JP2001334219A5 - - Google Patents
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- JP2001334219A5 JP2001334219A5 JP2000160232A JP2000160232A JP2001334219A5 JP 2001334219 A5 JP2001334219 A5 JP 2001334219A5 JP 2000160232 A JP2000160232 A JP 2000160232A JP 2000160232 A JP2000160232 A JP 2000160232A JP 2001334219 A5 JP2001334219 A5 JP 2001334219A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000160232A JP2001334219A (ja) | 2000-05-30 | 2000-05-30 | スピン処理装置及びスピン処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000160232A JP2001334219A (ja) | 2000-05-30 | 2000-05-30 | スピン処理装置及びスピン処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001334219A JP2001334219A (ja) | 2001-12-04 |
| JP2001334219A5 true JP2001334219A5 (https=) | 2007-07-12 |
Family
ID=18664452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000160232A Pending JP2001334219A (ja) | 2000-05-30 | 2000-05-30 | スピン処理装置及びスピン処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001334219A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5816468B2 (ja) * | 2011-06-15 | 2015-11-18 | 東京応化工業株式会社 | 基板収容装置 |
| US10133173B2 (en) | 2012-09-27 | 2018-11-20 | SCREEN Holdings Co., Ltd. | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method |
| JP6212819B2 (ja) * | 2012-09-27 | 2017-10-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理液処理装置および処理液処理方法 |
| WO2014050941A1 (ja) * | 2012-09-27 | 2014-04-03 | 大日本スクリーン製造株式会社 | 処理液供給装置、基板処理装置、処理液供給方法、基板処理方法、処理液処理装置および処理液処理方法 |
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2000
- 2000-05-30 JP JP2000160232A patent/JP2001334219A/ja active Pending