JP2001501369A5 - - Google Patents

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Publication number
JP2001501369A5
JP2001501369A5 JP1998515996A JP51599698A JP2001501369A5 JP 2001501369 A5 JP2001501369 A5 JP 2001501369A5 JP 1998515996 A JP1998515996 A JP 1998515996A JP 51599698 A JP51599698 A JP 51599698A JP 2001501369 A5 JP2001501369 A5 JP 2001501369A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP1998515996A
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English (en)
Japanese (ja)
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JP4163752B2 (ja
JP2001501369A (ja
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Priority claimed from US08/802,829 external-priority patent/US5738800A/en
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Publication of JP2001501369A publication Critical patent/JP2001501369A/ja
Publication of JP2001501369A5 publication Critical patent/JP2001501369A5/ja
Application granted granted Critical
Publication of JP4163752B2 publication Critical patent/JP4163752B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP51599698A 1996-09-27 1997-09-26 複合物を研磨するための組成物及び方法 Expired - Lifetime JP4163752B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US2727796P 1996-09-27 1996-09-27
US08/802,829 1997-02-19
US08/802,829 US5738800A (en) 1996-09-27 1997-02-19 Composition and method for polishing a composite of silica and silicon nitride
US60/027,277 1997-02-19
PCT/US1997/017503 WO1998013218A1 (en) 1996-09-27 1997-09-26 Composition and method for polishing a composite

Publications (3)

Publication Number Publication Date
JP2001501369A JP2001501369A (ja) 2001-01-30
JP2001501369A5 true JP2001501369A5 (enExample) 2005-05-12
JP4163752B2 JP4163752B2 (ja) 2008-10-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP51599698A Expired - Lifetime JP4163752B2 (ja) 1996-09-27 1997-09-26 複合物を研磨するための組成物及び方法

Country Status (5)

Country Link
US (2) US5738800A (enExample)
EP (1) EP0930978B1 (enExample)
JP (1) JP4163752B2 (enExample)
DE (1) DE69724632T2 (enExample)
WO (1) WO1998013218A1 (enExample)

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