CN109427958A - Membrane polarization bearing assembly and membrane polarization equipment - Google Patents
Membrane polarization bearing assembly and membrane polarization equipment Download PDFInfo
- Publication number
- CN109427958A CN109427958A CN201710792879.1A CN201710792879A CN109427958A CN 109427958 A CN109427958 A CN 109427958A CN 201710792879 A CN201710792879 A CN 201710792879A CN 109427958 A CN109427958 A CN 109427958A
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- Prior art keywords
- positioning device
- membrane polarization
- circle
- pedestal
- center
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
Abstract
The present invention relates to provide a kind of membrane polarization bearing assembly, it carries to polarize to film included in piezoelectric device piezoelectric device for realizing during membrane polarization, it includes pedestal and an at least positioning device, it is formed with the placement region for placing piezoelectric device on the pedestal and is formed in the location hole at placement region edge, the positioning device is rotatably set in the location hole and partially exposes the pedestal, the positioning device defines a center of circle, expose minimum range of the distance greater than the placement region edge to the center of circle at least arriving the center of circle on the part positioning device outer edge of pedestal with a bit.The present invention also provides the membrane polarization equipment using above-mentioned membrane polarization bearing assembly.The present invention have the advantages that by piezoelectric device and piezoelectric device film precise positioning, guarantee that membrane polarization position is accurate and polarization effect is excellent.
Description
[technical field]
The present invention relates to thin film technique field, it is related specifically to a kind of membrane polarization bearing assembly and membrane polarization equipment.
[background technique]
Polarization is an important link in thin-film material processing, and main purpose is point for making to be orientated in a jumble in thin-film material
Sub- dipole moment is consistently oriented along specific direction (such as polarized electric field direction), so that the thin-film material be made to have piezoelectric property.It is thin
Thin-film material is typically directly placed between electrode by film polarization, completes polarization using the high voltage electric field that electrode generates.Thin-film material
In polarization process, if polarization effect will be impacted it cannot be guaranteed that thin-film material has enough positional stabilities.
[summary of the invention]
To overcome technical problem existing in the prior art, the present invention provides a kind of membrane polarization bearing assembly and film pole
Change equipment.
The scheme that the present invention solves technical problem is to provide a kind of membrane polarization bearing assembly, for realizing in film pole
Piezoelectric device is carried to polarize to film included in piezoelectric device during change comprising pedestal and at least
One positioning device is formed with the placement region for placing piezoelectric device on the pedestal and is formed in placement region edge
Location hole, the positioning device are rotatably set in the location hole and partially expose the pedestal, and the positioning device is fixed
An adopted center of circle exposes the distance on the part positioning device outer edge of pedestal at least with any to the center of circle and is greater than the rest area
Minimum range of the domain edge to the center of circle.
Preferably, the placement region is the accommodation groove being opened on the pedestal, the groove bottom of the accommodation groove to institute
The distance for stating base-plates surface is less than the piezoelectric device in the thickness on its placement direction so that described in the exposing of part piezoelectric device
Accommodation groove.
Preferably, the part base that the placement region is surrounded by the fin and the fin that are raised in the base-plates surface
Surface is defined jointly, and the fin is jagged so that the positioning device protrudes into corresponding to opening up at the positioning device position
The placement region.
Preferably, the positioning device is that 2 or multiple, described 2 or multiple positioning devices are respectively distributed to rest area
The edge in domain is from different perspectives to the piezoelectric device force being placed in placement region to position.
Preferably, the positioning device includes cup dolly and the abutting part for being convexly equipped in cup dolly edge, the positioning
The device center of circle is the cup dolly center of circle, and the distance in the center of circle of the abutting part any point to cup dolly is all larger than described
The radius size of cup dolly itself, itself radius of the cup dolly be less than piezoelectric device edge to the center of circle of cup dolly it
The distance and distance in the center of circle of the abutting part any point to cup dolly is all larger than the piezoelectric device edge to cup dolly
The center of circle distance.
Preferably, the positioning device further includes rotating part, and the rotating part extends vertically shape from the end face of cup dolly
At, the rotating part is cylindric, and is arranged with the same central axis of the cup dolly, and the radius of the rotating part is less than etc.
In cup dolly itself radius.
Preferably, the positioning device further includes spring holder, and locating slot, the spring are offered on the rotating part
Positioning pin is contacted with the locating slot extension type positions rotating part.
Preferably, the locating slot is the annular groove being opened on the rotating part surface.
Preferably, the dowel hole being connected to the location hole, the dowel hole hole wall are also provided on the pedestal
It is threadedly engaged with the spring holder and passes through the dowel hole and be arranged in locating slot in the pedestal with the rotating part
It abuts.
The present invention also provides a kind of membrane polarization equipment comprising above-mentioned membrane polarization bearing assembly.
Compared with prior art, a kind of membrane polarization bearing assembly of the invention and membrane polarization equipment have following effect
Fruit:
The present invention relates to providing a kind of membrane polarization bearing assembly, for realizing during membrane polarization to piezoelectricity device
Part is carried to polarize to film included in piezoelectric device comprising pedestal and at least a positioning device, it is described
It is formed with the placement region for placing piezoelectric device on pedestal and is formed in the location hole at placement region edge, the positioning
Device is rotatably set in the location hole and partially exposes the pedestal, and the positioning device defines a center of circle, exposes base
Distance on the part positioning device outer edge of seat at least with any to the center of circle is greater than the placement region edge to the circle
The minimum range of the heart.The present invention also provides the membrane polarization equipment using above-mentioned membrane polarization bearing assembly.The present invention has will
Film precise positioning, the guarantee advantage that membrane polarization position is accurate and polarization effect is excellent in piezoelectric device and piezoelectric device.
[Detailed description of the invention]
Fig. 1 is the schematic perspective view of membrane polarization equipment of the present invention.
Fig. 2 is the schematic perspective view of piezoelectric device of the present invention.
Fig. 3 is the configuration schematic diagram of membrane polarization equipment of the present invention.
Fig. 4 is the schematic perspective view of pedestal of the present invention.
Fig. 5 is the schematic perspective view of another embodiment of pedestal of the present invention.
Fig. 6 is the schematic perspective view of positioning device of the present invention.
Fig. 7 is another viewing angle constructions schematic diagram of positioning device of the present invention.
Fig. 8 is the cooperation schematic diagram of membrane polarization bearing assembly and piezoelectric device of the present invention.
Fig. 9 is the schematic perspective view of the variant embodiment of positioning device.
[specific embodiment]
In order to make the purpose of the present invention, technical solution and advantage is apparent understands, below in conjunction with attached drawing and embodiment,
The present invention will be described in further detail.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention,
It is not intended to limit the present invention.
Also referring to Fig. 1-3, a kind of membrane polarization bearing assembly 10 of the invention, for realizing in membrane polarization mistake
Piezoelectric device 12 is carried to carry out polarization to film 121 included in piezoelectric device 12 and make the piezoelectric device 12 in journey
With piezoelectric property.Since film 121 is very slim, it usually needs substrate layer 122 is used as carrier, which is carried on base
Piezoelectric device 10 is collectively formed both on material layer 122.The substrate layer 122 can be wafer layer and be also possible to glassy layer.When the base
When material layer 122 is wafer layer, film 121 electrically conducts with wafer layer, and after the completion of film 121 is polarized, piezoelectric property is formed in
Between itself upper and lower surfaces of film 121, film 121 and wafer layer can be used as an entirety namely a piezoelectric device 12 at this time
It uses；When the substrate layer is glassy layer, glassy layer is only purely by way of carrier, with film 121 without electrical connection, piezoelectricity
It can be formed between itself upper and lower surfaces of film 121, only film 121 has piezoelectric property at this time, need to take from glassy layer
Lower film 121 uses.
As shown in figure 3, the membrane polarization bearing assembly 10 includes mask (Mask) 11, pedestal 13 and positioning device 20.
The placement region 131 for placing piezoelectric device 12 is formed on the pedestal 13, piezoelectric device 12 is placed in the placement region
On 131.The mask 11 covers on the pedestal 13, and the piezoelectric device 12 is placed between mask 11 and pedestal 13 and carries out
Polarization.The present invention illustrates polarization process by taking the film 121 of strip as an example, as shown in Fig. 2, multiple strip form films 121 are set to institute
It states on substrate layer 122, corresponds to the strip form film 121, the mask 11 offers pole corresponding with 121 position of strip form film
Change hole 111, polarized part film 121 will be needed to be exposed to extra electric field on piezoelectric device 12 by the polarization hole 111 and carry out pole
Change, while being not required to polarization or the other parts film 121 without being exposed under extra electric field and substrate layer 122 and passing through mask 11
Covered, prevent from being not required to polarized part film 121 and the damage of substrate layer 122 (such as when substrate layer 122 is wafer, if
It is exposed under extra electric field, may cause the electronic circuit damage on wafer and/or wafer).It is appreciated that when needing to exposing to the open air
When the film 121 in placement region 131 is all polarized, the mask 11 can be removed at this time.
In polarization process, piezoelectric device 12 must have enough positional stabilities, to guarantee without exposure to additional
The part film 121 and substrate layer 122 of electric field are not exposed in electric field, while guarantee is accurate to polairzed area needed for film 121
It polarizes.The positioning device 20 is set to around the placement region 131, is placed in the placement region in piezoelectric device 12
After 131, edge namely 122 edge of substrate force to the piezoelectric device 12 are positioned, and prevent piezoelectric device 12 from sending out
Raw displacement, it is ensured that polarization precision.It is offered on the pedestal 13 for being put into location hole therein for the positioning device 20
132, the positioning device 20 is put into the location hole 132 and can rotate relative to the pedestal 13 and piezoelectric device 12, thus
Positioning device 20 is abutted in polarization process with the edge of the piezoelectric device 12 to be positioned, after the completion of polarization, positioning
The edge separation of the rotation of device 20 and the piezoelectric device 12 is convenient for the piezoelectric device 12 separating the placement region 131.
Referring to Fig. 4, in some embodiments, the placement region 131 is by being raised in 13 upper surface 1311 of pedestal
Fin 133 and the part base surface 1311 that surrounds of the fin 133 define jointly, the fin 133 and piezoelectric device 12
Edge be adapted, the piezoelectric device 12 be seated when being placed in the placement region 131 on the surface 1311 simultaneously by institute
State the limit of fin 133.The fin 133 correspond to 132 position of location hole at offer a notch 134, the positioning
Device 20 protrudes into the placement region 131 by the notch 134 and abuts with 12 edge of piezoelectric device.Referring to Fig. 5, another
In outer some embodiments, the placement region 131 is the accommodation groove 135 being opened on the surface 1311, the accommodation groove 135
Groove bottom 1351 to the base-plates surface 1311 distance be less than thickness of the piezoelectric device 12 on its placement direction, with
Make part piezoelectric device 12 expose the accommodation groove 135 and abut with the positioning device 20 to be positioned by the positioning device 20.
It is appreciated that the positioning device 20 is one or more, and when positioning device 20 is one, then piezoelectric device
It 12 one end must be against 131 edge of placement region namely the cell wall of the fin 133 or the accommodation groove 135.Then it is pressing
Electrical part 12 is not against the place at 131 edge of placement region, if 134 position of notch setting positioning device 20 is to piezoelectricity device
Part 12 positions.2 or multiple positioning devices 20 can certainly be set, and respective numbers are set at the edge of placement region 131
Location hole 132 and notch 134, from different perspectives to exert a force piezoelectric device 12 to being allowed to be located in placement region 131.
Referring to Figure 6 together -8, the positioning device 20 is rotatably set in the location hole 132 and institute is exposed in part
Pedestal 13 is stated, the positioning device 20 defines a center of circle, and exposing at least has on 20 outer edge of part positioning device of pedestal 13
A little arrive the minimum range of the distance greater than 131 edge of placement region to the center of circle in the center of circle.The positioning device 20 is
One block structure can be hard material, can also be soft material, preferably soft materials such as rubber, the positioning device 20 with
13 split settings of pedestal, and can opposite base 13 rotate, can be wrapped in opposite 12 rotational travel of piezoelectric device of the positioning device 20
Include an abutted position and a disengaged position, when the positioning device 20 turns to the abutted position with 12 edge of piezoelectric device
I.e. 121 edge of substrate layer abuts, and exerts a force 12 edge of piezoelectric device piezoelectric device 12 is positioned at the placement region 131
In；When the positioning device 20 turns to the disengaged position, the positioning device 20 is not contacted with the piezoelectric device 12.?
That is, positioning device 20 is fixed to each other with the piezoelectric device 12 in abutted position, in disengaged position, the piezoelectric device 12 can
It removes from placement region 131 and is not limited by positioning device 20.
The positioning device 20 includes cup dolly 21, the abutting part 22 for being convexly equipped in 21 edge of cup dolly and from circular base
The vertically extending rotating part 23 in end face of seat 21.The cup dolly 21, abutting part 22 and 23 three of rotating part can be integrally formed,
It seperated can also form.The cup dolly 21, abutting part 22 are that foregoing anchors expose 13 part of pedestal, the rotation
Portion 23 is then placed in the location hole 132.The cup dolly 21 is a round pie structure, and definition has a center of circle A, described
The positioning device center of circle is the center of circle A of the cup dolly 21.The cup dolly 21 and abutting part 22 are substantially in same plane
On, it is assumed that the distance of 22 any point of abutting part to center of circle A is R1, and the radius of cup dolly 21 is R2, the substrate 122
The minimum range of edge to center of circle A are R, then the distance R1 for setting 22 any point of abutting part to the center of circle A is all larger than the circle
The radius size R2 of shape pedestal 21 itself, and have R2 < R < R1, that is, the cup dolly 21 itself radius R2 is less than piezoelectricity device
12 edge of part to cup dolly 21 center of circle A minimum range R and 22 any point of the abutting part to cup dolly 21 center of circle A
Distance R1 be all larger than center of circle A of 12 edge of piezoelectric device to cup dolly 21 minimum range be R, thus make positioning fill
When setting 20 opposite piezoelectric devices 12 and turning to the abutted position, the abutting part 22 is abutted with 12 edge of piezoelectric device,
It exerts a force to the piezoelectric device 12, to be positioned to piezoelectric device 12.It is appreciated that the abutting part 22 may include one
Or more than one, such as two abutting parts 22 can be set at both ends on the same diameter line of cup dolly 21.
Further, it is offered on the end face of the cup dolly 21 far from rotating part 23 and turns round hole 211, it is described to twist
Positioning device 20 rotates.The rotating part 23 is set to the end face opposite with hole 211 is turned round of cup dolly 21.The rotating part 23 is
Cylindrical-shaped structure, and be arranged with the same central axis of the cup dolly 21.Assuming that the radius of the rotating part 23 is R3, then set
R3≤R1, the rotating part 23 are put into the location hole 132 of aforementioned pedestal 13, and the relatively described pedestal 13 and 12 turns of piezoelectric device
It is dynamic.
Referring to Figure 6 together and Fig. 8, the positioning device 20 further include spring holder 24, the spring holder 24
For an elastic element；The locating slot 231 with the spring holder 24 cooperation is offered on 23 outer surface of rotating part, it is described
Locating slot 231 is the ring annular groove being opened on 23 cylindrical surface of rotating part, 24 extension type of spring holder with
The locating slot 231 contact positions positioning device 20, prevent positioning device 20 on the direction for being put into location hole 132 on move down
It is dynamic.In addition, the dowel hole 134 being connected to the location hole 132 is offered on the pedestal 13,134 hole of dowel hole
Wall is threadedly engaged with the spring holder 24, the spring holder 24 through the dowel hole 134 be arranged in pedestal 11 with
The abutting of locating slot 231 of the positioning device 20 is positioned.
Referring to Fig. 9, the locating slot 231 is to be opened in 23 cylindrical surface of rotating part as a variant embodiment
On multiple interval troughs 232 for equidistantly arranging of annular.For the interval trough 232 is compared with annular groove, there is better locating effect.
The present invention also provides a kind of membrane polarization equipment comprising membrane polarization bearing assembly as described above.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in original of the invention
Made any modification within then, equivalent replacement and improvement etc. should all be included in the protection scope of the present invention.
Claims (10)
1. membrane polarization bearing assembly carries to piezoelectricity device piezoelectric device for realizing during membrane polarization
Film included in part polarizes, it is characterised in that: including pedestal and an at least positioning device, is formed on the pedestal
For placing the placement region of piezoelectric device and being formed in the location hole at placement region edge, the positioning device is rotatably set
It is placed in the location hole and partially exposes the pedestal, the positioning device defines a center of circle, exposes the part positioning of pedestal
Distance on off-site edge at least with any to the center of circle is greater than the placement region edge to the minimum range in the center of circle.
2. membrane polarization bearing assembly as described in claim 1, it is characterised in that: the placement region is to be opened in the base
The distance of accommodation groove on seat, groove bottom to the base-plates surface of the accommodation groove is less than the piezoelectric device in its placement side
Upward thickness is so that part piezoelectric device exposes the accommodation groove.
3. membrane polarization bearing assembly as described in claim 1, it is characterised in that: the placement region is by being raised in the base
The part base surface that the fin of seating face and the fin surround is defined jointly, and the fin is corresponding to the positioning device
It is opened up at position jagged so that the positioning device protrudes into the placement region.
4. membrane polarization bearing assembly as described in claim 1, it is characterised in that: the positioning device is 2 or multiple, institute
It states 2 or multiple positioning devices is respectively distributed to the edge of placement region from different perspectives to the pressure being placed in placement region
Electrical part force is to position.
5. membrane polarization bearing assembly as described in claim 1, it is characterised in that: the positioning device include cup dolly and
It is convexly equipped in the abutting part at cup dolly edge, the positioning device center of circle is the cup dolly center of circle, and the abutting part is appointed
Some distance to the center of circle of cup dolly is all larger than the radius size of the cup dolly itself, the cup dolly itself half
Diameter be less than piezoelectric device edge to the center of circle of cup dolly distance and the abutting part any point to the center of circle of cup dolly it
Distance is all larger than the distance in the center of circle of the piezoelectric device edge to cup dolly.
6. the positioning device during membrane polarization as claimed in claim 5, it is characterised in that: the positioning device further includes
Rotating part, the rotating part extend vertically to be formed from the end face of cup dolly, the rotating part be it is cylindric, and with the circle
The same central axis setting of pedestal, the radius of the rotating part are less than or equal to cup dolly itself radius.
7. membrane polarization bearing assembly as claimed in claim 6, it is characterised in that: the positioning device further includes spring positioning
It sells, locating slot is offered on the rotating part, the spring holder contacts fixed to rotating part with the locating slot extension type
Position.
8. membrane polarization bearing assembly as claimed in claim 7, it is characterised in that: the locating slot is to be opened in the rotation
Annular groove on portion surface.
9. membrane polarization bearing assembly as claimed in claim 7, is characterized in that: being also provided on the pedestal and the positioning
The dowel hole of hole connection, the dowel hole hole wall are threadedly engaged with the spring holder and pass through the dowel hole and wear
It is abutted in the pedestal with the locating slot of the rotating part.
10. membrane polarization equipment, it is characterised in that: including the described in any item membrane polarization bearing assemblies of such as claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710792879.1A CN109427958A (en) | 2017-09-05 | 2017-09-05 | Membrane polarization bearing assembly and membrane polarization equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710792879.1A CN109427958A (en) | 2017-09-05 | 2017-09-05 | Membrane polarization bearing assembly and membrane polarization equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109427958A true CN109427958A (en) | 2019-03-05 |
Family
ID=65513540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710792879.1A Pending CN109427958A (en) | 2017-09-05 | 2017-09-05 | Membrane polarization bearing assembly and membrane polarization equipment |
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| Country | Link |
|---|---|
| CN (1) | CN109427958A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001332777A (en) * | 2000-05-22 | 2001-11-30 | Sharp Corp | Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization |
| JP2001332778A (en) * | 2000-05-25 | 2001-11-30 | Fdk Corp | Method of polarizing piezoelectric element |
| US20120117769A1 (en) * | 2010-11-11 | 2012-05-17 | Ngk Insulators, Ltd. | Method for manufacturing piezoelectric element |
| CN204312487U (en) * | 2014-11-21 | 2015-05-06 | 中航华东光电有限公司 | Fixture and the device pasted for liquid crystal box and filter |
| CN106328804A (en) * | 2016-11-17 | 2017-01-11 | 河北建筑工程学院 | Multi-channel piezoelectric film polarization fixture |
-
2017
- 2017-09-05 CN CN201710792879.1A patent/CN109427958A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001332777A (en) * | 2000-05-22 | 2001-11-30 | Sharp Corp | Plate-shaped piezoelectric material, method of manufacturing the same, and device for judging direction of its polarization |
| JP2001332778A (en) * | 2000-05-25 | 2001-11-30 | Fdk Corp | Method of polarizing piezoelectric element |
| US20120117769A1 (en) * | 2010-11-11 | 2012-05-17 | Ngk Insulators, Ltd. | Method for manufacturing piezoelectric element |
| CN204312487U (en) * | 2014-11-21 | 2015-05-06 | 中航华东光电有限公司 | Fixture and the device pasted for liquid crystal box and filter |
| CN106328804A (en) * | 2016-11-17 | 2017-01-11 | 河北建筑工程学院 | Multi-channel piezoelectric film polarization fixture |
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