JP2002022798A - Noise-waveform-accompanied driver input generating method for semiconductor testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a noise-waveform-accompanied driver input generating method for a semiconductor testing device, allowing the evaluation of noise resistance by applying an input waveform accompanied by noises to a measuring device. SOLUTION: To achieve the stepwise waveform, coaxial wires 3, 4 are connected to each other at a point on an I/F board 5 using two drivers DRVI(1), DRV2(2) and then the waveform is applied to the measuring device 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for generating a driver input accompanied by a noise waveform in a semiconductor test apparatus.

[0002]

2. Description of the Related Art An LSI is tested by a semiconductor test apparatus by applying a pulse waveform to a device to be measured. In general, the input waveform is ideally a complete pulse waveform without noise because noise causes the device to malfunction and lowers the yield.

However, in the evaluation stage of the LSI, it is often necessary to evaluate the margin of the device resistance when noise is applied to the input waveform in consideration of the actual use state.

However, the conventional input driver aims at inputting a pulse waveform and does not assume that a waveform accompanied by any noise is output.

[0005]

As described above, no input driver of a conventional semiconductor test apparatus is designed in consideration of noise immunity evaluation.
This could not be achieved.

The present invention provides a method for generating a driver input with a noise waveform in a semiconductor test apparatus capable of eliminating the above-mentioned problems, applying an input waveform with noise to a measuring device, and realizing a noise tolerance evaluation. The purpose is to do so.

[0007]

According to the present invention, there is provided a method for generating a driver input accompanied by a noise waveform in a semiconductor test apparatus, wherein two driver outputs are connected to a single point by a coaxial wiring. Thus, a step-like waveform is supplied to the measurement device.

[2] In a method of generating a driver input accompanied by a noise waveform of a semiconductor test apparatus, a glitch waveform is supplied to a measuring device by connecting three driver outputs to one point by a coaxial wiring.

[3] A method of generating a driver input accompanied by a noise waveform in a semiconductor test apparatus is characterized in that a noise generating circuit is provided in a driver to supply a step-like waveform to a measuring device.

[4] In a method for generating a driver input accompanied by a noise waveform of a semiconductor test apparatus, a glitch waveform is supplied to a measuring device by providing a noise generating circuit in the driver.

[5] A method for generating a driver input accompanied by a noise waveform in a semiconductor test apparatus is characterized in that a stepwise waveform or a glitch waveform is supplied to a measuring device by providing a noise generating circuit in the driver.

[6] In a method of generating a driver input accompanied by a noise waveform of a semiconductor test apparatus, a switch for connecting a driver to another driver is provided, and a step-like waveform or a glitch waveform is supplied to a measuring device. I do.

[7] In a method for generating a driver input accompanied by a noise waveform of a semiconductor test apparatus, a switch for connecting the driver to all other drivers is provided, and a step-like waveform or a glitch waveform can be generated without reducing the number of simultaneous measurements. It is characterized in that it is supplied to a measuring device.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a circuit diagram showing a first embodiment of the present invention.
FIG. 2 is an explanatory diagram for outputting a step-like waveform by the circuit.

As a normal use, one coaxial wiring is connected to one driver to supply a pulse waveform to the measuring device.

In this embodiment, in order to realize a step-like waveform as shown in FIG. 2, two drivers (DRV1, DRV2) 1 and 2 are used as shown in FIG. Waveforms are applied to the measuring device 6 after connecting the terminals 3 and 4 at the point (A) on the I / F board 5.

As shown in FIG. 2A, DRV1 (1)
Output a waveform having an amplitude of Vih / Vil = Vih1 / Vil1, and switch from High to Low at timing T0.

As shown in FIG. 2B, DRV2 (2)
Output a waveform having an amplitude of Vih / Vil = Vih2 / Vil2, and switch from High to Low by delaying the timing T0 by W. Since the coaxial wirings 3 and 4 are connected at the point (A), the measuring device 6 in the I / F board 5 combines the DRV1 output and the DRV2 output as shown in FIG. The applied waveform is applied.

As described above, according to the first embodiment, the waveforms applied to the measuring device 6 are DRV1 (1) and DRV1 (1).
2 (2) are combined to form a step-like waveform as shown in FIG. That is, Vih = (Vih1 + Vih2)
/ Vil = (Vil1 + Vil2) / 2, and the time from the switching point T0 of the DRV1 (1) from High to Low to W is Vn = (Vil1 + Vih).
2) A step-like waveform holding a potential of / 2 is measured by the measuring device 6.
Can be supplied. As a result, it is possible to perform an evaluation in consideration of the actual use state of the measuring device 6.

Next, a second embodiment of the present invention will be described.

FIG. 3 is a circuit diagram showing a second embodiment of the present invention.
FIG. 4 is an explanatory diagram for outputting a glitch-like waveform by the circuit.

As a usual usage, one coaxial wiring is connected to one driver to supply a pulse waveform to a measuring device.

In this embodiment, in order to realize a glitch waveform as shown in FIG. 4, three drivers 11, 12, and 13 as shown in FIG.
The waveforms are applied to the measuring device 18 after connecting the terminals 4, 15, and 16 on the I / F board 17 at the point (A).

As shown in FIG. 4A, DRV1 (1
1) is to output a waveform having an amplitude of Vih / Vil = Vih1 / Vil1, and to output Hig at timing T0.
It is assumed that h is switched to Low. As shown in FIG. 4B, DRV2 (12) is Vih / Vil = Vih
A waveform having an amplitude of 2 / Vil2 is output,
Switching from Low to High is delayed by W1 with respect to the timing T0.

As shown in FIG. 4C, DRV3 (1
3) is to output a waveform having an amplitude of Vih / Vil = Vih3 / Vil3, and switch from High to Low with a delay of W1 + W2 with respect to timing T0. At this time, DRV2 (12) also changes from High to L at the same time.
ow. Here, coaxial wiring 14,1
5 and 16 are connected at the point (A), the I / F
As shown in FIG. 4D, a combined waveform of the DRV1, DRV2, and DRV3 outputs is applied to the measurement device 18 in the board 17.

As described above, according to the second embodiment, the waveforms applied to the measuring device 18 are DRV1 (11) and DV1 (11).
RV2 (12) and DRV3 (13) are synthesized, and FIG.
A glitch waveform as shown in FIG. That is, V
ih = (Vih1 + Vih2 + Vih3) / 3, Vil
= (Vil1 + Vil2 + Vil3) / 3, and Vn1 = (Vil1 +) for the time from the switching point T0 of the DRV1 (11) from High to Low to W1.
Vih2 + Vih3) / 3, and T0 to W
The time of 1 + W2 is Vn2 = (Vil1 + Vih2 + Vi)
h3) / 3 can be supplied to the measuring device with the glitch waveform holding the potential. This makes it possible to evaluate the measuring device 18 in consideration of the actual use state.

Next, a third embodiment of the present invention will be described.

FIG. 5 is a circuit diagram showing a third embodiment of the present invention.
FIG. 6 is an explanatory diagram for outputting a step-like waveform by the circuit.

As shown in FIG. 5, each of the drivers has a noise generating circuit 23 inside the tester, and can output a step-like waveform as shown in FIG. That is, a driver DRV1 (21) for supplying a pulse waveform to the measuring device 27 is provided with one set of a noise generation circuit DRV1 '(22).
1 '(22) is connected to the DRV via the switch SW1 (24).
1 (21). SW1 (24) is a control signal S
Controlled by _CONT .

In a normal state, the noise generating circuit 23 shown in FIG. 5 is turned off by the switch SW1 (24). As shown in FIG. 6A, the driver DRV1 (21) outputs the pulse waveform to the measuring device 27. To supply. On the other hand, in order to supply the stepwise waveform shown in FIG. 6C to the measurement device, the switch SW1 (24) is turned on to connect the noise generation circuit 23 to the DRV1 (21).

As shown in FIG. 6A, DRV1 is set to Vi
It is assumed that a waveform having an amplitude of h / Vil = Vih1 / Vil1 is output, and from timing High to Lo at timing T0.
w. The driver DRV1 '(22) in the noise generating circuit 23 outputs a waveform having an amplitude of Vih / Vil = Vih2 / Vil2, as shown in FIG.
Switching from High to Low with a delay. Here, DRV1 (21) and D are determined by SW1 (24).
Since the RV1 '(22) is connected, a combined waveform of the DRV1 output and the DRV1' output is applied to the measurement device 27 in the I / F board 26 via the coaxial wiring 25. .

As described above, according to the third embodiment, SW1
(24) is switched to set the noise generation circuit 23 to DRV1.
When connected to (21), the waveform applied to the measurement device 27 is a combination of DRV1 (21) and DRV1 '(22), resulting in a step-like waveform as shown in FIG.
That is, Vih = (Vih1 + Vih2) / 2, Vi
1 = (Vil1 + Vil2) / 2, and D
During the time from the switching point T0 to the switching point W of the RV1 from High to Low, the step-like waveform holding the potential of Vn = (Vil1 + Vih2) / 2 can be supplied to the measuring device 27. This makes it possible to evaluate the measuring device 27 in consideration of the actual use state without changing the wiring of the I / F board 26.

Next, a fourth embodiment of the present invention will be described.

FIG. 7 is a circuit diagram showing a fourth embodiment of the present invention.
FIG. 8 is an explanatory diagram for outputting a glitch-like waveform by the circuit.

As shown in FIG. 7, each of the drivers has a noise generating circuit 34 inside the tester, and can output a glitch waveform as shown in FIG. That is, the noise generation circuit DRV1 '(3) is supplied to the driver DRV1 (31) that supplies the pulse waveform to the measurement device 38.
2), one set of DRV1 ″ (33),
1 '(32) and DRV1 "(33) are switches SW1
It is supplied to DRV1 (31) via (35). SW
1 (35) is controlled by the control signal S _CONT .

In a normal state, the noise generation circuit shown in FIG. 7A is turned off by SW1 (35).
The driver DRV1 (31) supplies a pulse waveform to the measurement device. On the other hand, in order to supply a glitch waveform as shown in FIG.
5) is turned ON, and the noise generation circuit is switched to DRV1 (3).
Connect to 1).

Therefore, as shown in FIG.
1, a waveform having an amplitude of Vih / Vil = Vih1 / Vil1 is output, and High is output at timing T0.
To Low. DRV1 '(3
2) Vih / Vil = Vih as shown in FIG.
A waveform having an amplitude of 2 / Vil2 is output,
Delay from timing T0 by W1 to Low to H
Switch to igh.

As shown in FIG. 8C, DRV1 ″ (3
3) is to output a waveform having an amplitude of Vih / Vil = Vih3 / Vil3, and switch from High to Low with a delay of W1 + W2 with respect to timing T0. At this time, the DRV 1 ′ (32) also switches from High to Low at the same time. Here, SW1 (35)
DRV1 (31) and DRV1 '(32), DRV
1 ″ (33) is connected to the measuring device 38 in the I / F board 37 via the coaxial wiring 36.
A combined waveform of the RV1 output, the DRV1 'output, and the DRV1 "output is applied.

As described above, according to the fourth embodiment, SW1
(35) is switched to set the noise generation circuit 34 to DRV1.
When connected to (31), the waveform applied to the measuring device 38 is DRV1 (31), DRV1 '(32),
DRV1 ″ (33) is synthesized to form a glitch waveform as shown in FIG. 8D. That is, Vih = (Vih1)
+ Vih2 + Vih3) / 3, Vil = (Vil1 + V)
il2 + Vil3) / 3, and DRV1
(31) Switching from High to Low from point T0 to W
Time 1 is Vn1 = (Vil1 + Vil2 + Vih3)
/ 3, and the time from T0 to W1 + W2 is Vn
A glitch waveform holding a potential of 2 = (Vil1 + Vil2 + Vih3) / 3 can be supplied to the measurement device 38. This makes it possible to evaluate the measuring device 38 in consideration of the actual use state without changing the wiring of the I / F board 37.

Next, a fifth embodiment of the present invention will be described.

FIG. 9 is a circuit diagram showing a fifth embodiment of the present invention.
FIG. 10 is an explanatory diagram for outputting a staircase waveform by the circuit, and FIG. 11 is an explanatory diagram for outputting a glitch waveform by the circuit.

First, as shown in FIG. 9, each of the drivers has a noise generating circuit 44 inside the tester.
It is possible to output a step-like waveform as shown in (c) or a glitch waveform as shown in FIG.
In other words, the driver DRV1 (41) that supplies a pulse waveform to the measurement device 49 receives the DR
V1 '(42) and DRV1 "(43), and DRV1' (42) is supplied to DRV1 (41) via switch SW1 (45).
(43) DRV1 via switch SW2 (46)
(41). SW1 (45), SW2 (4
6) Each control signal S _CONT1, which is controlled by the control signal S _{CONT 2.}

In a normal state, the noise generation circuit 44 shown in FIG. 9 is turned off by the switch SW1 (45), and the driver DRV1 (41) outputs the pulse waveform to the measuring device 4.
9. On the other hand, FIG.
To supply the step-like waveform shown in (c), SW1 (4
5) is turned ON, and the noise generation circuit 44 is switched to DRV1.
(41) and SW2 (46) is turned off.

As shown in FIG. 10A, DRV1 (4
It is assumed that 1) outputs a waveform having an amplitude of Vih / Vil = Vih1 / Vil1, and Hig is output at timing T0.
It is assumed that h is switched to Low. The driver DRV1 '(42) in the noise generation circuit 44 is shown in FIG.
As shown in FIG. 7, a waveform having an amplitude of Vih / Vil = Vih2 / Vil2 is output, and the timing T0 is switched from High to Low with a delay of W. Here, DRV1 (4) is set by SW1 (45).
Since 1) and DRV1 '(42) are connected,
As shown in FIG.
A combined waveform of one output and DRV1 'output is applied.

Further, in order to supply the glitch waveform shown in FIG.
N to DRV1 (41)
And SW2 (46) is turned on. FIG.
As shown in (a), DRV1 (41) is converted to Vih / Vi
It is assumed that a waveform having an amplitude of 1 = Vih1 / Vil1 is output, and that the waveform is switched from High to Low at timing T0. DRV1 '(42) is shown in FIG.
As shown in the figure, a waveform having an amplitude of Vih / Vil = Vih2 / Vil2 is output, and the timing T0
Is switched from Low to High with a delay of W1.

As shown in FIG. 11 (c), DRV1 ″ (43) outputs a waveform having an amplitude of Vih / Vil = Vih3 / Vil3, and is delayed from W0 by W1 + W2 with respect to the timing T0, and from Low to High. At this time, DRV1 '(41) is also set to H at the same time.
It is assumed that switching from high to Low is performed.

Here, SW1 (45) and SW2 (46)
DRV1 (41), DRV1 '(42), DRV
1 "(43) is connected to the measurement device 49 in the I / F board 48, so that the DRV1 output and the DRV1
The combined waveform of the 1 'output and the DRV1 "output is applied via the coaxial wiring 47.

As described above, according to the fifth embodiment, SW1
(45) is switched to DRV1 'of the noise generation circuit 44.
(42) is connected to DRV1 (41), and SW2 (4
When DRV1 ″ (43) is cut off according to 6), the waveform applied to the measuring device 49 is a combination of DRV1 (41) and DRV1 ′ (42), and has a step-like waveform as shown in FIG. That is, Vih = (Vih1
+ Vih2) / 2, Vil = (Vil1 + Vil2) /
2 and the DRV1 (41) switches from High to Low from the point T0 to the time W from Vn = (Vil
A step-like waveform holding the potential of (1 + Vih2) / 2 can be supplied to the measuring device 49.

The switch SW1 (45) is switched to connect the noise generation circuit 44 to the DRV1 (41).
When DRV1 ″ (43) is connected according to 6), the waveform applied to the measuring device 49 is DRV1 (41) and DV1 (41).
RV1 ′ (42) and DRV1 ″ (43) are combined to form a glitch waveform as shown in FIG. 11D. That is, Vih = (Vih1 + Vil2 + Vih3) / 3,
Vil = (Vil1 + Vil2 + Vil3) / 3, and Vn1 = (Vil1) during the time from the switching point T0 of the DRV1 (41) from High to Low to W1 from W1.
+ Vil2 + Vih3) / 3, and the time from T0 to W1 + W2 is Vn2 = (Vil1 + Vih2 + V)
A glitch waveform holding the potential of ih3) / 3 can be supplied to the measuring device 49.

Thus, without changing the wiring of the I / F board 48, the measuring device 4 in consideration of the actual use state can be used.
9 is possible.

Next, a sixth embodiment of the present invention will be described.

FIG. 12 is a circuit diagram showing a sixth embodiment of the present invention, FIG. 13 is an explanatory diagram for outputting a stepwise waveform by the circuit, and FIG. 14 is an explanatory diagram for outputting a glitch waveform by the circuit. That is, FIG. 12 performs connection switching between drivers by a switch inside the tester, and FIG.
It is possible to output a step-like waveform as shown in (c) or a glitch waveform as shown in FIG.

As shown in FIG. 12, a driver DRV1 (51), a driver DRV2 (52), and a driver DRV3 (53) for supplying a pulse waveform to the measuring device 59 are provided. These drivers are switches SW1 (54),
They are connected to each other via a switch SW2 (55) and a switch SW3 (56). SW1 (54), SW2
(55) and SW3 (56) are control signals S
_CONT1, controlled by S _CONT2, S _CONT3 is performed.

In a normal state, as shown in FIG.
Each of the two drivers is in a disconnected state, and separately supplies a pulse waveform to the measuring device 59.

On the other hand, in order to supply the step-like waveform shown in FIG. 13C to the measuring device 59, the switch SW2 (55) is switched by the control signal S _CONT2 and the DRV2 (5
2) and DRV1 (51) are connected. In that case, FIG.
As shown in FIG. 3 (a), DRV1 (51) is set to Vih / V
It is assumed that a waveform having an amplitude of il = Vih1 / Vil1 is output, and that the waveform is switched from High to Low at timing T0. DRV2 (52) is shown in FIG.
As shown in the figure, a waveform having an amplitude of Vih / Vil = Vih2 / Vil2 is output, and the timing T0
Is switched from High to Low with a delay of W. Here, DRV1 is set by SW2 (55).
Since (51) and DRV2 (52) are connected, as shown in FIG.
The combined waveform of the RV1 output and the DRV2 output is applied.

[0057] To supply the glitch waveform shown in FIG. 14 (d) to the measuring device 59, control signal S changeover switch SW2 (55) by _CONT2, the control signal S _CONT3 switches the switch SW3 (56) DRV2 ( 5
2) and DRV3 (53) are connected to DRV1 (51).

As shown in FIG. 14A, DRV1 (5
It is assumed that 1) outputs a waveform having an amplitude of Vih / Vil = Vih1 / Vil1, and Hig is output at timing T0.
It is assumed that h is switched to Low. DRV2 (5
2) Vih / Vil = V as shown in FIG.
It is assumed that a waveform having an amplitude of ih2 / Vil2 is to be output, and the timing is switched from Low to High by delaying the timing T0 by W1. DRV3 (53) is shown in FIG.
As shown in (c), Vih / Vil = Vih3 / Vi
It is assumed that a waveform having an amplitude of l3 is to be output, and the waveform is delayed from High by L
Switch to ow. At this time, DRV2 (52) is also H
It is assumed that switching from high to Low is performed.

Here, SW2 (55) and SW3 (5
6) DRV1 (51) and DRV2 (52), DRV1
Since V3 (53) is connected, the glitch waveform obtained by combining the DRV1 output, the DRV2 output, and the DRV3 output is coaxial to the measurement device 59 in the I / F board 57 as shown in FIG. This is applied via the wiring 58.

As described above, according to the sixth embodiment, SW2
(55) is switched to DRV2 (52) for DRV1 (5
When connected to 1), the waveform applied to the measuring device 59 is a combination of DRV1 (51) and DRV2 (52), resulting in a step-like waveform as shown in FIG. That is, Vih = (Vih1 + Vih2) / 2, Vil =
(Vil1 + Vil2) / 2 amplitude and DRV
During the time from the switching point T0 from High to Low of 1 (51) from W to W, a step-like waveform holding the potential of Vn = (Vil1 + Vih2) / 2 can be supplied to the measuring device 59.

By switching SW2 (55) and SW3 (56), DRV2 (52) and DRV3 (53) are switched to DRV
1 (51), the waveform applied to the measurement device 59 is a combination of DRV1 (51), DRV2 (52) and DRV3 (53), and a glitch waveform as shown in FIG. Become. That is, Vih = (Vih1
+ Vil2 + Vih3) / 3, Vil = (Vil1 + V)
il2 + Vil3) / 3 with DRV1
The time from the switching point T0 from High to Low in (51) to W1 is Vn1 = (Vil1 + Vil2 + Vih).
3) A potential of 3/3 can be held, and a glitch waveform holding a potential of Vn2 = (Vil1 + Vih2 + Vih3) / 3 can be supplied to the measuring device 59 during the time from T0 to W1 + W2.

As a result, the measurement device 5 can be used in consideration of the actual use state without changing the wiring of the I / F board 57.
9 is possible.

Next, a seventh embodiment of the present invention will be described.

FIG. 15 is a circuit diagram showing a seventh embodiment of the present invention, FIG. 16 is an explanatory diagram for outputting a stepwise waveform by the circuit, and FIG. 17 is an explanatory diagram for outputting a glitch waveform by the circuit. That is, FIG. 15 shows that the connection between the drivers is switched by a switch inside the tester, and FIG.
It is possible to output a step-like waveform as shown in (c) or a glitch waveform as shown in FIG. 17 (d).

At the time of normal measurement, the measuring devices 74 and 7
Driver DRV1 for supplying pulse waveform to 5, 76
₁ (61) to DRV1 _n (63), and drivers DRV1 _{n + 1} (64), DRV which become redundant during normal measurement.
1 _{n + 2} (65). DRV1 _{n + 1} (6
4) DRV1 via switch SW1 (69-1)
₁ (61) to DRV1 _n (63) are connected to DRV1
_n + 2 (65) is connected via a switch _{SW2 (69-2) DRV1 1 (61} ) ~DRV1 to _n (63). SW1 (69-1) and SW2 (69-2) are turned on by the control signal S _CONT1 and the control signal S _CONT2 , respectively.
/ OFF control is performed.

At the time of device measurement, it is necessary to input n signals, and correspondingly, n drivers DRV1 ₁
(61) to DRV1 _n (63) are required. In a normal state, in FIG. 15, each driver is in a disconnected state, and supplies a separate pulse waveform to the measuring device 74, 75, 76.

The measuring devices 74, 75, 76
To supply the step-like waveform shown in FIG.
By switching the switch SW1 (69-1) by _CONT1, it is connected to a driver has a surplus DRV1 _n + 1 (64) the _{DRV1 1 (61) ~DRV1 n (} 63).

As shown in FIG. 16A, DRV1
₁ (61) to DRV1 _n (63) are calculated as Vih / Vil = V
It is assumed that a waveform having an amplitude of ih1 / Vil1 is output, and that the waveform is switched from High to Low at timing T0. As shown in FIG. 16B, DRV1 _{n + 1} (64) outputs a waveform having an amplitude of Vih / Vil = Vih2 / Vil2, and delays from timing T0 by W to change from High to Low. Shall switch. Here, DRV1 _{1 is set} by SW1 (69-1).
(61) to DRV1 _n (63) and DRV1 _{n + 1} (64)
Are connected, the measuring devices 74, 75,
76, DRV1 ₁ (6) as shown in FIG.
1) to DRV1 _n (63) and DRV1 _{n + 1} (6
The combined waveform of the output of 4) is applied.

The measuring devices 74, 75, 76
To supply the glitch waveform shown in (d), the control signal S
_The switch SW1 (69-1) is switched by _CONT1 , and the switch SW2 is further switched by the control signal S _CONT2.
Driver D that has become redundant after switching (69-2)
RV1 _{n + 1} (64) and DRV1 _{n + 2} (65) are converted to DRV1
₁ (61) to DRV1 _n (63).

DRV1 ₁ (61) to DRV1 _n (63)
Is Vih / Vil = Vih, as shown in FIG.
A waveform having an amplitude of 1 / Vil1 is output,
It is assumed that switching from High to Low is performed at timing T0. As shown in FIG. 17 (b), DRV1 _{n + 1} (64) outputs a waveform having an amplitude of Vih / Vil = Vih2 / Vil2, and delays from timing T0 by W1 to change from low to high. Switch.

DRV1 _{n + 2} (65) outputs a waveform having an amplitude of Vih / Vil = Vih3 / Vil3 as shown in FIG. 17C, and the timing shown in FIG. 17D. Switching from High to Low is delayed by T1 + W2 with respect to T0. At this time, DRV1
_It is assumed that _{n + 1} (64) is simultaneously switched from High to Low.

Here, SW1 (69-1) and SW2
According to (69-2), DRV1 ₁ (61) to DRV1
_n (63), DRV1 _{n + 1} (64), DRV1 _{n + 2} (6
5) that are connected, the measuring device 74, 75, 76 in the I / F board 70 DRV1 ₁ to DRV
The combined waveforms of the 1 _n output, the DRV _{n + 1} output, and the DRV _{1 n + 2} output are coaxial wirings 66:71, 67:72, 68: 7.
3 will be applied.

As described above, according to the seventh embodiment, SW1
(69-1) is switched to DRV1 _{n + 1}DR of (64)
V1₁(61)-DRV1_nPlace connected with (63)
The waveforms applied to the measuring devices 74, 75, 76
Is DRV1₁(61)-DRV1_n(63) and DRV
1_{n + 1}(64) is synthesized, as shown in FIG.
It becomes a step-like waveform. That is, Vih = (Vih1^*x
+ Vih2) / (x + 1), Vil = (Vil1^*x +
Vil2) / (x + 1) and DRV1₁
(61)-DRV1_nFrom (63) High to Low
The time from switching point T0 to W is Vn = (Vil1^*x
+ Vih2) / (x + 1) stepped waveform holding potential
Can be supplied to the measuring devices 74, 75, 76.
Become so.

SW1 (69-1) and SW2 (69-
2) Switch to DRV1 _{n + 1} (64) and DRV
_{n + 2} (65) is converted from DRV1 ₁ (61) to DRV1 _n (6
When connected to 3), the measuring devices 74, 75, 76
Are applied to DRV1 ₁ (61) to DRV1 _n
(63) and DRV1 _{n + 1} (64) and DRV _{n + 2} (65)
Are combined to form a glitch waveform as shown in FIG. That is, Vih = (Vih1 ^* x + Vil2 +
Vih3) / (x + 2), Vil = (Vil1 ^* x + V
il2 + Vil3) / (x + 2), and D
RV1 (61) switching point T from High to Low
The time from 0 to W1 is Vn1 = (Vil1 ^* x + Vil2)
+ Vih3) / (x + 2), and from T0 to W
The time of 1 + W2 is Vn2 = (Vil1 ^* x + Vil2 +
A glitch waveform holding the potential of (Vih3) / (x + 2) can be supplied to the measuring devices 74, 75, and 76.

As a result, the measuring device 7 in consideration of the actual use state can be used without changing the wiring of the I / F board 70.
4,75,76 evaluations are possible.

The first embodiment, the second embodiment,
In the case of the sixth embodiment, the number of drivers required to add noise is twice as large in the case of a staircase waveform and three times as large in the case of a glitch waveform. When the measurement is performed, the number of measurements is smaller than in the normal state. On the other hand, in the case of the present embodiment, noise can be added to n drivers by using one or two surplus drivers, so that the number of simultaneous measurements is not reduced,
The selection of the measuring device in consideration of the actual use state becomes possible.

Note that the present invention is not limited to the above-described embodiment, and various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

[0078]

As described above, according to the present invention, the following effects can be obtained.

(A) A driver input accompanied by a noise waveform can be performed, and a semiconductor test can be performed in consideration of an actual use state.

In particular, a step-like waveform or a glitch waveform can be supplied as an applied voltage for a semiconductor test.

(B) The semiconductor device can be tested in consideration of the actual use state without changing the wiring of the I / F board.

(C) The number of drivers required to add noise is twice as large in the case of a staircase waveform and three times as many in the case of a glitch waveform. Therefore, simultaneous measurement is performed during mass production sorting. In this case, the number of measurements is smaller than in the normal state. However, in the case of the present invention, noise can be added to n drivers with one or two surplus drivers. In addition, it is possible to select a semiconductor device in consideration of an actual use state.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing a first embodiment of the present invention.

FIG. 2 is an explanatory diagram for outputting a step-like waveform by a circuit according to the first embodiment of the present invention.

FIG. 3 is a circuit diagram showing a second embodiment of the present invention.

FIG. 4 is an explanatory diagram for outputting a glitch-like waveform by a circuit according to a second embodiment of the present invention.

FIG. 5 is a circuit diagram showing a third embodiment of the present invention.

FIG. 6 is an explanatory diagram for outputting a step-like waveform by a circuit according to a third embodiment of the present invention.

FIG. 7 is a circuit diagram showing a fourth embodiment of the present invention.

FIG. 8 is an explanatory diagram for outputting a glitch-like waveform by a circuit according to a fourth embodiment of the present invention.

FIG. 9 is a circuit diagram showing a fifth embodiment of the present invention.

FIG. 10 is an explanatory diagram for outputting a step-like waveform by a circuit according to a fifth embodiment of the present invention.

FIG. 11 is an explanatory diagram for outputting a glitch waveform by a circuit according to a fifth embodiment of the present invention.

FIG. 12 is a circuit diagram showing a sixth embodiment of the present invention.

FIG. 13 is an explanatory diagram for outputting a step-like waveform by a circuit according to a sixth embodiment of the present invention.

FIG. 14 is an explanatory diagram for outputting a glitch waveform by a circuit according to a sixth embodiment of the present invention.

FIG. 15 is a circuit diagram showing a seventh embodiment of the present invention.

FIG. 16 is an explanatory diagram for outputting a step-like waveform by a circuit according to a seventh embodiment of the present invention.

FIG. 17 is an explanatory diagram for outputting a glitch waveform by a circuit according to the seventh embodiment of the present invention.

[Explanation of symbols]

1,11,21,31,41,51 DRV1 2,12,52 DRV2 3,4,14,15,16,25,36,47,58,
66, 67, 68, 71, 72, 73 Coaxial wiring 5, 17, 26, 37, 48, 57, 70 I / F board 6, 18, 27, 38, 49, 59, 74, 75, 76
Measurement device 13,53 DRV3 22,32,42 DRV1'23,34,44 Noise generation circuit 24,35,45,54,69-1 Switch SW1 33,43 DRV1 ″ 46,55,69-2 Switch SW2 56 Switch SW3 61 DRV1 ₁ 62 DRV1 ₂ 63 DRV1 _n 64 DRV1 _{n + 1} 65 DRV1 _{n + 2}

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Toshiaki Kato 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. (72) Inventor Shigeru Katakura 1-7-112 Toranomon, Minato-ku, Tokyo Inside Electric Industry Co., Ltd. (72) Inventor Nakamura Yoshiyoshi F 7-term, 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. F-term (reference) 2G032 AB07 AE06 AE07 AG01

Claims (7)

[Claims] 1. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, wherein a stepwise waveform is supplied to a measuring device by connecting two driver outputs to a single point by coaxial wiring. 2. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, wherein a glitch waveform is supplied to a measuring device by connecting three driver outputs to a single point by coaxial wiring. 3. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, wherein a noise generating circuit is provided in the driver to supply a step-like waveform to a measuring device. 4. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, wherein a glitch waveform is supplied to a measuring device by providing a noise generating circuit in the driver. 5. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, wherein a noise generating circuit is provided in the driver to supply a staircase waveform or a glitch waveform to a measuring device. 6. A method for generating a driver input with a noise waveform in a semiconductor test apparatus, comprising: providing a switch for connecting a driver to another driver; and supplying a stepped waveform or a glitch waveform to a measurement device. 7. A noise of a semiconductor test apparatus, wherein a driver is provided with a switch for connecting to all other drivers, and a step-like waveform or a glitch waveform is supplied to a measurement device without reducing the number of simultaneous measurements. Driver input generation method with waveform.