JP2002040223A - 被加熱体保持部材およびそれを用いた加熱炉 - Google Patents
被加熱体保持部材およびそれを用いた加熱炉Info
- Publication number
- JP2002040223A JP2002040223A JP2000221892A JP2000221892A JP2002040223A JP 2002040223 A JP2002040223 A JP 2002040223A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2002040223 A JP2002040223 A JP 2002040223A
- Authority
- JP
- Japan
- Prior art keywords
- heated
- heating furnace
- holding member
- heating
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 73
- 239000000758 substrate Substances 0.000 claims description 28
- 239000011521 glass Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 15
- 229920001721 polyimide Polymers 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229920006015 heat resistant resin Polymers 0.000 claims description 6
- 239000004973 liquid crystal related substance Substances 0.000 claims description 6
- 239000009719 polyimide resin Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 15
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000001035 drying Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000013256 coordination polymer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Resistance Heating (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000221892A JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000221892A JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002040223A true JP2002040223A (ja) | 2002-02-06 |
| JP2002040223A5 JP2002040223A5 (enrdf_load_stackoverflow) | 2007-09-06 |
Family
ID=18716215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000221892A Pending JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002040223A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7214455B2 (en) | 2002-05-29 | 2007-05-08 | Toray Industries, Inc. | Photosensitive resin composition and process for producing heat-resistant resin film |
| JP2007226128A (ja) * | 2006-02-27 | 2007-09-06 | Toppan Printing Co Ltd | カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219921A (ja) * | 1990-12-20 | 1992-08-11 | Fujitsu Ltd | 半導体製造装置 |
| JPH08279548A (ja) * | 1993-12-28 | 1996-10-22 | Sharp Corp | ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉 |
| JPH11337266A (ja) * | 1998-05-28 | 1999-12-10 | Toray Ind Inc | カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法 |
| JP2000119737A (ja) * | 1998-10-16 | 2000-04-25 | Nsk Warner Kk | ワークの炉内配置方法 |
-
2000
- 2000-07-24 JP JP2000221892A patent/JP2002040223A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219921A (ja) * | 1990-12-20 | 1992-08-11 | Fujitsu Ltd | 半導体製造装置 |
| JPH08279548A (ja) * | 1993-12-28 | 1996-10-22 | Sharp Corp | ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉 |
| JPH11337266A (ja) * | 1998-05-28 | 1999-12-10 | Toray Ind Inc | カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法 |
| JP2000119737A (ja) * | 1998-10-16 | 2000-04-25 | Nsk Warner Kk | ワークの炉内配置方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7214455B2 (en) | 2002-05-29 | 2007-05-08 | Toray Industries, Inc. | Photosensitive resin composition and process for producing heat-resistant resin film |
| JP2007226128A (ja) * | 2006-02-27 | 2007-09-06 | Toppan Printing Co Ltd | カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070724 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070724 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20101005 |