JP2002050689A5 - - Google Patents
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- Publication number
- JP2002050689A5 JP2002050689A5 JP2000238080A JP2000238080A JP2002050689A5 JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5 JP 2000238080 A JP2000238080 A JP 2000238080A JP 2000238080 A JP2000238080 A JP 2000238080A JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000238080A JP5036096B2 (ja) | 2000-08-07 | 2000-08-07 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000238080A JP5036096B2 (ja) | 2000-08-07 | 2000-08-07 | 半導体装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002050689A JP2002050689A (ja) | 2002-02-15 |
JP2002050689A5 true JP2002050689A5 (cs) | 2007-09-20 |
JP5036096B2 JP5036096B2 (ja) | 2012-09-26 |
Family
ID=18729837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000238080A Expired - Fee Related JP5036096B2 (ja) | 2000-08-07 | 2000-08-07 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5036096B2 (cs) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7224068B2 (en) * | 2004-04-06 | 2007-05-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stable metal structure with tungsten plug |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09148431A (ja) * | 1995-11-21 | 1997-06-06 | Nec Corp | 半導体装置の製造方法 |
JP3393436B2 (ja) * | 1996-12-03 | 2003-04-07 | ソニー株式会社 | 配線の形成方法 |
JP3111924B2 (ja) * | 1997-04-11 | 2000-11-27 | 日本電気株式会社 | 半導体装置の製造方法 |
JP2000003912A (ja) * | 1998-06-16 | 2000-01-07 | Hitachi Ltd | 半導体装置の製造方法および半導体装置 |
JP3141939B2 (ja) * | 1998-11-26 | 2001-03-07 | 日本電気株式会社 | 金属配線形成方法 |
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2000
- 2000-08-07 JP JP2000238080A patent/JP5036096B2/ja not_active Expired - Fee Related