JP2002050689A5 - - Google Patents

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Publication number
JP2002050689A5
JP2002050689A5 JP2000238080A JP2000238080A JP2002050689A5 JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5 JP 2000238080 A JP2000238080 A JP 2000238080A JP 2000238080 A JP2000238080 A JP 2000238080A JP 2002050689 A5 JP2002050689 A5 JP 2002050689A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000238080A
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Japanese (ja)
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JP5036096B2 (ja
JP2002050689A (ja
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Priority to JP2000238080A priority Critical patent/JP5036096B2/ja
Priority claimed from JP2000238080A external-priority patent/JP5036096B2/ja
Publication of JP2002050689A publication Critical patent/JP2002050689A/ja
Publication of JP2002050689A5 publication Critical patent/JP2002050689A5/ja
Application granted granted Critical
Publication of JP5036096B2 publication Critical patent/JP5036096B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000238080A 2000-08-07 2000-08-07 半導体装置の製造方法 Expired - Fee Related JP5036096B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000238080A JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000238080A JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2002050689A JP2002050689A (ja) 2002-02-15
JP2002050689A5 true JP2002050689A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2007-09-20
JP5036096B2 JP5036096B2 (ja) 2012-09-26

Family

ID=18729837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000238080A Expired - Fee Related JP5036096B2 (ja) 2000-08-07 2000-08-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP5036096B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7224068B2 (en) * 2004-04-06 2007-05-29 Taiwan Semiconductor Manufacturing Company, Ltd. Stable metal structure with tungsten plug

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09148431A (ja) * 1995-11-21 1997-06-06 Nec Corp 半導体装置の製造方法
JP3393436B2 (ja) * 1996-12-03 2003-04-07 ソニー株式会社 配線の形成方法
JP3111924B2 (ja) * 1997-04-11 2000-11-27 日本電気株式会社 半導体装置の製造方法
JP2000003912A (ja) * 1998-06-16 2000-01-07 Hitachi Ltd 半導体装置の製造方法および半導体装置
JP3141939B2 (ja) * 1998-11-26 2001-03-07 日本電気株式会社 金属配線形成方法

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