JP2001505119A5 - - Google Patents
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- Publication number
- JP2001505119A5 JP2001505119A5 JP1997536618A JP53661897A JP2001505119A5 JP 2001505119 A5 JP2001505119 A5 JP 2001505119A5 JP 1997536618 A JP1997536618 A JP 1997536618A JP 53661897 A JP53661897 A JP 53661897A JP 2001505119 A5 JP2001505119 A5 JP 2001505119A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH948/96 | 1996-04-15 | ||
| CH00948/96A CH692446A5 (de) | 1996-04-15 | 1996-04-15 | Verfahren zur Herstellung von Werkstücken und von Teilen hierfür |
| PCT/CH1997/000147 WO1997039472A1 (de) | 1996-04-15 | 1997-04-14 | Verwendung eines reinigungsverfahrens, reinigungsverfahren, verbindungsverfahren und werkstückpaar |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001505119A JP2001505119A (ja) | 2001-04-17 |
| JP2001505119A5 true JP2001505119A5 (enExample) | 2005-03-10 |
| JP4086902B2 JP4086902B2 (ja) | 2008-05-14 |
Family
ID=4198897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53661897A Expired - Fee Related JP4086902B2 (ja) | 1996-04-15 | 1997-04-14 | 工作物を製造するための方法および構成要素を処理する方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US6203637B1 (enExample) |
| EP (1) | EP0894332B8 (enExample) |
| JP (1) | JP4086902B2 (enExample) |
| CH (1) | CH692446A5 (enExample) |
| DE (1) | DE59710130D1 (enExample) |
| WO (1) | WO1997039472A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH692446A5 (de) * | 1996-04-15 | 2002-06-28 | Esec Sa | Verfahren zur Herstellung von Werkstücken und von Teilen hierfür |
| FR2778190B1 (fr) * | 1998-05-04 | 2000-06-02 | Air Liquide | Procede et appareil de traitement de surfaces metalliques par voie seche |
| US6605175B1 (en) * | 1999-02-19 | 2003-08-12 | Unaxis Balzers Aktiengesellschaft | Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber |
| US6749691B2 (en) | 2001-02-14 | 2004-06-15 | Air Liquide America, L.P. | Methods of cleaning discolored metallic arrays using chemical compositions |
| US6776330B2 (en) | 2001-09-10 | 2004-08-17 | Air Products And Chemicals, Inc. | Hydrogen fluxless soldering by electron attachment |
| US6902774B2 (en) | 2002-07-25 | 2005-06-07 | Inficon Gmbh | Method of manufacturing a device |
| US7387738B2 (en) * | 2003-04-28 | 2008-06-17 | Air Products And Chemicals, Inc. | Removal of surface oxides by electron attachment for wafer bumping applications |
| US7079370B2 (en) * | 2003-04-28 | 2006-07-18 | Air Products And Chemicals, Inc. | Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation |
| US7897029B2 (en) * | 2008-03-04 | 2011-03-01 | Air Products And Chemicals, Inc. | Removal of surface oxides by electron attachment |
| US8361340B2 (en) * | 2003-04-28 | 2013-01-29 | Air Products And Chemicals, Inc. | Removal of surface oxides by electron attachment |
| US6980015B2 (en) * | 2003-06-17 | 2005-12-27 | Agilent Technologies, Inc. | Back side probing method and assembly |
| DE502006003016D1 (de) * | 2005-05-04 | 2009-04-16 | Oerlikon Trading Ag | Plasmaverstärker für plasmabehandlungsanlage |
| US7434719B2 (en) * | 2005-12-09 | 2008-10-14 | Air Products And Chemicals, Inc. | Addition of D2 to H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment |
| US20070243713A1 (en) * | 2006-04-12 | 2007-10-18 | Lam Research Corporation | Apparatus and method for generating activated hydrogen for plasma stripping |
| KR101046520B1 (ko) | 2007-09-07 | 2011-07-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 내부 챔버 상의 부산물 막 증착을 제어하기 위한 ｐｅｃｖｄ 시스템에서의 소스 가스 흐름 경로 제어 |
| US8454850B2 (en) | 2009-09-02 | 2013-06-04 | Air Products And Chemicals, Inc. | Method for the removal of surface oxides by electron attachment |
| US9006975B2 (en) | 2011-02-09 | 2015-04-14 | Air Products And Chemicals, Inc. | Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment |
| US9053894B2 (en) | 2011-02-09 | 2015-06-09 | Air Products And Chemicals, Inc. | Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment |
| JP6219227B2 (ja) * | 2014-05-12 | 2017-10-25 | 東京エレクトロン株式会社 | ヒータ給電機構及びステージの温度制御方法 |
| CN115430663A (zh) * | 2022-08-17 | 2022-12-06 | 成都飞机工业（集团）有限责任公司 | 一种电子束金属表面清洗方法 |
| CN117798451B (zh) * | 2024-03-01 | 2024-04-30 | 深圳市志胜威电子设备有限公司 | 一种选择性波峰焊喷锡装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2663580B2 (ja) * | 1988-11-22 | 1997-10-15 | 日本電気株式会社 | シリコン表面のパッシベーション方法及び装置 |
| GB8827933D0 (en) * | 1988-11-30 | 1989-01-05 | Plessey Co Plc | Improvements relating to soldering processes |
| DE4032328A1 (de) * | 1989-11-06 | 1991-09-19 | Wls Karl Heinz Grasmann Weichl | Verfahren und vorrichtung zur verarbeitung von zu verloetenden fuegepartnern |
| DE4029270C1 (enExample) | 1990-09-14 | 1992-04-09 | Balzers Ag, Balzers, Li | |
| DE4029268C2 (de) | 1990-09-14 | 1995-07-06 | Balzers Hochvakuum | Verfahren zur gleichspannungs-bogenentladungs-unterstützten, reaktiven Behandlung von Gut und Vakuumbehandlungsanlage zur Durchführung |
| DE59202116D1 (de) | 1991-04-23 | 1995-06-14 | Balzers Hochvakuum | Verfahren zur Abtragung von Material von einer Oberfläche in einer Vakuumkammer. |
| US5376223A (en) * | 1992-01-09 | 1994-12-27 | Varian Associates, Inc. | Plasma etch process |
| CH687111A5 (de) * | 1992-05-26 | 1996-09-13 | Balzers Hochvakuum | Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens. |
| US5409543A (en) * | 1992-12-22 | 1995-04-25 | Sandia Corporation | Dry soldering with hot filament produced atomic hydrogen |
| CH692446A5 (de) * | 1996-04-15 | 2002-06-28 | Esec Sa | Verfahren zur Herstellung von Werkstücken und von Teilen hierfür |
-
1996
- 1996-04-15 CH CH00948/96A patent/CH692446A5/de not_active IP Right Cessation
-
1997
- 1997-04-14 JP JP53661897A patent/JP4086902B2/ja not_active Expired - Fee Related
- 1997-04-14 DE DE59710130T patent/DE59710130D1/de not_active Expired - Lifetime
- 1997-04-14 EP EP97915247A patent/EP0894332B8/de not_active Expired - Lifetime
- 1997-04-14 WO PCT/CH1997/000147 patent/WO1997039472A1/de not_active Ceased
-
1998
- 1998-10-15 US US09/172,598 patent/US6203637B1/en not_active Expired - Lifetime
-
2000
- 2000-12-05 US US09/729,176 patent/US6503351B2/en not_active Expired - Fee Related
-
2002
- 2002-10-16 US US10/270,495 patent/US20030051792A1/en not_active Abandoned