JP2002050689A5 - - Google Patents

Download PDF

Info

Publication number
JP2002050689A5
JP2002050689A5 JP2000238080A JP2000238080A JP2002050689A5 JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5 JP 2000238080 A JP2000238080 A JP 2000238080A JP 2000238080 A JP2000238080 A JP 2000238080A JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000238080A
Other languages
Japanese (ja)
Other versions
JP5036096B2 (ja
JP2002050689A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000238080A priority Critical patent/JP5036096B2/ja
Priority claimed from JP2000238080A external-priority patent/JP5036096B2/ja
Publication of JP2002050689A publication Critical patent/JP2002050689A/ja
Publication of JP2002050689A5 publication Critical patent/JP2002050689A5/ja
Application granted granted Critical
Publication of JP5036096B2 publication Critical patent/JP5036096B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000238080A 2000-08-07 2000-08-07 半導体装置の製造方法 Expired - Fee Related JP5036096B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000238080A JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000238080A JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2002050689A JP2002050689A (ja) 2002-02-15
JP2002050689A5 true JP2002050689A5 (enrdf_load_stackoverflow) 2007-09-20
JP5036096B2 JP5036096B2 (ja) 2012-09-26

Family

ID=18729837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000238080A Expired - Fee Related JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP5036096B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7224068B2 (en) * 2004-04-06 2007-05-29 Taiwan Semiconductor Manufacturing Company, Ltd. Stable metal structure with tungsten plug

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148431A (ja) * 1995-11-21 1997-06-06 Nec Corp 半導体装置の製造方法
JP3393436B2 (ja) * 1996-12-03 2003-04-07 ソニー株式会社 配線の形成方法
JP3111924B2 (ja) * 1997-04-11 2000-11-27 日本電気株式会社 半導体装置の製造方法
JP2000003912A (ja) * 1998-06-16 2000-01-07 Hitachi Ltd 半導体装置の製造方法および半導体装置
JP3141939B2 (ja) * 1998-11-26 2001-03-07 日本電気株式会社 金属配線形成方法

Similar Documents

Publication Publication Date Title
BE2014C009I2 (enrdf_load_stackoverflow)
BE2013C060I2 (enrdf_load_stackoverflow)
BE2010C009I2 (enrdf_load_stackoverflow)
JP2003516073A5 (enrdf_load_stackoverflow)
BE2010C008I2 (enrdf_load_stackoverflow)
BRPI0112928B8 (enrdf_load_stackoverflow)
JP2002016990A5 (enrdf_load_stackoverflow)
JP2002178428A5 (enrdf_load_stackoverflow)
BRPI0110940B8 (enrdf_load_stackoverflow)
JP2002169179A5 (enrdf_load_stackoverflow)
JP2000208811A5 (enrdf_load_stackoverflow)
BE2014C025I2 (enrdf_load_stackoverflow)
JP2001232243A5 (enrdf_load_stackoverflow)
JP2002196007A5 (enrdf_load_stackoverflow)
JP2002103270A5 (enrdf_load_stackoverflow)
BRPI0113372A8 (enrdf_load_stackoverflow)
CH694022C1 (enrdf_load_stackoverflow)
JP2001307860A5 (enrdf_load_stackoverflow)
JP2002158205A5 (enrdf_load_stackoverflow)
JP2002193271A5 (enrdf_load_stackoverflow)
JP2001200870A5 (enrdf_load_stackoverflow)
CN300955183S (zh) 连接件
BRPI0000763B8 (enrdf_load_stackoverflow)
HU0004260D0 (enrdf_load_stackoverflow)
CN3142120S (enrdf_load_stackoverflow)