JP2002050229A5 - - Google Patents

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Publication number
JP2002050229A5
JP2002050229A5 JP2000234945A JP2000234945A JP2002050229A5 JP 2002050229 A5 JP2002050229 A5 JP 2002050229A5 JP 2000234945 A JP2000234945 A JP 2000234945A JP 2000234945 A JP2000234945 A JP 2000234945A JP 2002050229 A5 JP2002050229 A5 JP 2002050229A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000234945A
Other languages
Japanese (ja)
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JP3904378B2 (ja
JP2002050229A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000234945A priority Critical patent/JP3904378B2/ja
Priority claimed from JP2000234945A external-priority patent/JP3904378B2/ja
Priority to US09/920,292 priority patent/US6569548B2/en
Publication of JP2002050229A publication Critical patent/JP2002050229A/ja
Publication of JP2002050229A5 publication Critical patent/JP2002050229A5/ja
Application granted granted Critical
Publication of JP3904378B2 publication Critical patent/JP3904378B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000234945A 2000-08-02 2000-08-02 酸化亜鉛透明導電膜 Expired - Fee Related JP3904378B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000234945A JP3904378B2 (ja) 2000-08-02 2000-08-02 酸化亜鉛透明導電膜
US09/920,292 US6569548B2 (en) 2000-08-02 2001-08-02 Transparent conductive film of zinc oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000234945A JP3904378B2 (ja) 2000-08-02 2000-08-02 酸化亜鉛透明導電膜

Publications (3)

Publication Number Publication Date
JP2002050229A JP2002050229A (ja) 2002-02-15
JP2002050229A5 true JP2002050229A5 (enExample) 2006-03-30
JP3904378B2 JP3904378B2 (ja) 2007-04-11

Family

ID=18727236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000234945A Expired - Fee Related JP3904378B2 (ja) 2000-08-02 2000-08-02 酸化亜鉛透明導電膜

Country Status (2)

Country Link
US (1) US6569548B2 (enExample)
JP (1) JP3904378B2 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045182A1 (en) * 1999-12-17 2001-06-21 Institute Of Materials Research & Engineering Improved transparent electrode material for quality enhancement of oled devices
JP3826755B2 (ja) * 2001-09-28 2006-09-27 株式会社村田製作所 ZnO膜及びその製造方法並びに発光素子
JP2004017994A (ja) * 2002-06-13 2004-01-22 Thermos Kk 断熱容器およびその製造方法
TW589672B (en) * 2002-12-31 2004-06-01 Ind Tech Res Inst Method of manufacturing p-type transparent conductive film and its system
US7786550B2 (en) 2003-03-06 2010-08-31 Panasonic Corporation P-type semiconductor and semiconductor hetero material and manufacturing methods thereof
KR100571818B1 (ko) * 2003-10-08 2006-04-17 삼성전자주식회사 질화물계 발광소자 및 그 제조방법
US7061026B2 (en) * 2004-04-16 2006-06-13 Arima Optoelectronics Corp. High brightness gallium nitride-based light emitting diode with transparent conducting oxide spreading layer
KR101004981B1 (ko) * 2005-06-28 2011-01-04 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 산화갈륨-산화아연계 스퍼터링 타겟, 투명 도전막의 형성방법 및 투명 도전막
US7686985B2 (en) * 2005-06-28 2010-03-30 Nippon Mining & Metals Co., Ltd Gallium oxide-zinc oxide sputtering target, method of forming transparent conductive film, and transparent conductive film
WO2007020729A1 (ja) * 2005-08-18 2007-02-22 Yamanashi University 酸化亜鉛薄膜の製造方法及び製造装置
CN101326304B (zh) * 2005-12-08 2011-05-04 Jx日矿日石金属株式会社 氧化镓-氧化锌类溅射靶、透明导电膜及其形成方法
CN101405427B (zh) * 2006-03-17 2012-07-18 Jx日矿日石金属株式会社 氧化锌系透明导体以及该透明导体形成用溅射靶
CN101490766B (zh) * 2006-08-24 2011-11-30 Jx日矿日石金属株式会社 氧化锌系透明导体、溅射靶以及该溅射靶的制造方法
MX2009002182A (es) * 2006-08-29 2009-04-22 Pilkington Group Ltd Metodo de fabricacion de recubrimientos de oxido de zinc impurificado de baja resistividad y articulos formados mediante el mismo.
US8835756B2 (en) * 2006-12-21 2014-09-16 Rutgers, The State University Of New Jersey Zinc oxide photoelectrodes and methods of fabrication
US8747630B2 (en) 2007-01-16 2014-06-10 Alliance For Sustainable Energy, Llc Transparent conducting oxides and production thereof
JP4808682B2 (ja) * 2007-08-03 2011-11-02 Jx日鉱日石金属株式会社 焼結体、透明導電膜の製造方法及び透明導電膜
US8253012B2 (en) * 2008-03-17 2012-08-28 Alliance For Sustainable Energy, Llc High quality transparent conducting oxide thin films
WO2010151430A1 (en) 2009-06-22 2010-12-29 Arkema Inc. Chemical vapor deposition using n,o polydentate ligand complexes of metals
MX2012002156A (es) * 2009-08-24 2012-04-02 First Solar Inc Oxido conductor transparente impurificado.
US8546797B2 (en) 2009-10-20 2013-10-01 Stanley Electric Co., Ltd. Zinc oxide based compound semiconductor device
JP5451320B2 (ja) * 2009-10-30 2014-03-26 スタンレー電気株式会社 ZnO系化合物半導体素子
US20120024360A1 (en) * 2010-07-28 2012-02-02 General Electric Company Photovoltaic device
WO2013119550A1 (en) 2012-02-10 2013-08-15 Alliance For Sustainable Energy, Llc Thin film photovoltaic devices with a minimally conductive buffer layer
WO2014077895A1 (en) 2012-11-19 2014-05-22 Alliance For Sustainable Energy, Llc Devices and methods featuring the addition of refractory metals to contact interface layers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU650782B2 (en) * 1991-09-24 1994-06-30 Canon Kabushiki Kaisha Solar cell
EP0578046B1 (en) * 1992-07-10 1996-11-06 Asahi Glass Company Ltd. Transparent conductive film, and target and material for vapor deposition to be used for its production

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