JP2001358050A5 - - Google Patents
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- JP2001358050A5 JP2001358050A5 JP2000176963A JP2000176963A JP2001358050A5 JP 2001358050 A5 JP2001358050 A5 JP 2001358050A5 JP 2000176963 A JP2000176963 A JP 2000176963A JP 2000176963 A JP2000176963 A JP 2000176963A JP 2001358050 A5 JP2001358050 A5 JP 2001358050A5
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- 239000000758 substrate Substances 0.000 claims 28
- 238000011156 evaluation Methods 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 6
- 230000002093 peripheral Effects 0.000 claims 5
- 230000000875 corresponding Effects 0.000 claims 4
- 240000004282 Grewia occidentalis Species 0.000 claims 3
- 230000003287 optical Effects 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000176963A JP3823692B2 (ja) | 2000-06-13 | 2000-06-13 | 露光基板の製造方法及び電気光学装置の製造方法、並びに露光基板及び電気光学装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000176963A JP3823692B2 (ja) | 2000-06-13 | 2000-06-13 | 露光基板の製造方法及び電気光学装置の製造方法、並びに露光基板及び電気光学装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001358050A JP2001358050A (ja) | 2001-12-26 |
| JP2001358050A5 true JP2001358050A5 (ko) | 2004-12-24 |
| JP3823692B2 JP3823692B2 (ja) | 2006-09-20 |
Family
ID=18678619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000176963A Expired - Fee Related JP3823692B2 (ja) | 2000-06-13 | 2000-06-13 | 露光基板の製造方法及び電気光学装置の製造方法、並びに露光基板及び電気光学装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3823692B2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4617650B2 (ja) * | 2003-09-26 | 2011-01-26 | セイコーエプソン株式会社 | 多面取り用フォトマスク、電気光学装置の製造方法 |
-
2000
- 2000-06-13 JP JP2000176963A patent/JP3823692B2/ja not_active Expired - Fee Related
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