JP2001330172A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mechanism for removing foreign matter in a gate valve where a sealing material attached to a gate plate is conventionally pressed against an opening circumferential rim for retaining airtightness causing a problem of deterioration of airtightness when the foreign matter sticks to an adhering portion of the sealing material and a sealing material of the opening circumferential rim part. SOLUTION: This gate valve 1 has a casing 2 having an opening 3a, the gate plate 5 opening and closing the opening 3a, and an actuator (not illustrated) driving the gate plate 5. It is characterized by that it has a mechanism arranging brushes 13 and 14 each near a tip of the gate plate 5 and near the opening circumferential rim part for removing the foreign matter sticking to the mutually adhering portion of the gate plate 5 and the opening circumferential rim part by movement in parallel with an opening face of the opening 3a of the gate plate 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve used for opening and closing a substrate loading / unloading port in a processing chamber of a semiconductor substrate processing apparatus or the like.

[0002]

2. Description of the Related Art For example, a CV which is a process of processing a semiconductor substrate is used.
D, thin film formation on the substrate surface such as sputtering and vapor deposition is processed in a reduced pressure processing chamber. The airtightness of the processing chamber greatly affects the quality of the semiconductor substrate, and when the processing gas is toxic, the airtightness of the processing chamber is important from the viewpoint of safety. In order to secure the airtightness, a gate valve is disposed at the loading / unloading port of the semiconductor substrate in the processing chamber.

FIG. 6 is a sectional view showing a main part of a conventional gate valve. The gate valve 1 is a housing 2
Openings (hereinafter, referred to as a first opening 3a and a second opening 3b) are respectively formed on two opposite wall surfaces of
The first opening 3a and the second opening 3b are connected to two different chambers (hereinafter, referred to as a first chamber 4a and a second chamber 4b). Moving in a direction parallel to the opening surface of the opening 3a between a position disposed in the housing and opposed to the first opening 3a and a position separated from the first opening 3a; At a position opposed to the opening 3a, the housing 3 moves in a direction perpendicular to the opening surface, and the housing-side seal portion on the housing side and the gate-plate-side seal portion on the gate plate side move with each other in the opening 3a. The gate plate 5 which is in close contact with and surrounds the opening 3a and closes the opening 3a and is spaced apart from the opening 3a to open the opening 3a,
A sealing material such as an O-ring 6 formed in a circular shape or a rectangular shape so as to surround the opening 3a is attached. The mechanism for moving the gate plate 5 includes:
The gate plate 5, a link 7 having one end rotatably attached to the gate plate 5, and a central portion of the link 7 supported by a shaft at a side opposite to the first opening 3 a with respect to the gate plate 5. A movable body 8 that moves in a direction parallel to the opening surface of the first opening 3a, an actuator (not shown) that drives the movable body 8, and a movable body 8 between the other end of the link 7 and the movable body 8. A tension spring 9 provided to pull the link 7 clockwise in FIG. 6; and a tip end face of the gate plate when the gate plate 5 is moved to a position facing the first opening 3a by movement of the movable body 8. 1st in 10
A stopper 11 for stopping the movement of the opening 3a in a direction parallel to the opening surface and for moving the link 7 in a direction perpendicular to the opening surface by rotation of the link 7 from the state where the gate plate 5 abuts the stopper 11; And the movable body 8
6, the link 7 rotates counterclockwise in FIG. 6 and moves in the direction approaching the first opening 3a of the gate plate 5, so that the O on the housing side seal portion is moved. The ring 6
The opening 3a is closed. Conversely, by lowering the movable body 8 in FIG. 6, the gate plate 5 is lowered by the restoring force of the tension spring 9 while being separated from the casing-side seal portion, and the first opening 3a is opened. .

In this case, the gate valve 1 is
First chamber 4a which is a processing chamber for semiconductor substrate processing
And a second chamber 4b for carrying in / out the semiconductor substrate to keep the inside of the first chamber 4a at or below a desired pressure. Further, an actuator (not shown) for driving the movable body 8 includes an air cylinder (not shown) arranged outside the housing 2 and penetrates a wall forming the housing 2. Then, the rod 12 supporting the movable body 8 is moved up and down.

[0005]

The above-mentioned conventional gate valve is provided with a sealing material in order to secure airtightness by pressing a sealing material attached to a gate plate against a peripheral edge of an opening formed in a housing of the gate valve. Although the cleanliness of the surface of the casing-side seal portion to which the seal material adheres is important, some foreign substances contained in the processing gas and products generated by processing the semiconductor substrate are gradually removed from the seal material or the casing. It is unavoidable to adhere to the body side seal part. However, the conventional gate valve does not have a mechanism for removing adhered foreign matter, so foreign matter accumulates and airtightness deteriorates.For example, when a desired degree of vacuum cannot be obtained, overhaul of the processing apparatus including the gate valve is performed. Will be implemented. Overhaul requires a great deal of man-hours, and in the case of vacuum equipment, since it is open to the atmosphere at the time of overhaul, it takes a long time to start up and has a large effect on production. It is an object of the present invention to prevent airtightness from being deteriorated by providing a gate valve with a mechanism for removing foreign substances attached to the sealing material or the casing-side sealing portion.

[0006]

Means for Solving the Problems The present invention has been proposed to solve the above-mentioned problems, and a gate valve for solving the above-mentioned problems is provided with a housing having an opening, and disposed in the housing. Move in a direction parallel to the opening surface of the opening between a position facing the opening and a position separated from the opening, and at a position facing the opening, the opening surface Move in a direction perpendicular to the housing, the housing-side seal portion on the housing side and the gate plate-side seal portion on the gate plate side are in close contact with each other so as to surround the opening, and close the opening, A gate valve having a gate plate that is separated from the opening and opens the opening, and an actuator as a moving mechanism of the gate plate.
When the gate plate moves in a direction parallel to the opening surface, a surface of the gate plate on the opening portion side of the gate plate for removing foreign substances attached to the housing-side seal portion is located on the tip side of the gate plate. A brush that moves while rubbing the housing-side seal portion, and rubs the gate-plate-side seal portion against a rear end side of the gate plate at a periphery of the opening for removing foreign matter attached to the gate-plate-side seal portion. A gate valve on which a brush is disposed.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION The gate valve of the present invention has an opening connected to a chamber or the like in its housing. For example, two openings may be connected to two different chambers, respectively, or one opening may be connected to one chamber. Furthermore, this housing does not necessarily have to be configured separately from the connected chamber, but may be configured as a part of the connected chamber. Moves in a direction parallel to the opening surface of the opening between a position opposed to the opening and a position opposed to the opening disposed in the housing, and also faces the opening. In the position, the casing moves in a direction perpendicular to the opening surface, and the casing-side seal portion on the casing side and the gate-plate-side seal portion on the gate plate side are in close contact with each other so as to surround the opening, and the opening is closed. The gate plate that closes the part and separates from the opening and opens the opening,
A sealing member such as an O-ring formed in a circular or rectangular shape is attached so as to surround the periphery of the opening while the opening is closed. However, in this case, the sealing material is attached to the gate plate side, but may be attached to the opening peripheral edge side.

[0008] A feature of the present invention is that, when the gate plate moves in a direction parallel to the opening surface in the movement for opening and closing the opening, foreign matter adhered to the casing side seal portion. A brush (hereinafter, referred to as a first brush) that moves while rubbing the housing-side seal portion on the front end side of the gate plate on the opening-side surface of the gate plate for removing the gate plate, and the gate-plate-side seal portion A brush (hereinafter, referred to as a second brush) for rubbing the gate plate side seal portion (seal material) against a rear end side of the gate plate at a periphery of the opening for removing foreign matter attached to the (seal material). Is to be arranged.

[0009] The mounting position of the first brush is further closer to the tip of the gate plate than to the end of the tip of the gate plate in a region surrounded by the casing-side seal when the gate plate closes the opening. In a state where the gate plate is located at the end point of movement in the direction in which the opening is opened, the gate plate rear end is further extended than the gate plate rear end side of an area surrounded by the housing-side seal portion. It is arranged to be located on the side. The mounting position of the second brush is further located on the rear end side of the gate plate than the end on the rear end side of the gate plate in a region surrounded by the sealant when the gate plate closes the opening. And, in a state in which the gate plate has reached the end point of the movement in the direction of opening the opening, the region surrounded by the sealing material is further located on the tip side of the gate plate than the end on the tip side of the gate plate. It is arranged in. The width of the first brush and the second brush is a direction along the front end face of the gate plate of the housing-side seal portion and the sealing material so that foreign matter can be removed over the entire width of the housing-side sealing portion and the sealing material. And is arranged at a position such that it passes over the entire area surrounded by the casing-side sealing portion and the sealing material. The first
The bristle tip length of the brush is set to a length that allows the gate plate to come into contact with the casing-side seal portion with an appropriate pressure even when the gate plate is farthest from the opening when the gate plate is moved. The bristle tip length of the second brush is set to such a length that the gate plate comes into contact with the sealing material with an appropriate pressure even when the gate plate is farthest from the opening when the gate plate moves. In the above case, the first brush and the second brush are also in contact with each other on the main surface of the housing inner wall having the undesired opening other than the housing-side sealing portion and the sealing material, and the main surface of the gate plate. As a result, the abrasion and deterioration of the hair tips are accelerated. In order to prevent this, the casing-side seal portion and / or the gate plate-side seal portion are respectively protruded from the main surface of the inner wall of the housing and / or the main surface of the gate plate, Undesirable selection of the brush tip length of the brush and the brush tip length of the second brush so as to contact only the respective opposed protruding portions and not to contact the respective main surfaces which do not protrude. Contact with the portion is omitted, and wear and deterioration of the bristle tips of the first brush and / or the second brush can be reduced. As the relative position of the first brush and the second brush, it is desirable for the life of the brush that the first brush and the second brush are arranged so as not to overlap each other in the moving range of the gate plate. As the above-mentioned brush material, it is preferable that the brush material has high durability and hardness that does not damage the casing-side seal portion and the seal material,
It is preferable to attach it detachably to facilitate cleaning and replacement.

The link whose one end is rotatably attached to the gate plate may be any link that can transmit general motion. The other end of the link is supported by a shaft on the side opposite to the opening with respect to the gate plate, and the other end of the link and the movable body move in a direction parallel to the opening surface of the opening. And a tension spring provided between the gate plate and the link plate to pull the link and maintain a constant distance between the gate plate and the opening surface. When the gate plate moves to open and close the opening along with the movement of the movable body, the first brush removes foreign matter attached to the housing-side seal portion, and the second brush removes the foreign matter attached to the gate-plate seal portion ( Foreign matter attached to the sealing material).

The actuator for driving the movable body may be a general cylinder or motor utilizing hydraulic pressure or air pressure. When the gate plate moves to a position facing the opening along with the movement of the movable body, the gate plate hits the front end surface of the gate plate, stops moving in a direction parallel to the opening surface, and rotates the link to open the opening surface. The stopper that moves in the direction perpendicular to the gate plate preferably has a small coefficient of friction so that the front end surface of the gate plate can be easily slid. The casing-side seal portion and the gate-plate-side seal portion (sealant) configured by the above components.
A gate valve having a mechanism for removing foreign matter adhered to a gate valve.

In the above case, the sealing member is attached to the gate plate. However, the same effect can be obtained when the sealing member is attached to the peripheral portion of the opening. Further, the present invention is not limited to the semiconductor substrate processing apparatus,
It goes without saying that the above-mentioned action is achieved by providing the apparatus having a mechanism for opening and closing the opening of the closed chamber.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described with reference to FIG. 1 showing a cross-sectional view of a main part, FIGS. 4 and 5 showing an enlarged cross-sectional view of a main part, and FIGS.
The same parts as those in FIG. The gate valve 1 of the present invention has a first opening 3a and a second opening 3b on two opposing wall surfaces, respectively.
It is surrounded by a casing 2 connected to different chambers 4a and 4b and having a passage communicating the chambers 4a and 4b. Moving in a direction parallel to the opening surface of the first opening portion 3a between a position disposed in the housing 2 and facing the first opening portion 3a and a position away from the first opening portion 3a; Further, at a position facing the first opening 3a, the housing moves in a direction perpendicular to the opening surface, and the housing-side seal portion on the housing side and the gate-plate-side seal portion on the gate plate side move with each other. The first opening 3a is tightly closed so as to surround the first opening 3a, and the first opening 3a is closed.
The gate plate 5 that opens the opening 3a is provided with an O-ring 6 that is formed in a rectangular shape so as to surround the periphery of the first opening 3a with the first opening 3a closed as a sealing material. Then, a brush 13 (hereinafter referred to as a first brush 13) for removing foreign matter attached to the housing-side seal portion is provided on the surface of the gate plate 5 facing the first opening 3a near the tip of the gate plate. Is called). FIG. 2 is a main part enlarged plan view showing a state in which the first brush 13 is disposed near the tip end of the gate plate. The vicinity of the front end of the gate plate 5 means that the gate plate 5 is the first opening 3.
a in a closed state (see FIG. 4), the region surrounded by the casing-side seal portion is located further on the gate plate tip side than the end on the gate plate tip side, and the gate plate 5 has the first opening. When the end point of the movement in the opening direction of the portion 3a is reached (see FIG. 5), the region surrounded by the casing-side seal portion is further located on the rear end side of the gate plate than the end on the rear end side of the gate plate. Are located in In addition, a brush 14 (hereinafter, referred to as a second brush 14) for removing foreign matter attached to the O-ring 6 is disposed in a part near the first opening. FIG. 3 is an enlarged plan view of a main part showing a state in which the second brush 14 is arranged in a part near the first opening.
Shown in The part near the first opening is defined as the gate plate 5.
In a state in which the first opening 3a is closed (see FIG. 4), the region surrounded by the O-ring 6 is further located on the rear end side of the gate plate than the end on the rear end side of the gate plate,
In a state where the gate plate 5 has reached the end point of the movement in the direction of opening the first opening 3a (see FIG. 5),
It is arranged so as to be located further on the tip side of the gate plate than the end of the region surrounded by the ring 6 on the tip side of the gate plate. The widths of the first brush 13 and the second brush 14 are set to the O-ring 6 and the front end surface of the gate plate of the housing-side seal so that foreign matter can be removed over the entire width of the O-ring 6 and the housing-side seal. It is larger than the maximum width in the direction along, and is arranged at a position such that it passes over the entire area surrounded by the O-ring 6 and the casing-side seal portion. The thicknesses of the first brush 13 and the second brush 14 are set so as to maintain rigidity enough to remove attached foreign matter. The bristle tip length of the first brush 13 is set to such a length that the housing-side seal portion contacts the housing-side seal portion with an appropriate pressure even when the gate-side seal portion and the gate plate 5 are farthest apart when the gate plate 5 moves. It is. The tip length of the second brush 14 is set to such a length that the O-ring 6 contacts only the O-ring 6 with an appropriate pressure even when the O-ring 6 is farthest from the opening 3a when the gate plate 5 moves. is there.

Further, the O-ring 6 or the vicinity of the gate plate surface including the O-ring 6 surrounds the main surface 1 of the gate plate.
The first protruding portion 16 is formed to protrude from the inner surface of the main body 1 near the wall surface including the housing-side seal portion.
7, the second brush 14 has a bristle tip length that is only in contact with the first protrusion 16 but not in contact with the main surface 15 of the gate plate. 1
By selecting the bristle tip length to be such that it only contacts the second protrusion 18 but does not contact the main surface 17 of the surrounding inner wall of the housing, contact with an undesired portion is omitted and the second brush The wear and deterioration of the tips of the brushes 14 and the first brush 13 can be reduced. As a relative position between the first brush 13 and the second brush 14,
In the movement range of the gate plate 5, they are arranged so as not to overlap each other. FIG. 4 is an enlarged cross-sectional view of a main part of a state where the first opening 3a is closed by the gate plate 5, and FIG. 4 shows a state where the gate plate 5 reaches an end point of the movement in the direction of opening the first opening 3a. FIG. 5 is an enlarged sectional view. The brush material has a high durability and a hardness that does not damage the O-ring 6 and the casing-side seal portion. The moving mechanism of the gate plate 5 is configured so that movement can be transmitted by a link 7 having one end rotatably attached to the gate plate 5. The other end of the link 7 is supported by a shaft on the opposite side of the gate plate 5 from the first opening 3a, and the movable body 8 that moves in a direction parallel to the first opening 3a is the link 7
And a tension spring 9 that is provided between the other end of the movable member 8 and the movable body 8 to pull the link 7 to keep the distance between the gate plate 5 and the first opening 3a constant. As the movable body 8 moves, the gate plate 5 moves to the first opening 3.
When moving in a direction parallel to the direction a, the first brush 13 removes foreign matter adhering to the casing side seal portion,
The brush 14 removes foreign matter attached to the O-ring 6. An actuator (not shown) for driving the movable body 8 is a general hydraulic cylinder (not shown). When the movable body 8 moves and the gate plate 5 moves to a position opposed to the first opening 3a, the movable plate 8 hits the front end face 10 of the gate plate and stops moving in a direction parallel to the first opening 3a. Rotation of the first opening 3
A stopper 11 for moving in a direction perpendicular to a is attached to the side wall having the first opening 3a. A gate valve having a mechanism for removing foreign matter adhering to the casing-side seal portion and the gate-plate-side seal portion (sealant) constituted by the above components.

[0015]

According to the gate valve of the present invention, brushes are respectively arranged on a part of the gate plate and a part of the periphery of the opening, and the gate plate is used to open and close the opening with the gate plate. During the movement, foreign matter attached to a portion where the gate plate and the peripheral part of the opening are in close contact with each other by moving in a direction parallel to the opening surface of the opening is deteriorated in airtightness due to accumulation of foreign matter. The service life is prolonged, and the man-hours required for overhaul of the processing apparatus and the adverse effects on the production due to the construction can be reduced. Further, in the gate valve, the vicinity including a portion where the gate plate and the peripheral portion of the opening portion are in close contact with each other is protruded from a peripheral surface, and the bristle tip length of the brush is selected so as to contact only a desired portion. The life of the brush can be extended.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of a gate valve according to an embodiment of the present invention.

FIG. 2 is an enlarged plan view of a main part showing a state in which a first brush according to an embodiment of the present invention is attached near a tip end of a gate plate.

FIG. 3 is an enlarged plan view of a main part showing a state in which a second brush according to an embodiment of the present invention is attached near a first opening;

FIG. 4 is an enlarged sectional view of a main part showing a state where a first opening is closed by a gate plate according to an embodiment of the present invention;

FIG. 5 is an enlarged sectional view of a main part showing a state in which the gate plate of the embodiment according to the present invention has reached the end point of the movement in the direction of opening the first opening;

FIG. 6 is a sectional view of a main part of a conventional gate valve.

[Explanation of symbols]

 13 first brush 14 second brush 15 gate plate main surface 16 first protrusion 17 main surface of housing inner wall 18 second protrusion

Claims (2)

[Claims] A direction parallel to an opening surface of the housing, wherein the housing has an opening, and a space between the housing and a position opposed to the opening disposed in the housing and separated from the opening. In addition, at a position opposed to the opening portion, a movement in a direction perpendicular to the opening surface is performed, and a housing-side seal portion on the housing side and a gate plate-side seal portion on the gate plate side are moved. A gate plate having close contact with each other so as to surround the opening, closing the opening, and further separating from the opening and opening the opening; and a gate valve having an actuator as a moving mechanism of the gate plate. When the gate plate moves in a direction parallel to the opening surface, the gate plate tip side of the opening-side surface of the gate plate for removing foreign matter attached to the housing-side seal portion. On the housing side A brush that moves while rubbing the sealing portion, and a brush that rubs the gate plate-side sealing portion against the rear end side of the gate plate at the periphery of the opening for removing foreign substances attached to the gate plate-side sealing portion. A gate valve, which is disposed. 2. A method according to claim 1, wherein said casing-side seal portion and / or said gate plate-side seal portion protrude from a main surface of a housing inner wall having said opening and / or a main surface of said gate plate, respectively. The gate valve according to claim 1, wherein: