JP2001358208A5 - - Google Patents

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Publication number
JP2001358208A5
JP2001358208A5 JP2000180182A JP2000180182A JP2001358208A5 JP 2001358208 A5 JP2001358208 A5 JP 2001358208A5 JP 2000180182 A JP2000180182 A JP 2000180182A JP 2000180182 A JP2000180182 A JP 2000180182A JP 2001358208 A5 JP2001358208 A5 JP 2001358208A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000180182A
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Japanese (ja)
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JP2001358208A (ja
JP4422300B2 (ja
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Publication date
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Priority to JP2000180182A priority Critical patent/JP4422300B2/ja
Priority claimed from JP2000180182A external-priority patent/JP4422300B2/ja
Publication of JP2001358208A publication Critical patent/JP2001358208A/ja
Publication of JP2001358208A5 publication Critical patent/JP2001358208A5/ja
Application granted granted Critical
Publication of JP4422300B2 publication Critical patent/JP4422300B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000180182A 2000-06-15 2000-06-15 ウェハ処理装置 Expired - Lifetime JP4422300B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000180182A JP4422300B2 (ja) 2000-06-15 2000-06-15 ウェハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000180182A JP4422300B2 (ja) 2000-06-15 2000-06-15 ウェハ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007192099A Division JP4422745B2 (ja) 2007-07-24 2007-07-24 ウェハ位置ずれ検出装置およびウェハ位置ずれ検出方法

Publications (3)

Publication Number Publication Date
JP2001358208A JP2001358208A (ja) 2001-12-26
JP2001358208A5 true JP2001358208A5 (enrdf_load_html_response) 2007-09-06
JP4422300B2 JP4422300B2 (ja) 2010-02-24

Family

ID=18681331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000180182A Expired - Lifetime JP4422300B2 (ja) 2000-06-15 2000-06-15 ウェハ処理装置

Country Status (1)

Country Link
JP (1) JP4422300B2 (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4650273B2 (ja) * 2006-01-12 2011-03-16 シンフォニアテクノロジー株式会社 基板搬送装置、および基板位置検出方法
JP2007227781A (ja) * 2006-02-24 2007-09-06 Tokyo Electron Ltd 基板の位置ずれ検査機構，処理システム及び基板の位置ずれ検査方法
JP2010032242A (ja) * 2008-07-25 2010-02-12 Yamatake Corp 基板検出装置
WO2023023444A1 (en) * 2021-08-17 2023-02-23 Tokyo Electron Limited Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber
CN119542247B (zh) * 2025-01-23 2025-05-06 四川艾庞机械科技有限公司 一种用于led芯片干法蚀刻的载片治具

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