JP2791228B2 - Method of manufacturing inkjet head and inkjet head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink-jet head having a water-repellent treatment at the periphery of an orifice and an ink-jet head.

[0002]

2. Description of the Related Art Conventionally, an ink jet recording apparatus which performs recording by discharging a recording liquid (ink) from an orifice (discharge port) of a recording head is known as a recording apparatus excellent in terms of low noise, high speed recording and the like. Have been.

[0003] Regarding the ink jet recording method, various methods have been proposed so far, some of which have been commercialized with improvements, and some of which are currently being put to practical use.

FIG. 1 is a perspective view (A) and a developed perspective view (B) illustrating the configuration of a normal ink jet recording head.

In this recording head, a discharge pressure generating element 12 is provided on a substrate 11 formed of glass, ceramics, or the like, and the photosensitive resin cured film 13 is patterned by a photolithography method. Liquid flow path 15 corresponding to generation element 12 and orifice 1
Fourth, a liquid chamber 16 is formed. A top plate 17 made of, for example, glass, ceramics, metal, or the like is laminated and fixed on the cured photosensitive resin film 13 with an adhesive 19. The top plate 17 has a recording liquid supply port 1.
8 are formed.

In the recording head having such a configuration, the physical properties (physical properties) of the surface of the substrate 11, the photosensitive resin cured film 13, and the top plate 17 surrounding the orifice 14 are such that the recording liquid is constantly stabilized from the orifice 14. In order to discharge
Very important. In other words, if the recording liquid wraps around the outer peripheral surface of the orifice 14 (peripheral edge of the orifice) and a liquid pool also occurs in a part thereof, when the recording liquid in the flow path 15 is discharged from the orifice 14, The flight direction deviates from the normal predetermined direction, and furthermore, the instability of the state of the liquid pool causes a disadvantage that the flight direction is disturbed every time the liquid is discharged, so that stable liquid discharge cannot be performed. Good recording cannot be performed.

Further, when the entire outer surface of the orifice 14 is covered with the recording liquid film, a so-called splash phenomenon occurs, and the recording liquid is scattered, so that stable recording cannot be performed. Also, if the liquid pool covering the outer surface of the orifice becomes large, the recording head may even become unable to discharge liquid.

In the ordinary recording head as shown in FIG. 1, as a member surrounding the orifice, for example, silicon (substrate 11), glass (top plate 17), resin (photosensitive resin cured film 13) is used. In many cases, different materials are used. Then, the recording liquid leaks from the most leaky material portion among the three types at the periphery of the orifice. For ordinary ink (recording liquid), the glass is the most wettable with the ink among the above three types of materials, so that the ink is likely to leak. The glass part is a material that is usually used because it is preferable in terms of manufacturing and performance of the head,
The use of another material to prevent ink leakage is undesirable in terms of manufacturing, performance, and cost.

As described above, in the conventional recording head, if the recording liquid pools at the periphery of the orifice, stable ejection cannot be performed. In addition, this tendency is very prominent when performing high-definition printing by increasing the nozzle density, or when driving at a high frequency, that is, when aiming for high-speed printing. It is a big problem.

Therefore, a proposal has been made to solve the above-mentioned problem by forming a water-repellent treatment layer 20 for repelling ink by applying a so-called water-repellent treatment to at least the peripheral portion of the orifice 14, for example, Japanese Patent Application Laid-Open No. Sho 56 (1988). Many documents have been disclosed in the prior art, such as Japanese Patent Application Laid-Open Nos. As the water-repellent agent used for the water-repellent treatment, for example, various compounds such as silicon-based polymers and oligomers, and furthermore, fluorine-based polymers and oligomers are mentioned.

[0011]

The water-repellent layer 20 formed on the ink-jet recording head has not only good water repellency but also the durability of the water-repellent layer during normal ink-jet recording. If the point is not enough, it is not practical. Hereinafter, its durability will be described.

In the case of carrying out the ink jet recording method, the orifice peripheral portion is always in contact with the recording liquid even if the orifice peripheral portion is subjected to a water-repellent treatment.
Usually, a recovery operation of wiping the orifice surface with an absorbent such as polyurethane foam and sucking out the attached ink is performed. Therefore, the water-repellent treatment layer is required to have such adhesion as not to be peeled off even when rubbed by the absorber, and to have wear resistance to such an extent that the layer is not broken. If the durability is insufficient, the water-repellent layer will gradually peel off or fall off during the use of the head, aside from the initial stage, and the water-repellent effect will not be exhibited. I can no longer do it.

However, on the other hand, when the rigidity of the water-repellent layer is very high and the adhesion between the water-repellent layer and the peripheral edge of the orifice is low, separation occurs at the interface between the water-repellent layer and the peripheral edge of the orifice.

In some cases, the durability required for such an ink jet recording head is not sufficient with a water-repellent layer formed with a conventional water-repellent agent.

Further, when the member surrounding the orifice is made of a plurality of different materials as in the ink jet head shown in FIG. 1, a water-repellent treatment layer having good adhesion to any of the materials must be formed. Must. The water-repellent layer formed with the conventional water-repellent agent may be insufficient in this point in particular.

[0016] For example, the surface O ₃ it is intended to provide a water repellent layer is bonded to the O ₃ treatment layer and the water-repellent treatment layer not sufficient in the processing in JP-A-61-141565, by wiping There is room for improvement in terms of durability.

Japanese Patent Application Laid-Open No. 61-291148 discloses a method in which fluorine coating is performed after treatment with a silane coupling agent. However, since the silane coupling agent is not firmly bonded to the surface of the processed member, wiping is performed. Is insufficient in durability.

An object of the present invention is to provide a method for producing an ink jet which is excellent in wiping durability, maintains sufficient water repellency for a long period of time, has a good ink discharge state, and is excellent in print quality. Is to provide a head manufactured by the same.

[0019]

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and includes an ejection port, an ink path communicating with the ejection port, and an ink path provided in the ink path. In the method for manufacturing an ink jet head having an energy generator for generating energy used for performing, a step of imparting hydrophilicity to a discharge port forming surface side of a processing member for forming the discharge port; Providing a water repellent layer for imparting water repellency to the upper layer of the layer.

Further, in the method for manufacturing an ink jet head comprising a discharge port, an ink path communicating with the discharge port, and an energy generator provided in the ink path and generating energy used for discharging ink, A step of oxidizing the surface on the discharge port forming surface side of the processing member for forming the discharge port;
providing an intermediate layer having a coupling agent containing i, and providing a layer containing a polymer containing a fluorine-containing heterocyclic structure in the main chain for imparting water repellency to the upper layer of the intermediate layer, It is characterized by having.

The method for manufacturing an ink jet head further comprising an ejection port, an ink path communicating with the ejection port, and an energy generator provided in the ink path to generate energy used for ejecting ink. A step of oxidizing the surface on the discharge port forming surface side of the processing member for forming the outlet, and a step of providing an intermediate layer containing an organometallic compound on the oxidized surface of the surface on the discharge port forming surface side; Providing a layer containing a polymer containing a fluorine heterocyclic structure in the main chain for imparting water repellency to the upper layer,
It is characterized by having.

Further, the present invention provides a method for manufacturing an ink jet head comprising a discharge port, an ink path communicating with the discharge port, and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing a surface on the discharge port forming surface side of the processing member for forming the discharge port, and a step of providing an intermediate layer containing an amine resin on an oxidized surface of the surface on the discharge port formation surface side; Providing a layer containing a polymer containing a fluorine-containing amorphous thermoplastic resin on the main chain for imparting water repellency to an upper layer of the layer.

Also, in the method for manufacturing an ink jet head, comprising: a discharge port, an ink path communicating with the discharge port, and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing a surface on a discharge port forming surface side of a processing member for forming a discharge port, and a step of providing an intermediate layer containing an amine-based cured resin on an oxidized surface of the surface on the discharge port formation surface side; Providing a layer containing a polymer containing a fluorine-containing amorphous thermoplastic resin on the main chain for imparting water repellency to an upper layer of the layer.

By pre-treating the base material with a material exhibiting water repellency to enhance adhesion, long-term stability of water repellency is ensured, resistance in cleaning with a blade and the like is increased, and ejection characteristics are improved. I can do it.

[0025]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.

First, a schematic configuration of an ink jet head to which the present invention is applied will be described.

The ink jet recording head shown in FIG.
A recess (hereinafter, groove) for forming an ink flow path and a common liquid chamber, and a top plate integrally formed with an orifice plate 10, an electrothermal converter (hereinafter, discharge heater) for generating discharge energy, and A recording head body (not shown) configured by joining an Al wiring for supplying an electric signal thereto and a substrate (hereinafter, referred to as a heater board) formed on a Si substrate by a film forming technique is provided. .

In the figure, reference numeral 600 denotes a sub ink tank disposed adjacent to the recording head main body. The sub ink tank 600 and the main body are supported by a lid 300. Furthermore, 1000 is the cartridge body, 110
Reference numeral 0 denotes a lid member of the cartridge body. An ink tank is built in the cartridge body, and supplies ink at the time of dropping to the sub ink tank 600.

FIG. 3 shows an example of the structure of the top plate 7 constituting the above-mentioned head.

The top plate 7 according to the present embodiment is provided with an ink passage groove 14.
And a corresponding number of ink discharge ports (orifices) 11 formed in the orifice plate 10 (two in the figure for simplicity), and the orifice plate 10 is provided integrally. .

In the configuration example shown in FIG. 3, the top plate 7 is made of a resin such as polysulfone, polyethersulfone, polyphenylene oxide, or polypropylene having excellent ink resistance.
And are simultaneously molded integrally in a mold.

Next, the ink liquid passage groove 14 and the orifice 11
The method for forming the film will be described. As for the ink channel groove, a resin is formed by a method in which a fine groove having a pattern opposite to that of the ink channel groove is formed by a method such as cutting.
4 can be formed.

The formation of the discharge port in the orifice plate of the top plate 17 can be performed as follows.

FIG. 4 shows a state in which an orifice plate is formed integrally with the top plate by irradiating an excimer laser beam from the ink liquid path side to perform orifice processing.
Elements similar to those shown in FIG. 2 are denoted by the same reference numerals.
In FIG. 1, reference numeral 1 denotes a laser oscillation device that oscillates a KrF excimer laser beam, 2 denotes a pulse laser beam having a wavelength of 248 mm and a pulse width of about 15 nsec oscillated from the laser oscillation device 1, and 3 denotes a laser beam for condensing the laser beam 2. The synthetic quartz lens 4 is a projection mask on which aluminum that can shield the laser beam 2 is deposited, and a plurality of holes having a diameter of 133 μm are arranged at a pitch of 212 μm to form an orifice pattern.

(Example 1) At least the periphery of the orifice-forming portion of the top plate provided with the orifice plate as described above is oxidized with an oxidizing agent, for example, potassium dichromate, or is subjected to UV / O ₃ cleaning. To form a hydrophilic oxidation-treated layer.

Next, the top plate was immersed in an amino-based silane coupling agent (for example, A1110γ-aminopropyltrimethoxysilane manufactured by Nippon Conica), and the excess silane coupling agent was removed in pure water to remove the orifice periphery. A uniform monolayer of the silane coupling agent was formed in the portion.

Then, after air drying, a water repellent treatment was performed. As a water-repellent treatment agent, a stock solution (5% by weight) of CTX-805A (manufactured by Asahi Glass Co., Ltd.) CTX-105A (same as the left) was used in CT-Solv100: CT-Solv180.
(Both 100 ° C and 180 ° C, respectively, Asahi Glass Co., Ltd.)
) = 4: 1. As for the concentration, it is possible to use a range of 0.01% by weight to 5.0% by weight, and particularly, 0.1 to 0.7% by weight is optimal. The coating method on the head can be performed by brush coating, casting method or the like. Next, a heat drying treatment was performed at 150 ° C. for 1 hour. Thereafter, laser drilling was performed to form a discharge orifice, and a substrate having a discharge pressure generating element was bonded.
The head manufactured in this manner was prepared and used as Sample 1.

Examples of the water repellent used in the present invention include fluorine-containing heterocyclic ones. This fluorine-containing heterocyclic structure is a compound represented by a chemical formula in which 1
It is a 5- to 8-membered organic material containing two. A hetero atom is an atom other than carbon (C), and specifically, oxygen (O),
Nitrogen (N), sulfur (S), phosphorus (P) and the like are used, and oxygen (O) is particularly preferably used from the viewpoint of chemical stability and safety.

In the present invention, the fluorine-containing polymer having a heterocyclic structure has a fluorine content of 10% by weight or more, more preferably 25% by weight, from the viewpoint of ink repellency (contact angle).
Above, more preferably 50% by weight or more.

The proportion of the ring structure in the main chain is preferably 10% or more, more preferably 20% or more, in view of the strength of the target film, the solubility in a solvent, or the adhesion to the substrate. Preferably, it is 30% or more.

In the present invention, among the fluorine-containing polymers having a heterocyclic structure, it is particularly preferable to use an amorphous polymer. Since the amorphous polymer is excellent in film strength, adhesion to a substrate, film uniformity, and the like, the effects of the present invention can be further exhibited.

In the present invention, as the fluorine-containing polymer having a heterocyclic structure in the main chain, for example, US Pat.
No. 418,302, US Pat. No. 3,978,03.
No. 0, JP-A-63-238111, JP-A-63-238115, JP-A-1-131214, JP-A-1-131215 and the like are preferably used. .

Of these, polymers having the following heterocyclic structures are representative. However, the content of the present invention is not limited only to these.

[0044]

[Outside 1]

[0045]

[Outside 2]

[0046]

[Outside 3]

[0047]

[Outside 4]

[0048]

[Outside 5]

[0049]

[Outside 6]

[0050]

[Outside 7]

[0051]

[Outside 8]

Further, in order to improve the adhesion to the base material and to control the Tg and the solubility in a solvent, it is necessary to add

[0053]

[Outside 9] (R ₃ , R ₄ and R ₅ are each H, F, Cl and R _f (fluorine-containing alkyl). X is H, F, Cl, R _f3 and R _f
f4 . Where R _f3 is an acid, ester, alcohol,
R _f4 is a fluorine-containing alkyl or ether containing a fluorine-containing organic substituent having a functional unit such as an amine or an amide at the terminal. ) May be introduced, and these structures are obtained by copolymerization with the following comonomers.

CF ₂ = CF—O—CF ₂ CF (CF ₃ ) —O—CF ₂ C
_{F 2 SO 2 F, · CF} 2 = CF-O-CF 2 CF 2 CF 2 COOCH 3, · CF 2 = CF-CF 2 CF (CF 3) -O-CF 2 CF 2
SO ₂ F

(Example 2) In Example 1, a head manufactured without cleaning in pure water was prepared.
And

Comparative Example 1 An ink jet recording head was manufactured in the same manner as in Example 1 except that the silane coupling agent treatment was not performed. Such a head was prepared as Sample 3.

Evaluation of Durability The samples 1 to 3 of the ink jet recording heads manufactured in Examples 1 and 2 and Comparative Example 1 were subjected to a wear durability test as follows.

FIGS. 5A and 5B are a perspective view and a plan view showing the outline of the wear durability test.

As shown in this figure, the silicone rubber plate 21 having the same structure as the cleaning blade is rotated by the rotation of the member 22 so that the silicone rubber plate 21 becomes approximately 10 g / cm.
Surface treatment of an ink jet recording head 1 in the ^second pressure layer 2
0 is rubbed. Further, the ink spraying device 24 can spray the ink droplets 25 of the water-based ink onto the rubbing portion so that the rubbing is close to the actual use state.

Using this apparatus, the durability test was performed 1,000 to 20,000 times with the number of times of spraying of ink being performed once every 10 seconds. At that time, 1,000 times, 5,000 times, 10,000 times,
After 20,000 times, each head was removed, printed, and the state was observed. Table 1 shows the results. In addition,
Each mark shown in Table 1 indicates the obtained printing condition. O indicates that the printing condition is good.
Indicates that the printing condition is normal, and x indicates that the printing condition is poor. The judgment of the quality of the printing condition is made by measuring the deviation amount of the dot landing point and by visual sensory inspection, and the average evaluation of each sample is shown in Table-1.
Shown in

[0061]

[Table 1] ○… Good △… Normal ×… Evil

As is clear from the results shown in Table 1, the recording head (sample 3) according to Comparative Example 1 was 5,000.
When the rubbing is performed, the printing state deteriorates. this is,
This is because the surface treatment layer is peeled off. In comparison, heads of Examples 1 and 2 (samples 1 and 2)
The printing condition was good or normal even after rubbing up to 20,000 times. In particular, comparing sample 1 and sample 2,
The print quality of Sample 1 which had been subjected to the water washing treatment was more stable after rubbing 20,000 times.

In the present invention, not only a Si coupling agent is used as an intermediate layer, but also a layer containing an organometallic compound, an amine-based resin, and an amine-based cured resin is provided as an intermediate layer so that a base material and a water repellent can be used. May be achieved.

It should be noted that the present invention includes a means (for example, an electrothermal converter or a laser beam) for generating thermal energy as energy used for performing ink ejection, particularly in an ink jet recording system. The present invention brings about an excellent effect in a print head and a printing apparatus of a type in which a change in the state of ink is caused by energy. This is because according to such a method, it is possible to achieve higher density and higher definition of recording.

The typical structure and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method is a so-called on-demand type,
Although it can be applied to any type of continuous type, in particular, in the case of the on-demand type, it can be applied to a sheet holding liquid (ink) or an electrothermal converter arranged corresponding to the liquid path. By applying at least one drive signal corresponding to the recorded information and providing a rapid temperature rise exceeding nucleate boiling, heat energy is generated in the electrothermal transducer, and film boiling occurs on the heat acting surface of the recording head. Liquid (ink) corresponding to this drive signal on a one-to-one basis.
This is effective because air bubbles inside can be formed. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of a liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the configuration of the recording head, in addition to the combination of the discharge port, the liquid path, and the electrothermal converter (linear liquid flow path or right-angled liquid flow path) as disclosed in the above-mentioned respective specifications, U.S. Pat. No. 4,558,333 and U.S. Pat. No. 44,558 which disclose a configuration in which a heat acting portion is disposed in a bending region.
A configuration using the specification of Japanese Patent No. 59600 is also included in the present invention. In addition, Japanese Unexamined Patent Application Publication No. 59-123670 discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, and an aperture for absorbing a pressure wave of thermal energy is provided. The effect of the present invention is effective even if the configuration is based on JP-A-59-138461, which discloses a configuration corresponding to a discharge unit. That is, according to the present invention, recording can be performed reliably and efficiently regardless of the form of the recording head.

Further, the present invention can be effectively applied to a full-line type recording head having a length corresponding to the maximum width of a recording medium on which a recording apparatus can record. Such a recording head may have a configuration that satisfies the length by a combination of a plurality of recording heads, or a configuration as one integrally formed recording head.

In addition, even in the case of the serial type as described above, the recording head fixed to the apparatus main body or the electric connection with the apparatus main body and the ink from the apparatus main body can be provided by being mounted on the apparatus main body. The present invention is also effective when a replaceable chip-type recording head that can be supplied or a cartridge-type recording head in which an ink tank is provided integrally with the recording head itself is used.

It is preferable to add recovery means for the recording head, preliminary auxiliary means, and the like provided as a configuration of the recording apparatus in the present invention since the effects of the present invention can be further stabilized. . If these are specifically mentioned, capping means for the recording head, cleaning means, pressurizing or suction means, preheating means using an electrothermal transducer or another heating element or a combination thereof, Performing a preliminary ejection mode in which ejection is performed separately from printing is also effective for performing stable printing.

The type and number of recording heads to be mounted are, for example, different from those provided with only one ink corresponding to a single color ink and those corresponding to a plurality of inks having different recording colors and densities. A plurality may be provided. That is, for example, the printing mode of the printing apparatus is not limited to a printing mode of only a mainstream color such as black, but may be any of integrally forming a printing head or a combination of a plurality of printing heads. The present invention is also extremely effective for an apparatus provided with at least one of full colors by color mixture.

In addition, in the embodiments of the present invention described above, the ink is described as a liquid. However, an ink which solidifies at room temperature or lower and which softens or liquefies at room temperature, or an ink jet system In general, the temperature of the ink itself is controlled within a range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. Anything can be used. In addition, the temperature rise due to thermal energy can be positively prevented by using it as energy for changing the state of the ink from a solid state to a liquid state, or ink that solidifies in a standing state to prevent evaporation of the ink can be used. In any case, the ink is liquefied by the application of the thermal energy according to the recording signal, and the ink is liquefied, and the liquid ink is discharged. The present invention is also applicable to a case where an ink that liquefies for the first time by energy is used.

The ink in such a case is disclosed in
As described in JP-A-56847 or JP-A-60-71260, a configuration in which a liquid sheet or a solid substance is held in a concave portion or a through hole of a porous sheet so as to face an electrothermal converter. It may be. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

Further, the form of the ink jet recording apparatus of the present invention is not limited to those used as image output terminals of information processing equipment such as computers, copying apparatuses combined with readers and the like, and facsimile apparatuses having a transmission / reception function. It may take a form.

[0074]

As described above, in the ink jet recording head of the present invention, since the water repellent portion having excellent water repellency and durability is formed on the peripheral portion of the orifice, it is possible to always perform stable discharge printing. And good printing can be obtained.

[Brief description of the drawings]

FIG. 1A is a perspective view illustrating the appearance of an inkjet recording head, and FIG. 1B is a developed perspective view illustrating the configuration of the inkjet recording head.

FIG. 2 is a diagram schematically showing the appearance of a recording head according to the present invention.

FIG. 3 is a view schematically showing a grooved top plate which is a component of the head according to the present invention.

FIG. 4 is a diagram illustrating a state in which a discharge port is formed in a top plate by laser processing.

FIGS. 5A and 5B are a perspective view and a plan view showing an outline of a durability test performed on the inkjet recording heads of the present example and a comparative example.

DESCRIPTION OF SYMBOLS 1 Inkjet recording head 11 Substrate 12 Discharge pressure generating element 13 Photosensitive resin cured film 14 Orifice 15 Flow path 16 Liquid chamber 17 Top plate 19 Adhesive 20 Water repellent treatment layer 21 Silicon rubber plate 22 Holding member 23 Rotation Shaft 24 Ink dripping device 25 Ink

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-153744 (JP, A) JP-A-61-141565 (JP, A) JP-A-62-105638 (JP, A) JP-A-1- 195052 (JP, A) JP-A-1-131214 (JP, A) JP-A-1-131215 (JP, A) JP-A-60-30355 (JP, A) JP-A-3-53942 (JP, A) (58) Field surveyed (Int.Cl. ⁶ , DB name) B41J 2/16 B32B 27/08 B41J 2/05 C08J 7/00

Claims (10)

(57) [Claims] 1. A method of manufacturing an ink jet head comprising: a discharge port; an ink path communicating with the discharge port; and an energy generator provided in the ink path and generating energy used for discharging ink. A step of imparting hydrophilicity to the ejection port forming surface side of the processing member for forming the ejection port, and a step of providing an intermediate layer having a coupling agent containing Si on the surface provided with the hydrophilicity, Providing a water-repellent layer for imparting water-repellency to an upper layer of the intermediate layer. 2. The method according to claim 1, wherein the processing member is an organic material, and an oxidized layer is formed on a surface of the processing member in the step of imparting hydrophilicity. 3. The coupling agent containing Si has, at one end, a terminal group selected from a methoxy group and an ethoxy group, and at the other end, an amino group, an epoxy group, or a mercapto group. The method for producing an ink jet head according to claim 1, wherein the method has a terminal group selected from the group consisting of: 4. The method according to claim 1, wherein the water-repellent layer is made of a fluorine-containing amorphous thermoplastic resin. 5. A method for manufacturing an ink jet head comprising: a discharge port; an ink path communicating with the discharge port; and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing the surface on the discharge port forming surface side of the processing member for forming the discharge port, and a step of providing an intermediate layer having a coupling agent containing Si on the oxidized surface of the surface on the discharge port formation surface side; Providing a layer containing a polymer containing a fluorine-containing heterocyclic structure in the main chain for imparting water repellency to the upper layer of the intermediate layer. 6. The step of covering with the oxidation treatment layer is performed by UV irradiation ozone cleaning.
3. The method for manufacturing an ink jet head according to item 1. 7. A method of manufacturing an ink jet head comprising: a discharge port; an ink path communicating with the discharge port; and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing a surface on a discharge port forming surface side of a processing member for forming a discharge port; a step of providing an intermediate layer containing an organometallic compound on an oxidized surface of the surface on the discharge port formation surface side; Providing a layer containing a polymer containing a fluorine-containing heterocyclic structure in the main chain for imparting water repellency to the upper layer. 8. A method for manufacturing an ink jet head, comprising: a discharge port, an ink path communicating with the discharge port, and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing a surface on a discharge port forming surface side of a processing member for forming a discharge port, a step of providing an intermediate layer containing an amine-based resin on an oxidized surface of the surface on the discharge port formation surface side, A step of providing a layer containing a polymer containing a fluorine-containing amorphous thermoplastic resin in the main chain for imparting water repellency to the upper layer,
A method for manufacturing an inkjet head having: 9. A method of manufacturing an ink jet head comprising: a discharge port; an ink path communicating with the discharge port; and an energy generator provided in the ink path and generating energy used for discharging ink. A step of oxidizing a surface on a discharge port forming surface side of a processing member for forming a discharge port, and a step of providing an intermediate layer containing an amine-based cured resin on an oxidized surface of the surface on the discharge port formation surface side; Providing a layer containing a polymer containing a fluorine-containing amorphous thermoplastic resin in a main chain for imparting water repellency to an upper layer of the layer. 10. An ink jet head manufactured by the manufacturing method according to claim 1, 5, 7, 8, or 9.