JP2001332777A - Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization - Google Patents

Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization

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Publication number
JP2001332777A
JP2001332777A JP2000149315A JP2000149315A JP2001332777A JP 2001332777 A JP2001332777 A JP 2001332777A JP 2000149315 A JP2000149315 A JP 2000149315A JP 2000149315 A JP2000149315 A JP 2000149315A JP 2001332777 A JP2001332777 A JP 2001332777A
Authority
JP
Japan
Prior art keywords
plate
piezoelectric material
shaped piezoelectric
polarization
polarization direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000149315A
Other languages
Japanese (ja)
Inventor
Koichi Fujita
浩一 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2000149315A priority Critical patent/JP2001332777A/en
Publication of JP2001332777A publication Critical patent/JP2001332777A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a plate-shaped piezoelectric material which can judge the direction of the polarization even after treatment such as polishing, cleaning of the surface is performed after polarization treatment. SOLUTION: Polarization treatment (S2) is performed in the specified direction of board thickness based on the external form, after the external form of plate-shaped piezoelectric material is processed (for example, one angle of a rectangle is cut off) into the form without a right and left symmetric axis (S1). As a result, even if the worker performs the treatment such as the polishing, the cleaning, etc., of the surface of plate-shaped piezoelectric material after, for example, polarization treatment, the features of external form is not lost, and the worker can prevent an error such as making a mistake in the direction of polarization at processing after that, by recognizing the direction of polarization based on the external form.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は,板状圧電材料の分
極方向を明確にして板状圧電材料の後加工工程でのミス
の発生を防止するための板状圧電材料製造方法,それに
よって製造された板状圧電材料,及び板状圧電材料の分
極方向判別装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a plate-shaped piezoelectric material for clarifying the polarization direction of the plate-shaped piezoelectric material and preventing the occurrence of mistakes in a post-processing step of the plate-shaped piezoelectric material. The present invention relates to a plate-shaped piezoelectric material and a polarization direction discrimination device for the plate-shaped piezoelectric material.

【0002】[0002]

【従来の技術】例えばインクジェットプリンタの印字ヘ
ッドでは,厚み方向に分極された板状圧電材料に溝加工
を施して駆動電極を形成し,上記板状圧電材料の剪断変
形を利用してインクを吐出するように構成されたものが
知られている。このような印字ヘッドでは,例えば分極
方向を間違えて逆の面に溝加工を施した板状圧電材料を
用いると,同じ駆動電圧を印加した場合に全く逆の動作
をしてしまい,正常なインク吐出を行うことができな
い。例えば,図6左に矢印で示すような分極方向を有す
る板状圧電材料51に溝52を施して駆動電極を形成
し,所定の駆動電圧を印加することによって図6右に示
すような変形を生じる場合,誤って図7左に示すように
分極方向を逆にして溝加工を施してしまうと,図6と同
様の駆動電圧印加では図7右上に示すように全く逆の変
形を生じてしまう。この場合,例えば駆動電圧を逆電位
にする(図7右下)などの対策が必要になる。
2. Description of the Related Art For example, in a print head of an ink jet printer, a drive electrode is formed by forming a groove in a plate-shaped piezoelectric material polarized in a thickness direction, and ink is ejected by utilizing the shear deformation of the plate-shaped piezoelectric material. One configured to do so is known. In such a print head, for example, if a plate-shaped piezoelectric material is used in which the polarization direction is wrong and a groove is formed on the opposite surface, the opposite operation is performed when the same drive voltage is applied, so that a normal ink operates. Discharge cannot be performed. For example, a groove 52 is formed in a plate-shaped piezoelectric material 51 having a polarization direction as indicated by an arrow on the left side of FIG. 6 to form a drive electrode, and by applying a predetermined drive voltage, a deformation as shown on the right side of FIG. If this occurs, if the grooving is performed by reversing the polarization direction by mistake as shown on the left side of FIG. 7, the application of the same drive voltage as in FIG. 6 will result in a completely opposite deformation as shown on the upper right of FIG. . In this case, for example, a countermeasure such as setting the driving voltage to the opposite potential (lower right in FIG. 7) is required.

【0003】このような事態を防止するためには,圧電
材料の分極方向を正しく判別することが必要となるが,
圧電材料の分極方向は内部的なものであるため,分極方
向を判別するためには例えば圧電材料に電界を印加して
その機械的変位を見る必要がある。しかしながら,板状
圧電材料の場合,板厚方向に電界を印加してもその機械
的変位量は僅かであり,これに基づいて分極方向を判別
することは難しい。また,板厚方向に直交する方向に電
界を印加しても,電圧を印加する距離が大きいために必
要な電圧が大きくなり,十分な電界強度が得られず,こ
の場合も分極方向の判別は困難である。そこで,例えば
特開平2−283108号公報には,図8に示すよう
に,板状圧電材料の製造を行う際にその分極方向に応じ
て表面に表裏判別用のマーキングを施す方法が提案され
ている。
In order to prevent such a situation, it is necessary to correctly determine the polarization direction of the piezoelectric material.
Since the polarization direction of the piezoelectric material is internal, in order to determine the polarization direction, for example, it is necessary to apply an electric field to the piezoelectric material and observe its mechanical displacement. However, in the case of a plate-shaped piezoelectric material, even if an electric field is applied in the thickness direction, the mechanical displacement is small, and it is difficult to determine the polarization direction based on the mechanical displacement. In addition, even if an electric field is applied in a direction perpendicular to the thickness direction, the required voltage increases due to the long distance to which the voltage is applied, and a sufficient electric field intensity cannot be obtained. Have difficulty. Therefore, for example, Japanese Patent Application Laid-Open No. 2-283108 proposes a method for marking a front surface and a back surface according to the polarization direction when manufacturing a plate-shaped piezoelectric material, as shown in FIG. I have.

【0004】[0004]

【発明が解決しようとする課題】しかしながら,上記の
ように板状圧電材料の表面に分極方向を判別するための
マーキングを施す方法では,例えば分極処理の後に表面
の研磨や洗浄などの処理が行われる場合には,その時点
で上記マーキングが消去されてその後の分極方向の判別
が不可能になる事態が想定される。本発明は,上記事情
に鑑みてなされたものであり,その目的とするところ
は,分極処理の後に表面の研磨や洗浄などの処理が行わ
れる場合であっても,その後も分極方向を正しく判別す
ることが可能な板状圧電材料,その製造方法,及びその
分極方向判別装置を提供することである。
However, in the above-described method of marking the surface of the plate-shaped piezoelectric material to determine the direction of polarization, for example, polishing, cleaning, or the like of the surface is performed after the polarization process. In such a case, it is assumed that the marking is erased at that time, and it becomes impossible to determine the polarization direction thereafter. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to correctly determine the polarization direction even after a process such as polishing or cleaning of the surface is performed after the polarization process. It is an object of the present invention to provide a plate-shaped piezoelectric material capable of performing the same, a method of manufacturing the same, and a polarization direction discriminating device thereof.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に,第1の発明は,板厚方向の分極処理を含む板状圧電
材料の製造方法において,上記板状圧電材料をその分極
方向に応じた左右対称軸を有しない外形に加工する外形
加工工程を具備してなることを特徴とする板状圧電材料
の製造方法として構成されている。これにより,例えば
分極処理の後に板状圧電材料の表面の研磨や洗浄などの
処理を行ったとしてもその外形上の特徴が失われること
はないため,その外形に基づいて分極方向を判断するこ
とにより,その後の加工時に分極方向を間違えるという
ミスを未然に防止することができる。
According to a first aspect of the present invention, there is provided a method of manufacturing a plate-like piezoelectric material including a polarization treatment in a plate thickness direction. An outer shape processing step of processing an outer shape having no corresponding left-right symmetric axis is provided as a method of manufacturing a plate-shaped piezoelectric material. As a result, even if the surface of the plate-shaped piezoelectric material is polished or cleaned after the polarization processing, the characteristics of the external shape are not lost. Therefore, the polarization direction is determined based on the external shape. Accordingly, it is possible to prevent a mistake that the polarization direction is mistaken during the subsequent processing.

【0006】ここで,上記外形加工工程においては,左
右対称軸を有する例えば長方形,正方形,円などの形状
の周囲に切欠加工を施すことにより,上記左右対称軸を
有しない形状とすることが考えられる。更に,上記外形
加工工程を分極処理の後に行うことも可能であるが,こ
の場合には外形加工自体を分極方向と逆の方向に施して
しまう可能性があるため,上記外形加工工程の後で上記
分極処理を行うことが望ましい。
Here, in the outer shape processing step, it is conceivable that a shape having no left-right symmetric axis is formed by performing notch processing around a shape having a left-right symmetric axis, such as a rectangle, a square, or a circle. Can be Further, it is possible to carry out the outer shape processing step after the polarization processing. In this case, however, the outer shape processing itself may be performed in a direction opposite to the polarization direction. It is desirable to perform the above-mentioned polarization processing.

【0007】また,第2の発明は,上記製造方法によっ
て製造された,分極方向に応じた左右対称軸を有しない
外形を有する板状圧電材料である。
A second aspect of the present invention is a plate-shaped piezoelectric material manufactured by the above manufacturing method and having an outer shape that does not have a left-right symmetric axis according to a polarization direction.

【0008】また,第3の発明は,上記板状圧電材料の
分極方向を判別する板状圧電材料の分極方向判別装置で
あって,上記板状圧電材料の分極方向を所定の方向に向
けた場合にのみ上記板状圧電材料を所定位置に位置決め
可能な位置決め手段を具備し,上記位置決め手段によっ
て上記板状圧電材料が上記所定位置に位置決めされたか
否かによって上記分極方向を判別してなることを特徴と
する板状圧電材料の分極方向判別装置として構成されて
いる。これにより,板状圧電材料が所定位置に正しく位
置決めされたか否かを自動検出することによって分極方
向が正しいか否かを自動的に判定することが可能とな
る。
A third invention is a device for determining the polarization direction of a plate-shaped piezoelectric material, which determines the polarization direction of the plate-shaped piezoelectric material, wherein the polarization direction of the plate-shaped piezoelectric material is oriented in a predetermined direction. Positioning means for positioning the plate-shaped piezoelectric material at a predetermined position only in the case where the polarization direction is determined based on whether or not the plate-shaped piezoelectric material has been positioned at the predetermined position by the positioning means. This is configured as a device for determining the polarization direction of a plate-shaped piezoelectric material. This makes it possible to automatically determine whether or not the polarization direction is correct by automatically detecting whether or not the plate-shaped piezoelectric material is correctly positioned at a predetermined position.

【0009】[0009]

【発明の実施の形態】以下添付図面を参照して,本発明
の実施の形態及び実施例につき説明し,本発明の理解に
供する。尚,以下の実施の形態及び実施例は本発明を具
体化した一例であって,本発明の技術的範囲を限定する
性格のものではない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments and examples of the present invention will be described below with reference to the accompanying drawings to facilitate understanding of the present invention. The following embodiments and examples are mere examples embodying the present invention, and do not limit the technical scope of the present invention.

【0010】(板状圧電材料の製造方法に関する実施の
形態)本実施の形態に係る板状圧電材料の製造方法は,
図1に示すような概略手順により構成される。本実施の
形態に係る板状圧電材料の製造方法は,板厚方向の分極
処理(S2)を行う前に,板状圧電材料に表裏判別用の
処理を施す工程(S1)を有する点で上記従来の製造方
法(図8)と共通するが,その工程が,板状圧電材料の
外形を機械的に加工するものである点で上記従来の製造
方法と異なる。
(Embodiment relating to a method for manufacturing a plate-shaped piezoelectric material) A method for manufacturing a plate-shaped piezoelectric material according to this embodiment is as follows.
It is constituted by a schematic procedure as shown in FIG. The method of manufacturing a plate-shaped piezoelectric material according to the present embodiment is characterized in that the method includes a step (S1) of performing a process for discriminating the front and back of the plate-shaped piezoelectric material before performing the polarization process (S2) in the plate thickness direction. It is common to the conventional manufacturing method (FIG. 8), but differs from the above-described conventional manufacturing method in that the process is to mechanically process the outer shape of the plate-shaped piezoelectric material.

【0011】本実施の形態に係る板状圧電材料の製造方
法における機械加工工程S1(外形加工工程に相当)で
は,例えば板状圧電材料の外形の一部分に切欠を形成す
ることによって左右対称軸を有しない形状に加工する。
このように板状圧電材料の外形を左右対称軸を有しない
形状に加工すれば,その外形によってその表裏の方向性
が確定される。
In the machining step S1 (corresponding to the outer shape processing step) in the method for manufacturing a plate-shaped piezoelectric material according to the present embodiment, for example, a notch is formed in a part of the outer shape of the plate-shaped piezoelectric material so that the left-right symmetric axis is formed. Process into a shape that does not have.
If the outer shape of the plate-like piezoelectric material is processed into a shape having no left-right symmetric axis, the outer shape determines the direction of the front and back surfaces.

【0012】具体的には,例えば板状圧電材料の外形が
長方形であれば(図2(a)),その1つの角を切り欠
く(図2(b))ことで左右対称軸を有しない形状とす
ることができる。また,板状圧電材料の外形が正方形で
あれば,その1つの角を非対称に切り欠く(図3
(b))ことで左右対称軸を有しない形状とすることが
できる。正方形の場合には,長方形と違って対角線も左
右対称軸となるため,1つの角を対称に切り欠いた場合
(図3(a))には依然として左右対称軸が存在してし
まう。同様に,板状圧電材料の外形が円であれば,その
円周上の一部分を非対称に切り欠く(図4(a))こと
で左右対称軸を有しない形状とすることができる。その
他,例えば板状圧電材料の外形が正方形であれば,辺上
の一部分を図4(b),(c)に示すように非対称に切
り欠いてもよい。もちろんこれは長方形の場合も同様で
ある。尚,この他にも板状圧電材料の外形が左右対称軸
を有しないような切欠の形成パターンは無数に存在する
が,どのような形成パターンを用いてもよいことは言う
までもない。
Specifically, for example, if the outer shape of the plate-like piezoelectric material is rectangular (FIG. 2A), one corner thereof is cut out (FIG. 2B), so that the piezoelectric material has no left-right symmetric axis. It can be shaped. If the outer shape of the plate-like piezoelectric material is a square, one corner thereof is cut asymmetrically (FIG. 3).
By (b)), a shape having no left-right symmetric axis can be obtained. In the case of a square, unlike a rectangle, a diagonal line also has an axis of left-right symmetry. Therefore, if one corner is cut off symmetrically (FIG. 3A), a left-right symmetry axis still exists. Similarly, when the outer shape of the plate-shaped piezoelectric material is a circle, a portion on the circumference thereof is cut asymmetrically (FIG. 4A), so that a shape having no left-right symmetric axis can be obtained. In addition, for example, if the outer shape of the plate-shaped piezoelectric material is a square, a portion on the side may be cut asymmetrically as shown in FIGS. 4B and 4C. Of course, this is the same in the case of a rectangle. In addition, there are a myriad of notch forming patterns in which the outer shape of the plate-shaped piezoelectric material does not have a left-right symmetric axis, but it goes without saying that any forming pattern may be used.

【0013】上記機械加工工程S1において板状圧電材
料の外形を左右対称軸を有しない形状に加工した後,そ
の外形に基づいて所定の板厚方向に分極処理を施し(S
2),例えば上記板状圧電材料にヘッド用の加工(例え
ば溝加工を施して駆動電極を形成する)を行う(S
3)。その時,例えば分極処理(S2)の後に板状圧電
材料の表面の研磨や洗浄などの処理を行ったとしても,
外形上の特徴が失われることはないため,その外形に基
づいて分極方向を認識すれば,加工(S3)時に分極方
向を間違えて逆の面に溝加工を施してしまうなどのミス
を未然に防止することができる。
In the machining step S1, the outer shape of the plate-shaped piezoelectric material is processed into a shape having no left-right symmetric axis, and polarization processing is performed in a predetermined thickness direction based on the outer shape (S1).
2) For example, the plate-shaped piezoelectric material is processed for a head (for example, a groove is formed to form a drive electrode) (S).
3). At that time, for example, even if the surface of the plate-like piezoelectric material is polished or cleaned after the polarization process (S2),
Since the features on the outer shape are not lost, if the polarization direction is recognized based on the outer shape, mistakes such as erroneous polarization direction during the processing (S3) and grooving on the opposite surface will be made beforehand. Can be prevented.

【0014】以上説明したように,本実施の形態に係る
板状圧電材料の製造方法によれば,板状圧電材料の外形
を左右対称軸を有しない形状に加工した後でその外形に
基づいて所定の板厚方向に分極処理を施すため,例えば
分極処理の後に板状圧電材料の表面の研磨や洗浄などの
処理を行ったとしてもその外形上の特徴が失われること
はなく,その外形に基づいて分極方向を認識することに
より,その後の加工時に分極方向を間違えるというミス
を未然に防止することができる。
As described above, according to the method for manufacturing a plate-shaped piezoelectric material according to the present embodiment, the outer shape of the plate-shaped piezoelectric material is processed into a shape having no left-right symmetric axis, and then the shape is determined based on the outer shape. Since the polarization process is performed in the predetermined thickness direction, even if the surface of the plate-like piezoelectric material is polished or cleaned after the polarization process, the characteristics of the outer shape are not lost. By recognizing the polarization direction on the basis of this, it is possible to prevent a mistake that the polarization direction is mistaken during the subsequent processing.

【0015】尚,上記機械加工工程(S1)を分極処理
(S2)の後に行うことも可能であるが,この場合には
外形加工自体を分極方向と逆の方向に施してしまう可能
性があるため,上記の例のように分極処理の前に機械加
工(外形加工)を行うことがより望ましい。
Although the above-mentioned machining step (S1) can be performed after the polarization processing (S2), in this case, there is a possibility that the outer shape processing itself is performed in a direction opposite to the polarization direction. Therefore, it is more desirable to perform machining (outer shape processing) before the polarization processing as in the above example.

【0016】(分極方向判定装置に関する実施の形態)
従来,分極処理済の板状圧電材料に例えば溝加工などの
加工を施す際の加工装置としては,例えば図9に示すよ
うに3本の位置決めピン60a,60b,60cによっ
て板状圧電材料Wの位置決めを行うものがあった。しか
しながら,上述したような左右対称軸を有しないように
外形の一部分に切欠を形成した板状圧電材料W1を用い
る場合,このような3本の位置決めピンによって位置決
めを行う加工装置では,図10に示すように上記板状圧
電材料W1の表裏(図中ではハッチングの有無で区別し
ている)のどちらを上にした状態でも(即ち分極方向を
どのように向けた状態でも)所定位置にセットすること
が可能であるため,上記板状圧電材料W1の分極方向が
正しいか否かを自動的に判定することはできない。
(Embodiment relating to polarization direction determining apparatus)
Conventionally, as a processing apparatus for performing processing such as grooving on a polarized plate-shaped piezoelectric material, for example, as shown in FIG. 9, three positioning pins 60a, 60b, and 60c are used to form the plate-shaped piezoelectric material W. There was one that performed positioning. However, in the case of using the plate-shaped piezoelectric material W1 in which a notch is formed in a part of the outer shape so as not to have a left-right symmetric axis as described above, such a processing apparatus that performs positioning by using three positioning pins as shown in FIG. As shown in the figure, the plate-shaped piezoelectric material W1 is set at a predetermined position regardless of whether it is upside down (that is, whether or not the polarization direction is oriented), with both sides of the plate-like piezoelectric material W1 distinguished by the presence or absence of hatching. Therefore, it is not possible to automatically determine whether the polarization direction of the plate-shaped piezoelectric material W1 is correct.

【0017】そこで,例えば図5に示すように,上記3
本の位置決めピン60a,60b,60cに加えて,上
記板状圧電材料W1の分極方向を正しくセットした時に
その切欠部分に当接する位置に新たな位置決めピン60
d(位置決め手段の一例)を設けた加工装置を用いれ
ば,分極方向が逆となるように板状圧電材料W1がセッ
トされた場合には上記板状圧電材料W1を所定位置に正
しく位置決めすることは不可能となるため,板状圧電材
料W1が所定位置に正しく位置決めされたか否かを自動
検出することによって分極方向が正しいか否かを自動的
に判定することが可能となる。
Therefore, for example, as shown in FIG.
In addition to the positioning pins 60a, 60b and 60c, a new positioning pin 60 is provided at a position where the plate-shaped piezoelectric material W1 comes into contact with the cutout portion when the polarization direction is correctly set.
If a processing device provided with d (an example of a positioning means) is used, when the plate-shaped piezoelectric material W1 is set so that the polarization direction is reversed, the plate-shaped piezoelectric material W1 is correctly positioned at a predetermined position. Therefore, it is possible to automatically determine whether or not the polarization direction is correct by automatically detecting whether or not the plate-shaped piezoelectric material W1 is correctly positioned at a predetermined position.

【0018】尚,板状圧電材料W1が所定位置に正しく
位置決めされたか否かを自動的に検出する手段として
は,上記4本の位置決めピン60a,60b,60c,
60dを全てコンタクトスイッチで構成することが考え
られる。これにより,セットされた板状圧電材料W1が
上記4本の位置決めピン60a,60b,60c,60
dの全てに接触した場合に板状圧電材料W1が所定位置
に正しく位置決めされた(即ち分極方向が正しい)もの
と判断できる。以上のような4本の位置決めピン60
a,60b,60c,60dを有する加工装置が分極方
向判定装置の一例である。
As means for automatically detecting whether or not the plate-shaped piezoelectric material W1 is correctly positioned at a predetermined position, the four positioning pins 60a, 60b, 60c,
It is conceivable that all the switches 60d are constituted by contact switches. As a result, the set plate-shaped piezoelectric material W1 is transferred to the four positioning pins 60a, 60b, 60c, and 60.
When all of d are contacted, it can be determined that the plate-shaped piezoelectric material W1 is correctly positioned at a predetermined position (that is, the polarization direction is correct). Four positioning pins 60 as described above
A processing device having a, 60b, 60c, and 60d is an example of a polarization direction determination device.

【0019】尚,上記のような4本の位置決めピン60
a,60b,60c,60dを有するもの以外でも,上
記板状圧電材料の左右対称軸を有しない外形に基づい
て,分極方向を所定の方向に向けた場合にのみ上記板状
圧電材料を所定位置に位置決め可能な位置決め手段を具
備するように構成した分極方向判定装置であれば,上記
のような左右対称軸を有しない外形の板状圧電材料の分
極方向を容易且つ正確に判定することが可能である。
Incidentally, the four positioning pins 60 as described above are used.
Other than those having a, 60b, 60c, and 60d, the plate-like piezoelectric material is placed in a predetermined position only when the polarization direction is oriented in a predetermined direction based on the outer shape of the plate-like piezoelectric material having no left-right symmetric axis. With a polarization direction determination device configured to include a positioning means capable of positioning at a predetermined position, it is possible to easily and accurately determine the polarization direction of a plate-shaped piezoelectric material having an outer shape that does not have a left-right symmetric axis as described above. It is.

【0020】[0020]

【発明の効果】以上説明したように,第1の発明に係る
板状圧電材料の製造方法,及びそれによって製造される
第2の発明に係る板状圧電材料によれば,例えば分極処
理の後に板状圧電材料の表面の研磨や洗浄などの処理を
行ったとしてもその外形上の特徴が失われることはな
く,その外形に基づいて分極方向を判断することによ
り,その後の加工時に分極方向を間違えるというミスを
未然に防止することができる。
As described above, according to the method for manufacturing a plate-shaped piezoelectric material according to the first invention and the plate-shaped piezoelectric material according to the second invention manufactured thereby, for example, after the polarization process, Even if the surface of the plate-shaped piezoelectric material is polished or cleaned, its external characteristics are not lost. By determining the polarization direction based on the external shape, the polarization direction can be changed during subsequent processing. The mistake of making a mistake can be prevented beforehand.

【0021】ここで,上記外形加工工程においては,左
右対称軸を有する例えば長方形,正方形,円などの形状
の周囲に切欠加工を施すことにより,上記左右対称軸を
有しない形状とすることが考えられる。更に,上記外形
加工工程を分極処理の後に行うことも可能であるが,こ
の場合には外形加工自体を分極方向と逆の方向に施して
しまう可能性があるため,上記外形加工工程の後で上記
分極処理を行うことが望ましい。
Here, in the above-mentioned outer shape processing step, it is conceivable to form a shape having no left-right symmetric axis by performing notch processing around a shape having a left-right symmetric axis, for example, a rectangle, square, circle or the like. Can be Further, it is possible to carry out the outer shape processing step after the polarization processing. In this case, however, the outer shape processing itself may be performed in a direction opposite to the polarization direction. It is desirable to perform the above-mentioned polarization processing.

【0022】また,第3の発明に係る分極方向判別装置
によれば,板状圧電材料が所定位置に正しく位置決めさ
れたか否かを自動検出することによって分極方向が正し
いか否かを自動的に判定することが可能となる。
Further, according to the polarization direction discriminating apparatus according to the third invention, whether or not the polarization direction is correct is automatically determined by automatically detecting whether or not the plate-shaped piezoelectric material is correctly positioned at a predetermined position. It is possible to make a determination.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の実施の形態に係る板状圧電材料の製
造方法による処理手順を示すフローチャート。
FIG. 1 is a flowchart showing a processing procedure according to a method for manufacturing a plate-shaped piezoelectric material according to an embodiment of the present invention.

【図2】 板状圧電材料の外形が長方形である場合の切
欠の形成パターンの一例を示す図。
FIG. 2 is a diagram showing an example of a notch formation pattern when the outer shape of a plate-shaped piezoelectric material is rectangular.

【図3】 板状圧電材料の外形が正方形である場合の切
欠の形成パターンの一例を示す図。
FIG. 3 is a diagram showing an example of a notch formation pattern when the outer shape of a plate-like piezoelectric material is a square.

【図4】 その他の切欠の形成パターンの例を示す図。FIG. 4 is a diagram showing an example of another notch formation pattern.

【図5】 本発明の実施の形態に係る加工装置(分極方
向判別装置)の位置決め手段近傍の概略構成を示す模式
図。
FIG. 5 is a schematic diagram showing a schematic configuration near a positioning means of the processing apparatus (polarization direction discriminating apparatus) according to the embodiment of the present invention.

【図6】 溝加工を施して駆動電極が形成された板状圧
電材料に駆動電圧を印加した場合の変形状態を示す説明
図(分極方向が正常な場合)。
FIG. 6 is an explanatory view showing a deformed state when a drive voltage is applied to a plate-shaped piezoelectric material on which drive electrodes are formed by performing groove processing (when the polarization direction is normal).

【図7】 溝加工を施して駆動電極が形成された板状圧
電材料に駆動電圧を印加した場合の変形状態を示す説明
図(分極方向が逆の場合)。
FIG. 7 is an explanatory diagram showing a deformed state when a drive voltage is applied to a plate-shaped piezoelectric material on which a drive electrode is formed by performing groove processing (when the polarization directions are opposite).

【図8】 従来の板状圧電材料の製造方法による処理手
順の一例を示すフローチャート。
FIG. 8 is a flowchart illustrating an example of a processing procedure according to a conventional method for manufacturing a plate-shaped piezoelectric material.

【図9】 従来の加工装置の位置決め手段近傍の概略構
成を示す模式図。
FIG. 9 is a schematic diagram showing a schematic configuration near a positioning means of a conventional processing apparatus.

【図10】 上記従来の加工装置の位置決め手段に本発
明に係る板状圧電材料をセットした状態を示す説明図。
FIG. 10 is an explanatory view showing a state in which the plate-shaped piezoelectric material according to the present invention is set in the positioning means of the conventional processing apparatus.

【符号の説明】[Explanation of symbols]

W,W1…板状圧電材料 60a〜60d…位置決めピン S1…機械加工工程(外形加工工程に相当) W, W1 ... Plate-shaped piezoelectric material 60a-60d ... Positioning pin S1 ... Machining process (corresponding to external machining process)

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 板厚方向の分極処理を含む板状圧電材料
の製造方法において,上記板状圧電材料をその分極方向
に応じた左右対称軸を有しない外形に加工する外形加工
工程を具備してなることを特徴とする板状圧電材料の製
造方法。
1. A method of manufacturing a plate-shaped piezoelectric material including a polarization process in a plate thickness direction, comprising an outer shape processing step of processing the plate-shaped piezoelectric material into an outer shape having no symmetric axis in accordance with the polarization direction. A method for producing a plate-shaped piezoelectric material, comprising:
【請求項2】 上記外形加工工程において,左右対称軸
を有する形状の周囲に切欠加工を施すことにより,上記
左右対称軸を有しない形状とする請求項1記載の板状圧
電材料の製造方法。
2. The method for manufacturing a plate-shaped piezoelectric material according to claim 1, wherein in the outer shape processing step, the shape having no left-right symmetry axis is formed by performing notch processing around the shape having the left-right symmetry axis.
【請求項3】 上記外形加工工程の後で上記分極処理を
行う請求項1又は2記載の板状圧電材料の製造方法。
3. The method for manufacturing a plate-like piezoelectric material according to claim 1, wherein the polarization treatment is performed after the outer shape processing step.
【請求項4】 分極方向に応じた左右対称軸を有しない
外形を有する板状圧電材料。
4. A plate-shaped piezoelectric material having an outer shape that does not have a left-right symmetric axis according to a polarization direction.
【請求項5】 分極方向に応じた左右対称軸を有しない
外形に加工された板状圧電材料の分極方向を判別する板
状圧電材料の分極方向判別装置において,上記板状圧電
材料の分極方向を所定の方向に向けた場合にのみ上記板
状圧電材料を所定位置に位置決め可能な位置決め手段を
具備し,上記位置決め手段によって上記板状圧電材料が
上記所定位置に位置決めされたか否かによって上記分極
方向を判別してなることを特徴とする板状圧電材料の分
極方向判別装置。
5. A polarization direction discrimination device for a plate-shaped piezoelectric material which discriminates a polarization direction of a plate-shaped piezoelectric material processed into an outer shape having no left-right symmetry axis according to the polarization direction. Positioning means for positioning the plate-shaped piezoelectric material at a predetermined position only when the plate-shaped piezoelectric material is oriented in a predetermined direction, and determining whether or not the plate-shaped piezoelectric material has been positioned at the predetermined position by the positioning means. An apparatus for determining the direction of polarization of a plate-shaped piezoelectric material, comprising determining the direction.
JP2000149315A 2000-05-22 2000-05-22 Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization Pending JP2001332777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000149315A JP2001332777A (en) 2000-05-22 2000-05-22 Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000149315A JP2001332777A (en) 2000-05-22 2000-05-22 Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization

Publications (1)

Publication Number Publication Date
JP2001332777A true JP2001332777A (en) 2001-11-30

Family

ID=18655188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000149315A Pending JP2001332777A (en) 2000-05-22 2000-05-22 Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization

Country Status (1)

Country Link
JP (1) JP2001332777A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015041195A1 (en) * 2013-09-17 2015-03-26 株式会社村田製作所 Pressure sensor and method for manufacturing pressure sensor
JP2015084016A (en) * 2013-10-25 2015-04-30 株式会社エス・エム・エムプレシジョン Optical isolator optical element and manufacturing method of the same
CN109427958A (en) * 2017-09-05 2019-03-05 王开安 Membrane polarization bearing assembly and membrane polarization equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015041195A1 (en) * 2013-09-17 2015-03-26 株式会社村田製作所 Pressure sensor and method for manufacturing pressure sensor
JPWO2015041195A1 (en) * 2013-09-17 2017-03-02 株式会社村田製作所 Press sensor
JP2015084016A (en) * 2013-10-25 2015-04-30 株式会社エス・エム・エムプレシジョン Optical isolator optical element and manufacturing method of the same
CN109427958A (en) * 2017-09-05 2019-03-05 王开安 Membrane polarization bearing assembly and membrane polarization equipment

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