JP2001332954A - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter

Info

Publication number
JP2001332954A
JP2001332954A JP2000152389A JP2000152389A JP2001332954A JP 2001332954 A JP2001332954 A JP 2001332954A JP 2000152389 A JP2000152389 A JP 2000152389A JP 2000152389 A JP2000152389 A JP 2000152389A JP 2001332954 A JP2001332954 A JP 2001332954A
Authority
JP
Japan
Prior art keywords
electrode
reflector
comb
acoustic wave
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000152389A
Other languages
Japanese (ja)
Other versions
JP4534307B2 (en
Inventor
Naruhiro Mita
成大 三田
Akio Tsunekawa
昭雄 常川
Kazuo Ikeda
和生 池田
Shunichi Seki
関  俊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000152389A priority Critical patent/JP4534307B2/en
Publication of JP2001332954A publication Critical patent/JP2001332954A/en
Application granted granted Critical
Publication of JP4534307B2 publication Critical patent/JP4534307B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface acoustic wave(SAW) filter, capable of fully securing an attenuation quantity close to a pass frequency band. SOLUTION: A first comb-line electrode 11 and second and third comb-line electrodes 12 and 13 on both the sides of a SAW propagating direction thereof are located on a piezoelectric substrate 10, first and second reflector electrodes 14 and 15 are provided on both the sides of these electrodes, and the reflector electrode pitch of the first and second reflector electrodes 14 and 15 is changed to gradually turn small, going away from the adjacent second and third comb- line electrodes 12 and 13.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は例えば、無線通信機
器における高周波回路などに使用される弾性表面波フィ
ルタに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave filter used for a high-frequency circuit or the like in a wireless communication device.

【0002】[0002]

【従来の技術】従来、RF段に適する弾性表面波フィル
タとしては、縦モード結合共振器型弾性表面波フィルタ
がよく知られており、回路の簡素化、高性能化のため、
選択的に高減衰量を確保できるものが要望されている。
2. Description of the Related Art Conventionally, as a surface acoustic wave filter suitable for an RF stage, a longitudinal mode coupled resonator type surface acoustic wave filter is well known.
What can selectively secure a high attenuation is demanded.

【0003】以下、従来の縦モード結合型設計を用いた
弾性表面波フィルタについて説明する。
Hereinafter, a surface acoustic wave filter using a conventional longitudinal mode coupling type design will be described.

【0004】図12は従来の縦モード結合型弾性表面波
フィルタの上面図である。
FIG. 12 is a top view of a conventional longitudinal mode coupling type surface acoustic wave filter.

【0005】圧電基板80上に一点鎖線で囲んだ三電極
型櫛電極81,82を縦続接続する。三電極型櫛電極8
1,82はそれぞれ点線で囲んだ第1の櫛型電極81
a,82a、第2の櫛型電極81b,82b、第3の櫛
型電極81c,82cと、それらの両側の反射器電極8
1d,82dが表面波伝搬方向に配置されている。
[0005] On a piezoelectric substrate 80, three-electrode-type comb electrodes 81 and 82 surrounded by a chain line are connected in cascade. Three-electrode comb electrode 8
Reference numerals 1 and 82 denote first comb-shaped electrodes 81 each surrounded by a dotted line.
a, 82a, the second comb electrodes 81b, 82b, the third comb electrodes 81c, 82c, and the reflector electrodes 8 on both sides thereof.
1d and 82d are arranged in the surface wave propagation direction.

【0006】三電極型櫛電極81の第1の櫛型電極81
aは、対向する両電極指の一方が出力端子83に他方が
アース端子85に接続されている。三電極型櫛電極82
の第1の櫛型電極82aも、対向する両電極指の一方が
出力端子84に他方がアース端子86に接続されてい
る。
The first comb electrode 81 of the three-electrode comb electrode 81
In a, one of both opposing electrode fingers is connected to the output terminal 83 and the other is connected to the ground terminal 85. Three-electrode comb electrode 82
In the first comb-shaped electrode 82a, one of both opposing electrode fingers is connected to the output terminal 84 and the other is connected to the ground terminal 86.

【0007】三電極型櫛電極81,82の第1の櫛型電
極81a,82aに電圧を印加することにより表面波が
励起され、反射器電極81d,82dでエネルギーが閉
じ込められることによりフィルタ特性が形成される。
By applying a voltage to the first comb electrodes 81a and 82a of the three-electrode comb electrodes 81 and 82, surface waves are excited, and energy is confined by the reflector electrodes 81d and 82d so that filter characteristics are improved. It is formed.

【0008】また反射器電極81d,82dは電極指幅
及び電極指間隔を一定にして形成したものであった。
The reflector electrodes 81d and 82d are formed with a constant electrode finger width and electrode finger interval.

【0009】[0009]

【発明が解決しようとする課題】反射器電極特性は反射
効率の良い通過周波数範囲とその両側の周期的なスロー
プ特性で形成される。そのため上記構成においては通過
帯域近傍で反射器電極の周期的な特性が波形として現わ
れ、スプリアスが発生することになる。その結果通過周
波数帯域近傍での減衰量確保が困難であるという問題点
を有していた。
The reflector electrode characteristic is formed by a pass frequency range with good reflection efficiency and a periodic slope characteristic on both sides thereof. Therefore, in the above configuration, the periodic characteristic of the reflector electrode appears as a waveform in the vicinity of the pass band, and spurious is generated. As a result, there is a problem that it is difficult to secure the attenuation in the vicinity of the pass frequency band.

【0010】そこで本発明は、通過周波数帯域近傍の減
衰量を十分に確保することのできる弾性表面波フィルタ
を提供することを目的とするものである。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a surface acoustic wave filter capable of sufficiently securing an attenuation near a pass frequency band.

【0011】[0011]

【課題を解決するための手段】この目的を達成するため
に本発明の弾性表面波フィルタは、圧電基板と、この圧
電基板上に設けた第1の櫛型電極と、この第1の櫛型電
極のその表面波伝搬方向の両側に設けた第2、第3の櫛
型電極と、この第2及び第3の櫛型電極を挟むように設
けた第1及び第2の反射器電極とを備え、前記第1、第
2の反射器電極の少なくとも一方の電極指幅あるいは電
極指間隔の周期は不定期としたものであり、反射器電極
の通過周波数帯域近傍の低周波数側あるいは高周波数側
の周期的なスロープ特性を乱すことにより、スプリアス
を抑制し、上記目的を達成することができる。
To achieve this object, a surface acoustic wave filter according to the present invention comprises a piezoelectric substrate, a first comb-shaped electrode provided on the piezoelectric substrate, and a first comb-shaped electrode. A second and third comb-shaped electrodes provided on both sides of the electrode in the surface wave propagation direction, and first and second reflector electrodes provided so as to sandwich the second and third comb-shaped electrodes. The width of at least one electrode finger of the first and second reflector electrodes or the period of the electrode finger interval is irregular, and the low or high frequency side near the pass frequency band of the reflector electrode is provided. By disturbing the periodic slope characteristic, spurious can be suppressed, and the above object can be achieved.

【0012】[0012]

【発明の実施の形態】本発明の請求項1に記載の発明
は、圧電基板と、この圧電基板上に設けた第1の櫛型電
極と、この第1の櫛型電極のその表面波伝搬方向の両側
に設けた第2、第3の櫛型電極と、この第2及び第3の
櫛型電極を挟むように設けた第1及び第2の反射器電極
とを備え、前記第1、第2の反射器電極の少なくとも一
方の電極指幅あるいは電極指間隔の周期は不定期とした
弾性表面波フィルタであり、通過周波数帯域近傍の低周
波数側あるいは高周波数側の減衰量を十分に確保するこ
とができるものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention provides a piezoelectric substrate, a first comb-shaped electrode provided on the piezoelectric substrate, and the propagation of the surface wave of the first comb-shaped electrode. Second and third comb-shaped electrodes provided on both sides in the direction, and first and second reflector electrodes provided so as to sandwich the second and third comb-shaped electrodes. This is a surface acoustic wave filter in which the width of at least one electrode finger of the second reflector electrode or the period of the electrode finger interval is irregular, and ensures a sufficient amount of attenuation on the low frequency side or high frequency side near the pass frequency band. Is what you can do.

【0013】請求項2に記載の発明は、電極指幅あるい
は電極指間隔を隣接する櫛型電極側から徐々に小さくし
た請求項1に記載の弾性表面波フィルタであり、反射器
電極のエネルギー閉じ込め効果に悪影響を及ぼさずに、
通過周波数帯域近傍の低周波数側の減衰量を十分に確保
することができるものである。
According to a second aspect of the present invention, there is provided the surface acoustic wave filter according to the first aspect, wherein the electrode finger width or the electrode finger interval is gradually reduced from the adjacent comb electrode side. Without affecting the effect,
It is possible to sufficiently secure the attenuation on the low frequency side near the pass frequency band.

【0014】請求項3に記載の発明は、電極指幅あるい
は電極指間隔を隣接する櫛型電極側から徐々に大きくし
た請求項1に記載の弾性表面波フィルタであり、反射器
電極のエネルギー閉じ込め効果に悪影響を及ぼさずに、
通過周波数帯域近傍の高周波数側の減衰量を十分に確保
することができるものである。
According to a third aspect of the present invention, there is provided the surface acoustic wave filter according to the first aspect of the present invention, wherein the electrode finger width or the electrode finger interval is gradually increased from the adjacent comb electrode side. Without affecting the effect,
A sufficient amount of attenuation on the high frequency side near the pass frequency band can be ensured.

【0015】請求項4に記載の発明は、第1、第2の反
射器電極の少なくとも一方を電極指幅あるいは電極指間
隔の異なる少なくとも二種類の反射器電極群で構成した
請求項1に記載の弾性表面波フィルタであり、通過周波
数帯域近傍の低周波数側あるいは高周波数側の反射器特
性を制御、通過周波数帯域近傍の低周波数側あるいは高
周波数側の減衰量を十分に確保することができるもので
ある。
According to a fourth aspect of the present invention, at least one of the first and second reflector electrodes is constituted by at least two types of reflector electrode groups having different electrode finger widths or electrode finger intervals. Surface acoustic wave filter, which controls the reflector characteristics on the low frequency side or high frequency side near the pass frequency band, and ensures sufficient attenuation on the low frequency side or high frequency side near the pass frequency band. Things.

【0016】請求項5に記載の発明は、反射器電極群の
電極指幅あるいは電極指間隔の周期は、櫛型電極に近い
方から小さくした請求項4に記載の弾性表面波フィルタ
であり、反射器電極のエネルギー閉じ込め効果への悪影
響を抑制し、通過周波数帯域近傍の低周波数側の減衰量
を確保することができるものである。
According to a fifth aspect of the present invention, there is provided the surface acoustic wave filter according to the fourth aspect, wherein the width of the electrode fingers or the interval between the electrode fingers of the reflector electrode group is reduced from the direction closer to the comb-shaped electrode. It is possible to suppress an adverse effect on the energy trapping effect of the reflector electrode and to secure an attenuation amount on the low frequency side near the pass frequency band.

【0017】請求項6に記載の発明は、反射器電極群の
電極指幅あるいは電極指間隔の周期は、櫛型電極に近い
方から大きくした請求項4に記載の弾性表面波フィルタ
であり、反射器電極のエネルギー閉じ込め効果への悪影
響を抑制し、通過周波数帯域近傍の高周波数側の減衰量
を確保することができるものである。
According to a sixth aspect of the present invention, there is provided the surface acoustic wave filter according to the fourth aspect, wherein the electrode finger width or the period of the electrode finger interval of the reflector electrode group is increased from the side closer to the comb electrode. It is possible to suppress the adverse effect of the reflector electrode on the energy confinement effect, and to secure the attenuation on the high frequency side near the pass frequency band.

【0018】請求項7に記載の発明は、櫛型電極と隣接
する反射器電極群は10から30本の電極指で構成した
請求項4に記載の弾性表面波フィルタであり、効率よく
通過帯域近傍のスプリアスを抑制し、通過周波数帯域近
傍の低周波数側あるいは高周波数側の減衰量を確保する
ことができるものである。
According to a seventh aspect of the present invention, there is provided the surface acoustic wave filter according to the fourth aspect, wherein the reflector electrode group adjacent to the comb-shaped electrode is constituted by 10 to 30 electrode fingers, and the pass band is efficiently provided. The spurious in the vicinity can be suppressed, and the attenuation on the low frequency side or the high frequency side near the pass frequency band can be secured.

【0019】請求項8に記載の発明は、隣り合う反射器
電極群の電極指幅あるいは電極指間隔幅の差は、反射器
電極ピッチ(電極指幅+電極指間隔幅)の0.05%以
上とした請求項4に記載の弾性表面波フィルタであり、
効率よく通過帯域近傍のスプリアスを抑制し、通過周波
数帯域近傍の低周波数側あるいは高周波数側の減衰量を
確保することができるものである。
According to the present invention, the difference between the electrode finger widths or the electrode finger interval widths of the adjacent reflector electrode groups is 0.05% of the reflector electrode pitch (electrode finger width + electrode finger interval width). The surface acoustic wave filter according to claim 4, wherein
The spurious in the vicinity of the pass band can be efficiently suppressed, and the attenuation on the low frequency side or the high frequency side in the vicinity of the pass frequency band can be secured.

【0020】以下図面を参照しながら本発明の実施の形
態について説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.

【0021】(実施の形態1)図1は本発明の実施の形
態1における弾性表面波フィルタの上面図である。
(Embodiment 1) FIG. 1 is a top view of a surface acoustic wave filter according to Embodiment 1 of the present invention.

【0022】圧電基板10上に、第1の櫛型電極11と
その表面波伝搬方向の両側に第2、第3の櫛型電極1
2,13を配置し、それらの両側に第1の反射器電極1
4と第2の反射器電極15を備えている。第1及び第2
の反射器電極14,15の反射器電極ピッチは、隣り合
う第2及び第3の櫛型電極12,13から離れるにつれ
て徐々に小さく変化させてある。
On a piezoelectric substrate 10, a first comb-shaped electrode 11 and second and third comb-shaped electrodes 1 on both sides in the direction of propagation of the surface wave.
2 and 13 with the first reflector electrode 1 on each side of them.
4 and a second reflector electrode 15. First and second
The reflector electrode pitch of the reflector electrodes 14 and 15 is gradually reduced as the distance from the adjacent second and third comb-shaped electrodes 12 and 13 increases.

【0023】この構成により、第1及び第2の反射器電
極14,15の特性は図2のようになり、従来よりも通
過帯域内近傍の低周波数側の反射効率を下げることがで
きる。
With this configuration, the characteristics of the first and second reflector electrodes 14 and 15 are as shown in FIG. 2, and the reflection efficiency on the low frequency side near the pass band can be reduced as compared with the conventional case.

【0024】また、第1及び第2の反射器電極14,1
5の反射器電極ピッチを、隣り合う第2、第3の櫛型電
極12,13側から離れるにつれて大きく変化させる
と、図3に示すように通過帯域内近傍の高周波数側の反
射効率を下げることができる。
Also, the first and second reflector electrodes 14, 1
When the reflector electrode pitch of No. 5 is greatly changed as the distance from the adjacent second and third comb-shaped electrodes 12 and 13 increases, the reflection efficiency on the high frequency side near the pass band decreases as shown in FIG. be able to.

【0025】すなわち第1、第2の反射器電極14,1
5の反射器電極ピッチを一定でなく、変えることにより
反射特性を乱し、スプリアスの発生を抑制することによ
り、通過帯域近傍の低周波数側あるいは高周波数側の帯
域外減衰量を十分に確保することができる。
That is, the first and second reflector electrodes 14 and 1
The reflector characteristics are disturbed by changing the electrode pitch of the reflector 5 in a non-constant manner, and by suppressing the generation of spurious components, a sufficient amount of out-of-band attenuation on the low frequency side or high frequency side near the pass band is ensured. be able to.

【0026】(実施の形態2)図4は本発明の実施の形
態2における弾性表面波フィルタの上面図である。
(Embodiment 2) FIG. 4 is a top view of a surface acoustic wave filter according to Embodiment 2 of the present invention.

【0027】圧電基板30上に、第1の櫛型電極31と
その表面波伝搬方向の両側に第2、第3の櫛型電極3
2,33を配置し、それらの両側に第1の反射器電極3
4と第2の反射器電極35を備えている。また、第1、
第2の反射器電極34,35は、それぞれ反射器電極ピ
ッチが異なる。二つの反射器電極群(図4中点線で囲ん
でいる)34a,34b,35a,35bで構成されて
いる。また反射器電極群34a,35aの反射器電極ピ
ッチは、反射器電極群34b,35bの反射器電極ピッ
チよりも大きくしてある。
On the piezoelectric substrate 30, a first comb-shaped electrode 31 and second and third comb-shaped electrodes 3 on both sides in the direction of propagation of the surface wave.
2 and 33, and a first reflector electrode 3 on both sides thereof.
4 and a second reflector electrode 35. First,
The second reflector electrodes 34 and 35 have different reflector electrode pitches. It is composed of two reflector electrode groups 34a, 34b, 35a and 35b (surrounded by dotted lines in FIG. 4). The reflector electrode pitch of the reflector electrode groups 34a and 35a is larger than the reflector electrode pitch of the reflector electrode groups 34b and 35b.

【0028】図5は図4に示す第1及び第2の反射器電
極34,35の特性図であり、第1の反射器電極34,
35を二つの反射器電極群34a,34b,35a,3
5bに分割することにより、通過帯域内近傍の低周波数
側の反射効率を下げることが可能である。
FIG. 5 is a characteristic diagram of the first and second reflector electrodes 34 and 35 shown in FIG.
35 to two reflector electrode groups 34a, 34b, 35a, 3
By dividing into 5b, the reflection efficiency on the low frequency side near the pass band can be reduced.

【0029】また、反射器電極群34a,35aの反射
器電極ピッチを反射器電極群34b,35bの反射器電
極ピッチより小さくすると、図6に示すように通過帯域
内近傍の高周波数側の反射効率を下げることが可能であ
る。
When the reflector electrode pitch of the reflector electrode groups 34a and 35a is made smaller than the reflector electrode pitch of the reflector electrode groups 34b and 35b, as shown in FIG. Efficiency can be reduced.

【0030】すなわち第1及び第2の反射器電極34,
35を二つ以上の反射器電極群に分割し、それぞれの反
射器電極ピッチを変えてそれぞれの周期が異なるように
することにより、反射特性の山と谷が重なり合い、この
部分の反射器特性が平坦になり、スプリアスを抑制し、
通過帯域近傍の低周波数側あるいは高周波数側の帯域外
減衰量を十分に確保することができるのである。
That is, the first and second reflector electrodes 34,
By dividing 35 into two or more reflector electrode groups and changing the respective reflector electrode pitches so that the respective periods are different, the peaks and valleys of the reflection characteristics overlap, and the reflector characteristics of this portion are reduced. Flattened, suppresses spurs,
It is possible to sufficiently secure the out-of-band attenuation on the low frequency side or the high frequency side near the pass band.

【0031】(実施の形態3)図7は本発明の実施の形
態3における弾性表面波フィルタの上面図である。
(Embodiment 3) FIG. 7 is a top view of a surface acoustic wave filter according to Embodiment 3 of the present invention.

【0032】圧電基板50上に、第1の櫛型電極51と
その表面波伝搬方向の両側に第2、第3の櫛型電極5
2,53を配置し、それらの両側に第1の反射器電極5
4と第2の反射器電極55を備えた三電極縦モード結合
型櫛電極56が形成されている。また、第1の反射器電
極54及び第2の反射器電極55は、反射器電極ピッチ
が異なる三つの反射器電極群54a,54b,54c,
55a,55b,55cで構成されている。反射器電極
ピッチは反射器電極群54a,55aが一番大きく、次
いで反射器電極群54b,55bが大きく、反射器電極
群54c,55cを最も小さくしている。
On the piezoelectric substrate 50, a first comb-shaped electrode 51 and second and third comb-shaped electrodes 5 on both sides in the direction of propagation of the surface wave.
2 and 53, and a first reflector electrode 5 on both sides thereof.
A three-electrode longitudinal mode-coupled comb electrode 56 including the fourth and second reflector electrodes 55 is formed. Further, the first reflector electrode 54 and the second reflector electrode 55 include three reflector electrode groups 54a, 54b, 54c, with different reflector electrode pitches.
It comprises 55a, 55b and 55c. The reflector electrode pitch is the largest for the reflector electrode groups 54a and 55a, the largest for the reflector electrode groups 54b and 55b, and the smallest for the reflector electrode groups 54c and 55c.

【0033】さらに、三電極縦モード結合型櫛電極56
にこれと同じ構成の三電極縦モード結合型櫛電極57が
縦続接続されている。
Further, a three-electrode longitudinal mode coupling type comb electrode 56
A three-electrode longitudinal mode-coupled comb electrode 57 having the same configuration is connected in cascade.

【0034】このような構成の弾性表面波フィルタにお
いて、反射器電極群54a,54b,54c,55a,
55b,55cの構成を(表1)に示すような構成とし
た時の、第1及び第2の反射器電極54,55の特性を
図8に示す。また図9は図8の要部拡大図である。
In the surface acoustic wave filter having such a configuration, the reflector electrode groups 54a, 54b, 54c, 55a,
FIG. 8 shows the characteristics of the first and second reflector electrodes 54 and 55 when the configurations of 55b and 55c are configured as shown in (Table 1). FIG. 9 is an enlarged view of a main part of FIG.

【0035】[0035]

【表1】 [Table 1]

【0036】図9を見るとわかるように反射器電極群5
4a,55aの反射効率が第1及び第2の反射器電極5
4,55の反射効率に対して支配的にならない範囲で、
反射器電極特性を変化させることにより、通過帯域近傍
の低周波数側のスプリアスを抑制し、減衰量を確保する
ことができる。
As can be seen from FIG. 9, the reflector electrode group 5
The reflection efficiency of the first and second reflector electrodes 5a and 55a
To the extent that it does not dominate the reflection efficiency of 4,55,
By changing the reflector electrode characteristics, spurious components on the low frequency side near the pass band can be suppressed, and the attenuation can be secured.

【0037】つまり反射器電極群54a,55aの電極
指本数を10本から30本とすることが望ましいのであ
る。第1及び第2の反射器電極54,55の反射効率に
大きく寄与するのは第2、第3の櫛型電極52,53に
最も近い反射器電極群54a,55aであることを考慮
すると第1及び第2の反射器電極54,55を構成する
電極指の本数が変化したとしても、反射器電極群54
a,55aの電極指本数は10本から30本とすること
が望ましい。
That is, it is desirable that the number of electrode fingers of the reflector electrode groups 54a and 55a be 10 to 30. Considering that the reflector electrode groups 54a and 55a closest to the second and third comb-shaped electrodes 52 and 53 largely contribute to the reflection efficiency of the first and second reflector electrodes 54 and 55, Even if the number of electrode fingers constituting the first and second reflector electrodes 54 and 55 changes, the reflector electrode group 54
It is desirable that the number of electrode fingers a and 55a is 10 to 30.

【0038】また、反射器電極群54a,55aの電極
指本数が30本よりも多くなると(図9の(d))、反
射器電極群54a,55aの反射効率が支配的となり、
第1及び第2の反射器電極54,55の特性を変化させ
て通過帯域近傍のスプリアスを抑制することが困難とな
る。反対に反射器電極群54a,55aの電極指本数が
9本以下となると反射効率が不十分となり所望の特性を
確保することが難しい。
When the number of electrode fingers of the reflector electrode groups 54a and 55a exceeds 30 (FIG. 9D), the reflection efficiency of the reflector electrode groups 54a and 55a becomes dominant,
It becomes difficult to change the characteristics of the first and second reflector electrodes 54 and 55 to suppress spurious near the pass band. Conversely, if the number of electrode fingers of the reflector electrode groups 54a and 55a is nine or less, the reflection efficiency becomes insufficient and it is difficult to secure desired characteristics.

【0039】次に反射器電極群54a,55aの反射器
電極ピッチをλa、反射器電極群54b,55bの反射
器電極ピッチをλb、反射器電極群54c,55cの反
射器ピッチをλcとし、(表2)に示すような構成とし
た場合の第1及び第2の反射器電極54,55の特性を
図10に、その要部拡大図を図11に示す。
Next, the reflector electrode pitch of the reflector electrode groups 54a and 55a is λa, the reflector electrode pitch of the reflector electrode groups 54b and 55b is λb, and the reflector pitch of the reflector electrode groups 54c and 55c is λc. FIG. 10 shows the characteristics of the first and second reflector electrodes 54 and 55 in the configuration shown in (Table 2), and FIG.

【0040】[0040]

【表2】 [Table 2]

【0041】図10を見るとわかるように、通過帯域近
傍の低周波数側に減衰量を確保するには、反射器電極ピ
ッチは第2、第3の櫛型電極52,53に近いほど大き
く、反隣り合う反射器電極群との反射器ピッチは0.0
5%以上、好ましくは0.1%以上の差を有するように
し、第2及び第3の櫛型電極52,53との距離が長い
反射器電極群ほど反射器電極ピッチを小さくすれば良
い。
As can be seen from FIG. 10, in order to secure the attenuation on the low frequency side near the pass band, the reflector electrode pitch is larger as it is closer to the second and third comb-shaped electrodes 52 and 53. The reflector pitch between anti-adjacent reflector electrode groups is 0.0
The difference should be 5% or more, preferably 0.1% or more, and the reflector electrode pitch should be smaller as the distance between the second and third comb-shaped electrodes 52 and 53 is longer.

【0042】なお、本実施の形態3においては、第1及
び第2の反射器電極54,55をそれぞれ複数の反射器
電極群に分割し、第2及び第3の櫛型電極52,53か
らの距離が長い反射器電極群ほど反射器電極ピッチを小
さくして通過帯域近傍の低周波数側のスプリアスを抑制
し、減衰量を確保した。高周波数側の減衰量を確保した
い場合は、第2及び第3の櫛型電極52,53からの距
離が長い反射器電極群ほど反射器電極ピッチを大きくす
れば良い。
In the third embodiment, the first and second reflector electrodes 54 and 55 are divided into a plurality of reflector electrode groups, respectively. The longer the distance of the reflector electrode group is, the smaller the reflector electrode pitch is, and the spurious on the low frequency side near the pass band is suppressed, and the attenuation is secured. When it is desired to secure the attenuation on the high frequency side, the reflector electrode pitch may be increased as the distance from the second and third comb-shaped electrodes 52 and 53 increases.

【0043】また、三電極縦モード結合型櫛電極56に
ついてのみ説明したが同じ構成の三電極縦モード結合型
櫛電極57についても同様のことがいえる。
Although only the three-electrode longitudinal mode-coupled comb electrode 56 has been described, the same can be said for the three-electrode longitudinal-mode coupled comb electrode 57 having the same configuration.

【0044】さらに実施の形態3においては二つの三電
極縦モード結合型櫛電極56,57を複数縦続接続した
弾性表面波フィルタについて説明したが、図1、図2に
示すように一つあるいは三つ以上の三電極縦モード結合
型櫛電極で構成されている弾性表面波フィルタについて
も、それぞれの三電極縦モード結合型櫛電極の第1及び
第2の反射器電極を本実施の形態3のように構成するこ
とにより同様の効果が得られるものである。
Further, in the third embodiment, a surface acoustic wave filter in which a plurality of two three-electrode longitudinal mode coupling type comb electrodes 56 and 57 are connected in cascade has been described. However, as shown in FIGS. Also for the surface acoustic wave filter composed of one or more three-electrode longitudinal mode-coupled comb electrodes, the first and second reflector electrodes of each three-electrode longitudinal mode-coupled comb electrode are the same as those of the third embodiment. With such a configuration, a similar effect can be obtained.

【0045】さらにまた、上記各実施の形態では、第1
及び第2の反射器電極14,15,34,35,54,
55が同じ構成の場合についてのみ説明したが、第1の
反射器電極14,34,54と第2の反射器電極15,
35,55とはその構成が異なっていても構わない。
Further, in each of the above embodiments, the first
And second reflector electrodes 14, 15, 34, 35, 54,
Although only the case where 55 has the same configuration has been described, the first reflector electrode 14, 34, 54 and the second reflector electrode 15,
The configuration may be different from 35 and 55.

【0046】[0046]

【発明の効果】以上本発明によると、通過周波数帯域近
傍の低周波数側あるいは高周波数側のスプリアスを抑制
し、帯域外減衰量を十分に有する弾性表面波フィルタを
提供することができる。従ってこの弾性表面波フィルタ
を用いる携帯電話などの無線機器の高性能化及び回路の
簡素化を図ることができる。
As described above, according to the present invention, it is possible to provide a surface acoustic wave filter that suppresses spurious components on the low frequency side or high frequency side near the pass frequency band and has a sufficient amount of out-of-band attenuation. Therefore, it is possible to improve the performance and simplify the circuit of a wireless device such as a mobile phone using the surface acoustic wave filter.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態1における弾性表面波フィ
ルタの上面図
FIG. 1 is a top view of a surface acoustic wave filter according to Embodiment 1 of the present invention.

【図2】図1に示す弾性表面波フィルタの周波数特性曲
線図
FIG. 2 is a frequency characteristic curve diagram of the surface acoustic wave filter shown in FIG.

【図3】本発明の実施の形態1における弾性表面波フィ
ルタの周波数特性曲線図
FIG. 3 is a frequency characteristic curve diagram of the surface acoustic wave filter according to Embodiment 1 of the present invention.

【図4】本発明の実施の形態2における弾性表面波フィ
ルタの上面図
FIG. 4 is a top view of a surface acoustic wave filter according to Embodiment 2 of the present invention.

【図5】図4に示す弾性表面波フィルタの周波数特性曲
線図
5 is a frequency characteristic curve diagram of the surface acoustic wave filter shown in FIG.

【図6】本発明の実施の形態2における弾性表面波フィ
ルタの周波数特性曲線図
FIG. 6 is a frequency characteristic curve diagram of the surface acoustic wave filter according to Embodiment 2 of the present invention.

【図7】本発明の実施の形態3における弾性表面波フィ
ルタの上面図
FIG. 7 is a top view of a surface acoustic wave filter according to Embodiment 3 of the present invention.

【図8】本発明の実施の形態3における弾性表面波フィ
ルタの周波数特性曲線図
FIG. 8 is a frequency characteristic curve diagram of the surface acoustic wave filter according to Embodiment 3 of the present invention.

【図9】図8の要部拡大図FIG. 9 is an enlarged view of a main part of FIG. 8;

【図10】本発明の実施の形態3における弾性表面波フ
ィルタの周波数特性曲線図
FIG. 10 is a frequency characteristic curve diagram of the surface acoustic wave filter according to Embodiment 3 of the present invention.

【図11】図10の要部拡大図FIG. 11 is an enlarged view of a main part of FIG. 10;

【図12】従来の弾性表面波フィルタの上面図FIG. 12 is a top view of a conventional surface acoustic wave filter.

【符号の説明】[Explanation of symbols]

10 圧電基板 11 第1の櫛型電極 12 第2の櫛型電極 13 第3の櫛型電極 14 第1の反射器電極 15 第2の反射器電極 30 圧電基板 31 第1の櫛型電極 32 第2の櫛型電極 33 第3の櫛型電極 34 第1の反射器電極 34a 反射器電極群 34b 反射器電極群 35 第2の反射器電極 35a 反射器電極群 35b 反射器電極群 50 圧電基板 51 第1の櫛型電極 52 第2の櫛型電極 53 第3の櫛型電極 54 第1の反射器電極 54a 反射器電極群 54b 反射器電極群 54c 反射器電極群 55 第2の反射器電極 55a 反射器電極群 55b 反射器電極群 55c 反射器電極群 56 三電極縦モード結合型櫛電極 57 三電極縦モード結合型櫛電極 Reference Signs List 10 piezoelectric substrate 11 first comb-shaped electrode 12 second comb-shaped electrode 13 third comb-shaped electrode 14 first reflector electrode 15 second reflector electrode 30 piezoelectric substrate 31 first comb-shaped electrode 32 first 2nd comb electrode 33 third comb electrode 34 first reflector electrode 34a reflector electrode group 34b reflector electrode group 35 second reflector electrode 35a reflector electrode group 35b reflector electrode group 50 piezoelectric substrate 51 First comb-shaped electrode 52 Second comb-shaped electrode 53 Third comb-shaped electrode 54 First reflector electrode 54a Reflector electrode group 54b Reflector electrode group 54c Reflector electrode group 55 Second reflector electrode 55a Reflector electrode group 55b Reflector electrode group 55c Reflector electrode group 56 Three-electrode longitudinal mode coupling type comb electrode 57 Three-electrode vertical mode coupling type comb electrode

───────────────────────────────────────────────────── フロントページの続き (72)発明者 池田 和生 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 関 俊一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 5J097 AA14 AA16 BB11 DD14 DD16 KK03  ──────────────────────────────────────────────────の Continuing on the front page (72) Kazuo Ikeda 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Shunichi Seki 1006 Kadoma Kadoma Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd. F term (reference) 5J097 AA14 AA16 BB11 DD14 DD16 KK03

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板と、この圧電基板上に設けた第
1の櫛型電極と、この第1の櫛型電極のその表面波伝搬
方向の両側に設けた第2、第3の櫛型電極と、この第2
及び第3の櫛型電極を挟むように設けた第1及び第2の
反射器電極とを備え、前記第1、第2の反射器電極の少
なくとも一方の電極指幅あるいは電極指間隔の周期は不
定期とした弾性表面波フィルタ。
1. A piezoelectric substrate, a first comb-shaped electrode provided on the piezoelectric substrate, and second and third comb-shaped electrodes provided on both sides of the first comb-shaped electrode in the surface wave propagation direction. Electrodes and this second
And first and second reflector electrodes provided so as to sandwich the third comb-shaped electrode. The width of at least one of the first and second reflector electrodes or the period of the electrode finger interval is An irregular surface acoustic wave filter.
【請求項2】 電極指幅あるいは電極指間隔を隣接する
櫛型電極側から徐々に小さくした請求項1に記載の弾性
表面波フィルタ。
2. The surface acoustic wave filter according to claim 1, wherein an electrode finger width or an electrode finger interval is gradually reduced from an adjacent comb-shaped electrode side.
【請求項3】 電極指幅あるいは電極指間隔を隣接する
櫛型電極側から徐々に大きくした請求項1に記載の弾性
表面波フィルタ。
3. The surface acoustic wave filter according to claim 1, wherein an electrode finger width or an electrode finger interval is gradually increased from an adjacent comb-shaped electrode side.
【請求項4】 第1、第2の反射器電極の少なくとも一
方を電極指幅あるいは電極指間隔の異なる少なくとも二
種類の反射器電極群で構成した請求項1に記載の弾性表
面波フィルタ。
4. The surface acoustic wave filter according to claim 1, wherein at least one of the first and second reflector electrodes comprises at least two types of reflector electrode groups having different electrode finger widths or electrode finger intervals.
【請求項5】 反射器電極群の電極指幅あるいは電極指
間隔の周期は、櫛型電極に近い方から小さくした請求項
4に記載の弾性表面波フィルタ。
5. The surface acoustic wave filter according to claim 4, wherein the width of the electrode finger or the period of the electrode finger interval of the reflector electrode group is reduced from the side closer to the comb-shaped electrode.
【請求項6】 反射器電極群の電極指幅あるいは電極指
間隔の周期は、櫛型電極に近い方から大きくした請求項
4に記載の弾性表面波フィルタ。
6. The surface acoustic wave filter according to claim 4, wherein the width of the electrode finger or the period of the electrode finger interval of the reflector electrode group is increased from the side closer to the comb-shaped electrode.
【請求項7】 櫛型電極と隣接する反射器電極群は10
から30本の電極指で構成した請求項4に記載の弾性表
面波フィルタ。
7. The reflector electrode group adjacent to the comb-shaped electrode is 10
5. The surface acoustic wave filter according to claim 4, wherein the surface acoustic wave filter is configured by 30 to 30 electrode fingers.
【請求項8】 隣り合う反射器電極群の電極指幅あるい
は電極指間隔幅の差は、反射器電極ピッチ(電極指幅+
電極指間隔幅)の0.05%以上とした請求項4に記載
の弾性表面波フィルタ。
8. The difference between the electrode finger widths or electrode finger interval widths of adjacent reflector electrode groups is determined by the reflector electrode pitch (electrode finger width + electrode finger width).
The surface acoustic wave filter according to claim 4, wherein the surface acoustic wave filter is set to 0.05% or more of an electrode finger interval width).
JP2000152389A 2000-05-24 2000-05-24 Surface acoustic wave filter Expired - Lifetime JP4534307B2 (en)

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JP2010187057A (en) * 2009-02-10 2010-08-26 Denso Corp Surface acoustic wave element, method of producing same, and method of changing resonation frequency of same
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US7002438B2 (en) * 2002-02-27 2006-02-21 Fujitsu Media Devices Limited Surface acoustic wave device with reflection electrodes having pitches that vary
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