JP2002026109A - Pickup apparatus for handlers - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pickup apparatus for handlers which has little risk of giving damages, such as breakdown to a device and can greatly reduce the jam ratio. SOLUTION: The handler pickup apparatus, for picking up and releasing a device, is mounted on the top end of a stroke applier. The apparatus comprises a cylindrical vacuum pad for removably mounting a device on the top end, piston which has a hollow part and is connected at one end to the other end of the vacuum pad, cylinder which contains the piston at one end and is connected at the other to the stroke applier, a stopper mounted on the cylinder for regulating the piston for a specified stroke slide motion, conductive ring covering a device vacuuming side of the vacuum pad, and outer spring which is fixed at one end to the ring and is connected at its other end to the other end of the cylinder.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a handler pickup apparatus which has a low possibility of causing damage such as destruction to a device and which can greatly reduce a jam rate.

[0002]

2. Description of the Related Art FIG. 5 is an explanatory view of the structure of a conventional example which has been generally used in the prior art. This is an example used for a horizontal handler, and is an explanatory view of the main part of an example in which it is attached to the tip of a stroke applying device. is there.

As shown in FIG. 5, a tip of a unit for transporting an IC called a loader or an unloader that can move arbitrarily in the horizontal X axis and Y axis is provided with a stroke applying device A and a stroke applying device. It comprises a pickup device attached to the tip of the device A.

[0004] The stroke applying device A includes a cylinder A
1, piston rod A2, linear guide A3, guide A
4, block A5, and pickup device 1. An IC to be transported (indicated by symbol C) is accommodated in a pocket B1 of a plate B arranged opposite to the pickup device 1.

Here, during the transfer operation, the IC to be transferred is
Is controlled so that the pick-up device 1 attached to the stroke applying device A comes directly above the. Next, the cylinder A1 operates and the lower surface of the pickup device 1
Piston rod A1 and guide A until lightly touching C
4, block A5, pickup device 1 goes down.

Next, the inside of the pickup device 1 is evacuated to a vacuum pressure, and the IC is attracted to the pickup device 1. After that, the cylinder A1 operates and the pickup device 1
The IC adsorbed on is moved up by the stroke.

At about the same time, the stroke applying device A is controlled so as to be located on an empty pocket B2 at the destination. Thereafter, the cylinder A1 operates to lower the piston rod A2, the guide A4, the block A5, and the pickup device 1 (with IC) by the stroke.

Next, the inside of the pickup device 1 is released from the vacuum pressure to the atmospheric pressure, and the sucked IC is separated from the pickup device 1 and stored in the pocket B2. Next time,
The same operation as described above is sequentially repeated for an IC in another pocket B3.

Here, as shown in FIG. 6, the pickup device 1 has a sleeve 12 (metal or plastic) and a pad 13 (rubber) attached to a boss 11 of the main body. A ring 14 is provided.

Normally, the ring 14 lightly contacts the upper surface of the IC when the pickup device is lowered. The gap between the ring 14 and the sleeve 12 will be referred to as "buffer stroke F"
I will call it. In this case, the buffer stroke F
Is 0.3 mm.

Since there is a buffer stroke F, the pad 13 can be brought up into contact with (collide with) the sleeve 12 with a light force due to the elasticity of the rubber. When the inside of the pickup device 1 is pulled by the vacuum pressure, the gap between the ring 14 and the IC disappears, and the suction is performed.
The IC moves up with the ring 14 by the buffer stroke F, and the ring 14 comes into contact with the sleeve 12.

At this time, even if the ring 14 is charged with static electricity, the static electricity can be released to the main body of the handler by the above-mentioned contact.

[0013]

However, in such a device, 1) if the distance between the IC and the pickup device 1 is shortened for some reason, the buffer stroke F (0.3 mm in this case) Inside the IC, no excessive force is applied to the IC.
1, the total mass of the block A5 and the pickup device 1 becomes an impact force, and there is a possibility that the IC is destroyed by applying an excessive impact force to the IC.

2) While the IC and the ring 14 move during the buffer stroke F for a short period of time, there is an inconvenience that the minute static electricity generated when the IC comes into contact with the ring 14 cannot be released.

3) The above problem can be absorbed if the buffer stroke F is large, but in the structure of FIG. 6 (determined by the rubber pad 13), it is at most about 0.3 to 0.5 mm.
Not enough.

4) To release the charge of the IC, the ring 1
Since the sleeve 4 and the sleeve 12 are usually made of metal, they have no cushioning property. Even if a conductive resin is used, the buffer performance is not sufficient.

5) According to the above-mentioned items 1 to 4, when the IC rides on the pocket B1 and is arranged at an angle of more than ten degrees, the IC cannot be adsorbed, as a matter of course.
C will be destroyed by a large impact force.

6) The ring 14 also has the following problems. The ring 14 follows the suction pad 13,
It is slightly free. Since the stroke applying device A moves at a high speed, the ring 14 connected to the suction pad 13 is easily wobble, and it takes time to attenuate the ring.

As a result, when the suction is released just above the destination pocket and the device falls, the occurrence rate of the problem that the device does not normally fit in the pocket but runs on the edge of the pocket (= jam rate) ) Is high.

An object of the present invention is to solve the above-mentioned problems, and to provide a handler pickup apparatus which can reduce the possibility of causing damage such as destruction to a device and greatly reduce the jam rate.

More specifically, by fixing one end of the outer spring to the ring, the swing of the ring is suppressed, the amplitude is reduced and attenuated in a short time, and the jam pickup rate can be greatly reduced. Is to provide.

[0022]

In order to achieve the above object, according to the present invention, there is provided a pickup device for a handler according to the first aspect of the present invention, wherein the pickup device is attached to a tip of a stroke applying device and detaches the device. , A cylindrical suction pad to which a device is attached and detached at one end, a piston having a hollow portion having one end connected to the other end of the suction pad, and a piston built into one end and the other end provided to the stroke applying device. A cylinder to be connected, a stopper attached to the cylinder to regulate the piston to slide for a predetermined stroke, a conductive ring provided over the device suction side of the suction pad, and one end of the ring. An outer spring fixed to the other end and connected to the other end of the cylinder. To.

According to a second aspect of the present invention, in the handler pickup apparatus according to the first aspect, it is preferable that a step portion provided on the ring and an outer spring having one end fixed to the step portion are provided. Features.

According to a third aspect of the present invention, there is provided the handler pickup device according to the first aspect, further comprising a concave portion provided in the ring, and an outer spring having one end inserted and fixed in the concave portion. And

According to a fourth aspect of the present invention, in the pickup device of the handler according to any one of the first to third aspects, a press-fit fixing is used as the fixing.

According to a fifth aspect of the present invention, in the pickup device for a handler according to any one of the first to fourth aspects, an inner spring having one end connected to the piston and the other end connected to the cylinder is provided. It is characterized by having.

According to a sixth aspect of the present invention, in the pickup device for a handler according to any one of the first to fifth aspects, one end is connected to the piston and the other end is slidable to the other end of the cylinder. It is characterized in that it has a cylindrical piston rod that is rotatably supported.

According to a seventh aspect of the present invention, in the pickup device of the handler according to any one of the first to sixth aspects, a bearing is used for the shaft support portion of the piston rod. .

According to an eighth aspect of the present invention, in the pickup device for the handler according to any one of the first to seventh aspects, a bearing is used as the stopper.

According to a ninth aspect of the present invention, in the pickup device of the handler according to any one of the first to eighth aspects, the suction pad is formed of an elastic body.

According to claim 10 of the present invention, claim 8
The pick-up device for a handler according to the above, wherein the elastic body is made of a rubber material.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.

In the figure, the same reference numerals as those in FIG. 5 indicate the same functions. Hereinafter, only differences from FIG. 5 will be described. In the figure, the suction pad 13 has a device attached and detached at one end,
Form a cylinder.

In this case, the suction pad 13 is made of an elastic rubber material. The piston 21 has one end connected to the other end of the suction pad 13 and a hollow portion 211.

The cylinder 22 has a piston 21 built in at one end and a stopper 23 connected to the stroke applying device A at the other end. The stopper 23 is attached to the cylinder 22 and regulates the piston 21 to slide a predetermined stroke.

In this case, the stopper 23 uses a metal bearing, regulates the piston 21 to slide for a predetermined stroke, and supports the piston 21 so that the piston 21 slides smoothly.

The stopper 24 is provided on the side of the cylinder 22 opposite to the side on which the stopper 23 is mounted. The inner spring 25 has one end connected to the piston 21 and the other end connected to the stopper 24.

The ring 14 is provided to cover the device suction side of the suction pad 13 and has conductivity. One end of the outer spring 26 is fixed to the ring 14, and the other end is connected to the other end of the cylinder 22.

In this case, one end of the outer spring 26 is bonded to the ring 14 with a conductive adhesive.

In the above configuration, when the cylinder A1 operates, the piston rod A2, the guide A4, the block A5, and the pickup device 20 in FIG. 1 are lowered. At this time, in addition to the initial distance, in this case, 10 mm, 1.
Suppose you drop 3mm more.

There are 2 g. For example, it may be sufficient, in short, if it is sufficient. Limit

In other words, relative to the position of the cylinder 22, the ring 14 is raised by 1.3 mm, and the light load deformation of the lower end of the suction pad 13 is reduced by 0.3.
mm, the suction pad 13 and the piston 21 are 1.0 mm
mm. That is, the buffer mechanism G (1.8 mm at maximum) larger by 1.0 mm (1.5 mm at maximum) than the conventional example in FIG. The impact force applied to the surface is reduced.

That is, in the conventional example shown in FIG.
2, the mass A of the guide A4, the block A5, and the entire mass M of the pickup device 1 are related to the impact energy. On the other hand, in the embodiment of FIG. 1, the mass: m of only the piston 21, the suction pad 13, and the ring 14 is related to the impact energy.

Therefore, the impact energy ratio can be reduced to M: m. In this case, about 2
5: 1. Next, the inside of the pickup device 20 is pulled by vacuum pressure, and the IC is connected to the ring 1 of the pickup device 20.
4 adsorbed.

Next, the cylinder A1 is operated, and the IC. Is increased by the stroke. Almost at the same time, the stroke applying device A is controlled so as to be located on the empty pocket B2 of the transfer destination.

Next, the cylinder A1 is operated, and the piston rod A2, the guide A4, and the block A
5, The pickup device 20 (with IC) is lowered.

Next, the interior of the pickup device 20 is released from the vacuum pressure to the atmospheric pressure, and the piston 21 and the suction pad 1 are released.
3. The ring 14 is lowered by the buffer stroke G, and the sucked IC is separated from the pickup device 20 and stored in the pocket B2. This time, the above operation is sequentially repeated for the IC in another pocket B3.

Since the one end of the outer spring 26 is fixed to the ring 14, the swing of the ring 14 is suppressed, and the amplitude can be attenuated in a short time and with a small amplitude.
The device can be accurately dropped into the pocket, and the jam rate can be greatly reduced. As an example, in the conventional example shown in FIG. 5, the vibration amplitude after several tens of ms has elapsed is about 50 μm, whereas in the apparatus of the present invention, it can be attenuated to about 5 μm.

Next, when the device C is sucked, there is a case where the piston 21 does not want to be retracted by the suction force.
In other words, if the piston 21 is moved into and out of the cylinder 22 each time it is transported, the sliding between the piston 21 and the cylinder 22 becomes unnecessarily large, which may be undesirable in terms of wear life.

In this case, by providing the inner spring 25 having a spring force opposing the suction force, the piston 21 does not come in and out during normal conveyance.

When the device C rides on the edge of the pocket B1 or when the adjustment setting is out of order for some reason,
Only in an abnormal state such as when the cylinder 22 and the suction pad 13 are lowered, the cushioning function is exhibited by the piston 21, the suction pad 13, the ring 14, the outer spring 26, and the inner spring 25 being retracted. . Therefore, a handler pickup device having an extremely long wear life can be obtained.

As a result, (1) the suction pad 1 which is a small mass portion at the tip, not the entire mass of the device portion which moves at the time of device suction.
Since only the ring 3, the ring 14 and the piston 21 can be retracted within the required buffer stroke, the impact force acting on the device can be reduced, and a handler pickup device which is less likely to damage the device such as breakage can be obtained.

(2) The outer spring 2 is attached to the ring 14.
By fixing one end of 6, the vibration of the ring 14 can be suppressed, and the amplitude can be attenuated in a short time and small.
The device C can be accurately dropped into the pocket B1, and the pick-up device of the handler which can greatly reduce the jam rate can be obtained.

(3) Ring 14 and outer spring 2
Since the device 6 is always fixed, the device C is always passed through the ring 14 and the outer spring 26 after the suction starts, so that a pickup device of the handler to be neutralized can be obtained.

(4) The outer spring 2 is attached to the ring 14.
6 only needs to be fixed, so that the above-described vibration damping characteristics can be obtained at a low cost with a simple structure, and an inexpensive handler pickup device capable of greatly reducing the jam rate can be obtained.

(5) When the device C is sucked, the conductive ring 14 and the outer spring 26
A handler pickup device capable of reliably removing static electricity can be obtained.

(6) Since the outer spring 26 is used as a component for static elimination contact, a relatively weak spring can be used.

Therefore, even if the device C to be sucked is inclined over ten degrees by riding on the pocket B1, the inclined ring 14 comes into contact with the device C due to its flexibility. Thus, it is possible to obtain a handler pick-up device which is less likely to cause damage and can be adsorbed.

(7) Since the inner spring 25 is provided, it is possible to obtain a handler pickup device capable of reliably performing the stroke operation of the piston 21.

(8) By using the inner spring 25 having a spring force opposing the suction force, the piston 21 does not move during normal suction, and only in the abnormal state, the piston 21, the suction pad 13, When the ring 14, the outer spring 26 and the inner spring 25 are retracted, a buffering function is exhibited, and a handler pickup device having a very long wear life can be obtained.

(9) Since a metal bearing is used as the stopper 23, the piston 21 can be restricted so as to slide a predetermined stroke, and a handler pick-up device in which the piston 21 slides smoothly can be obtained.

(10) Since the suction pad 13 is made of an elastic material, a handler pickup device which does not cause damage such as breakage to the device can be obtained.

(11) Since the suction pad 13 is made of an elastic material, it is flexible, so that even if the device C rides on the edge of the pocket B1, the ring 14 is in contact therewith.
Can easily follow the inclination of the device C, so that even in this state, a large impact force is not applied to the device C, so that a handler pickup device can be obtained at low cost.

(12) Since the elastic body 13 is made of a rubber material, the rubber material has marketability and can be obtained at a low cost, so that an inexpensive handler pickup device can be obtained.

FIG. 2 is an explanatory diagram of a main part configuration of another embodiment of the present invention. In the present embodiment, the piston rod 31
One end is connected to the piston 21 and the other end is the cylinder 22
Is slidably supported by the other end of the shaft and has a cylindrical shape. In this case, a metal bearing is used for the shaft support portion 32 of the piston rod 31.

As a result, (1) Since the piston rod 31 is provided, the pick-up device of the handler in which the operation of the cylinder 22 is surely stable can be obtained.

(2) Since the piston is slid in two places, the axial movement of the piston is assured, the sliding wear is less than that of sliding at one end, and a handler pickup device having a long wear life is obtained. Can be

(3) At the shaft support of the piston rod 31,
Since a bearing is used, a handler pickup device can be obtained in which the pivoting operation of the piston rod 31 is smooth and the sliding wear life can be extended.

FIG. 3 is an explanatory view of a main part configuration of another embodiment of the present invention. In this embodiment, the step 411 is the ring 4
1 is provided. One end of the outer spring 42 is fixed to the step 411. In this case, press-fit fixing is used as the fixing.

As a result, (1) since one end of the outer spring 42 is fixed to the step portion 411 provided on the ring 41, more secure fixing can be performed and a more reliable handler pickup device can be obtained. .

(2) Since the outer spring 42 is aligned with and fixed to the step portion 411 of the ring 41, the axial center of the ring 41 and the outer spring 42 can be kept coincident. can get.

(3) The position and dimensions of the ring 41 in the axial direction of the ring 41 in the handler pickup device can be set to desired values, and a handler pickup device with an accurate operation can be obtained.

(4) Since the press-fitting is used as the fixing, the fixing is easy and an inexpensive handler pickup device can be obtained.

(5) Since the outer spring 42 can be connected to the ring step 411 simply by fitting (press-fitting) it into the ring, conductivity can be provided at low cost, and an inexpensive handler pickup device can be obtained. .

(6) Since the outer spring 42 and the suction pad 13 are flexible, even if the device C rides on the edge of the pocket B1, the ring 41 in contact therewith easily tilts following the inclination of the device C. So, even in this state, it does not give a large impact force to the device C,
It can be realized at low cost.

FIG. 4 is an explanatory diagram of a main part configuration of another embodiment of the present invention. In this embodiment, the recess 511 is
1 is provided. One end of the outer spring 52 is fixed to the concave portion 511. In this case, press-fit fixing is used as the fixing.

As a result, (1) one end of the outer spring 52 is inserted and fixed in the concave portion 511 of the ring 51. Therefore, when the ring diameter is larger than the outer spring diameter, it is easily and inexpensively manufactured. Thus, an inexpensive handler pickup device can be obtained.

(2) Since the press-fitting is used as the fixing, the fixing is easy and an inexpensive handler pickup device can be obtained.

(3) Since the outer spring 52 can be connected to the concave portion 511 of the ring 51 simply by fitting (press-fitting) the same, the conductivity can be provided at low cost, and an inexpensive handler pickup device can be obtained. .

(4) Since the outer spring 52 and the suction pad 13 are flexible, even if the device C rides on the edge of the pocket B1, the ring 51 in contact therewith easily tilts according to the inclination of the device C. So, even in this state, it does not give a large impact force to the device C,
It can be realized at low cost.

In the above-described embodiment, one end of the outer spring 26 has been described as being bonded to the ring 14 with a conductive adhesive. However, the present invention is not limited to this. For example, welding may be used. In short, what is necessary is just to be fixed.

When there is no need to remove static electricity,
Of course, a non-conductive adhesive may be used. Further, the inner spring 25 is a spring having a weak force for assisting the lowering operation of the piston 21, and is not always necessary when the operation is reliable due to its own weight drop or the like.

The outer springs 26, 42, 5
No. 2 is not necessarily required when conduction with static electricity to the rings 14, 41 and 51 due to this is unnecessary. In addition, the stopper 23 and the shaft support portion 32
It is not necessary to be a separate part, and a part of the cylinder 22 is
An integrated structure that performs these functions may be used.

Further, in the above-described embodiment, the description has been made for the purpose of adsorbing ICs. However, the present invention is not limited to this, and it is needless to say that any device other than ICs can be used as an object to be adsorbed. .

In this embodiment, the suction direction of the apparatus has been described as a vertical direction. However, for example, a horizontal direction may be used. In other words, the suction direction is not limited to the vertical direction. The piston 21 is not limited to a cylindrical shape.

The foregoing description merely illustrates certain preferred embodiments for purposes of explanation and illustration of the invention. Therefore, the present invention is not limited to the above-described embodiments, and includes many more modifications without departing from the spirit thereof.
This includes deformation.

[0086]

As described above, according to the first aspect of the present invention,
According to the above, the following effects are obtained. (1) Not the entire mass of the device moving during device suction, but only the small mass of the tip, the ring, the suction pad, the outer spring and the piston, can be retracted within the required buffer stroke. As a result, it is possible to obtain a handler pickup device that can reduce the impact force acting on the device and is less likely to damage the device such as destruction.

(2) By fixing one end of the outer spring to the ring, the run-out of the ring can be suppressed, and the amplitude can be attenuated in a short time, so that the device can be accurately dropped into the pocket and jammed. A handler pickup device that can greatly reduce the rate can be obtained.

(3) The ring and the outer spring are
Since the device is fixed at all times, the device is always passed through the ring and the outer spring after the start of the suction, so that a pickup device of the handler to be neutralized can be obtained.

(4) Since it is only necessary to fix the outer spring to the ring, it is possible to obtain an inexpensive handler pickup device which has a simple structure, can provide the above-described vibration damping characteristics at a low cost, and can greatly reduce the jam rate. Can be

(5) When the device is sucked, a pickup device of a handler that can reliably remove static electricity by the conductive ring and the outer spring can be obtained.

(6) Since the outer spring is used as a component for the static elimination contact, a relatively weak spring can be used.

Accordingly, even if the device to be sucked is tilted more than ten degrees after riding on the pocket, the tilted ring comes into contact with the device following the inclination of the device due to its flexibility, thereby damaging the device. Thus, it is possible to obtain a handler pick-up device capable of adsorbing less.

According to the second aspect of the present invention, the following effects can be obtained. (1) Since one end of the outer spring is fixed to the step provided on the ring, more reliable fixing can be performed, and a more reliable handler pickup device can be obtained.

(2) Since the outer spring is aligned with and fixed to the step of the ring, the axial center of the ring and the outer spring can be kept coincident, and a handler pick-up device with an accurate operation can be obtained.

(3) The position and size of the ring in the axial direction of the ring in the pickup device of the handler can be set to desired values, and a handler pickup device with an accurate operation can be obtained.

According to the third aspect of the present invention, the following effects can be obtained. (1) Since one end of the outer spring is inserted and fixed in the concave portion provided in the ring, more secure fixing can be performed by the insertion and fixing, and a more reliable handler pickup device can be obtained.

Since one end of the outer spring is inserted and fixed in the concave portion of the ring, it can be easily and inexpensively manufactured mainly when the ring diameter is larger than the outer spring diameter, and the inexpensive handler pickup is made. A device is obtained.

According to the fourth aspect of the present invention, the following effects can be obtained. (1) Since the press-fitting is used as the fixing, the fixing is easy and an inexpensive handler pickup device can be obtained.

(2) Since the outer spring can be connected (fitted) only by fitting the outer spring into the step portion of the ring, conductivity can be provided at low cost, and an inexpensive handler pickup device can be obtained.

(3) Since the outer spring and the pad are flexible, even if the device rides on the edge of the pocket, the ring in contact therewith easily tilts following the inclination of the device. It is possible to inexpensively realize that a large impact force does not occur.

According to claim 5 of the present invention, the following effects can be obtained. (1) Since the inner spring is provided, it is possible to obtain a handler pickup device capable of reliably performing the stroke operation of the piston.

(2) By using an inner spring having a spring force that opposes the suction force, the piston does not move during normal suction, and only when there is an abnormal state, the piston,
The buffer function is exhibited by the retraction of the suction pad, ring, outer spring and inner spring, so that a handler pick-up device having a very long wear life can be obtained.

According to the sixth aspect of the present invention, the following effects can be obtained. (1) Since the piston rod is provided, it is possible to obtain a handler pickup device in which the operation of the cylinder is surely stable.

(2) Since the piston is slid at two locations, the axial movement of the piston is assured, the sliding wear is less than that of sliding at one end, and a handler pickup device with a long wear life is obtained. Can be

According to the seventh aspect of the present invention, the following effects can be obtained. Since the bearing is used for the bearing portion of the piston rod, a handler pickup device can be obtained in which the bearing operation of the piston rod is smooth and the sliding wear life can be extended.

According to the eighth aspect of the present invention, the following effects can be obtained. Since the bearing is used as the stopper, the piston can be regulated so as to slide for a predetermined stroke, and the pickup device of the handler in which the piston slides smoothly can be obtained.

According to the ninth aspect of the present invention, the following effects can be obtained. (1) Since the suction pad is made of an elastic material, a handler pickup device that does not cause damage such as breakage to the device can be obtained.

(2) Since the suction pad is made of an elastic material, it is flexible, so that even if the device rides on the edge of the pocket, the ring in contact therewith easily tilts following the inclination of the device. As a result, a handler pickup device can be obtained at low cost, which does not cause a large impact force to the device even in this state.

According to the tenth aspect of the present invention, the following effects can be obtained. Since the elastic body is made of a rubber material, the rubber material has marketability and can be obtained at a low cost, so that an inexpensive handler pickup device can be obtained.

Therefore, according to the present invention, it is possible to realize a handler pickup apparatus which is less likely to damage the device, such as destruction, and can greatly reduce the jam rate.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.

FIG. 2 is an explanatory diagram of a main part configuration of another embodiment of the present invention.

FIG. 3 is an explanatory diagram of a main part configuration of another embodiment of the present invention.

FIG. 4 is an explanatory diagram of a main part configuration of another embodiment of the present invention.

FIG. 5 is an explanatory view of a configuration of a main part of a conventional example generally used in the related art.

FIG. 6 is a detailed explanatory view of a main part of FIG. 5;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pickup device 11 Boss of main body 12 Sleeve 13 Suction pad 14 Ring 20 Pickup device 21 Piston 211 Hollow part 22 Cylinder 23 Stopper 24 Stopper 25 Inner spring 26 Outer spring 30 Pickup device 31 Piston rod 32 Shaft support part 40 Pickup device 41 Ring 411 Step 42 Outer spring 50 Pickup device 51 Ring 511 Depression 52 Outer spring A Stroke applying device A1 Cylinder A2 Piston rod A3 Linear guide A4 Guide A5 Block B plate B1 Pocket B2 Pocket B3 Pocket C IC G Buffer stroke

Claims (10)

[Claims] 1. A pick-up device for a handler attached to and detached from a device attached to the tip of a stroke applying device, comprising: a cylindrical suction pad to which a device is attached and detached at one end; A piston having one end built into the piston and the other end connected to the stroke applying device; a stopper attached to the cylinder for regulating the piston to slide a predetermined stroke; and the suction pad. And a conductive ring provided so as to cover the device suction side, and an outer spring having one end fixed to the ring and the other end connected to the other end of the cylinder. . 2. A pickup device for a handler according to claim 1, further comprising a step provided on said ring, and an outer spring having one end fixed to said step. 3. The pickup device for a handler according to claim 1, further comprising a concave portion provided in said ring, and an outer spring having one end inserted and fixed in said concave portion. 4. The handler pickup device according to claim 1, wherein a press-fit fixing is used as the fixing. 5. The handler pickup device according to claim 1, further comprising an inner spring having one end connected to the piston and the other end connected to the cylinder. 6. A cylinder piston rod having one end connected to the piston and the other end pivotally supported so as to be slidable on the other end of the cylinder. 5. The pickup device for a handler according to any one of 5. 7. The handler pickup device according to claim 1, wherein a bearing is used for the shaft support portion of the piston rod. 8. The handler pickup device according to claim 1, wherein a bearing is used as said stopper. 9. The pickup device for a handler according to claim 1, wherein the suction pad is made of an elastic material. 10. The apparatus according to claim 8, wherein said elastic body is made of a rubber material.