JP2002001240A5 - - Google Patents

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Publication number
JP2002001240A5
JP2002001240A5 JP2000180193A JP2000180193A JP2002001240A5 JP 2002001240 A5 JP2002001240 A5 JP 2002001240A5 JP 2000180193 A JP2000180193 A JP 2000180193A JP 2000180193 A JP2000180193 A JP 2000180193A JP 2002001240 A5 JP2002001240 A5 JP 2002001240A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000180193A
Other languages
Japanese (ja)
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JP2002001240A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000180193A priority Critical patent/JP2002001240A/ja
Priority claimed from JP2000180193A external-priority patent/JP2002001240A/ja
Publication of JP2002001240A publication Critical patent/JP2002001240A/ja
Publication of JP2002001240A5 publication Critical patent/JP2002001240A5/ja
Pending legal-status Critical Current

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JP2000180193A 2000-06-15 2000-06-15 スピン処理装置 Pending JP2002001240A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000180193A JP2002001240A (ja) 2000-06-15 2000-06-15 スピン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000180193A JP2002001240A (ja) 2000-06-15 2000-06-15 スピン処理装置

Publications (2)

Publication Number Publication Date
JP2002001240A JP2002001240A (ja) 2002-01-08
JP2002001240A5 true JP2002001240A5 (cg-RX-API-DMAC7.html) 2007-08-16

Family

ID=18681339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000180193A Pending JP2002001240A (ja) 2000-06-15 2000-06-15 スピン処理装置

Country Status (1)

Country Link
JP (1) JP2002001240A (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101206923B1 (ko) 2011-03-29 2012-11-30 주식회사 엘지실트론 매엽식 웨이퍼 세정 장치
JP6045840B2 (ja) * 2012-07-30 2016-12-14 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6027465B2 (ja) * 2013-03-11 2016-11-16 東京エレクトロン株式会社 基板処理装置及び基板処理方法
KR20170093366A (ko) * 2016-02-05 2017-08-16 주식회사 이오테크닉스 웨이퍼 세정 장치
CN110522272B (zh) * 2019-07-12 2020-11-20 永康市莱晶科技有限公司 一种新型多功能紫外消毒杀菌功能的杯盖
CN115780363B (zh) * 2022-11-25 2023-11-21 江化微(镇江)电子材料有限公司 一种电子化学品内衬设备的清洗装置及清洗方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04269820A (ja) * 1991-02-26 1992-09-25 Hitachi Ltd スピン塗布装置及びスピン塗布方法
JP2886382B2 (ja) * 1992-03-16 1999-04-26 東京エレクトロン株式会社 塗布装置
JP3171965B2 (ja) * 1992-10-19 2001-06-04 島田理化工業株式会社 スピン洗浄乾燥装置
JP3013686B2 (ja) * 1993-02-17 2000-02-28 三菱電機株式会社 送風機
JPH1133467A (ja) * 1997-07-22 1999-02-09 Dainippon Screen Mfg Co Ltd 飛散防止カップの洗浄方法及び塗布装置
JPH11329960A (ja) * 1998-02-23 1999-11-30 Toshiba Corp 基板処理方法及び基板処理装置

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