JP2002025994A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002025994A5 JP2002025994A5 JP2000199992A JP2000199992A JP2002025994A5 JP 2002025994 A5 JP2002025994 A5 JP 2002025994A5 JP 2000199992 A JP2000199992 A JP 2000199992A JP 2000199992 A JP2000199992 A JP 2000199992A JP 2002025994 A5 JP2002025994 A5 JP 2002025994A5
- Authority
- JP
- Japan
- Prior art keywords
- unit
- heat treatment
- holder
- lid
- temperature detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 25
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 239000003575 carbonaceous material Substances 0.000 claims description 3
- 230000020169 heat generation Effects 0.000 claims 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000199992A JP3641193B2 (ja) | 2000-06-30 | 2000-06-30 | 縦型熱処理装置及び熱処理方法並びに保温ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000199992A JP3641193B2 (ja) | 2000-06-30 | 2000-06-30 | 縦型熱処理装置及び熱処理方法並びに保温ユニット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002025994A JP2002025994A (ja) | 2002-01-25 |
| JP2002025994A5 true JP2002025994A5 (enrdf_load_stackoverflow) | 2004-12-16 |
| JP3641193B2 JP3641193B2 (ja) | 2005-04-20 |
Family
ID=18697932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000199992A Expired - Fee Related JP3641193B2 (ja) | 2000-06-30 | 2000-06-30 | 縦型熱処理装置及び熱処理方法並びに保温ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3641193B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7203588B2 (ja) * | 2018-12-17 | 2023-01-13 | 東京エレクトロン株式会社 | 熱処理装置 |
| CN114127897B (zh) * | 2019-06-27 | 2025-08-12 | 株式会社国际电气 | 隔热结构体、基板处理装置、半导体装置的制造方法、基板处理方法以及存储介质 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH084000Y2 (ja) * | 1991-03-28 | 1996-01-31 | 信越化学工業株式会社 | 複層セラミックスヒ−タ− |
| JP3449630B2 (ja) * | 1993-07-15 | 2003-09-22 | 株式会社日立国際電気 | 半導体製造装置 |
| JP3423131B2 (ja) * | 1995-11-20 | 2003-07-07 | 東京エレクトロン株式会社 | 熱処理装置及び処理装置 |
| JPH10208855A (ja) * | 1997-01-23 | 1998-08-07 | Toshiba Ceramics Co Ltd | 面状ヒータ |
-
2000
- 2000-06-30 JP JP2000199992A patent/JP3641193B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20200030449A (ko) | 기판 처리 장치 및 방법 | |
| US3147141A (en) | Apparatus for the manufacture of high purity elemental silicon by thermal decomposition of silane | |
| US2686212A (en) | Electric heating apparatus | |
| US5859408A (en) | Apparatus for uniformly heating a substrate | |
| TW201531598A (zh) | 用於控制晶體成長裝置中的溫度均勻性的技術 | |
| US3492969A (en) | Apparatus for indiffusing impurity in semiconductor members | |
| JP2002025994A5 (enrdf_load_stackoverflow) | ||
| JPS6163513A (ja) | シリコンの融解方法及びその装置 | |
| JP2002277166A (ja) | バッチ式ロータリーキルン | |
| JPS6142388B2 (enrdf_load_stackoverflow) | ||
| JPS6183616A (ja) | 蒸気の発生方法 | |
| JP4393009B2 (ja) | 縦型熱処理装置 | |
| US3698872A (en) | Breakout protection for crystal growers | |
| US4308008A (en) | Method for differential thermal analysis | |
| JPS5987032A (ja) | 加工品処理装置 | |
| JP2952390B2 (ja) | 黒鉛ヒータの製造方法及びこれに使用する加工用治具 | |
| KR100375213B1 (ko) | 후드형어니일링로용어니일링베이스 | |
| US4641321A (en) | Cooled furnace head for heavy-current resistance furnaces | |
| JP4438246B2 (ja) | 熱処理装置 | |
| JP3641193B2 (ja) | 縦型熱処理装置及び熱処理方法並びに保温ユニット | |
| JPS6133518Y2 (enrdf_load_stackoverflow) | ||
| JPH0286090A (ja) | 高周波誘導加熱装置 | |
| US3434803A (en) | Apparatus for manufacturing flawless,stress-free boron rods | |
| JPS6112556Y2 (enrdf_load_stackoverflow) | ||
| JPH0454225Y2 (enrdf_load_stackoverflow) |