JP3518142B2 - Gate valve - Google Patents
Gate valveInfo
- Publication number
- JP3518142B2 JP3518142B2 JP05952396A JP5952396A JP3518142B2 JP 3518142 B2 JP3518142 B2 JP 3518142B2 JP 05952396 A JP05952396 A JP 05952396A JP 5952396 A JP5952396 A JP 5952396A JP 3518142 B2 JP3518142 B2 JP 3518142B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- processing chamber
- valve body
- sealing surface
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、処理室と排気ポン
プとの間を開閉する弁体を有するゲートバルブに係り、
特にゲートバルブの弁箱のシール面に付着した堆積物に
より生じるリークの発生を防止する構造に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve having a valve body that opens and closes between a processing chamber and an exhaust pump,
In particular, the present invention relates to a structure for preventing the occurrence of leakage caused by deposits attached to the sealing surface of the valve box of the gate valve.
【０００２】装置の処理室と排気ポンプとの間を開閉す
るのに用いる現用のゲートバルブにおいては、弁箱のシ
ール面が露出しているため処理室内で発生して浮遊した
塵埃や反応生成物がこのシール面に付着して堆積するよ
うになり、リーク発生の原因となっている。In a current gate valve used to open and close between a processing chamber of an apparatus and an exhaust pump, dust and reaction products generated in the processing chamber and floating due to an exposed sealing surface of a valve box. Adheres to the sealing surface and accumulates, which causes a leak.
【０００３】以上のような状況から、処理室内で発生し
て浮遊した塵埃や反応生成物が弁箱のシール面に付着し
て堆積するのを防止することが可能なゲートバルブが要
望されている。Under the circumstances as described above, there is a demand for a gate valve capable of preventing dusts and reaction products generated and suspended in the processing chamber from adhering to and depositing on the sealing surface of the valve box. .
【０００４】[0004]
【従来の技術】従来のゲートバルブの構造について図３
〜図４により詳細に説明する。図３は従来のゲートバル
ブを開いた状態の構造を示す図、図４は従来のゲートバ
ルブを閉じた状態の構造を示す図である。2. Description of the Related Art The structure of a conventional gate valve is shown in FIG.
~ It demonstrates in detail by FIG. FIG. 3 is a diagram showing a structure in which a conventional gate valve is opened, and FIG. 4 is a diagram showing a structure in which a conventional gate valve is closed.
【０００５】従来のゲートバルブにおいて排気ポンプ16
で処理室15内の空気を排気する場合には、図３に示すよ
うに、弁体押圧クランク13を介して弁体駆動シリンダ14
により弁体11を図示の位置に移動して処理室15内の空気
を排気ポンプ16により排気すると、処理室15内で発生し
た塵埃や反応生成物が空気とともに処理室15から弁箱12
内に移動し、弁箱12のシール面12a に付着する。In the conventional gate valve, the exhaust pump 16
When the air in the processing chamber 15 is exhausted by the valve body driving cylinder 14 through the valve body pressing crank 13 as shown in FIG.
When the valve body 11 is moved to the position shown in the drawing by the air and the air in the processing chamber 15 is exhausted by the exhaust pump 16, the dust and reaction products generated in the processing chamber 15 from the processing chamber 15 to the valve box 12 together with the air.
It moves inward and adheres to the sealing surface 12a of the valve box 12.
【０００６】処理室15の室内圧が所望の値に到達した場
合に、図４に示すように、弁体押圧クランク13を介して
弁体駆動シリンダ14により弁体11を図示の位置に移動し
て弁体11を弁箱12のシール面12a に接近させ、Ｏリング
11a をシール面12a に押し付けて処理室15と弁箱12とを
遮断分離しようとすると、弁箱12内で浮遊した塵埃や反
応生成物が付着して堆積したシール面12a とＯリング11
a が接触するようになる。When the internal pressure of the processing chamber 15 reaches a desired value, the valve element driving cylinder 14 moves the valve element 11 to the illustrated position via the valve element pressing crank 13, as shown in FIG. The valve body 11 close to the sealing surface 12a of the valve box 12 and the O-ring
When the processing chamber 15 and the valve box 12 are tried to be blocked and separated by pressing 11a against the sealing surface 12a, the sealing surface 12a and the O-ring 11 where the dust and reaction products floating in the valve box 12 adhere and accumulate.
a comes into contact.
【０００７】この場合、塵埃や反応生成物がシール面12
a とＯリング11a の間に介在して弁箱12のシール面12a
とＯリング11a の間に隙間が生じると、処理室15と弁箱
12との間に内部リークが発生することがある。[0007] In this case, dust and reaction products are not covered by the sealing surface 12.
The sealing surface 12a of the valve box 12 is interposed between a and the O-ring 11a.
If a gap occurs between the O-ring 11a and the O-ring 11a, the processing chamber 15 and the valve box
An internal leak may occur between 12 and.
【０００８】[0008]
【発明が解決しようとする課題】以上説明した従来のゲ
ートバルブにおいては、処理室内の空気を排気ポンプに
より排気すると処理室内で発生した塵埃や反応生成物が
空気とともに処理室から弁箱内に移動し、この塵埃や反
応生成物が弁箱内で浮遊してシール面に付着するように
なり、処理室の室内圧が所望の値に到達した場合に、弁
体押圧クランクを介して弁体駆動シリンダにより弁体を
移動して処理室と弁箱とを遮断分離しようとすると、塵
埃や反応生成物が付着して堆積したシール面とＯリング
が接触するようになり、塵埃や反応生成物がシール面と
Ｏリングの間に介在すると、処理室と弁箱の間に内部リ
ークが発生するという問題点があった。In the conventional gate valve described above, when the air in the processing chamber is exhausted by the exhaust pump, dust and reaction products generated in the processing chamber move from the processing chamber into the valve box together with the air. However, when the dust and reaction products float inside the valve box and adhere to the sealing surface, and the internal pressure of the processing chamber reaches the desired value, the valve drive crank drives the valve drive. When the valve body is moved by the cylinder to shut off and separate the processing chamber and the valve box, the O-ring comes into contact with the sealing surface where dust and reaction products are deposited and accumulated, and the dust and reaction products are separated. If it is interposed between the seal surface and the O-ring, there is a problem that an internal leak occurs between the processing chamber and the valve box.
【０００９】本発明は以上のような状況から、簡単且つ
容易に処理室と弁箱の間の内部リークの発生を防止する
ことが可能となるゲートバルブの提供を目的としたもの
である。In view of the above situation, it is an object of the present invention to provide a gate valve which can easily and easily prevent an internal leak between a processing chamber and a valve box.
【００１０】[0010]
【課題を解決するための手段】本発明のゲートバルブ
は、処理室と排気ポンプとの間を開閉する弁体を有する
ゲートバルブにおいて、この弁体は、貫通孔を備えた貫
通部分と、遮断部を備えた遮断部分と、この貫通孔とこ
の遮断部のそれぞれの周囲に設けられた溝に挿着され、
この弁体が収納されている弁箱の内壁に密着して気密を
保持することが可能なＯリングとを備えているものであ
り、この弁体は、この処理室と連通する排気孔に、貫通
部分が移動したとき、処理室と排気ポンプを連通させ、
遮断部分が移動したとき、この処理室と排気ポンプを遮
断するように構成する。The gate valve of the present invention is a gate valve having a valve body that opens and closes between a processing chamber and an exhaust pump, the valve body being cut off from a penetrating portion having a through hole. A blocking portion provided with a portion, and inserted into grooves provided around the through hole and the blocking portion,
The valve body is provided with an O-ring capable of tightly adhering to the inner wall of the valve box in which the valve body is housed, and the valve body has an exhaust hole communicating with the processing chamber. When the penetrating part moves, connect the processing chamber with the exhaust pump,
The processing chamber and the exhaust pump are shut off when the shutoff portion moves.
【００１１】更にこの貫通部分に周設されたＯリングの
遮蔽面積が、この遮断部分に周設されたＯリングの遮蔽
面積よりも大なるように構成する。即ち本発明において
はゲートバルブの弁体の構造が貫通孔と周囲にＯリング
を挿着する溝を備える部分（以下、貫通孔部と呼ぶ）
と、遮断部と周囲にＯリングを挿着する溝を備える部分
（以下、遮断部分と呼ぶ）とを有し、この貫通孔部の貫
通孔の周囲の領域で弁箱のシール面を覆っているので、
このゲートバルブを備えた処理室内の空気を排気する場
合に、処理室内で発生した塵埃や反応生成物が貫通孔部
の貫通孔の周囲の領域と対向する弁箱のシール面に付着
するのを防止することが可能となる。Further, the shielding area of the O-ring which is provided around the through portion is larger than the shielding area of the O-ring which is provided around the shielding portion. That is, in the present invention, the structure of the valve body of the gate valve has a through hole and a groove around which an O-ring is inserted (hereinafter referred to as a through hole portion).
And a portion having a groove for inserting an O-ring around it (hereinafter referred to as a blocking portion), and covering the sealing surface of the valve box in the region around the through hole of the through hole portion. Because
When exhausting the air in the processing chamber equipped with this gate valve, it is possible to prevent dust and reaction products generated in the processing chamber from adhering to the sealing surface of the valve box facing the area around the through hole of the through hole portion. It becomes possible to prevent it.
【００１２】また、この貫通部分に周設されたＯリング
の遮蔽面積を、この遮断部分に周設されたＯリングの遮
蔽面積よりも大きくすれば、この遮断部分で処理室と弁
箱とを遮断分離する場合の弁体の位置合わせ精度に余裕
を持たすことができるので、この遮断部分のＯリングと
シール面との間への塵埃や反応生成物の付着の防止を更
に確実にすることが可能となる。Further, if the shielding area of the O-rings provided around the through portion is made larger than the shielding area of the O-rings provided around the blocking portion, the processing chamber and the valve box are separated from each other at the blocking portion. Since it is possible to have a margin in the positioning accuracy of the valve element when the valve is blocked and separated, it is possible to further ensure the prevention of adhesion of dust and reaction products between the O-ring and the seal surface of the blocked portion. It will be possible.
【００１３】[0013]
【発明の実施の形態】以下図１〜図２により本発明の一
実施例のゲートバルブについて詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION A gate valve according to an embodiment of the present invention will be described in detail below with reference to FIGS.
【００１４】図１は本発明による一実施例のゲートバル
ブを開いた状態の構造を示す図、図２は本発明による一
実施例のゲートバルブを閉じた状態の構造を示す図であ
る。本発明による一実施例のゲートバルブにおいて排気
ポンプ６で処理室５内の空気を排気する場合には、図１
に示すように、弁体１の貫通孔1bが弁箱２の排気孔2bと
重なる位置に弁体１を弁体駆動シリンダ４により移動
し、スプリング4aを伸ばして弁体押圧シリンダ３により
弁体１のＯリング1aをシール面2aに押し付けると、貫通
孔1bの周囲の領域が弁箱２のシール面2aを覆うようにな
る。FIG. 1 is a view showing the structure of an embodiment of the present invention with the gate valve opened, and FIG. 2 is a view showing the structure of the embodiment of the present invention with the gate valve closed. In the case of exhausting the air in the processing chamber 5 with the exhaust pump 6 in the gate valve of the embodiment according to the present invention, as shown in FIG.
As shown in, the valve body 1 is moved by the valve body drive cylinder 4 to a position where the through hole 1b of the valve body 1 overlaps with the exhaust hole 2b of the valve box 2, the spring 4a is extended, and the valve body pressing cylinder 3 extends the valve body. When the O-ring 1a of No. 1 is pressed against the sealing surface 2a, the area around the through hole 1b covers the sealing surface 2a of the valve box 2.
【００１５】ここで処理室５内の空気を排気ポンプ６に
より排気すると処理室５内で発生した塵埃や反応生成物
が空気とともに処理室５から弁箱２内に移動するが、弁
体１の貫通孔部の貫通孔1bの周囲の領域が弁箱２のシー
ル面2aを覆っているので、この塵埃や反応生成物が浮遊
して弁箱２のこのシール面2aに付着するのを防止するこ
とが可能となる。Here, when the air in the processing chamber 5 is exhausted by the exhaust pump 6, the dust and reaction products generated in the processing chamber 5 move from the processing chamber 5 into the valve box 2 together with the air. Since the area around the through hole 1b of the through hole portion covers the sealing surface 2a of the valve box 2, it is possible to prevent the dust and reaction products from floating and adhering to the sealing surface 2a of the valve box 2. It becomes possible.
【００１６】処理室５の室内圧が所望の値に到達すれ
ば、図２に示すように、弁体押圧シリンダ３による弁体
１のシール面2aへの押圧を弱めてスプリング4aの引っ張
り力によってＯリング1aとシール面2aとの間に間隙を設
け、弁体駆動シリンダ４により弁体１の遮断部1cと弁箱
２の排気孔2bとが対向する位置に移動させ、弁体押圧シ
リンダ３により弁体１の遮断部分のＯリング1aを弁箱２
のシール面2aに押し付けて処理室５と弁箱２とを遮断分
離するが、この場合は、シール面2aに塵埃や反応生成物
が付着していないから、塵埃や反応生成物がシール面2a
とＯリング1aの間に介在しないので、処理室５と弁箱２
の間に内部リークが発生することがなくなる。When the internal pressure of the processing chamber 5 reaches a desired value, as shown in FIG. 2, the pressure of the valve body pressing cylinder 3 on the sealing surface 2a of the valve body 1 is weakened and the pulling force of the spring 4a is applied. A gap is provided between the O-ring 1a and the sealing surface 2a, and the valve body driving cylinder 4 moves the shutoff portion 1c of the valve body 1 to the position where the exhaust hole 2b of the valve box 2 faces each other, and the valve body pressing cylinder 3 The O-ring 1a of the shut-off portion of the valve body 1 by the valve box 2
The processing chamber 5 and the valve box 2 are separated by being pressed against the sealing surface 2a of the above. In this case, since no dust or reaction product is attached to the sealing surface 2a, the dust or reaction product is not attached to the sealing surface 2a.
Since there is no intervening between the O-ring 1a and the processing chamber 5, the valve box 2
No internal leak will occur between the two.
【００１７】なお、この貫通部分に周設されたＯリング
の遮蔽面積が、この遮断部分に周設されたＯリングの遮
蔽面積よりも大きくしておくと、弁体１により処理室５
と弁箱２とを遮断分離する場合に、処理室５の排気中に
塵埃や反応生成物が付着していない弁箱２のシール面2a
の領域内で、遮断部1cの周囲のＯリング1aを弁箱２のシ
ール面2aに位置合わせする際に余裕を持って接触させる
ことができるので、処理室５と弁箱２の間の内部リーク
の発生の防止を更に確実にすることが可能となる。If the shielding area of the O-rings provided around the penetrating portion is made larger than the shielding area of the O-rings surrounding the shielding portion, the valve body 1 allows the processing chamber 5 to be closed.
When the valve box 2 and the valve box 2 are cut off and separated from each other, the sealing surface 2a of the valve box 2 in which dust and reaction products are not attached to the exhaust gas of the processing chamber 5
Since the O-ring 1a around the cutoff portion 1c can be brought into contact with the sealing surface 2a of the valve box 2 with a sufficient margin within the area of the inside of the processing chamber 5 and the valve box 2, It becomes possible to more surely prevent the occurrence of the leak.
【００１８】[0018]
【発明の効果】以上の説明から明らかなように、本発明
によれば極めて簡単な構造の弁体を用いることにより、
ゲートバルブを開いた場合に、弁箱のシール面に塵埃や
反応生成物が付着して堆積するのを防ぐことが可能とな
るから、ゲートバルブを閉じた場合に、弁体のＯリング
と弁箱のシール面との間に塵埃や反応生成物が介在する
のを防止することが可能となるので、処理室と弁箱の間
の内部リークの発生の防止を更に確実にすることが可能
となる利点があり、著しい信頼性向上の効果が期待でき
るゲートバルブの提供が可能である。As is apparent from the above description, according to the present invention, by using the valve body having an extremely simple structure,
When the gate valve is opened, it is possible to prevent dust and reaction products from adhering to and depositing on the sealing surface of the valve box. Therefore, when the gate valve is closed, the O-ring and the valve of the valve body are closed. Since it is possible to prevent dust and reaction products from intervening between the sealing surface of the box, it is possible to further ensure the prevention of internal leak between the processing chamber and the valve box. Therefore, it is possible to provide a gate valve that has the advantage that the effect of significantly improving reliability can be expected.
【図１】 本発明による一実施例のゲートバルブを開い
た状態の構造を示す図FIG. 1 is a diagram showing a structure of an embodiment of the present invention with a gate valve opened.
【図２】 本発明による一実施例のゲートバルブを閉じ
た状態の構造を示す図FIG. 2 is a diagram showing a structure of a gate valve according to an embodiment of the present invention in a closed state.
【図３】 従来のゲートバルブを開いた状態の構造を示
す図FIG. 3 is a diagram showing a structure of a conventional gate valve in an open state.
【図４】 従来のゲートバルブを閉じた状態の構造を示
す図FIG. 4 is a view showing a structure in which a conventional gate valve is closed.
１ 弁体 1a Ｏリング 1b 貫通孔 1c 遮断部 ２ 弁箱 2a シール面 2b 排気孔 ３ 弁体押圧シリンダ ４ 弁体駆動シリンダ 4a スプリング ５ 処理室 ６ 排気ポンプ 1 valve 1a O-ring 1b through hole 1c Breaking part 2 valve box 2a Sealing surface 2b exhaust hole 3 Valve body pressing cylinder 4 Valve body drive cylinder 4a spring 5 processing room 6 exhaust pump
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B01J 3/00 - 3/04 C23C 14/00 - 14/56 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) B01J 3/00-3/04 C23C 14/00-14/56
Claims (2)
体を有するゲートバルブにおいて、 前記弁体は、貫通孔を備えた貫通部分と、遮断部を備え
た遮断部分と、該貫通孔と該遮断部のそれぞれの周囲に
設けられた溝に挿着され、該弁体が収納されている弁箱
の内壁に密接して気密を保持することが可能なＯリング
とを備えているものであり、 前記弁体は、前記処理室と連通する排気孔に、貫通部分
が移動したとき、処理室と排気ポンプを連通させ、遮断
部分が移動したとき、該処理室と排気ポンプを遮断する
ものであることを特徴とするゲートバルブ。1. A gate valve having a valve body that opens and closes between a processing chamber and an exhaust pump, wherein the valve body has a through portion having a through hole, a blocking portion having a blocking portion, and the through hole. And an O-ring which is inserted into a groove provided around each of the shut-off portions and is capable of closely maintaining airtightness by closely contacting with an inner wall of a valve box accommodating the valve body. The valve body communicates the processing chamber and the exhaust pump when the penetrating portion moves to the exhaust hole that communicates with the processing chamber, and shuts off the processing chamber and the exhaust pump when the shutoff portion moves. Gate valve characterized by being a thing.
蔽面積が、前記遮断部分に周設されたＯリングの遮蔽面
積よりも大なることを特徴とする請求項１記載のゲート
バルブ。2. The gate valve according to claim 1, wherein the shielding area of the O-rings provided around the penetrating portion is larger than the shielding area of the O-rings provided around the shielding portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05952396A JP3518142B2 (en) | 1996-03-15 | 1996-03-15 | Gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05952396A JP3518142B2 (en) | 1996-03-15 | 1996-03-15 | Gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09249960A JPH09249960A (en) | 1997-09-22 |
| JP3518142B2 true JP3518142B2 (en) | 2004-04-12 |
Family
ID=13115721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05952396A Expired - Fee Related JP3518142B2 (en) | 1996-03-15 | 1996-03-15 | Gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3518142B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI381470B (en) * | 2007-05-08 | 2013-01-01 | Tokyo Electron Ltd | And a treatment device provided with the valve |
| US11428790B2 (en) * | 2017-06-05 | 2022-08-30 | Texas Instruments Incorporated | Narrowband TIA and signaling for optical distance measurement systems |
-
1996
- 1996-03-15 JP JP05952396A patent/JP3518142B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09249960A (en) | 1997-09-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2001077549A3 (en) | Poppet valve seal | |
| CA2360083A1 (en) | Valves for use in wells | |
| CA1097181A (en) | Time delay valve | |
| WO2005036034A3 (en) | Valve assembly having improved conductance control | |
| CA2155414A1 (en) | Compressible Differential Pressure Energized Seals for Filter Elements and the Like | |
| US6056267A (en) | Isolation valve with extended seal life | |
| JP3518142B2 (en) | Gate valve | |
| KR100482978B1 (en) | Gate valve | |
| EP1028278A3 (en) | Valve seal | |
| JP2006312981A (en) | Structure for protecting rod sealing portion of two-port valve | |
| JP2000346238A (en) | Valve | |
| JPH0137635B2 (en) | ||
| KR100886674B1 (en) | Methods and apparatus for providing a floating seal for chamber doors | |
| JPH10183329A (en) | Valve device for vacuum treatment | |
| US5634625A (en) | Valve closure system | |
| JPS5917070A (en) | Gate valve for use in vacuum | |
| JP2885328B2 (en) | Shaft sealing part cleaning method of pneumatic drive control valve and shaft seal cleaning type pneumatic drive control valve | |
| CN216078821U (en) | Rubber gasket | |
| KR102434250B1 (en) | Butterfly type throttle valve | |
| JP2003021234A (en) | Diaphragm | |
| JP2001027349A (en) | Gate valve device and valve box device | |
| JP2004270769A (en) | Seat ring structure | |
| JP2000329241A (en) | Valve and storage bag provided with valve | |
| JP2000356272A (en) | Seat structure for ball valve | |
| JPH02129471A (en) | Stopping structure for slab gate valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20040106 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040119 |
|
| LAPS | Cancellation because of no payment of annual fees |