JP2002022415A5 - - Google Patents
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- Publication number
- JP2002022415A5 JP2002022415A5 JP2001128287A JP2001128287A JP2002022415A5 JP 2002022415 A5 JP2002022415 A5 JP 2002022415A5 JP 2001128287 A JP2001128287 A JP 2001128287A JP 2001128287 A JP2001128287 A JP 2001128287A JP 2002022415 A5 JP2002022415 A5 JP 2002022415A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001128287A JP2002022415A (ja) | 2000-05-01 | 2001-04-25 | 微小突起物検査装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000131966 | 2000-05-01 | ||
| JP2000-131966 | 2000-05-01 | ||
| JP2001128287A JP2002022415A (ja) | 2000-05-01 | 2001-04-25 | 微小突起物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002022415A JP2002022415A (ja) | 2002-01-23 |
| JP2002022415A5 true JP2002022415A5 (ja) | 2006-10-26 |
Family
ID=26591328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001128287A Pending JP2002022415A (ja) | 2000-05-01 | 2001-04-25 | 微小突起物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002022415A (ja) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003329407A (ja) * | 2002-05-14 | 2003-11-19 | Sharp Corp | 光学式距離測定装置およびそれを用いた印刷装置 |
| JP2003327346A (ja) * | 2002-05-14 | 2003-11-19 | Sharp Corp | 光学式物体識別装置およびそれを用いた印刷装置 |
| JP2004045111A (ja) | 2002-07-10 | 2004-02-12 | Hitachi High-Technologies Corp | 照明光学機構装置、および、欠陥検査装置 |
| JP4963544B2 (ja) * | 2005-10-11 | 2012-06-27 | 株式会社ブイ・テクノロジー | 微小高さ測定装置 |
| JP4725967B2 (ja) * | 2006-02-09 | 2011-07-13 | 株式会社ブイ・テクノロジー | 微小高さ測定装置及び変位計ユニット |
| JP5146636B2 (ja) * | 2007-01-31 | 2013-02-20 | 株式会社ブイ・テクノロジー | 高さ測定装置 |
| JP5231927B2 (ja) * | 2008-10-06 | 2013-07-10 | 株式会社日立ハイテクノロジーズ | 微小突起物検査装置 |
| KR101114362B1 (ko) * | 2009-03-09 | 2012-02-14 | 주식회사 쓰리비 시스템 | 결점검사를 위한 검사장치 |
| JP5046054B2 (ja) * | 2009-04-02 | 2012-10-10 | レーザーテック株式会社 | 欠陥検査装置、欠陥検査方法、光学式走査装置、半導体デバイス製造方法 |
| JP5603181B2 (ja) * | 2010-09-10 | 2014-10-08 | 大同特殊鋼株式会社 | 凹部の検査方法と凹部の検査装置 |
| US9885656B2 (en) | 2014-12-17 | 2018-02-06 | Kla-Tencor Corporation | Line scan knife edge height sensor for semiconductor inspection and metrology |
| US10088298B2 (en) | 2015-09-04 | 2018-10-02 | Kla-Tencor Corporation | Method of improving lateral resolution for height sensor using differential detection technology for semiconductor inspection and metrology |
| US9958257B2 (en) | 2015-09-21 | 2018-05-01 | Kla-Tencor Corporation | Increasing dynamic range of a height sensor for inspection and metrology |
| US11423526B2 (en) * | 2020-11-13 | 2022-08-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Optical inspection of a wafer |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54151265U (ja) * | 1978-04-12 | 1979-10-20 | ||
| JP2966950B2 (ja) * | 1991-03-25 | 1999-10-25 | 理化学研究所 | 試料変位測定装置 |
| JPH08327334A (ja) * | 1995-06-05 | 1996-12-13 | Toshiba Corp | ギャップ測定装置 |
| JP4067602B2 (ja) * | 1996-12-09 | 2008-03-26 | 富士通株式会社 | 高さ検査方法、それを実施する高さ検査装置 |
| JP3678916B2 (ja) * | 1998-06-09 | 2005-08-03 | 株式会社ミツトヨ | 非接触三次元測定方法 |
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2001
- 2001-04-25 JP JP2001128287A patent/JP2002022415A/ja active Pending