JP2002066999A - Extremely small valve mechanism and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an extremely small valve mechanism having high pressure proof, requiring no large mechanism for opening and closing operation, and capable of opening and closing in a practical time, and a manufacturing method of the same. SOLUTION: An extremely small valve mechanism comprises a capillary tube-like flow passage in a member and a gel chamber facing the passage in the middle way thereof and filled with a sensitive gel. A manufacturing method of the extremely small valve mechanism consist of filling the gel chamber formed to face the capillary flow passage in the middle way thereof with a solution which forms a sensitive gel by energy beam irradiation, and irradiating a portion forming a gel with the energy beam, thereby forming the sensitive gel in the gel chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microchemical device, that is, a microdevice for a chemical or biochemical reaction in which a structure such as a microchannel or a reaction tank is formed in a member.
Reactor), membrane filtration device, dialysis device, degassing /
Regarding micro-valve mechanisms incorporated or connected to chemical / physico-chemical processing devices such as suction devices and extraction devices, DNA analysis devices, electrophoresis devices, and micro-analysis devices such as chromatography devices, More specifically, the present invention relates to a microvalve mechanism that performs opening / closing and flow control by utilizing the gel transition of a thermosensitive gel.

[0002]

2. Description of the Related Art "Science" magazine (Vol. 288, 113)
(2000, p. 2000) describes a microchemical device having a liquid flow path formed of silicone rubber and a pressurized fluid introducing portion formed between the flow path and the partition wall of the silicone rubber. Then, a method is described in which compressed air is introduced into the pressurized fluid introduction section, the silicon rubber partition wall is bent and extruded toward the flow path side to change the flow path cross-sectional area, thereby opening and closing and adjusting the flow rate of the liquid. ing. On the other hand, there has been an attempt to use a thermosensitive gel for opening and closing a flow path having a normal size.

However, in such a microchemical device, since the partition walls must be formed of a flexible material, the pressure resistance of the flow channel is low, and the cross-sectional area of the flow channel changes due to a change in the pressure of the liquid. And the flow rate is not proportional to the pressure. Further, a mechanism for introducing compressed air from outside is required. Attempts to utilize thermosensitive gels for valves of normal size have the disadvantage that they require a long time to open and close.

[0004]

The problem to be solved by the present invention is to provide a micro valve mechanism which has high pressure resistance, does not require a large mechanism for opening and closing operations, and can be opened and closed in a practical time. It is to provide a manufacturing method thereof.

[0005]

Means for Solving the Problems As a result of intensive studies on a method for solving the above-mentioned problems, the present inventors have found that a linear movement is caused in a gel by utilizing a dimensional change accompanying a gel transition of a thermosensitive gel. As a result, the present inventors have found that the flow path can be opened and closed and the flow rate can be adjusted, and that the flow path can be opened and closed at a sufficiently high speed, thereby completing the present invention.

That is, the present invention is characterized in that (1) a capillary channel is provided in a member, and a gel chamber filled with a thermosensitive gel is provided in the middle of the channel, facing the flow channel. And a micro valve mechanism,

(2) The micro valve mechanism according to (1), wherein the cross section (width × height) of the capillary channel is in the range of (1 μm × 1 μm) to (3 mm × 3 mm).

(3) The depth of the gel chamber from the channel contact surface is
A minute valve mechanism according to the above (1) or (2), which is 0.5 to 100 times the width of the flow path,

(4) The microvalve mechanism according to any one of (1) to (3), which has a thermosensitive gel anchor structure inside the gel chamber;

(5) The temperature-sensitive gel contains poly-N-substituted (meth) acrylamide as a main component.
(4) the micro valve mechanism according to any one of (1),

(6) The thermosensitive gel is a porous gel,
(1) a minute valve mechanism according to any one of (5),

(7) The temperature-sensitive gel causes a volume change of 3 to 3000% in a temperature range of 4 ° C. to 50 ° C., (1) to
(6) the micro valve mechanism according to any one of (1),

(8) The minute valve mechanism according to any one of (1) to (7), which has a mechanism for adjusting the temperature of the gel chamber portion,

(9) The microvalve mechanism is composed of a member (A) having a groove and a recess on the surface, and a member (B) bonded to the surface of the member (A) where the grooves and the recess are formed. ,
(1) to (8), wherein the capillary channel and the gel chamber are formed by the grooves and recesses of the member (A) and the member (B).
A micro valve mechanism according to any one of the above,

(10) The member on which the minute valve mechanism is formed has a structure in which a solid substance (C) is filled between the member (A) and the member (B), and the capillary channel and the gel chamber are provided. Are formed as deficient portions of the solid substance (C), and the microvalve mechanism according to any one of (1) to (8),

(11) A gel chamber formed facing the flow path in the middle of the capillary flow path is filled with a solution for forming a thermosensitive gel by irradiating with an energy beam, and the energy beam is applied to a portion where the gel is formed. (1) to (10), whereby a thermosensitive gel is formed in the gel chamber.
And a method for manufacturing a micro valve mechanism according to

(12) A solution which forms a thermosensitive gel by irradiation with energy rays is filled into a recess formed facing the groove in the middle of the groove of the member (A) having a groove on the surface. Irradiating the portion to be formed with energy rays to form a thermosensitive gel in the concave portion, and then bonding the member (B) to the groove and concave portion forming surface of the member (A) (9). And a method for manufacturing a micro valve mechanism described in (1).

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The outer shape of the micro valve mechanism of the present invention is not particularly limited, and can take a shape according to the purpose of use. For example, it may be in the form of a sheet (including a film, a ribbon, etc .; the same applies hereinafter), a plate, a coating, a rod, a tube, a cylinder, a molded product having a complicated shape, and other fine chemicals. It is preferably in the form of a sheet or a plate from the viewpoint of easy integration with the device and ease of molding.

The microvalve mechanism of the present invention is preferably incorporated in a microchemical device, and is also preferably laminated or bonded to another member or another mechanism. Further, a plurality of minute valve mechanisms can be formed in one member, and after manufacturing, these can be cut into a plurality of minute valve mechanisms.

In the micro valve mechanism of the present invention, a capillary channel (hereinafter sometimes simply referred to as a "channel") is provided inside the member.
And the fluid flowing through the flow channel is configured to be opened and closed and the flow rate adjusted by the thermosensitive gel pushed out from the gel chamber into the flow channel.

The width and height of the cross section of the flow path (when the microchemical device is in the form of a plate or a sheet, the cross sectional dimension of the microchemical device in the longitudinal direction is “width”, and the cross sectional dimension in the short direction is In the case where the microchemical device has a rod shape or the like, any directions perpendicular to each other may be used as the width and the height.) Are 1 μm to 3 mm, preferably 3 μm to 1 mm, and more preferably 5 μm to 0.5 mm
It is.

The cross-sectional area of the flow passage is preferably 1 × 10
⁻¹² m ² to 1 × 10 ⁻⁶ m ² , more preferably 1 × 1
It is 0 ^-10 m ² to 1 × 10 ^-7 m ² . If the size is smaller than this, the difficulty in production increases and the liquid blocking property tends to decrease, which is not preferable. Also, if the size exceeds this, the pressure resistance of the valve mechanism tends to decrease. Not preferred.

The dimensions of the cross section of the capillary channel of the microvalve mechanism of the present invention are within the above-mentioned size range in the portion where the gel chamber is formed, that is, in the portion of the channel which is opened and closed by the thermosensitive gel. And the other portions may be outside the above range.

The cross section of the flow path may be of any shape, including a rectangle (including a rounded rectangle), a trapezoid, a triangle, a slit,
A circle, a semicircle, an ellipse and the like can be exemplified, but a rectangle with rounded corners or a semicircle is preferable. The shape of the flow channel may be different from that of other portions in the portion where the gel chamber is formed, that is, in the channel portion that is opened and closed by the thermosensitive gel.

For example, the portion may be spherical, hemispherical, conical (including cones with rounded or truncated vertices), pyramids (including pyramids with rounded or truncated vertices) Such a cavity may be used. The flow path is
It may be open to the outside of the microvalve mechanism, or it may not open to the outside, and other microchemical device mechanisms incorporated in the same member as the microvalve mechanism, such as a reaction tank, reaction channel, filtration mechanism, analysis mechanism, etc. You may contact.

The microvalve mechanism of the present invention preferably comprises
A capillary channel is formed between two members directly or indirectly bonded, that is, a member (A) and a member (B).

The flow path may be formed, for example, by bonding another member (B) to the grooved surface of the member (A) having the groove on the surface (A). (B) A portion other than the flow path between the member (A) and the member (B) may be formed by being filled with the solid substance (C).

The flow path in the above (a) has a member (A) on the bottom surface and side surfaces, and a member (B) or an adhesive applied to the member (B) on the top surface. However, the member (A) may be made of a plurality of materials, and for example, may be formed of a material whose bottom and side surfaces are different from each other. In addition, the flow path in the above (b) has a member (A) on the bottom surface when the member (B) is up, a solid substance (C) filled on the side surface, and a member (B) on the top surface. I have.

When the flow path is formed by adhering another member (B) to the grooved surface of the member (A) having the groove on the surface, the groove is lower than its peripheral portion, that is, a so-called groove. It may be formed, or may be formed between walls standing on the surface of the member (A). The depth of the groove may vary from location to location.

The method of providing grooves on the surface of the member (A) is arbitrary. For example, injection molding, solvent casting, melt replica method, cutting, patterning exposure of energy ray-curable resin coating film and removal of uncured portions , Photolithography (including energy beam lithography), wet etching, dry etching, laser etching, vapor deposition, vapor phase polymerization, bonding between sheet-like and plate-like members with cut-out portions to be grooves, etc. Method is available.

In the case where the flow path has a structure in which a portion other than the flow path between the member (A) and the member (B) is filled with the solid substance (C), the flow of the solid substance (C) is reduced. The thickness does not need to be uniform, but is preferably uniform.

Although the shape of the member (A) is arbitrary, it is preferably in the form of a sheet, a plate, a coating, or a rod. When the member (A) has a groove on the surface, the surface on which the groove is formed preferably has a planar shape. Further, the member (A) may be formed on a support.

The member (B) is bonded to the grooved surface of the member (A) having a groove on the surface, and a capillary channel is formed by the groove of the member (A) and the member (B). Or between the member (A) and the member (B),
If the member (A), the member (B), and the solid substance can form a capillary channel by filling the solid substance except for a part to be a flow path, the shape, The structure, surface condition, and the like are arbitrary.

These are the same as those of the member (A). The member (B) does not need to have a groove formed on its surface, but may have a groove or a structure other than the groove.
For example, the member (B) is a member (A) having a groove formed on the surface.
May be a mirror image of

Member (A) and member (B) having grooves on the surface
Any method may be used as long as the groove on the surface of the member (A) is formed as a capillary channel. Use of a solvent-based adhesive, use of a solventless adhesive, and use of a molten adhesive use,
Solvent application to the surface of the member (A) and / or the member (B), fusion by heat or ultrasonic waves, or the like can be used, but use of a solventless adhesive is preferred.

The method in which an energy ray-curable resin is used as a solventless adhesive and cured by irradiation with energy rays to bond the microscopic device enables precise bonding of a minute device.
It is preferable because productivity is high. Further, it is also possible to adopt a method of removing the protective material after bonding the groove with the protective material filled therein. The member (B) may be a cured product of the adhesive itself.

A method of forming a flow path having a structure formed by filling a portion other than the flow path between the member (A) and the member (B) with a solid substance is, for example, a method of forming the member (A) and the member (A). An energy-ray-curable composition is sandwiched between the members (B), and energy rays are irradiated from outside of the member (A) and / or the member (B) except for a portion serving as a flow path, and the uncured energy is irradiated. A method of removing the line-curable composition,

A method in which an adhesive sheet member cut out from a portion to be a flow path is sandwiched between members (A) and (B) and bonded to each other. A method of removing the protective substance after placing a protective substance such as a rod-shaped material, filling and solidifying an adhesive or a molten resin, or the like can be adopted. This method has a small number of steps, but when the channel diameter is small, it is difficult to remove the uncured energy ray-curable composition and the protective substance. Therefore, this method is suitable as a method for forming a channel having a relatively large dimension. .

The material forming the micro valve mechanism, for example, the material of the member (A) or the member (B) is arbitrary, and may be glass,
Crystals such as quartz, semiconductors such as silicon, metals such as stainless steel, ceramics, carbon, high molecular polymers (hereinafter simply referred to as polymers), and the like,
It is preferable to use a polymer because the electric heat coefficient is low and the temperature of a minute portion can be set.

The polymer may be a homopolymer or a copolymer, or a thermoplastic polymer.
It may be a thermosetting polymer. From the viewpoint of productivity, a cured product of a thermoplastic polymer or an energy ray-curable composition is preferable. When energy rays are used in bonding the member (A) to the member (B), curing the member (C), and forming a thermosensitive gel, the members (A) and ( As at least one of (B), a material that transmits the energy beam to be used is used.

Examples of the polymer which can be used for the member forming the microvalve mechanism of the present invention include styrene-based polymers such as polystyrene, poly-α-methylstyrene, polystyrene / maleic acid copolymer, and polystyrene / acrylonitrile copolymer. Polymer; polysulfone polymer such as porsulfone and polyether sulfone; (meth) acrylic polymer such as polymethyl methacrylate and polyacrylonitrile; polymaleimide polymer;

Bisphenol A-based polycarbonate, bisphenol F-based polycarbonate, bisphenol Z
Polycarbonate-based polymers such as polycarbonate-based;
Polyolefin-based polymers such as polyethylene, polypropylene and poly-4-methylpentene-1; vinyl chloride;
Chlorine-containing polymers such as vinylidene chloride; cellulose-based polymers such as cellulose acetate and methylcellulose;

Polyurethane polymer; Polyamide polymer; Polyimide polymer; Polyether or polythioether polymer such as poly-2,6-dimethylphenylene oxide and polyphenylene sulfide; Polyether such as polyetheretherketone Ketone polymers; Polyester polymers such as polyethylene terephthalate and polyarylate; Epoxy resins; Urea resins;
Phenol resins and the like can be mentioned.

Of these, styrene polymers, (meth) acrylic polymers, polycarbonate polymers, polysulfone polymers, and polyester polymers are preferred from the viewpoint of good adhesiveness.

The energy ray-curable compound constituting the energy ray-curable composition may be any one of radical polymerizable, anionic polymerizable, cationic polymerizable and the like. The energy ray-curable compound is not limited to one that polymerizes in the absence of a polymerization initiator, and one that is polymerized by an energy beam only in the presence of a polymerization initiator can also be used.

As such an energy ray-curable compound, those having a polymerizable carbon-carbon double bond are preferable. Among them, highly reactive (meth) acrylic compounds and vinyl ethers, and photopolymerization initiators are preferable. A maleimide-based compound that cures even in the absence of is preferred.

Examples of the crosslinkable polymerizable (meth) acrylic monomer which can be preferably used as an energy ray-curable compound include diethylene glycol di (meth) acrylate and neopentyl glycol di (meth)
Acrylate, 1,6-hexanediol di (meth) acrylate, 1,8-octanediol di (meth) acrylate, 2,2′-bis (4- (meth) acryloyloxy polyethyleneoxyphenyl) propane,

2,2'-bis (4- (meth) acryloyloxypolypropyleneoxyphenyl) propane, neopentylglycol hydroxydipivalate di (meth) acrylate, dicyclopentanyl diacrylate, bis (acryloxyethyl) hydroxy 2 such as ethyl isocyanurate and N-methylenebisacrylamide
Functional monomer;

Trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth) acrylate, tris (acryloxyethyl) isocyanurate,
Trifunctional monomers such as caprolactone-modified tris (acryloxyethyl) isocyanurate; tetrafunctional monomers such as pentaerythritol tetra (meth) acrylate; hexafunctional monomers such as dipentaerythritol hexa (meth) acrylate. No.

Further, as the energy ray-curable compound,
Polymerizable oligomers (called prepolymers) can also be used, for example, having a weight average molecular weight of 500 to 50.
000. Examples of such a polymerizable oligomer include (meth) acrylate of epoxy resin, (meth) acrylate of polyether resin, (meth) acrylate of polybutadiene resin, and (meth) acryloyl at the molecular terminal. And a polyurethane resin having a group.

Examples of the maleimide-based crosslinkable polymerizable energy ray-curable compound include 4,4′-methylenebis (N-phenylmaleimide) and 2,3-bis (2,
4,5-trimethyl-3-thienyl) maleimide, 1,
2-bismaleimide ethane, 1,6-bismaleimide hexane, triethylene glycol bismaleimide, N,
N'-m-phenylenedimaleimide, m-tolylenedimaleimide, N, N'-1,4-phenylenedimaleimide, N, N'-diphenylmethane dimaleimide, N,
N′-diphenylether dimaleimide,

N, N'-diphenylsulfone dimaleimide, 1,4-bis (maleimidoethyl) -1,4-diazoniabicyclo- [2,2,2] octane dichloride,
Bifunctional maleimides such as 4,4'-isopropylidenediphenyl dicyanate.N, N '-(methylenedi-p-phenylene) dimaleimide; polymerizable functionalities other than maleimide groups such as N- (9-acridinyl) maleimide and maleimide groups And a maleimide having a group.

Examples of the maleimide-based crosslinked polymerizable oligomer include polytetramethylene glycol maleimide alkylate such as polytetramethylene glycol maleimide capriate and polytetramethylene glycol maleimide acetate. The maleimide-based monomers and oligomers can be copolymerized with each other and / or with compounds having a polymerizable carbon-carbon double bond such as vinyl monomers, vinyl ethers, and acrylic monomers. These compounds can be used alone or as a mixture of two or more.

If necessary, a photopolymerization initiator can be added to the energy ray-curable composition. The photopolymerization initiator is not particularly limited as long as it is active with respect to the energy rays used and can polymerize the energy ray-curable compound. For example, a radical polymerization initiator, an anionic polymerization initiator And a cationic polymerization initiator. Further, the photopolymerization initiator may be a maleimide compound.

Examples of the monofunctional maleimide-based monomers that can be used in a mixture include N-alkylmaleimides such as N-methylmaleimide, N-ethylmaleimide, N-butylmaleimide and N-dodecylmaleimide; and N-cyclohexylmaleimide. N-alicyclic maleimide; N-benzylmaleimide; N-phenylmaleimide, N- (alkylphenyl) maleimide, N-dialkoxyphenylmaleimide, N- (2-chlorophenyl) maleimide,
2,3-dichloro-N- (2,6-diethylphenyl)
Maleimide,

2,3-dichloro-N- (2-ethyl-6
N- (substituted or unsubstituted phenyl) maleimide such as -methylphenyl) maleimide; N-benzyl-2,3-dichloromaleimide, N- (4'-fluorophenyl)-
Maleimide having a halogen such as 2,3-dichloromaleimide; maleimide having a hydroxyl group such as hydroxyphenylmaleimide; maleimide having a carboxy group such as N- (4-carboxy-3-hydroxyphenyl) maleimide;

Maleimide having an alkoxy group such as N-methoxyphenylmaleimide; maleimide having an amino group such as N- [3- (diethylamino) propyl] maleimide; and polycyclic aromatic maleimide such as N- (1-pyrenyl) maleimide. A maleimide having a heterocyclic ring such as N- (dimethylamino-4-methyl-3-coumarinyl) maleimide and N- (4-anilino-1-naphthyl) maleimide;

Examples of the energy rays include light rays such as ultraviolet rays, visible light rays and infrared rays; ionizing radiation rays such as X-rays and gamma rays; and particle rays such as electron rays, ion beams, beta rays and heavy ion beams. The member may be a polymer blend or a polymer alloy, or may be a foam, a laminate, or another composite. Further, the member may contain other components such as a modifying agent and a coloring agent.

Examples of the modifying agent include hydrophobizing agents (water repellents) such as silicone oil and fluorine-substituted hydrocarbons; surfactants such as anionic, cationic and nonionic; inorganic powders such as silica gel; And a hydrophilizing agent such as a hydrophilic polymer such as pyrrolidone; and a plasticizer for adjusting the tensile modulus. Examples of the colorant include an arbitrary dye or pigment, a fluorescent dye or pigment, and an ultraviolet absorber.

The microvalve mechanism of the present invention has a gel chamber open to the flow path in the middle of the capillary flow path. That is, the gel chamber is provided at a position where the expanded thermosensitive gel is extruded from the gel chamber to block the flow path. The depth of the gel chamber as viewed from the flow path is referred to as the depth of the gel chamber, the dimension of the gel chamber in the length direction of the flow path is referred to as the width of the gel chamber, and the dimension of the gel chamber in the height direction of the flow path is referred to as the height of the gel chamber. In that case, the depth of the gel chamber is
Preferably, it is 0.5 to 100 times, more preferably 1 to 30 times, most preferably 2 to 10 times the width of the flow path.

If this value is too small, the flow passage is incompletely cut off or the sensitivity to temperature change tends to be insufficient. On the other hand, if this value is too large, the expansion of the gel tends to cause inconveniences such as breakage of the valve structure. The optimum value of the depth of the gel chamber can be selected according to the degree of dimensional change of the thermosensitive gel.

The opening width of the gel chamber to the flow path is arbitrary,
Preferably 1 to 100 times the width of the flow path, more preferably 2 times
20 times to 30 times. If the value is too small, the flow path is incompletely blocked or the pressure resistance tends to decrease, which is not preferable. If the value is too large, the dead volume of the flow path is increased, which is not preferable. However, when the pressure of the fluid introduced into the flow channel is high, the opening width of the gel chamber is preferably large in order to reduce the amount of fluid leakage. The width of the gel chamber need not be the same as the opening width of the gel chamber, but is preferably the same or smaller.

The height of the gel chamber is not limited as long as the swollen gel can block the flow path. However, the height of the opening in the flow path is almost the same as the height of the flow path. preferable. When the microvalve mechanism of the present invention is formed between the member (A) and the member (B), it is easy to manufacture that the inside of the gel chamber has the same height as the flow path. Yes and preferred.

Although the shape of the gel chamber is arbitrary, it is preferable that the thermosensitive gel enter the gel chamber without jumping into the flow channel when the thermosensitive gel contracts. That is, it is preferable to have a thermosensitive gel anchor structure. Examples of the anchor structure include a structure in which the width or height of the gel chamber is larger than the opening in the back, a pillar for stopping the thermosensitive gel in the gel chamber, a protrusion, a groove, an undercut, and the like. Can be mentioned.

The method for forming the gel chamber is arbitrary, but for example, the same method as that for the capillary channel can be employed. That is, when the flow path is formed between the member (A) and the member (B), the gel chamber is formed between the member (A) and the member (B) in the same manner as the flow path. It is preferable that it is done. As another method, for example, it can be formed by forming a hole reaching the flow path in a member constituting the micro valve mechanism and closing the hole on the opposite side of the flow path.

As the thermosensitive gel, any thermosensitive gel,
That is, a gel that expands / contracts due to a change in temperature can be used. The expansion / contraction of the gel need not be limited in its mechanism, but may be due to, for example, gel / solid transition, changes in swelling, adsorption / release of other substances such as ions.

In the temperature range of 4 ° C. to 50 ° C., the thermosensitive gel has a volume of 3 to 300 based on the volume at the time of shrinkage.
Preferably, the change is 0%, and more preferably, 10% to 1000%. If the volume change is too small, inconveniences such as incomplete opening and closing of the valve, a large gel chamber is required, and the response speed deteriorates tend to occur.If the volume change is too large, the pressure resistance of the valve will increase. This tends to cause a decrease in durability, a decrease in durability, a leakage of fluid in a closed state, and the like.

The dimensional change of the thermosensitive gel does not need to be isotropic, and a dimensional change in a specific direction may be large. The amount of dimensional change of the gel due to temperature change is determined by a monomer capable of forming a thermosensitive gel by polymerization (hereinafter, a monomer capable of forming a thermosensitive gel by polymerization is referred to as a thermosensitive monomer). ), Adjustment of the degree of cross-linking by adjusting the amount of the cross-linkable polymerizable monomer, etc., and the mixing ratio of monomers other than the temperature-sensitive one. In addition, 4 ° C to 50 ° C near room temperature
It is preferable that the above-mentioned volume change occurs because the opening and closing of the valve is facilitated.

As such a thermosensitive gel, any gel can be used. For example, N-substituted (meth) acrylamides such as N-alkyl (meth) acrylamide and / or N-alkylene (meth) acrylamide can be used. Or a crosslinked polymer containing a thermosensitive monomer such as a (meth) acrylate such as a (meth) acrylate having a long-chain alkyl group or a long-chain alkylene group such as myristyl (meth) acrylate Can be mentioned.

Examples of N-alkyl (meth) acrylamide and / or N-alkylene (meth) acrylamide include N-ethylacrylamide, N, N-diethylacrylamide, N-ethylmethacrylamide, N, N-
Methylethylacrylamide, N-isopropylacrylamide, Nn-propylacrylamide, N-isopropylmethacrylamide, Nn-propylmethacrylamide, N-acryloylpyrrolidine, N-methacryloylpyrrolidine, N-acryloylpiperidine, N-
Methacryloyl piperidine and the like can be mentioned.

Examples of (meth) acrylates having a long-chain alkyl group or a long-chain alkylene group include those having 9 to 20 carbon atoms.
Alkyl (meth) acrylate. In particular, since transition occurs around room temperature, N-
Preferred are isopropylacrylamide-containing crosslinked polymers and myristyl (meth) acrylate-containing crosslinked polymers. Needless to say, these temperature-sensitive monomers may be copolymers of these or with other monomers that do not exhibit temperature sensitivity.

The method of forming the thermosensitive gel, that is, the method of forming the crosslinked polymer containing these thermosensitive monomers is arbitrary. For example, when the temperature-sensitive monomer is a polyfunctional monomer, it may be crosslinked by itself, or when the temperature-sensitive monomer is a monofunctional monomer, The method can be carried out by a method of forming a copolymer of a temperature-sensitive monomer and a crosslinkable polymerizable compound, or a method of cross-linking a polymer of a temperature-sensitive monomer or a solution thereof by, for example, radiation. The crosslinkable polymerizable compound is optional as long as it can be copolymerized with the temperature-sensitive monomer,
It is preferable that the polymer can be crosslinked and polymerized by an energy beam.

As the crosslinkable polymerizable compound, typically, a polyfunctional monomer or a polyfunctional oligomer having two or more double bonds in one molecule can be exemplified. Such polyfunctional monomers include, for example, methylene bisacrylamide, ethylene bisacrylamide, diethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, polyethylene Glycol di (meta)
Acrylate,

2,2′-bis (4- (meth) acryloyloxypolyethyleneoxyphenyl) propane,
Bifunctional monomers such as 2′-bis (4- (meth) acryloyloxypolypropyleneoxyphenyl) propane,
Trifunctional monomers such as trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth) acrylate and isocyanurate tri (meth) acrylate; tetrafunctional monomers such as pentaerythritol tetra (meth) acrylate; dipentaerythritol Hexafunctional monomers such as hexaacrylate are exemplified. Of course, it is also possible to use a mixture of these monomers.

The polyfunctional oligomer which can be crosslinked by irradiation with energy rays has, for example, a weight average molecular weight of 500 to 50.
000 oligomers (also called prepolymers),
For example, (meth) acrylate of epoxy resin,
Examples thereof include (meth) acrylic acid esters of polyether resins, (meth) acrylic acid esters of polybutadiene resins, and polyurethane resins having an acrylic or methacrylic group at a molecular terminal. Of course, these oligomers can be used as a mixture, or can be used as a mixture with a monomer.

Among these, the crosslinkable polymerizable compound is preferably soluble in a water-soluble solvent, and more preferably water-soluble. The swelling degree of the thermosensitive gel and the degree of its change can be adjusted by selecting the mixing amount and type of the crosslinkable polymerizable compound. As the amount of the crosslinking polymerizable compound is increased or the crosslinking density is increased by using a crosslinking polymerizable compound having a large number of functional groups, the hardness and strength of the thermosensitive gel increase, but the dimensional change decreases.

In the present invention, for the purpose of adjusting the strength, hardness, swelling degree, response temperature, response sensitivity, etc. of the thermosensitive gel, a mixture of a thermosensitive monomer and a crosslinkable polymerizable compound is added to the mixture. Other polymerizable compounds that can be polymerized can also be added.

As the other polymerizable compound which can be copolymerized with the temperature-sensitive monomer, those which are compatible with the temperature-sensitive monomer and the cross-linkable polymerizable compound are preferable. And acrylamide, methacrylamide, polyethylene glycol (meth) acrylate, methoxypolyethylene glycol (meth) acrylate, acrylic acid, methacrylic acid, vinylsulfonic acid, styrenesulfonic acid, 2-acrylamide-2- Phenylpropanesulfonic acid, ethyl 2-acrylamido-2-methylpropanesulfonate (meth)
Acrylate, N, N-dimethylaminoethyl (meth)
Acrylate, hydroxyethyl (meth) acrylate,

N-butyl (meth) acrylate, hexyl (meth) acrylate, 2-ethylhexyl (meth)
Acrylate, phenyl (meth) acrylate, phenyl cellosolve (meth) acrylate, n-vinylpyrrolidone, isobornyl (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate can be mentioned.

The method of mounting the thermosensitive gel in the gel chamber is optional. For example, (i) a method of filling a gel chamber with a mixed solution of a temperature-sensitive monomer and a cross-linkable polymerizable compound, and irradiating a necessary portion with energy rays to form a cross-linked polymer that becomes a temperature-sensitive gel, ii) Fill a gel chamber with a mixed solution containing a temperature-sensitive monomer, a cross-linkable polymerizable compound, and water, and irradiate necessary parts with energy rays at a temperature lower than or higher than the gel transition temperature to obtain a temperature-sensitive solution. A method of forming a functional gel,

(Iii) Instead of the gel chamber, the solution is filled in the concave portion of the member (A) having a groove and a concave portion, and irradiated with energy rays to form a crosslinked polymer which becomes a thermosensitive gel. A method similar to the above (i) except that (B) is adhered, and (iv) the solution is filled in the concave portion of the member (A) having the groove and the concave portion instead of the gel chamber, and irradiated with energy rays. After forming the temperature-sensitive gel, the same method as in the above (ii) except that the member (B) is adhered, and (v) separately forming the temperature-sensitive gel at a temperature not lower than the gel transition temperature or lower than the gel transition temperature. It can be manufactured by a method of attaching to a device.

When a temperature-sensitive gel is formed in a member by irradiation with an energy ray, the uncured portion of the uncured gel raw material solution is removed as necessary. Although any method such as washing, absorption, and blowing can be used as the removing method, in the above (i) and (ii), it is preferable to wash the gel in a contracted state, for example, at a temperature equal to or higher than the gel transition temperature.
The washing liquid is preferably a liquid flowing in the flow channel, for example, water or a buffer solution.

[0083] The temperature-sensitive gel is also preferably a porous gel. A porous gel is a porous body in which a resin portion is formed of a gel. Use of a porous gel as a thermosensitive gel increases the response speed. However, the amount of leakage in the completely closed state may be larger than that of a normal gel.

The method for producing the porous gel is arbitrary, and for example, the porous gel can be produced by the method disclosed in JP-A-5-16076. That is, a homogeneous mixed solution (hereinafter, referred to as a phase separation agent) of a compound having a temperature-sensitive monomer, a cross-linkable polymerizable monomer, and a compound which is compatible with these and is incompatible with the copolymer thereof (hereinafter, referred to as a phase separation agent) , Which may be referred to as a “porous gel raw material solution”), and using this porous gel raw material solution, is irradiated with energy rays and crosslinked by the same method as in the above-mentioned ordinary formation of a thermosensitive gel. It can be produced by a method of forming a polymer and phase-separating it into a porous body, and if necessary, replacing the phase-separating agent in the pores with an aqueous liquid.

As a phase separator, a mixture of a temperature-sensitive monomer and a crosslinkable polymerizable monomer is compatible, but it does not swell a crosslinked polymer formed by irradiating the mixture with energy rays. Any material can be used without particular limitation as long as it is inert to energy rays.

More specifically, water, monohydric or polyhydric alcohols, alkyl esters such as methyl caprate, dialkyl ketones such as diisobutyl ketone, liquid polyethylene glycol, monoesters of polyethylene glycol, polyethylene Oligomers such as glycol monoethers, polyethylene glycol sorbitan monoester, polyethylene glycol sorbitan diester, polyethylene glycol sorbitan triester, polyester polyol, and polyethylene glycolamine;

Cellulose acetate, ethyl cellulose, nitrocellulose, hydroxymethyl cellulose, chitosan, polystyrene, polyvinyl chloride, polycarbonate
, Polysulfone, polyether sulfone, polyurethane, phenoxy resin, polyarylate, polyacrylonitrile, polyacrylate, polyacrylic acid, polymethyl methacrylate, polyacrylamide, polyethylene glycol, polyvinyl pyrrolidone, polyvinyl methyl ether, polyvinyl alcohol, etc. Oligomers and polymers such as copolymers of the above. The phase separation agent may be a mixture thereof or a mixture containing them, or may be a mixture of a solvent which swells the crosslinked polymer formed therein.

After the polymer has been formed by irradiation with energy rays, the phase separation agent can be used without being removed depending on the system, but it can also be removed. Removal, washing, drying,
Any method such as substitution can be employed, but when it is necessary to remove the phase separating agent, it is preferable that the phase separating agent is water-soluble because it can be easily removed.

The viscosity of the homogeneous mixed solution is arbitrary, and a high viscosity solution can be used in the method of filling the uniform mixed solution into a concave portion to be a gel chamber and irradiating with an energy ray. In the method of filling the gel chamber with a homogeneous mixed solution and irradiating with an energy ray, the gel chamber is subjected to 10,000
cps or less, more preferably 1000 cps or less. The lower limit does not need to be particularly limited. If it is larger than this value, it is difficult to inject or remove the fine space.

The opening and closing of the minute valve mechanism and the flow rate adjustment of the present invention are performed by adjusting the temperature of the gel chamber. The method of controlling the temperature of the gel chamber is arbitrary, such as an electric heater, a Peltier element, contact with a temperature-controlled solid, contact with a temperature-controlled liquid, blowing of a temperature-controlled gas, infrared light, microwave, and the like. And the like. The temperature control mechanism may be incorporated in the micro valve mechanism of the present invention, or may be an external mechanism. As long as there is no problem in other parts, the temperature controlled region may be the entire area near the micro valve mechanism, or the entire micro chemical device.

Of these, a structure in which an electric heater is mounted near the gel chamber is simple and preferable. The electric heater may be, for example, a nichrome wire or other metal, metal oxide, carbon, semiconductor, conductive plastic, or the like, or may be an adhesive, embedded, or vapor-deposited material.

The position where the electric heater is mounted may be the periphery in the same plane as the gel chamber, or may be the upper surface and / or the lower surface of the gel chamber. How to open and close the valve
Although it depends on the kind of the thermosensitive gel, the gel is usually closed by shrinking the thermosensitive gel at a low temperature, and is opened by swelling of the thermosensitive gel at a high temperature.

The minute valve mechanism of the present invention can open and close minute flow paths and adjust the flow rate with a simple structure.
When used for analysis, inspection, etc., an independent liquid feed pump is not required for each device, and undiluted solution can be supplied at a common pressure, so it is easy to process many simultaneously and in parallel, improving work efficiency. I can measure.

The microvalve mechanism of the present invention can be used to supply a plurality of fluids to one chemical device such as mixing, reaction, extraction, and filtration. The device can be simplified because it can be adjusted.

[0095]

The present invention will be described in more detail with reference to examples and comparative examples, but the present invention is not limited to the scope of these examples. In the following examples, “parts” means “parts by weight” unless otherwise specified.

[Energy Beam Irradiation Apparatus] A light source unit for a multi-light 200 type exposure apparatus manufactured by Ushio Inc. incorporating a 200 w metal halide lamp was used. The ultraviolet intensity is 50 mw / cm ² .

[Preparation of energy ray-curable composition] 20 parts of a trifunctional urethane acrylate oligomer having an average molecular weight of about 2000 (“Unidick V-4263” manufactured by Dainippon Ink and Chemicals, Inc.), 1,6-hexane 20 parts of diol diacrylate (“New Frontier HDDA” manufactured by Daiichi Kogyo Seiyaku Co., Ltd.) and 60 parts of nonylphenoxy polyethylene glycol (n = 8) acrylate (“M-114” manufactured by Toa Gosei Chemical Co., Ltd.) -Hydroxycyclohexyl phenyl ketone (“Irgacure 184” manufactured by Ciba Geigy);
And 0.1 part of 2,4-diphenyl-4-methyl-1-pentene (manufactured by Kanto Chemical Co., Ltd .; polymerization retarder) were uniformly mixed to prepare an energy ray-curable composition (x).

[Preparation of Thermosensitive Gel Raw Material Solution] N-Isopropylacrylamide (manufactured by Wako Pure Chemical Industries, Ltd.) as a thermosensitive monomer was 19 parts, and bisacrylamide (Wako Pure Chemical Co., Ltd.) was used as a crosslinkable polymerizable monomer. 1 part, 1,2hydroxy-4-hydroxyethoxy- as a photopolymerization initiator.
2-Methylpropiophenone (“Irgacure 2959” manufactured by Ciba Specialty Chemicals Co., Ltd.
, And 80 parts of distilled water were mixed to prepare a gel raw material solution (y).

[Preparation of Raw Material Solution for Porous Gel] 80 parts of N-isopropylacrylamide (manufactured by Wako Pure Chemical Industries, Ltd.) as a temperature-sensitive monomer and trifunctional urethane acrylate having an average molecular weight of 804 as a crosslinkable polymerizable monomer Oligomers (“Unidick S9- manufactured by Dainippon Ink and Chemicals, Inc.)
414 ") and 5 parts of 1-hydroxycyclohexylphenyl ketone (" Irgacure 184 "manufactured by Ciba Specialty Chemicals KK) as a photopolymerization initiator.
Parts, 100 parts of polyvinylpyrrolidone having a molecular weight of 10,000 (manufactured by Wako Pure Chemical Industries, Ltd.) and N, N-
150 dimethylacetamide (Wako Pure Chemical Industries, Ltd.)
The parts were mixed to prepare a porous gel raw material solution (z).

(Example 1) [Preparation of member (A)] As member (A), a 2.5 cm x 5 cm x 2 mm thick plate made of "Delpet 670N" (acrylic resin manufactured by Asahi Kasei Corporation) was used. The substrate (1) was used, and the energy ray-curable composition [x] was applied thereto using a bar coater, and then, through a photomask in a nitrogen atmosphere, the flow path (3) shown in FIG. Then, an ultraviolet ray was irradiated to a portion other than the portion to be the gel chamber (4) for 3 seconds to cure the energy ray-curable composition [x].

Next, the uncured energy ray-curable composition [x] was removed with a 50% aqueous ethanol solution, whereby the bottom surface of the acrylic resin base material (1) and the wall face of the energy ray-curable composition [x] were removed. A groove (3) having a width of 108 μm and a depth of 67 μm, which is composed of the cured product (2) and having a substantially rectangular cross section, and a depth of 300 μm having a triangular projection-like anchor structure (5) provided along the groove; Opening width 30
A rectangular recess (4) having a thickness of 0 μm and a depth of 67 μm was formed.

Further, at both ends of the groove (3), a diameter of 0.3 mm is used.
An inflow port (6) and an outflow port (7) were formed by drilling a 5 mm drill hole, and the member [A shown in FIGS. 1 and 2 [A
1].

[Adhesion of Member (B)] Polypropylene biaxially stretched sheet (“FOR” manufactured by Nimura Chemical Co., Ltd., thickness 30 μm)
m; not shown), the energy ray-curable composition [x] is applied to the corona-treated surface using a bar coater,
Irradiation with ultraviolet light for one second in a nitrogen atmosphere was performed to obtain a semi-cured coating film in which fluidity was lost.
1] on the surface where the groove was formed.

Next, the same ultraviolet ray was irradiated from the side of the polypropylene biaxially stretched sheet for another 30 seconds to completely cure the coating film, thereby obtaining a cured product of the energy ray-curable composition [x] having a thickness of 64 μm. The sheet-like member (B) (hereinafter referred to as [B1]) (8) is simultaneously formed and adhered to the surface of the member [A1], and is formed between the capillary channel (3) and the middle thereof. A gel chamber (4) was formed.

Thereafter, the polypropylene biaxially-stretched sheet (not shown) is peeled off to form a capillary channel (3) and a gel chamber (4) inside the shape shown in FIGS. 1 and 2. It was a member.

[Formation of Thermosensitive Gel] The thermosensitive gel raw material solution (y) was introduced from the inflow section (6), and was filled in all the channels (3) and the gel chamber (4). Then, in an ice-cooled state, the entire gel chamber (4) and the flow path portion where the opening of the gel chamber is in contact are
Ultraviolet light was applied for 40 seconds to gel the gel raw material solution (y) in the irradiated area. Next, the microchemical device was placed in warm water at 50 ° C., and water at 50 ° C. was introduced from the inflow portion (6) and passed through the flow path to wash and remove the uncured polymerizable liquid. The formed thermosensitive gel was transparent at the stage after the irradiation of the ultraviolet rays, but turned white when washed with water at 50 ° C.

[Channel opening / closing test] Methylene blue (manufactured by Wako Pure Chemical Industries, Ltd.) was introduced into the micro valve mechanism filled with distilled water from the inflow section (6) using a micro syringe at room temperature of 25 ° C. An attempt was made to inject colored water into the capillary, but it did not flow in, and no water flowed out of the outlet (7).

Next, a brass rod having a temperature of 70 ° C. and having a diameter of 6 mm was brought into contact with the gel chamber portion from the outside of the member (B) while applying pressure with a syringe. The aqueous solution began to flow into the flow channel and flowed out of the outflow portion (7).

At 70 ° C., the metal rod was removed, and an airflow at room temperature was applied with a blower while applying pressure with a syringe. After about 1 minute, the outflow of the coloring liquid was stopped. This test was repeated five times, and the same results were obtained without any breakage of the flow path or the like.

A solution of the thermosensitive gel raw material (y) was applied on a glass plate and irradiated with the same ultraviolet rays as above to form a gel. The gel was cut out, washed with water at 50 ° C.
When immersed in water at 50 ° C. and 50 ° C., and the dimensions after 2 hours were measured, the dimensional change of each side at 4 ° C. at 83 ° C. based on the size at 50 ° C. in the contracted state was 83% ( 1.83
Times) and the volume change was 513% (6.13 times).

(Example 2) [Preparation of member (A)] "Dick styrene XC-52"
0 "(polystyrene manufactured by Dainippon Ink and Chemicals, Inc.), a 2.5 cm x 5 cm x 3 mm thick plate-shaped substrate (1) was heated with an electric hot air torch to soften the surface, Glass mold heated to ℃ (not shown)
After being pressed and cooled, it is peeled off, and on the surface of the substrate (1),
A groove (3) having a width of 30 μm, a depth of 30 μm and a length of 30 mm and having a substantially rectangular cross section, a depth of 75 μm having a triangular projection-like anchor structure (5) provided in contact with the groove on the way of the groove; A rectangular recess (4) having a width of 60 μm and a depth of 30 μm was formed.

Further, at both ends of the groove (3), a diameter of 0.5
By forming a drill hole of mm, an inlet (6) and an outlet (7) are formed, and instead of the energy ray-curable composition (x) cured product (2) of FIGS. Except that the portion is also formed of the same polystyrene as the substrate (1), the member (A) having the shape shown in FIGS.
[A2]. ) Was prepared.

[Formation of Thermosensitive Gel] In the same manner as in Example 1 except that the groove (3) and the recess (4) were filled with the polymerizable liquid instead of filling the capillary channel and the gel chamber. A thermosensitive gel was formed and washed with water to remove the uncured gel raw material solution.

[Adhesion of member (B)] In the same manner as in Example 1, the member (B) was adhered to the member (A). [Formation of Inflow Channel and Outflow Channel] Next, at both ends of the groove (3), a drilled hole having a diameter of 0.5 mm was formed in the acrylic resin plate and the cured product of the energy ray-curable composition [x]. ) And an outlet (7). [Opening / closing test of flow path] An opening / closing test similar to that in Example 1 was performed.
The same results as in Example 1 were obtained.

(Example 3) [Production of micro valve mechanism] 2.5 cm × 5 made of “Delpet 670N” (acrylic resin manufactured by Asahi Kasei Kogyo)
200 μm thick at the four corners of two flat plates of cm × 2 mm thick
A section (not shown) of a m-polystyrene sheet was placed as a spacer, and the gap was filled with the energy ray-curable composition [x]. Next, the flow path (3) and the gel chamber (4) shown in FIG. 1 are passed through a photomask in a nitrogen atmosphere.
Irradiation of ultraviolet rays for 10 seconds to a portion other than the portion to be cured to cure the energy ray-curable composition [x], and as an uncured portion of the energy ray-curable composition [x], the flow path (3)
And a gel chamber (4).

Next, at both ends of the flow path (3), an acrylic resin plate on one side [referred to as the member (A) (1)]
A hole having a diameter of 0.5 mm is formed at both ends of the flow path (3) to form an inlet (6) and an outlet (7). ), Ultrasonic cleaning is performed while flowing a 50% aqueous ethanol solution to remove the uncured energy-ray-curable composition [x], and two acrylic resin plates [member (A) and member (B)]. 1) and (8) in FIG. 1 and FIG. 2), a member (C) composed of a cured product of the energy ray-curable composition [x] [FIG. And (2) in FIG.
The same part as above]], a hollow width of 200 μm,
Capillary channel (3) having a depth of about 200 μm and a length of 30 mm, a depth of 500 μ having a triangular protrusion-shaped anchor structure (5) provided in contact with the channel on the way of the channel.
m, a rectangular gel chamber (4) having a width of 300 μm and a depth of about 200 μm was formed.

Thereafter, the whole was irradiated with ultraviolet rays for 30 seconds to completely cure the incompletely cured portion of the energy ray-curable composition [x].

[Formation of Thermosensitive Gel] A thermosensitive gel was formed in the same manner as in Example 1. [Opening / closing test of flow path] An opening / closing test similar to that in Example 1 was performed.
The same results as in Example 1 were obtained.

(Example 4) [Preparation of microvalve mechanism] Using the microvalve mechanism prepared in Example 1, an energy ray-curable composition was applied to a portion of the surface of the member (B) including the portion facing the gel chamber. A micro-valve mechanism [D4] incorporating an electric heater as a temperature control mechanism was prepared by fixing a nichrome wire using the object [x] and ultraviolet rays.

[Opening / Closing Test of Channel] An opening / closing test similar to that of Example 1 was performed, except that a current was passed through the nichrome wire instead of bringing the temperature-controlled metal rod into contact with the metal rod. I got

(Example 5) [Production of member (A)] In the same manner as in Example 1, the member [A
1] was produced. [Production of thermosensitive porous gel] Porous gel raw material solution (z)
On a glass plate using a bar coater,
Ultraviolet rays were irradiated for 60 seconds in a nitrogen atmosphere and washed with water to obtain a transparent thermosensitive porous gel. The thickness of the thermosensitive porous gel was about 70 μm. When this gel was immersed in warm water at 50 ° C., it was whitened, shrunk, and solidified. The solidified temperature-sensitive porous gel is heated in hot water at 50 ° C. to 250 μm × 250.
The cut piece was mounted on the gel chamber of the member [A1].

[Adhesion of Member (B)] In the same manner as in Example 1, the member (B) was adhered to the member (A). [Opening / closing test of flow path] When the same open / close test as in Example 1 was performed, the time from contact of the brass rod to the start of the flow of the methylene blue aqueous solution into the flow path was about 1 second, and the metal rod was removed. The same result as in Example 1 was obtained except that the time from when the flow of the colored liquid stopped flowing was about 10 seconds.

[0123]

According to the present invention, it is possible to provide a minute valve mechanism which has high pressure resistance, does not require a large mechanism for opening and closing operations, and can be opened and closed in a practical time, and a method of manufacturing the same.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional plan view schematically showing a member (B) of a micro valve mechanism manufactured in Example 1 viewed from a direction perpendicular to the surface.

FIG. 2 is a schematic elevation view of a microvalve mechanism manufactured in Example 1 as viewed from a direction parallel to a surface of a member (B).

[Explanation of symbols]

1: substrate of member (A) 2: energy ray-curable composition (x) cured material layer of member (A) 3: groove of member (A), capillary channel 4: concave portion of member (A) Gel chamber 5: Triangular projecting anchor structure 6: Inlet of member (A) 7: Outlet of member (A) 8: Member (B)

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) G01N 37/00 101 G01N 30/32 A // G01N 30/32 27/26 331Z

Claims (12)

[Claims] 1. A microvalve mechanism having a capillary channel in a member, and a gel chamber filled with a thermosensitive gel facing the channel in the middle of the channel. 2. The cross section (width × height) of the capillary channel is (1)
The microvalve mechanism according to claim 1, wherein the diameter is in the range of 1 µm x 1 µm) to (3 mm x 3 mm). 3. The microvalve mechanism according to claim 1, wherein the depth of the gel chamber from the flow channel contact surface is 0.5 to 100 times the width of the flow channel. 4. The microvalve mechanism according to claim 1, further comprising a thermosensitive gel anchor structure inside the gel chamber. 5. A thermosensitive gel comprising a poly-N-substituted (meth)
5. A composition comprising acrylamide as a main component.
A micro valve mechanism according to any one of the above. 6. The microvalve mechanism according to claim 1, wherein the temperature-sensitive gel is a porous gel. 7. The microvalve mechanism according to claim 1, wherein the temperature-sensitive gel undergoes a volume change of 3 to 3000% in a temperature range of 4 ° C. to 50 ° C. 8. The microvalve mechanism according to claim 1, further comprising a mechanism for adjusting the temperature of the gel chamber portion. 9. A micro valve mechanism comprising: a member (A) having a groove and a concave portion on a surface; and a member (B) bonded to a surface of the member (A) on which the groove and the concave portion are formed. The microvalve mechanism according to any one of claims 1 to 8, wherein the capillary channel and the gel chamber are formed by the groove and the concave portion of the member (A) and the member (B). 10. The member on which the minute valve mechanism is formed,
It has a structure in which a solid substance (C) is filled between a member (A) and a member (B), and a capillary channel and a gel chamber are formed as a defect of the solid substance (C). Certain claim 1
9. The microvalve mechanism according to any one of items 1 to 8, 11. A gel chamber formed in the middle of a capillary channel facing the channel is filled with a solution for forming a thermosensitive gel by irradiation with energy beams, and an energy beam is applied to a portion where the gel is formed. The method of manufacturing a microvalve mechanism according to any one of claims 1 to 10, wherein irradiation is performed to form a thermosensitive gel in the gel chamber. 12. A solution for forming a thermosensitive gel by energy ray irradiation into a recess formed in the middle of the groove of the member (A) having a groove on the surface and facing the groove to form a gel. Irradiating an energy beam to a portion to be formed to form a temperature-sensitive gel in the concave portion, and then bonding the member (B) to the groove and concave portion forming surface of the member (A). A manufacturing method of the micro valve mechanism described in the above.