JP2002058267A5 - - Google Patents

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Publication number
JP2002058267A5
JP2002058267A5 JP2000244373A JP2000244373A JP2002058267A5 JP 2002058267 A5 JP2002058267 A5 JP 2002058267A5 JP 2000244373 A JP2000244373 A JP 2000244373A JP 2000244373 A JP2000244373 A JP 2000244373A JP 2002058267 A5 JP2002058267 A5 JP 2002058267A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000244373A
Other languages
Japanese (ja)
Other versions
JP4724904B2 (ja
JP2002058267A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000244373A priority Critical patent/JP4724904B2/ja
Priority claimed from JP2000244373A external-priority patent/JP4724904B2/ja
Publication of JP2002058267A publication Critical patent/JP2002058267A/ja
Publication of JP2002058267A5 publication Critical patent/JP2002058267A5/ja
Application granted granted Critical
Publication of JP4724904B2 publication Critical patent/JP4724904B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000244373A 2000-08-11 2000-08-11 振動アクチュエータ Expired - Fee Related JP4724904B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000244373A JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000244373A JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2002058267A JP2002058267A (ja) 2002-02-22
JP2002058267A5 true JP2002058267A5 (de) 2008-01-17
JP4724904B2 JP4724904B2 (ja) 2011-07-13

Family

ID=18735070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000244373A Expired - Fee Related JP4724904B2 (ja) 2000-08-11 2000-08-11 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JP4724904B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5540855B2 (ja) * 2010-04-14 2014-07-02 セイコーエプソン株式会社 超音波センサー

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2585583B2 (ja) * 1987-04-11 1997-02-26 本多電子株式会社 超音波モ−タ
JPH09215351A (ja) * 1996-02-05 1997-08-15 Nikon Corp 振動アクチュエータの駆動方法及び駆動装置
JP4077923B2 (ja) * 1997-11-27 2008-04-23 キヤノン株式会社 振動型アクチュエータ
JP2000125576A (ja) * 1998-10-09 2000-04-28 Nikon Corp 振動アクチュエータを用いた搬送装置

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