007261070A (en) * | 2006-03-28 | 2007-10-11 | Seiko Epson Corp | Manufacturing method of nozzle forming substrate and nozzle forming substrate |
| EP1997636A1 (en) | 2007-05-31 | 2008-12-03 | Mimaki Engineering Co., Ltd. | Nozzle plate for inkjet head, method for manufacturing the same, and treatment liquid for inkjet head |
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| JP4595527B2 (en) * | 2004-12-20 | 2010-12-08 | セイコーエプソン株式会社 | Film forming method, liquid supply head, and liquid supply apparatus |
| JP2006175604A (en) * | 2004-12-20 | 2006-07-06 | Seiko Epson Corp | Film formation method, liquid feeding head and liquid feeder |
| US7641943B2 (en) | 2004-12-24 | 2010-01-05 | Seiko Epson Corporation | Coating method, liquid supplying head and liquid supplying apparatus |
| JP2007261070A (en) * | 2006-03-28 | 2007-10-11 | Seiko Epson Corp | Manufacturing method of nozzle forming substrate and nozzle forming substrate |
| EP2129526A1 (en) * | 2007-03-12 | 2009-12-09 | Silverbrook Research Pty. Ltd | Metal film protection during printhead fabrication with minimum number of mems processing steps |
| EP2129526A4 (en) * | 2007-03-12 | 2010-04-28 | Silverbrook Res Pty Ltd | Metal film protection during printhead fabrication with minimum number of mems processing steps |
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| CN103085481A (en) * | 2011-11-08 | 2013-05-08 | 富士胶片株式会社 | Method Of Manufacturing Liquid Droplet Ejection Head |
| JP2013099880A (en) * | 2011-11-08 | 2013-05-23 | Fujifilm Corp | Method of manufacturing liquid droplet ejection head |
| US9090064B2 (en) | 2011-11-08 | 2015-07-28 | Fujifilm Corporation | Method of manufacturing liquid droplet ejection head |
| CN103085481B (en) * | 2011-11-08 | 2016-06-08 | 富士胶片株式会社 | The manufacture method of droplet jetting head |
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