JP2002058267A5 - - Google Patents

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Publication number
JP2002058267A5
JP2002058267A5 JP2000244373A JP2000244373A JP2002058267A5 JP 2002058267 A5 JP2002058267 A5 JP 2002058267A5 JP 2000244373 A JP2000244373 A JP 2000244373A JP 2000244373 A JP2000244373 A JP 2000244373A JP 2002058267 A5 JP2002058267 A5 JP 2002058267A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000244373A
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Japanese (ja)
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JP2002058267A (ja
JP4724904B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2000244373A priority Critical patent/JP4724904B2/ja
Priority claimed from JP2000244373A external-priority patent/JP4724904B2/ja
Publication of JP2002058267A publication Critical patent/JP2002058267A/ja
Publication of JP2002058267A5 publication Critical patent/JP2002058267A5/ja
Application granted granted Critical
Publication of JP4724904B2 publication Critical patent/JP4724904B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000244373A 2000-08-11 2000-08-11 振動アクチュエータ Expired - Fee Related JP4724904B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000244373A JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000244373A JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2002058267A JP2002058267A (ja) 2002-02-22
JP2002058267A5 true JP2002058267A5 (enrdf_load_stackoverflow) 2008-01-17
JP4724904B2 JP4724904B2 (ja) 2011-07-13

Family

ID=18735070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000244373A Expired - Fee Related JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JP4724904B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5540855B2 (ja) * 2010-04-14 2014-07-02 セイコーエプソン株式会社 超音波センサー

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2585583B2 (ja) * 1987-04-11 1997-02-26 本多電子株式会社 超音波モ−タ
JPH09215351A (ja) * 1996-02-05 1997-08-15 Nikon Corp 振動アクチュエータの駆動方法及び駆動装置
JP4077923B2 (ja) * 1997-11-27 2008-04-23 キヤノン株式会社 振動型アクチュエータ
JP2000125576A (ja) * 1998-10-09 2000-04-28 Nikon Corp 振動アクチュエータを用いた搬送装置

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