JP2001343754A - Aligner for printed circuit board material, and work feeding and discharging method - Google Patents

Aligner for printed circuit board material, and work feeding and discharging method

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Publication number
JP2001343754A
JP2001343754A JP2000161785A JP2000161785A JP2001343754A JP 2001343754 A JP2001343754 A JP 2001343754A JP 2000161785 A JP2000161785 A JP 2000161785A JP 2000161785 A JP2000161785 A JP 2000161785A JP 2001343754 A JP2001343754 A JP 2001343754A
Authority
JP
Japan
Prior art keywords
circuit board
printed circuit
board material
exposure apparatus
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000161785A
Other languages
Japanese (ja)
Inventor
Ikuo Ito
郁夫 伊藤
Hisaya Takeda
尚也 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Howa Machinery Ltd
Original Assignee
Howa Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Howa Machinery Ltd filed Critical Howa Machinery Ltd
Priority to JP2000161785A priority Critical patent/JP2001343754A/en
Publication of JP2001343754A publication Critical patent/JP2001343754A/en
Pending legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce the floor space in the longitudinal direction of a machine bed of an aligner, and to improve workability in feeding and discharging stocks by an operator. SOLUTION: The aligner 1 is constituted to put racks 8 into and from transfer devices 5 and 6 from a direction orthogonal with a transfer direction, by which the floor length over the entire part of the aligner 1 may be shortened. Arrangement is made so that the racks 8 are supplied to the transfer positions 5 and 6 and may be taken out of the same, in the putting-in and out positions 7A and 7B which are both right and left sides on the same side with respect to the front of an exposure device body 2, where the operator exists, so that the distance at which the operator moves from the front to the putting-in and out positions 7A and 7B to and from the same is shortened, and workability is improved.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、プリント基板材
に所要の導体パターンを露光する露光装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for exposing a printed circuit board to a required conductor pattern.

【0002】[0002]

【従来の技術】プリント配線板の製造工程においては、
露光装置にプリント基板材を供給し、供給されたプリン
ト基板材に対して、露光装置本体内で所要の導体パター
ンと同じ露光パターンを有する露光マスクを介して、基
板材の導体箔に塗布したエッチングレジスト膜を露光し
てエッチングレジスト膜に耐エッチング処理を施して露
光装置から取り出し、その後、導体箔をエッチングして
所要の導体パターンを形成している。このような露光装
置は、従来、図3に示すように、上記の露光マスクを用
いた露光処理を行う露光装置本体Aに対して、その機台
長手方向(プリント基板材の搬送方向)の一側(供給
側)にプリント基板材Wの供給用の搬送装置Bを、ま
た、他側(排出側)に、露光処理されたプリント基板材
Wを排出する為の搬送装置Cを備えており、供給用の搬
送装置Bに対しては、機台の長手外側から多数の基板材
Wを斜めに重ねて保持した基板ストック手段(基板スト
ッカ)D1を供給してそのストッカD1から一枚ずつ搬
送装置Bへ移し替え、また、空になったストック手段D
1を搬送装置Bから機台長手外側の台車E上に載せ替え
ている。また、露光処理後に水平に排出されてくる基板
材Wを搬送装置Cから一枚ずつ受け取って斜めに保持す
るストッカD2は、同様に排出側の搬送装置Cに対し
て、機台長手外側の台車E上から排出側の搬送装置Cに
送り込まれ、また、基板材Wを多数枚受け取った排出側
のストッカD2は、機台長手外側に接台した台車Eへと
取り出されていた。
2. Description of the Related Art In a manufacturing process of a printed wiring board,
The printed circuit board material is supplied to the exposure apparatus, and the supplied printed circuit board material is applied to the conductor foil of the substrate material via an exposure mask having the same exposure pattern as the required conductor pattern in the exposure apparatus body. The resist film is exposed to light and the resist film is subjected to an etching-resistant treatment and taken out of the exposure device. Thereafter, the conductor foil is etched to form a required conductor pattern. Conventionally, as shown in FIG. 3, such an exposure apparatus is arranged such that an exposure apparatus main body A for performing an exposure process using the above-described exposure mask is moved in one direction in a machine base longitudinal direction (transfer direction of a printed circuit board material). A transfer device B for supplying the printed circuit board material W is provided on the side (supply side), and a transfer device C for discharging the exposed printed circuit board material W is provided on the other side (discharge side). The supply device B is supplied with substrate stock means (substrate stocker) D1 which holds a large number of substrate materials W obliquely from the longitudinal outside of the machine base, and transfers the substrate material one by one from the stocker D1. Transfer to B and empty stock means D
1 is transferred from the transfer device B to the carriage E on the outside of the machine base in the longitudinal direction. The stocker D2, which receives the substrate materials W discharged horizontally after the exposure processing one by one from the transport device C and holds the substrate materials diagonally, is also provided to the transport device C on the discharge side by a bogie located outside the machine base in the machine longitudinal direction. The stocker D2 on the discharge side, which has been sent from above E to the transfer device C on the discharge side and has received a large number of substrate materials W, has been taken out to the carriage E which is attached to the outside of the machine base in the longitudinal direction.

【0003】[0003]

【発明が解決しようとする課題】前記従来の露光装置で
は、供給側、排出側の各搬送装置に対して、基板材のス
トッカが機台長手方向の外側から出し入れされている。
こうしたストッカは、上述のように運搬台車などに載せ
て運搬されてくるので、搬送装置の機台長手外側に、運
搬台車が配置される所要の作業スペースが必要となり、
装置全体の長手方向設置スペースが大きくなる問題があ
る。また、露光装置本体の操作面側に対して、機台本体
の長手方向外側となるストッカの供給位置(運搬台車の
接台位置)とが離れている為、作業者が操作面側に位置
している状態から前記接台位置まで移動することが、わ
ずらわしい問題もあった。この発明の課題は、露光装置
における機台長手方向の設置スペースの削減と、作業者
によるストッカ給排作業性の向上を目指すものである。
In the above-mentioned conventional exposure apparatus, a stocker for a substrate material is put in and taken out of the supply side and the discharge side from the outside in the machine base longitudinal direction.
Since such a stocker is transported on a transport trolley or the like as described above, a required work space where the transport trolley is arranged outside the machine longitudinal of the transport device is required,
There is a problem that the installation space in the longitudinal direction of the entire apparatus becomes large. In addition, since the supply position of the stocker (positioning position of the carriage), which is located outside the machine body in the longitudinal direction, is away from the operation surface side of the exposure apparatus body, the worker is positioned on the operation surface side. There is also a problem that it is troublesome to move from the state of being in the state to the abutment position. SUMMARY OF THE INVENTION It is an object of the present invention to reduce the installation space of an exposure apparatus in the machine base longitudinal direction and improve the workability of stocker supply and discharge by an operator.

【0004】[0004]

【課題を解決するための手段】前記課題解決のため、本
願プリント基板材の露光装置では、露光装置本体を挟ん
だ機台長手の一方側と他方側にプリント基板材の供給
側、排出側の搬送装置を夫々配置し、これらの搬送装置
にプリント基板材のストック手段を別途運搬して出し入
れする形式のプリント基板材の露光装置において、各ス
トック手段は、各ストック手段と対応する搬送装置に対
して、機台長手方向と直交する方向から出し入れされる
ことを特徴とする(請求項1)。露光装置本体の操作面
側に、搬送装置と機台長手方向位置を重ねて各ストック
手段の搬送装置への出し入れ位置が設定されている(請
求項2)。ストック手段は運搬台車上に載せられて運搬
されるものであって、その運搬台車が前記出し入れ位置
に運搬される(請求項3)。また本願は、露光装置本体
を挟んだ機台長手の一方側と他方側にプリント基板材の
供給側、排出側の搬送装置を夫々配置して成るプリント
基板材の露光装置において、搬送装置で搬送されるプリ
ント基板材を、露光装置本体の正面両側で、搬送装置に
対して、基板材の搬送方向と交差する方向から供給、排
出するようにしたことを特徴とする(請求項4)。
In order to solve the above-mentioned problems, in the exposure apparatus for printed circuit board material of the present invention, one side and the other side of the machine base with the exposure apparatus main body interposed therebetween are provided on the supply side and the discharge side of the printed circuit board material. In the exposure apparatus of the printed circuit board material of the type in which the transporting devices are respectively arranged and the transporting means of the printed circuit board material are separately transported and taken in and out of these transporting devices, each stocking device is provided to the transporting device corresponding to each stocking device. And is inserted and removed from a direction perpendicular to the machine base longitudinal direction (claim 1). On the operation surface side of the exposure apparatus main body, the transfer device and the machine base longitudinal position are overlapped with each other, and the position of each stock unit with respect to the transfer device is set (claim 2). The stock means is carried on a carrier, and the carrier is carried to the loading / unloading position (claim 3). The present invention also relates to a printed board material exposing apparatus in which a printed board material supply side and a discharge side transfer apparatus are respectively disposed on one side and the other side of a machine base length with an exposure apparatus main body interposed therebetween, and the conveyance apparatus is used for the conveyance apparatus. The printed circuit board material to be supplied and discharged to and from the transport device on both sides of the front surface of the exposure apparatus main body in a direction intersecting the transport direction of the substrate material.

【0005】[0005]

【発明の実施の形態】図1には,本願露光装置1の全体
平面図を示している。露光装置本体2内には、図示しな
いが、露光パターンを有するマスクフイルムを貼りつけ
た露光マスク、プリント基板材Wを保持して、露光マス
クに対する位置あわせをするアライメントテーブル、露
光マスクを介してプリント基板材Wに塗膜されたエッチ
ングレジスト膜に露光を行う露光ランプなどが内蔵され
ている。露光装置本体2のケーシング3は、たとえば前
記露光マスクの交換作業などのために、正面側が開閉式
扉4となっており、この正面は、露光装置本体2への操
作を指示する操作盤などが配置された操作面となってい
る。
FIG. 1 is an overall plan view of an exposure apparatus 1 of the present invention. Although not shown, an exposure mask to which a mask film having an exposure pattern is adhered, an alignment table for holding a printed board material W and aligning the exposure substrate with the exposure mask, and printing through the exposure mask, which are not shown. An exposure lamp for exposing the etching resist film coated on the substrate material W is incorporated. The casing 3 of the exposure apparatus main body 2 has an opening / closing door 4 on the front side for exchanging the exposure mask, for example, and an operation panel for instructing the operation of the exposure apparatus main body 2 is provided on the front side. The operation surface is arranged.

【0006】露光装置本体2の長手方向の一方側(左
側)は、プリント基板材Wの供給側となっている。この
供給側には、基板材Wを機台長手に沿って水平に搬送し
て露光装置本体2内へ送り込む供給側の搬送装置(コン
ベア)5が配置されている。一方,露光装置本体2の長
手方向の他側(図1の右側)には、露光処理されたプリ
ント基板材Wを機台長手の外方へ排出する排出側搬送装
置(コンベア)6が配置されている。これらの搬送装置
5、6と機台長手方向位置を重ねるように、露光装置本
体2の操作面(正面)側の左右には、各搬送装置5、6
へストック手段を供給するストック手段の供給位置(出
し入れ位置)7A,7Bが設定されている。
One side (left side) of the exposure apparatus main body 2 in the longitudinal direction is a supply side of the printed circuit board material W. On the supply side, a supply-side transfer device (conveyor) 5 that transfers the substrate material W horizontally along the machine base length and sends it into the exposure apparatus main body 2 is arranged. On the other hand, on the other side in the longitudinal direction of the exposure apparatus main body 2 (the right side in FIG. 1), a discharge-side transfer device (conveyor) 6 for discharging the exposed printed circuit board material W to the outside of the machine base is arranged. ing. Each of the transfer devices 5 and 6 is located on the left and right sides of the operation surface (front) of the exposure apparatus main body 2 so that the transfer devices 5 and 6 overlap with the machine base longitudinal direction position.
Supply positions (in / out positions) 7A and 7B of the stock means for supplying the stock means are set.

【0007】ストック手段は、例えば、図2に示すよう
に、多数枚のプリント基板材Wを斜めに持たせかけてお
くラック8であり、露光装置1の前工程でこうしたラッ
ク8に収容され、運搬台車9に載置されて運搬されてく
る。このラック8は、対応する搬送装置5の台5A上に
載せられて使用される。運搬台車9は、前記ストック手
段の供給位置7A,7Bに接台され、その運搬台車9か
ら対応する搬送装置5、6の台5A上に移し替えられ
る。供給側の搬送装置5には、搬送装置5の台5A上に
載せかえられたラック8上のプリント基板材Wを1枚ず
つ搬送装置5に乗せかえる図示しない移し替え手段が設
けてある。また、排出側の搬送装置6には、搬送装置6
で排出されてきた露光済みのプリント基板材Wを1枚ず
つ搬送装置6上からラック8に移し替える移し替え手段
が設けてある。
[0007] The stock means is, for example, a rack 8 for holding a large number of printed circuit board materials W at an angle as shown in FIG. It is placed on a transport trolley 9 and transported. The rack 8 is used by being mounted on a table 5A of the corresponding transport device 5. The transport vehicle 9 is mounted on the supply position 7A, 7B of the stock means, and is transferred from the transport vehicle 9 onto the platform 5A of the corresponding transport device 5, 6. The transfer device 5 on the supply side is provided with a transfer unit (not shown) for transferring the printed circuit board materials W on the rack 8 mounted on the platform 5A of the transfer device 5 one by one to the transfer device 5. The transport device 6 on the discharge side includes the transport device 6.
There is provided a transfer means for transferring the exposed printed circuit board material W discharged in step 1 from the transport device 6 to the rack 8 one by one.

【0008】このような構成によれば、作業者Pが前工
程から、プリント基板材Wをストックしたラック8を運
搬台車9に載せて運搬して、露光装置本体2の正面の左
側の供給位置7Aに接台し、その位置で搬送装置5の搬
送方向に対して,直交する方向からラック8を搬送装置
5の台5A上に供給する。供給した後,正面に戻り,露
光装置本体2の作動を指令する。これにより搬送装置5
は、そのラック8から1枚ずつプリント基板材Wを搬送
装置5に水平に移し替え,搬送装置5はそのプリント基
板材Wを露光装置本体2内部へ送り込む。また、正面で
露光装置本体2の動作を指令していた作業者は、排出側
のラック8が一杯となると,動作指令位置(正面)のす
ぐ側方に位置する排出位置7Bに、空の運搬台車9を接
台し、その上に,搬送装置6側から露光済みのプリント
基板材Wが載せられたラック8を搬送方向と直交する方
向に取り出す。作業者の位置している露光装置本体2の
正面に対して,その同じ側で左右両側でラック8を供給
し,また、取り出すようにしたので,正面からそれらの
供給排出位置まで、作業者が移動する距離が短くなり,
作業性が向上する。
According to such a configuration, the worker P places the rack 8 stocking the printed circuit board material W on the transport trolley 9 from the previous process and transports the rack 8 to the supply position on the left side of the front of the exposure apparatus main body 2. 7A, the rack 8 is supplied onto the table 5A of the transfer device 5 at a position perpendicular to the transfer direction of the transfer device 5 at that position. After the supply, it returns to the front and instructs the operation of the exposure apparatus main body 2. Thereby, the transport device 5
Transfer the printed circuit board material W from the rack 8 one by one to the transfer device 5 horizontally, and the transfer device 5 sends the printed circuit board material W into the inside of the exposure apparatus main body 2. Further, when the operator instructs the operation of the exposure apparatus main body 2 from the front, when the discharge-side rack 8 is full, the worker transfers the empty conveyance to the discharge position 7B located immediately beside the operation command position (front). The carriage 9 is abutted, and the rack 8 on which the exposed printed circuit board material W is placed is taken out of the carrier device 6 in a direction perpendicular to the carrying direction. The rack 8 is supplied to and removed from the front of the exposure apparatus main body 2 on which the operator is located on the same side on both the left and right sides. The distance traveled becomes shorter,
Workability is improved.

【0009】[0009]

【発明の効果】以上のように本願発明では,搬送装置に
対して,搬送方向の直列方向からラックを供給しない構
成としたことで,露光装置の全体設置長さが短くでき
る。また、作業者の位置している露光装置本体の正面に
対して,その同じ側で左右両側となる位置でストック手
段を搬送装置へ供給し,また、取り出すようにしたの
で,正面からそれらの供給排出位置まで、作業者が移動
する距離が短くなり,作業性が向上する。
As described above, according to the present invention, since the rack is not supplied to the transfer apparatus from the serial direction in the transfer direction, the entire installation length of the exposure apparatus can be shortened. In addition, since the stock means is supplied to and removed from the transfer device at positions on the same side of the exposure apparatus main body where the operator is located and on the left and right sides thereof, the supply means can be supplied from the front. The distance that the worker moves to the discharge position is shortened, and workability is improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本願露光装置の平面図である。FIG. 1 is a plan view of an exposure apparatus of the present application.

【図2】図1のII視図である。FIG. 2 is a II view of FIG.

【図3】従来装置の正面図である。FIG. 3 is a front view of a conventional device.

【符号の説明】[Explanation of symbols]

1 露光装置 2 露光装置本体 5,6 搬送装置 7A,7B 供給位置(出し入れ位置) 8 ラック(ストック手段) 9 運搬台車 W プリント基板材 DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Exposure apparatus main body 5, 6 Transport apparatus 7A, 7B Supply position (in / out position) 8 Rack (stock means) 9 Carriage W W Printed circuit board material

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 露光装置本体を挟んだ機台長手の一方側
と他方側にプリント基板材の供給側、排出側の搬送装置
を夫々配置し、これらの搬送装置にプリント基板材のス
トック手段を別途運搬して出し入れする形式のプリント
基板材の露光装置において、各ストック手段は、各スト
ック手段と対応する搬送装置に対して、機台長手方向と
直交する方向から出し入れされることを特徴とするプリ
ント基板材の露光装置。
1. A transfer device for supplying and discharging a printed circuit board material is disposed on one side and the other side of the longitudinal length of a machine base with an exposure apparatus main body interposed therebetween. In an exposure apparatus for a printed circuit board material which is separately transported and taken in and out, each stock unit is taken in and out of a transport device corresponding to each stock unit in a direction perpendicular to the machine base longitudinal direction. Exposure equipment for printed circuit board materials.
【請求項2】 露光装置本体の操作面側に、搬送装置と
機台長手方向位置を重ねて各ストック手段の搬送装置へ
の出し入れ位置が設定されている請求項1記載のプリン
ト基板材の露光装置
2. The exposure of a printed circuit board material according to claim 1, wherein the transfer device and the machine base longitudinal position are overlapped with each other on the operation surface side of the exposure device main body, and a position where each stock unit is inserted into and removed from the transfer device is set. apparatus
【請求項3】 ストック手段は運搬台車上に載せられて
運搬されるものであって、その運搬台車が前記出し入れ
位置に運搬されることを特徴とする請求項2記載のプリ
ント基板材の露光装置。
3. An apparatus according to claim 2, wherein said stock means is carried on a carrier, and said carrier is carried to said loading / unloading position. .
【請求項4】 露光装置本体を挟んだ機台長手の一方側
と他方側にプリント基板材の供給側、排出側の搬送装置
を夫々配置して成るプリント基板材の露光装置におい
て、搬送装置で搬送されるプリント基板材を、露光装置
本体の正面両側で、搬送装置に対して、基板材の搬送方
向と交差する方向から供給、排出するようにしたことを
特徴とする露光装置におけるワーク給排方法。
4. A printed board material exposure apparatus comprising a printed board material supply side and a delivery side delivery apparatus disposed on one side and the other side of the machine base longitudinally with respect to the exposure apparatus body, respectively. A work supply / discharge in an exposure apparatus, wherein a printed circuit board material to be conveyed is supplied to and discharged from a conveyance apparatus on both sides in front of an exposure apparatus main body in a direction intersecting a conveyance direction of the substrate material. Method.
JP2000161785A 2000-05-31 2000-05-31 Aligner for printed circuit board material, and work feeding and discharging method Pending JP2001343754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000161785A JP2001343754A (en) 2000-05-31 2000-05-31 Aligner for printed circuit board material, and work feeding and discharging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000161785A JP2001343754A (en) 2000-05-31 2000-05-31 Aligner for printed circuit board material, and work feeding and discharging method

Publications (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011048239A (en) * 2009-08-28 2011-03-10 Ushio Inc Double-sided exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011048239A (en) * 2009-08-28 2011-03-10 Ushio Inc Double-sided exposure apparatus

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