JP2001326171A5 - - Google Patents

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Publication number
JP2001326171A5
JP2001326171A5 JP2000146365A JP2000146365A JP2001326171A5 JP 2001326171 A5 JP2001326171 A5 JP 2001326171A5 JP 2000146365 A JP2000146365 A JP 2000146365A JP 2000146365 A JP2000146365 A JP 2000146365A JP 2001326171 A5 JP2001326171 A5 JP 2001326171A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000146365A
Other versions
JP2001326171A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000146365A priority Critical patent/JP2001326171A/ja
Priority claimed from JP2000146365A external-priority patent/JP2001326171A/ja
Priority to KR10-2001-0026978A priority patent/KR100456436B1/ko
Publication of JP2001326171A publication Critical patent/JP2001326171A/ja
Publication of JP2001326171A5 publication Critical patent/JP2001326171A5/ja
Pending legal-status Critical Current

Links

JP2000146365A 2000-05-18 2000-05-18 照明装置 Pending JP2001326171A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000146365A JP2001326171A (ja) 2000-05-18 2000-05-18 照明装置
KR10-2001-0026978A KR100456436B1 (ko) 2000-05-18 2001-05-17 조명장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000146365A JP2001326171A (ja) 2000-05-18 2000-05-18 照明装置

Publications (2)

Publication Number Publication Date
JP2001326171A JP2001326171A (ja) 2001-11-22
JP2001326171A5 true JP2001326171A5 (ja) 2007-07-12

Family

ID=18652738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000146365A Pending JP2001326171A (ja) 2000-05-18 2000-05-18 照明装置

Country Status (2)

Country Link
JP (1) JP2001326171A (ja)
KR (1) KR100456436B1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010118383A (ja) * 2008-11-11 2010-05-27 Nikon Corp 照明装置、露光装置、及びデバイス製造方法
JP5806479B2 (ja) * 2011-02-22 2015-11-10 キヤノン株式会社 照明光学系、露光装置及びデバイス製造方法
JP6362095B2 (ja) 2014-06-17 2018-07-25 キヤノン株式会社 照明装置、露光装置、調整方法、及び、物品の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3278896B2 (ja) * 1992-03-31 2002-04-30 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JP3010567B2 (ja) * 1992-05-21 2000-02-21 松下電器産業株式会社 照明光学装置
KR100319216B1 (ko) * 1993-06-30 2002-06-28 시마무라 테루오 노광장치
JPH07159977A (ja) * 1993-12-01 1995-06-23 Nippon Telegr & Teleph Corp <Ntt> ホトマスク検査装置
JP2827951B2 (ja) * 1994-05-16 1998-11-25 松下電器産業株式会社 投写型表示装置
JPH0933852A (ja) * 1995-07-19 1997-02-07 Nikon Corp 照明装置および該装置を備えた投影露光装置
JP3447895B2 (ja) * 1996-02-09 2003-09-16 株式会社東芝 投射型表示装置におけるパラメータの設定方法
EP1069600A4 (en) * 1998-03-24 2002-11-20 Nikon Corp ILLUMINATOR, EXPOSURE METHOD AND APPARATUS, METHOD FOR MANUFACTURING SAID DEVICE
DE19903807A1 (de) * 1998-05-05 1999-11-11 Zeiss Carl Fa Beleuchtungssystem insbesondere für die EUV-Lithographie
JP3347676B2 (ja) * 1998-10-29 2002-11-20 キヤノン株式会社 照明装置およびそれを用いた投射型表示装置
JP2001043701A (ja) * 1999-07-28 2001-02-16 Ricoh Co Ltd 照明光学装置およびそれを用いた投写装置
JP2001110707A (ja) * 1999-10-08 2001-04-20 Orc Mfg Co Ltd 周辺露光装置の光学系

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