JP2002001240A5 - - Google Patents
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- JP2002001240A5 JP2002001240A5 JP2000180193A JP2000180193A JP2002001240A5 JP 2002001240 A5 JP2002001240 A5 JP 2002001240A5 JP 2000180193 A JP2000180193 A JP 2000180193A JP 2000180193 A JP2000180193 A JP 2000180193A JP 2002001240 A5 JP2002001240 A5 JP 2002001240A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000180193A JP2002001240A (ja) | 2000-06-15 | 2000-06-15 | スピン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000180193A JP2002001240A (ja) | 2000-06-15 | 2000-06-15 | スピン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002001240A JP2002001240A (ja) | 2002-01-08 |
| JP2002001240A5 true JP2002001240A5 (enExample) | 2007-08-16 |
Family
ID=18681339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000180193A Pending JP2002001240A (ja) | 2000-06-15 | 2000-06-15 | スピン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002001240A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101206923B1 (ko) | 2011-03-29 | 2012-11-30 | 주식회사 엘지실트론 | 매엽식 웨이퍼 세정 장치 |
| JP6045840B2 (ja) * | 2012-07-30 | 2016-12-14 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
| JP6027465B2 (ja) * | 2013-03-11 | 2016-11-16 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
| KR20170093366A (ko) * | 2016-02-05 | 2017-08-16 | 주식회사 이오테크닉스 | 웨이퍼 세정 장치 |
| CN110522272B (zh) * | 2019-07-12 | 2020-11-20 | 永康市莱晶科技有限公司 | 一种新型多功能紫外消毒杀菌功能的杯盖 |
| CN115780363B (zh) * | 2022-11-25 | 2023-11-21 | 江化微(镇江)电子材料有限公司 | 一种电子化学品内衬设备的清洗装置及清洗方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04269820A (ja) * | 1991-02-26 | 1992-09-25 | Hitachi Ltd | スピン塗布装置及びスピン塗布方法 |
| JP2886382B2 (ja) * | 1992-03-16 | 1999-04-26 | 東京エレクトロン株式会社 | 塗布装置 |
| JP3171965B2 (ja) * | 1992-10-19 | 2001-06-04 | 島田理化工業株式会社 | スピン洗浄乾燥装置 |
| JP3013686B2 (ja) * | 1993-02-17 | 2000-02-28 | 三菱電機株式会社 | 送風機 |
| JPH1133467A (ja) * | 1997-07-22 | 1999-02-09 | Dainippon Screen Mfg Co Ltd | 飛散防止カップの洗浄方法及び塗布装置 |
| JPH11329960A (ja) * | 1998-02-23 | 1999-11-30 | Toshiba Corp | 基板処理方法及び基板処理装置 |
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2000
- 2000-06-15 JP JP2000180193A patent/JP2002001240A/ja active Pending