JP2002036122A - Super abrasive grain grinding wheel and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a super abrasive grain grinding wheel capable of smoothly supplying a cutting fluid on a cutting surface and preventing the occurrence of cutting burn or poor sharpness when conducting especially mirror finishing by the super abrasive grain grinding wheel, and to provide a manufacturing method of the super abrasive grain grinding wheel. SOLUTION: The super abrasive grain grinding wheel is formed with a super abrasive grain layer on a base metal. The super abrasive grain layer is made by laminating linear elements uniting super abrasive grains by photo-setting resin, and fluid passing holes are formed in the super abrasive grain layer. In stead of the linear element, platy layers having plural through holes can be laminated, and the through holes can be used as the fluid passing holes by communicating the through holes of the platy layers with each other. Concerning a manufacturing method for the super abrasive grain grinding wheel, the base metal is set in a mixed solution of super abrasive grains and liquid photo-setting resin, and by irradiating a light such as a laser on the base metal, the mixed solution is hardened to form linear elements. By laminating the linear elements, the super abrasive grain layer is formed. In stead of the linear elements, platy layers having plural through holes can be formed and laminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a superabrasive grindstone used for grinding hard and brittle materials such as silicon, glass, ceramics, ferrite, crystal, and cemented carbide.
In particular, the present invention relates to a superabrasive grindstone used for performing mirror finishing and a method for producing the same.

[0002]

2. Description of the Related Art Recently, high-precision mirror finishing has been demanded due to rapid integration of semiconductors and rapid technological innovation in processing of ceramics, glass, ferrite and the like. This mirror finishing is a grinding method generally called lapping, in which loose abrasive grains mixed with lapping liquid are supplied between the lapping plate and the workpiece, and rubbed while applying pressure to the lapping plate and the workpiece. This is a processing method for shaving a workpiece by a rolling action of loose abrasive grains and a scratching action to obtain a highly accurate mirror surface. However, the lapping process consumes a lot of free abrasive grains, so a large amount of a mixture of used free abrasive grains, cutting chips and lapping liquid, that is, sludge, is generated, and the working environment is deteriorated and pollution is a major problem. Had become.

[0003] The grinding method using the loose abrasive grains has been revised, and research and development of a mirror finishing method using fixed fine superabrasive grains have been actively conducted. As a mirror-polishing method using fixed fine-grain super-abrasive grains, a processing method using a resin-bonded super-abrasive grindstone that elastically holds super-abrasive grains having an average particle size of several μm, An ELID grinding method in which dressing and grinding are performed while melting a bond material is well known.

[0004]

However, in the case of a resin-bonded superabrasive grindstone, the sharpness of the grindstone is poor due to the use of fine superabrasive grains, and the abrasion of the grindstone is large. Easy and frequent truing
There was a problem that had to be dressed. In metal bond superabrasive grindstones, it is necessary to make superabrasive grains finer than resin bond because the bond material is highly rigid when trying to obtain a mirror surface comparable to resin bond,
There was a problem that the sharpness worsened.

[0005] When fine superabrasive grains are used, the pores formed in the superabrasive layer become small, and it becomes difficult for the grinding fluid to enter these pores. There was a problem of lowering. One way to solve this problem is to adjust the porosity. For example, the porosity can be adjusted by mixing a hollow sphere such as a glass balloon or a resin balloon with the binder.
However, when the pores are enlarged by resin bond, the rigidity of the superabrasive layer decreases, and there is a problem that the abrasion increases or the shape collapses, and the pores cannot be uniformly dispersed. However, it is insufficient to supply the grinding fluid smoothly. For these reasons, there has been a problem that it is difficult to form pores that can supply a grinding fluid smoothly, particularly in a superabrasive grindstone using fine superabrasive grains used for mirror finishing. The present invention provides a super-abrasive grindstone having a high rigidity of a super-abrasive layer, in which a grinding fluid can be supplied smoothly even with a resin-bonded super-abrasive grindstone using fine-grain superabrasive grains, and a grinding burn does not occur. It proposes a manufacturing method.

[0006]

SUMMARY OF THE INVENTION The present invention provides not only a fixed abrasive process but also a continuous abrasive hole in a super-abrasive layer so that a free abrasive process can be performed on a surface to be processed. The object of the present invention is to provide a super-abrasive grinding wheel having a good circumference and a good sharpness, and a method for producing the same.

A first feature of the superabrasive grindstone of the present invention is a superabrasive grindstone having a superabrasive grain layer formed on a base metal, wherein the superabrasive grain layer is made of a light curable resin. Means that a plurality of linear bodies joined by the above are laminated. By forming a superabrasive grain layer in which a plurality of linear bodies are laminated, a space can be provided between each linear body, and by laminating the linear bodies, a gap between each linear body is formed. Becomes a liquid passage hole. Since these liquid passage holes are continuous, the grinding fluid passes through the liquid passage holes and is supplied to the grinding surface. As a result, the superabrasive layer can be cooled from the inside, so that grinding burn does not occur. In addition, good grinding is performed, and sharpness and accuracy are improved. Since a photocurable resin is used as the binder, a superabrasive layer in which a plurality of linear bodies are stacked can be easily formed. The ratio of the liquid passage holes is determined by the thickness and the interval of the linear body. From the viewpoint of the rigidity of the superabrasive layer and the smooth supply of the grinding fluid, 3 to 40% of the entire superabrasive layer is used. Is desirable. In addition, the height, the width in the horizontal direction, and the like of the abrasive layer can be changed continuously, stepwise, or discontinuously according to the inclination function.

[0008] As a second feature, the superabrasive grains include a plurality of first superabrasive grain layers in which a plurality of linear bodies are formed substantially in parallel, and a plurality of superabrasive grains in a direction different from the first superabrasive grain layer. And a plurality of second superabrasive layers having the linear body formed therein, wherein the first superabrasive layers and the second superabrasive layers are alternately laminated. By alternately laminating the first superabrasive layer and the second superabrasive layer, the through holes are regularly formed, so that the grinding fluid efficiently flows through the superabrasive layer, and And the binder is appropriately worn, so that the sharpness is not reduced and the frequency of truing and dressing is reduced. Preferably,
If the direction of the linear body of the second superabrasive layer is perpendicular to the linear body of the first superabrasive layer, the rigidity of the superabrasive layer increases, and the shape is maintained even if grinding is continued. Is done. More preferably, the rigidity of the superabrasive layer is maximized by making the size of the linear body constant and at equal intervals.

[0009] Another feature of the present invention is a superabrasive grindstone having a superabrasive grain layer formed on a base metal, wherein the superabrasive grain layer is a plate-shaped superabrasive grain bonded with a photocurable resin. And a plurality of through-holes are formed in the plate-like layer, and the through-holes of each plate-like layer are connected to each other. By laminating a plate-like layer having a plurality of through holes and connecting the through holes of each layer, a liquid passage hole is formed in the superabrasive layer. As a result, a necessary and sufficient grinding fluid is supplied to the grinding surface and the superabrasive layer can be cooled from the inside, so that grinding burn does not occur. In addition, good grinding is performed, and sharpness and accuracy are improved. Further, since the plate-like layers are laminated, a superabrasive layer having higher rigidity can be obtained. It is not necessary that the through holes have the same size, and it is preferable to appropriately set the size according to the performance required for the superabrasive grindstone.

As a third feature, the average grain size of the superabrasive grains is 1 to 30 μm. Even with a whetstone using such fine particles having a small average particle diameter, the necessary and sufficient liquid passage holes are formed while securely holding the superabrasive particles, so that the supply of the grinding liquid and the discharge of the cutting chips can be performed effectively. As a result, grinding burns are prevented, and the binder is appropriately worn, so that the sharpness is improved.

As a fourth feature, the superabrasive grindstone is a superabrasive grindstone for mirror finishing. The superabrasive grindstone of the present invention is effective in the supply of the grinding fluid and the discharge of the swarf as described above, and the binder is appropriately worn, so that the sharpness is good, and it is particularly suitable for use in mirror finishing. I have.

A feature of the method for producing a superabrasive grindstone of the present invention is that the method for producing a superabrasive grindstone having a superabrasive layer provided on a base metal comprises: (i) a superabrasive grindstone such as diamond or CBN; Mixing the abrasive grains and the liquid photocurable resin in a container to form a mixed solution; (ii) setting the base metal in the mixed solution; and (iii) the liquid level of the mixed solution is always constant. And adjusting the position of the base metal such that the surface of the base metal on which the superabrasive layer is formed is slightly lower than the liquid surface of the mixed solution; and (iv) A) moving means for moving a position of irradiating the mixed solution with light; and moving the light irradiation position continuously and / or intermittently on the surface of the base metal on which the superabrasive layer is formed. Irradiating the plurality of linear bodies, and (v) attaching the base metal to the plurality of linear bodies. And a step of lowering by the thickness of the linear body, the process repeatedly performed in (iv) and (v), by stacking the plurality of linear bodies is to form a super-abrasive layer.

Further, as a second feature of the method for manufacturing a superabrasive grinding wheel of the present invention, a plate-like layer having a plurality of through holes is formed instead of the plurality of linear bodies in the above-described manufacturing method,
Can be laminated. It is preferable to set the positions and sizes of the through holes so that the through holes of the respective plate-like layers communicate with each other.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail in Examples.

[0015]

FIG. 1 shows an example of a superabrasive grinding wheel according to the present invention. Figure 1
Is a cup-shaped grindstone, and a superabrasive grain layer 2 is provided on a base metal 1. The superabrasive layer 2 is formed by laminating a linear body 3 in which superabrasive grains 2c such as diamond and CBN are bonded with a photocurable resin as a binder. FIG. 2 is a partially enlarged view in which a part of the superabrasive layer 2 is cut. Liquid passage holes 4 are formed in the superabrasive layer 2, and the liquid passage holes 4 are continuous. By laminating the linear bodies 3 as shown in FIG. 2, the continuous liquid passage holes 4 can be formed.

FIG. 3 is an explanatory view of a method for forming the superabrasive layer 2. In order to form the superabrasive layer 2, first, a superabrasive 2c such as diamond or CBN and a liquid photocurable resin are mixed in a container 6 to form a mixed solution 5. A base 7 that can move up and down is provided in the container 6, and the base metal 1 is set on the base 7. The base metal 1 is immersed in the mixed solution 5 and adjusted so that the surface of the base metal 1 on which the superabrasive layer 2 is provided is slightly lower than the liquid level 5a. Specifically, the thickness t of the mixed solution 5 on the surface of the base metal 1 is set to be about 0.1 to 1 mm.

As shown in FIG. 3 (a), a thin layer of the mixed solution 5 is left on the base metal 1, and the super-abrasive layer 2 is formed on the base metal 1. The mixed solution 5 above 1 is irradiated with a light beam such as an ultraviolet laser 8. At this time, the focus of the ultraviolet laser 8 is set on the base metal 1. The ultraviolet laser 8 irradiates linearly at regular intervals to form a plurality of linear bodies 3. The layers of the plurality of linear bodies 3
This is the first superabrasive layer 2a to be the first layer. The thickness of the linear body 3 can be adjusted by the size of the focal point of the ultraviolet laser 8, the size of the laser output, and the scanning speed of the laser beam. The light beam to be irradiated is not limited to an ultraviolet laser, and a visible light or an ultraviolet lamp can be used.

Next, the base 7 is lowered by the thickness t of the first superabrasive grain layer 2a formed on the base metal 1. Then, FIG.
As shown in (1), a second layer is formed on the first superabrasive layer 2a by the same method. The second layer forms a linear body 3 in a direction perpendicular to the first superabrasive grain layer 2a to form a second superabrasive grain layer 2b. A first superabrasive layer 2a is formed as a third layer on the second superabrasive layer 2b. By repeating this, the first
The superabrasive layer 2a and the second superabrasive layer 2b are alternately stacked to form the superabrasive layer 2. As the superabrasive layer is formed, the mixed solution 5 is consumed, and the level of the liquid surface 5a due to the consumption decreases. In order to prevent this drop, it is necessary to replenish and supply the mixed solution 5 with a pump so that the level of the liquid level 5 is always constant.

(Example 1) Diamond abrasive grains and an ultraviolet curable resin were mixed, a superabrasive grain layer 2 was formed on a base metal 1 by the above-described method, and a superabrasive grain whetstone was manufactured. Grinding was performed using this whetstone. The details of the processing conditions are shown below. 1. Specifications of superabrasive grinding wheel Size φ350-10W-3X Superabrasive grain size # 2000 diamond Concentration 150 Liquid porosity 40% 2. Grinding condition Grinding wheel peripheral speed 1320 m / min Depth of cut 1 m / min from 1 to 8 μm / min Workpiece material Optical glass Workpiece speed 3.2 m / min Spark-out 1 min Grinding fluid JIS W2 2% aqueous solution Using phenolic resin for
A superabrasive grindstone having a porosity of 0% was manufactured by a hot press method, and a grinding experiment was performed under the same conditions as described above. These results are shown in FIG.

As can be seen from FIG. 4, the superabrasive grindstone of the present embodiment did not suffer from scorching even if the cutting speed was increased, and it was possible to perform highly efficient mirror finishing. On the other hand, the superabrasive grindstone for comparison could be ground up to a cutting speed of 3 μm / min and the surface roughness was not largely changed, but the cutting speed was 4 μm.
At m / min, grinding burn occurred and grinding became impossible. This is considered to be caused by insufficient supply of the grinding fluid to the grinding surface.

Example 2 A workpiece was made of quartz glass, and was ground in the same manner as in Example 1. The details of the processing conditions are shown below. 1. Specifications of superabrasive grinding wheel Size φ350-10W-3X Superabrasive grain size # 2000 diamond Concentration 150 Liquid porosity 40% 2. Grinding condition Grinding wheel peripheral speed 1320 m / min Depth of cut 1 m / min from 1 to 5 μm / min Workpiece material Quartz glass Workpiece speed 3.2 m / min Spark out 1 min Grinding fluid JIS W2 2% aqueous solution Using phenolic resin for
A superabrasive grindstone having a porosity of 0% was manufactured by a hot press method, and a grinding experiment was performed under the same conditions as described above. These results are shown in FIG.

As can be seen from FIG. 5, the superabrasive grindstone of the present embodiment did not suffer from scorching even if the cutting speed was increased, and it was possible to perform highly efficient mirror finishing. On the other hand, the superabrasive grindstone for comparison was grindable and the surface roughness was not significantly changed up to a cutting speed of 2 μm / min, but the cutting speed was 3 μm.
At m / min, grinding burn occurred and grinding became impossible. It is considered that this also occurred because the grinding fluid was not sufficiently supplied to the ground surface as in the first embodiment.

In this embodiment, a super-abrasive grindstone for mirror polishing is taken as an example. However, the same effect can be obtained in a super-abrasive grindstone other than for mirror polishing, and the present invention is limited to this embodiment. is not.

[0024]

As can be seen from the above description, according to the superabrasive grindstone of the present invention, a plurality of linear bodies in which superabrasive grains are bonded by a photocurable resin are laminated or a plurality of through-holes are provided. A continuous liquid passage hole can be formed by laminating plate-like layers and connecting the through holes of the respective layers, so that the grinding fluid is smoothly supplied to the grinding surface. In addition, since cooling is performed from the inside of the superabrasive layer, problems such as grinding burns do not occur, and mirror polishing can be performed with high efficiency. Further, according to the method for producing a superabrasive grindstone of the present invention, a continuous liquid passage hole can be easily formed, and even when a fine superabrasive for mirror polishing is used, the grinding fluid is smoothly applied to the grinding surface. A super-abrasive grindstone that can be supplied to a steel can be easily obtained. Further, the porosity can be freely adjusted, and a superabrasive grindstone suitable for a workpiece can be easily obtained.

[Brief description of the drawings]

FIG. 1A is a plan view of a superabrasive grindstone of the present invention, and FIG.
Is a sectional view of FIG.

FIG. 2 is an enlarged perspective view of a part of the superabrasive layer of the superabrasive wheel of the present invention when cut off.

FIG. 3 is an explanatory view of a step of forming a superabrasive layer of a superabrasive grindstone of the present invention.

FIG. 4 is a graph showing the results of Example 1.

FIG. 5 is a graph showing the results of Example 2.

[Explanation of symbols]

 Reference Signs List 1 base metal 2 superabrasive layer 2a first superabrasive layer 2b second superabrasive layer 2c superabrasive 3 linear body 4 liquid passing hole 5 mixed solution 5a liquid level 6 container 7 base 8 laser beam

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Mizuho Nakada 2-80 Hokita-cho, Sakai City, Osaka Prefecture Inside Osaka Diamond Monde Industry Co., Ltd. (72) Toshio Fukunishi 2-80 Horikita-cho, Sakai City, Osaka Osaka Osaka F term in Mondo Kogyo Co., Ltd. (reference) 3C063 AA02 AB05 BA14 BA22 BA33 BB02 BB07 BC03 BG10 CC23 EE15 EE16 EE27 FF18 FF20 FF23

Claims (7)

[Claims] 1. A superabrasive grindstone in which a superabrasive layer is formed on a base metal, wherein the superabrasive layer is formed by laminating a plurality of linear bodies in which superabrasives are bonded by a photocurable resin. Is a super abrasive whetstone. 2. The super-abrasive layer comprises: a plurality of first super-abrasive layers in which a plurality of linear bodies are formed substantially in parallel; and a plurality of linear forms in a direction different from the first super-abrasive layer. The super-abrasive layer according to claim 1, comprising a plurality of second super-abrasive layers having a body formed therein, wherein the first super-abrasive layers and the second super-abrasive layers are alternately laminated. Abrasive whetstone. 3. A superabrasive grain having a superabrasive layer formed on a base metal, wherein the superabrasive layer is obtained by laminating a plate-like layer in which superabrasive grains are bonded with a photocurable resin. And a plurality of through-holes are formed in the plate-like layer, and the through-holes of each plate-like layer communicate with each other. 4. The superabrasive grinding wheel according to claim 1, wherein the average particle diameter of the superabrasive grains is 1 to 30 μm. 5. The superabrasive grinding wheel according to claim 1, wherein the superabrasive grinding wheel is a superabrasive grinding wheel for mirror finishing. 6. A method of manufacturing a superabrasive grindstone having a superabrasive layer provided on a base metal, comprising: (i) diamond, CB
A step of mixing superabrasive grains such as N and a liquid photocurable resin in a container to form a mixed solution; (ii) a step of setting the base metal in the mixed solution; and (iii) a liquid of the mixed solution. A step of adjusting the base metal position such that the surface is always maintained at a constant height, and the surface of the base metal forming the superabrasive layer is slightly lower than the liquid surface of the mixed solution. When,
(Iv) a surface for forming a superabrasive layer of the base metal while providing a moving means for moving a position at which the mixed solution is irradiated with light, and moving the light irradiation position continuously and / or intermittently; Irradiating light to form a plurality of linear bodies,
(V) lowering the base by the thickness of the plurality of linear bodies, and repeating the steps (iv) and (v) to stack the plurality of linear bodies. A method for producing a superabrasive grindstone, comprising forming a superabrasive grain layer by heating. 7. The method according to claim 6, wherein a plate-like layer having a plurality of through holes is formed and laminated instead of the plurality of linear bodies.