JP2001343222A5 - - Google Patents
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- JP2001343222A5 JP2001343222A5 JP2000168195A JP2000168195A JP2001343222A5 JP 2001343222 A5 JP2001343222 A5 JP 2001343222A5 JP 2000168195 A JP2000168195 A JP 2000168195A JP 2000168195 A JP2000168195 A JP 2000168195A JP 2001343222 A5 JP2001343222 A5 JP 2001343222A5
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- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000168195A JP4536873B2 (ja) | 2000-06-05 | 2000-06-05 | 三次元形状計測方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000168195A JP4536873B2 (ja) | 2000-06-05 | 2000-06-05 | 三次元形状計測方法及び装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001343222A JP2001343222A (ja) | 2001-12-14 |
| JP2001343222A5 true JP2001343222A5 (enExample) | 2007-07-19 |
| JP4536873B2 JP4536873B2 (ja) | 2010-09-01 |
Family
ID=18671237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000168195A Expired - Fee Related JP4536873B2 (ja) | 2000-06-05 | 2000-06-05 | 三次元形状計測方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4536873B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050114611A (ko) * | 2003-01-27 | 2005-12-06 | 제테틱 인스티튜트 | 간섭계에서 대상에 의해 반사/산란되고 투과되는 빔의 공액직교 필드의 공동 측정 장치 및 방법 |
| JP5231883B2 (ja) * | 2008-07-03 | 2013-07-10 | 株式会社 光コム | 距離計及び距離測定方法並びに光学的三次元形状測定機 |
| JP2013213802A (ja) * | 2012-03-09 | 2013-10-17 | Canon Inc | 計測装置 |
| JP7107268B2 (ja) | 2019-04-03 | 2022-07-27 | 日本製鉄株式会社 | 速度測定方法及び速度測定装置 |
| JP7715375B2 (ja) * | 2021-05-07 | 2025-07-30 | 国立大学法人 東京大学 | 計測装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61202128A (ja) * | 1985-03-06 | 1986-09-06 | Hitachi Ltd | 半導体レ−ザヘテロダイン干渉計 |
| JPH02122206A (ja) * | 1988-11-01 | 1990-05-09 | Nippon Steel Corp | 光ファイバー干渉計およびその信号処理方法 |
| JPH02173505A (ja) * | 1988-12-26 | 1990-07-05 | Brother Ind Ltd | 光波干渉型微細表面形状測定装置 |
| JPH0395906U (enExample) * | 1990-01-23 | 1991-09-30 | ||
| JPH0474914A (ja) * | 1990-07-16 | 1992-03-10 | Brother Ind Ltd | 追従型光波干渉表面形状測定装置 |
| JPH04188003A (ja) * | 1990-11-22 | 1992-07-06 | Brother Ind Ltd | パターン・マッチング型光ヘテロダイン干渉測定装置 |
| JPH0560511A (ja) * | 1991-09-02 | 1993-03-09 | Mitsubishi Electric Corp | ヘテロダイン干渉計 |
| JP3310022B2 (ja) * | 1992-07-28 | 2002-07-29 | シチズン時計株式会社 | 表面形状測定装置 |
| JPH085314A (ja) * | 1994-06-20 | 1996-01-12 | Canon Inc | 変位測定方法及び変位測定装置 |
| JP3534443B2 (ja) * | 1994-07-06 | 2004-06-07 | 浜松ホトニクス株式会社 | 光周波数混合装置 |
| JP3501605B2 (ja) * | 1996-12-27 | 2004-03-02 | キヤノン株式会社 | 干渉計及び形状測定装置 |
| JP2000146516A (ja) * | 1998-11-12 | 2000-05-26 | Yokogawa Electric Corp | レーザ測長装置 |
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2000
- 2000-06-05 JP JP2000168195A patent/JP4536873B2/ja not_active Expired - Fee Related