JP2002016120A - Semiconductor wafer transporting system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the productivity in a clean room by continuing transportation of a wafer even in the maintenance period of a storage device, suppressing increase of the transportation period of a storage container and shortening the entire manufacturing period of a semiconductor product. SOLUTION: A maintenance schedule planned on the storage device is stored and an alternate storage device is selected from the other storage device during an operation before maintenance is performed based on the schedule. Information on the transportation destination and the transportation destination of the storage container is changed in accordance with the selected alternate storage device, and the wafer is transported by using the alternate storage device even if the storage device during the operation exists based on the change.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor wafer transfer system used in a semiconductor manufacturing line, and more particularly to a wafer transfer in a case where there is a storage device in a maintenance state.

[0002]

2. Description of the Related Art A conventional transfer system for a semiconductor manufacturing line will be described with reference to FIGS.

FIGS. 7 and 8 show an example of the configuration of a conventional semiconductor wafer transfer system. As shown in FIG. 7A, a conventional transfer system for transferring semiconductor wafers includes an in-room transfer device 1, an inter-room transfer device 2, a storage device 3,
In-room transfer device control device 4 for controlling the movement of in-room transfer device 1, inter-room transfer device control device 5 for controlling the movement of inter-room transfer device 2, and storage device control device for controlling the movement of storage device 3. 6 and a host computer 7 for managing the operation of each control device. FIG. 7B shows FIG.
It is an enlarged view of the part enclosed with the broken line of (a). Reference numeral 11 denotes a process device.

As shown in FIG. 8, each of the control devices 4, 5, and 6 is connected online to a host computer 7 and is provided for each room. 1 and 2 are connected, and the storage device 3 is connected below the control device 6.

As shown in FIG. 9, the conventional storage device 3 includes a storage container mounting portion 8a for transferring the storage container to the intra-room transfer device 1 and a storage container mounting portion 8 for transferring the storage container to the inter-room transfer device 2. A storage shelf 9 for storing a plurality of storage containers; and a storage container transport device 10.

In a clean room, semiconductor wafers are transferred by a transfer device 1 in a room or a transfer device 2 between rooms while being housed in a storage container. At this time, the storage containers transported in the room and between the rooms are temporarily stored in the storage devices 3 installed in a plurality in the clean room, and then transported by the in-room transport device 1 or the inter-room transport device 2. Usually it is. The storage device 3 is used as an interface between the intra-room transport device 1 and the inter-room transport device 2 or between the intra-room transport devices 1 for transferring storage containers.
Incidentally, the host computer of the conventional transport system does not know the maintenance plan schedule of the storage device.

FIG. 10 is a diagram showing a flow of wafer transfer in a conventional semiconductor wafer transfer system. The wafer is transferred from the process device 11 in the room 1 to the in-room transfer device 1 and the storage device 3. When the wafer enters maintenance, the transfer of the wafer is interrupted until the maintenance is completed. afterwards,
When the maintenance is completed, the storage device 3 in the room 1 is transferred to the in-room transfer device 2 in the room 2 and further stored in the storage device 3 (room n).
It is transferred to the process device 11 at the destination via the in-room transfer device 1 (room n).

[0008]

In the conventional semiconductor wafer transfer system described above, there is a state in which the storage device 3 enters a maintenance state. In this maintenance state, the storage device 3 completely functions as a storage device. Stop. As described above, the storage device 3 includes the in-room transport device 1 and the inter-room transport device 2
During the maintenance of the storage device 3, as shown in FIG. 10, it is impossible to transport the storage container into and out of the room where the storage device 3 exists. Become. Further, in the conventional transport system, since the maintenance plan of the storage device 3 is not known, the other transport device cannot cope with the planned maintenance of the storage device.

For this reason, in the conventional semiconductor wafer transfer system, the maintenance period is directly counted as a transfer wait,
There has been a problem that the period for transporting the storage container increases, the period for manufacturing semiconductor products increases overall, and the productivity of the clean room decreases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is to allow the wafer transfer to be continued even during the maintenance period of the storage device. An object of the present invention is to provide a semiconductor wafer transfer system capable of suppressing an increase in the work period, shortening the manufacture time of semiconductor products comprehensively and improving the productivity of a clean room.

[0011]

In order to achieve the above object, the present invention is characterized in that a plurality of storage shelves, a storage container transfer device for transferring semiconductor wafer storage containers in the storage shelves, and the storage container transfer device. A storage device provided with at least one storage container mounting portion for transferring the storage container to and from the outside by the storage container transport device, a storage device control device controlling operation of the storage device, and the storage container mounting portion In a semiconductor wafer transfer system having a transfer device that loads and unloads a storage container and moves to a destination, a transfer device control device that controls the operation of the transfer device, and a host computer that controls the operation of each control device A maintenance plan schedule storage unit for storing a maintenance plan schedule planned for the storage device; and a maintenance schedule based on the schedule from the maintenance plan schedule storage unit. An alternative storage device selection unit for selecting an alternative storage device from other storage devices in operation before implementation, and a source and a destination of the storage container according to the alternative storage device selected by the alternative storage device selection unit The host computer is provided with a transfer command change unit for changing the information of the storage device, and the host computer switches and uses the storage device according to the maintenance plan schedule.

According to a second aspect of the present invention, the host computer selects and switches an alternative storage device by the alternative storage device selection unit based on a maintenance plan schedule in the maintenance plan schedule storage unit, and responds to the selected storage device. The transport device moves the storage container already stored in the storage device to an alternative storage device selected before maintenance is performed.

When the storage device control device of the third aspect of the present invention recognizes that a trouble has occurred suddenly in the storage device, the alternative storage device selection unit selects an alternative storage device,
The transfer command changing unit changes the transfer command according to the selected alternative storage device, and the transfer device control device controls the operation of the transfer device according to the transfer command.

When the storage device control device of the present invention recognizes that the trouble of the storage device has been resolved, the host computer releases the function of the alternative storage device selection unit, and the transfer command change unit transmits the substitute storage device selection unit. In response to the release, the transfer command is restored, and the transfer device control device controls the operation of the transfer device using the restored storage device according to the transfer command.

According to a fifth aspect of the present invention, the maintenance plan schedule storage unit updates and stores the current maintenance status and the maintenance plan schedule as needed.

A feature of the invention of claim 6 is that at least one or more storage devices transport the storage container to another room.
And the second storage container transport device has a second storage container mounting portion for transferring the storage container to the outside.

According to the present invention, a maintenance plan schedule storage unit for a storage device is provided in a semiconductor wafer transfer system used in a semiconductor manufacturing line, and the storage device used in accordance with the maintenance plan schedule is switched to an alternative storage device. By using an alternative storage device, it is possible to transport storage containers during a maintenance period, thereby shortening the transport period and improving productivity.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a semiconductor wafer transfer system according to a first embodiment of the present invention. However, the same parts as those in the conventional example will be described with the same reference numerals. In FIG. 1A, the present transport system includes an in-room transport device 1, an inter-room transport device 2, a storage container storage device 3, an in-room transport device control device 4, an inter-room transport device control device 5, , A storage device control device 6 and a host computer 7.

Further, the host computer 7 includes a maintenance plan schedule storage unit 12, an alternative storage device selection unit 13,
It has a transfer command changing unit 14, and the in-room transfer device control device 4, the inter-room transfer device control device 5, and the storage device control device 6 are connected below it. Incidentally, FIG.
(A) is an enlarged view of a portion surrounded by a broken line. still,
Reference numeral 11 denotes a process device.

FIG. 2 is a diagram showing a configuration example of the storage device 3 described above. A storage container mounting portion 8a for transferring the storage container to the in-room transfer device 1, a storage container mounting portion 8b for transferring the storage container to the inter-room transfer device 2, a storage shelf 9 for storing a plurality of storage containers, and a storage container In addition to the transport device 10, a second device for transporting the storage container to another room different from the conventional example
And a second storage container mounting portion 16 for transferring the storage container to and from the outside.

In this example, an example in which a transfer robot is used for the second storage container transfer device 15 is shown, but the second storage container transfer device 15 can transfer a storage container to another room. Any form, such as a conveyor, may be used. The delivery of the storage container between the storage container transport device 10 and the second storage container transport device 15 is as follows.
This is performed in the storage container mounting portion 8a. Also, the storage container mounting part 8
A similar storage container mounting portion may be provided separately from a.

Next, the operation of this embodiment will be described with reference to the maintenance plan schedule of the storage device shown in FIG. The maintenance plan schedule storage unit 12 in the host computer 7 has maintenance plan schedule information (schedules such as regular maintenance and regular QC) as shown in FIG. 3 for all storage devices 3 installed in the semiconductor manufacturing clean room. are doing. FIG. 3 shows an example of a maintenance plan schedule of “one day”.
2 may store a maintenance plan schedule for a set period such as “one month”.

Here, consider a case where periodic maintenance occurs in the storage device 3 in the room 1. Based on the maintenance plan schedule stored in advance, the maintenance plan schedule storage unit 12 recognizes “scheduled maintenance of the storage device in the room 1” before starting maintenance. Based on the maintenance plan schedule information of all the storage devices 3 stored in the maintenance plan schedule storage unit 12,
Another storage device 3 in which the alternative storage device selection unit 13 is operating.
Is selected as the alternative storage device 3 from among the storage devices. After the alternative storage device 3 is selected, the transfer instruction changing unit 14 changes the transfer command of the intra-room transfer and the inter-room transfer according to the selected alternative storage device 3. According to the changed transfer command, the intra-room transfer device 1 and the inter-room transfer device 2
Transports the storage container under the control of the transport device controllers 4 and 5.

When the maintenance of the storage device 3 in the room 1 is completed, the host computer 7 recognizes "the maintenance completion of the storage device 3 in the room 1" through the storage device control device 6. In response to this recognition, the alternative storage device selection unit 13 releases the role of the “storage device 3 in the room 2” as the alternative storage device. In response to this, the transfer command changing unit 14 changes the transfer command again, and the in-room transfer device 1 and the inter-room transfer device 2 transfer the storage container using the storage device whose maintenance has been completed.

FIG. 4 shows the procedure of the storage device switching control based on the maintenance status described above. FIG. 5 shows the flow of transporting the storage containers during storage device maintenance.

FIG. 4 is a flow chart showing the procedure of storage device switching control by the host computer 7 during regular maintenance. In step 401, when the storage device 3 is operating, the maintenance plan schedule storage unit 12 of the host computer 7 checks the maintenance plan schedule of the storage device (room 1) in step 402, and in step 403,
Determine if a maintenance plan exists. If it does not exist, proceed to step 412; if it exists, step 4
Go to 04.

In step 404, the alternative storage device selection unit 13 selects the “storage device 3 (room 2)” as the alternative storage device 3.
In step 405, the transfer command changing unit 14 changes the transfer command in the room and between the rooms according to the alternative storage device 3, and sets the destination of the stored container. Next, in step 406, the storage container is transported according to the changed transport command. In step 407, it is determined whether the maintenance of the storage device 3 (room 1) has been completed. If the maintenance has not been completed, the process returns to step 402, and if completed, the process proceeds to step 408.

In step 408, the storage device controller 6
Recognizes that the maintenance has been completed. In step 409, the host computer 7 recognizes that the maintenance has been completed.
The alternative storage device selection unit 13 releases the function of the alternative storage device 3, and in step 411, the transfer command changing unit 14 changes all the transfer commands to the storage device 3 whose maintenance has been completed again. After that, in step 412, the storage container is transported using the storage device 3 whose maintenance has been completed in accordance with the transport command, and the process ends.

FIG. 5 is a diagram showing the flow of wafer transfer in the semiconductor wafer transfer system during storage device maintenance. The wafer is transferred from the process device 11 in the room 1 to the storage device in the room 2 (alternative to the maintenance device in the room 1 under maintenance) 3 through the in-room transfer device 1 and the second storage container transfer device 15 (room 1). Conveyed. Further, it is transported from the storage device 3 in the room 2 to the in-room transport device 2 in the room 2, and further transported to the destination process device 11 via the storage device 3 (room n) and the in-room transport device 1 (room n). Then, the conveyance is completed.

According to the present embodiment, the maintenance plan schedule of the storage device 3 is grasped in advance, and the storage device 3 that operates in another room according to the maintenance plan schedule is replaced with the storage device 3 that is under maintenance. Since the storage container can be used as 3, the storage container which has been impossible during the maintenance period can be transported, thereby shortening the transportation period, shortening the manufacturing period, and improving the productivity of the clean room.

The maintenance plan schedule storage unit 12 stores
Because it is connected online to the storage device controller 6,
It is preferable to update and store the scheduled maintenance plan schedule at any time while reflecting the current maintenance status.

Next, a second embodiment of the semiconductor wafer transfer system of the present invention will be described. However, since the configuration of the transport system is the same as that of the first embodiment, it will be described below with reference to FIG.

In the system of the present embodiment, since the control for transporting the storage containers stored in the storage device 3 before the periodic maintenance is performed with respect to the first embodiment, this point will be described. The maintenance plan schedule storage unit 12 of the host computer 7 recognizes that “the storage device 3 in the room 1 is scheduled for periodic maintenance” before starting maintenance. The alternative storage device selecting unit 13 performs an alternative storage of the “storage device 3 in the room 2” from the storage devices 3 that are in operation and have room for storage based on the stored maintenance plan schedule information of all the storage devices 3. Select as device 3. After the alternative storage device 3 is selected, the transfer instruction changing unit 14 changes the transfer command of the intra-room transfer and the inter-room transfer according to the selected alternative storage device 3. According to the changed transfer command, the inter-room transfer device 2 is switched to the storage device 3 to be maintained.
From the storage container to the alternative storage device 3.

When the maintenance of the storage device in the room 1 is completed, the host computer 7 recognizes “the maintenance of the storage device 3 in the room 1 is completed” through the storage device control device 6. In response to this recognition, the alternative storage device selection unit 13 releases the role of the “storage device 3 in the room 2” as the alternative storage device 3. In response, the transfer command changing unit 14 changes the transfer command again, and the inter-room transfer device 2 transfers the storage container using the storage device whose maintenance has been completed.

According to the present embodiment, a storage container already stored in the storage device 3 to be maintained is moved to another alternative storage device 3 before maintenance, and transported via the alternative storage device 3. Can be done. As a result, the storage container in the storage device 3 is not left unattended during the maintenance period,
It is possible to shorten the manufacturing period and improve the productivity of the clean room as compared with the first embodiment.

FIG. 6 is a flowchart showing a storage device switching control procedure according to a third embodiment of the semiconductor wafer transfer system of the present invention. This example is a control example in a case where a trouble suddenly occurs in the storage device 3 in addition to the first embodiment.
Since the configuration is the same as that of the first embodiment, the configuration of FIG.

It is assumed that a trouble occurs suddenly in the storage device 3 in the room 1 while the storage device 3 in the room 1 is operating (step 601) (step 602). Storage device controller 6
Recognizes "trouble has occurred in the storage device 3 in the room 1" (step 603), and notifies the host computer 7 of the trouble occurrence.
Inform

After the host computer 7 recognizes the sudden trouble (step 604), the alternative storage device selecting unit 13 selects the storage device in the room 2 as the alternative storage device from the other storage devices 3 in operation. "3" is selected (step 605). The transfer command changing unit 14 changes the transfer commands for the intra-room transfer and the inter-room transfer according to the selected alternative storage device 3 (step 606). According to the changed transfer command, the intra-room transfer device 1 and the inter-room transfer device 2 transfer the storage container using the alternative storage device 3 (60).
7).

Thereafter, when the sudden trouble of the storage device 3 is released (step 608), the storage device control device 6 recognizes that the trouble has been released (step 609).
The host computer 7 is controlled by the storage device controller 6
"Trouble cancellation of the storage device in room 1" is recognized (step 610). Upon receiving this recognition, the alternative storage device selection unit 1
3 releases the role of “storage device 3 in room 2” as an alternative storage device (step 611). In response, the transfer command changing unit 14 changes the transfer command again (step 61).
2), the in-room transport device 1 and the inter-room transport device 2 transport the storage container using the restored storage device 3 (step 613).

According to the present embodiment, it is possible to switch the storage device 3 to be used in response to unexpected unexpected trouble of the storage device 3. Accordingly, in addition to the effects of the first embodiment, further shortening of the transport period, shortening of the manufacturing period, and improvement in the productivity of the clean room can be expected. Further, by switching the storage device in conjunction with the start / end of maintenance for the occurrence of a sudden trouble, more efficient storage container transport becomes possible.

[0041]

As described above in detail, according to the first or sixth aspect of the present invention, the transfer of the wafer can be continued even during the maintenance period of the storage device. It is possible to suppress the increase, shorten the manufacturing period of the semiconductor products comprehensively, and improve the productivity of the clean room.

According to the second aspect of the present invention, a storage container already stored in a storage device scheduled for regular maintenance can be transferred to another operating storage device before maintenance.
This eliminates the need to leave the storage container unattended during the regular maintenance period, and it is possible to expect a shortened transport period, a shortened manufacturing period, and improved productivity.

According to the third or fourth aspect of the present invention, it is possible to cope with a sudden occurrence of an unplanned maintenance device, and it is expected that the transport period, the manufacturing period and the productivity will be further shortened. it can.

According to the fifth aspect of the invention, the current maintenance status and maintenance plan schedule can be updated / recorded at any time, and the latest maintenance plan schedule information can be handled.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a semiconductor wafer transfer system according to a first embodiment of the present invention.

FIG. 2 is a diagram illustrating a configuration example of a storage device illustrated in FIG. 1;

FIG. 3 is a table illustrating an example of a maintenance plan schedule of a storage device stored in a maintenance plan schedule storage unit illustrated in FIG. 1;

FIG. 4 is a flowchart showing a storage device switching control procedure when there is a storage device under maintenance by the host computer shown in FIG. 1;

5 is a diagram showing a flow of transport of the storage container during maintenance of the storage device by the system of FIG. 1;

FIG. 6 is a flowchart showing a storage device switching control procedure according to a third embodiment of the semiconductor wafer transfer system of the present invention.

FIG. 7 is a block diagram showing a configuration example of a conventional semiconductor wafer transfer system.

FIG. 8 is a block diagram showing a configuration of a control system of a conventional semiconductor wafer transfer system.

FIG. 9 is a diagram illustrating a configuration example of a storage device illustrated in FIG. 7;

10 is a diagram showing a flow of transport of the storage container during maintenance of the storage device by the system of FIG. 7;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 In-room transfer device 2 Between-room transfer device 3 Storage container storage device 4 In-room transfer device control device 5 Between-room transfer device control device 6 Storage device control device 7 Host computer 8a, 8b Storage container placement part 9 Storage shelf 10 Storage container transfer device 11 Process device 12 Maintenance plan schedule storage unit 13 Alternative storage device selection unit 14 Transfer command change unit 15 Second storage container transfer device 16 Second storage container mounting unit

Claims (6)

[Claims] A plurality of storage shelves, a storage container transfer device for transferring the semiconductor wafer storage containers in the storage shelves, and at least one storage container mounting for transferring the storage containers between the storage container transfer device and the outside; A storage device including a storage unit, a storage device control device that controls the operation of the storage device, a transport device that loads and unloads a storage container at the storage container mounting unit, and moves to a destination, and the transfer device. In a semiconductor wafer transfer system having a transfer device control device for controlling the operation of the control device and a host computer for controlling the operation of each control device, a maintenance plan schedule storage unit for storing a maintenance plan schedule planned for the storage device; An alternative to selecting an alternative storage device from other storage devices in operation before performing maintenance based on a schedule from the maintenance plan schedule storage unit. A spare storage device selecting unit, and a transfer command changing unit that changes information of a transfer source and a transfer destination of the storage container according to the substitute storage device selected by the substitute storage device selecting unit, wherein the host computer includes: A semiconductor wafer transfer system, wherein a host computer switches and uses a storage device according to the maintenance plan schedule. 2. The method according to claim 1, wherein the host computer selects an alternative storage device by the alternative storage device selection unit based on a maintenance plan schedule in the maintenance plan schedule storage unit.
Switching, the transport device according to the selected storage device,
2. The semiconductor wafer transfer system according to claim 1, wherein a storage container already stored in the storage device is moved to an alternative storage device selected before maintenance is performed. 3. When the storage device control device recognizes that a trouble has occurred suddenly in the storage device, the alternative storage device selection unit selects an alternative storage device, and the transfer command change unit selects the alternative storage device. 3. The semiconductor wafer transfer system according to claim 1, wherein a transfer command is changed according to an alternative storage device, and the transfer device control device controls an operation of the transfer device according to the transfer command. 4. When the storage device control device recognizes that the trouble of the storage device has been resolved, the host computer releases the function of the alternative storage device selection unit, and the transport command change unit responds to the release. 4. The semiconductor wafer transfer system according to claim 3, wherein the transfer command is returned to its original state, and the transfer device control device controls the operation of the transfer device using a storage device restored according to the transfer command. 5. The semiconductor wafer transfer system according to claim 1, wherein the maintenance plan schedule storage unit updates and stores a current maintenance status and a maintenance plan schedule as needed. 6. A storage container transport device, wherein at least one storage device transports the storage container to another room,
6. The semiconductor wafer transfer system according to claim 1, wherein the second storage container transfer device has a second storage container mounting portion for transferring the storage container between the outside and the outside.