JP2001324451A - Inspecting apparatus and lens for inspection - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspecting apparatus which has a high throughput to objects of inspection having side faces. SOLUTION: This inspecting apparatus 100 includes a ring illuminator 300 for illuminating the object of inspection 600, having a front face 610 and the side face 604, a lens 200 set above the object of inspection 600 and the ring illuminator 300 for changing an optical axis of a reflecting light from the side face 604 to a perpendicular direction, by making the reflecting light refract from the side face 604 illuminated by the ring illuminator 300, an imaging camera 400 for imaging a reflecting light from the front face 610 and the reflecting light from the whole circumference of the side face 604 outputted from a bottom face 202 of the lens 200 through a hollow part 206, and an image processor for processing image signals of the reflecting lights imaged by the imaging camera 400.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting an article, and more particularly to an apparatus for inspecting the surface of an article having a side surface.

[0002]

2. Description of the Related Art As a technique for automatically inspecting an inspection object having a cylindrical shape, there is a technique disclosed in JP-A-5-87744. Referring to FIG. 10, surface inspection apparatus 800 disclosed in this publication is arranged around inspection object 810 so as to surround inspection object 810, and inspects reflected light from the side surface of inspection object 810. An annular prism 802 that reflects light above the object 810, a two-dimensional imaging camera that captures light reflected from the upper surface of the inspection object 810 and light output from the upper surface 804 of the annular prism 802, and a two-dimensional imaging camera. And an image processing device that performs image processing on the video signal.

The surface inspection apparatus 800 disclosed in this publication
According to the above, the inspection object 810 is mounted inside the annular prism 802 using the suction mechanism 808 or the like. The annular prism 802 reflects the light reflected from the side surface of the inspection object 810 toward the upper surface 804 of the annular prism 802 by the total reflection surface 806. The two-dimensional imaging camera includes a light reflected from the front of the inspection object 810 and the annular prism 80.
The light output from the upper surface 804 of the second device is imaged two-dimensionally. The image processing device processes a video signal from the two-dimensional imaging camera.

[0004] Since the annular prism 802 is arranged on the side surface of the inspection object 810 so as to surround the inspection object 810, the front surface and the entire periphery of the inspection object 810 are simultaneously inspected by one two-dimensional imaging camera. be able to.

[0005]

However, in the surface inspection apparatus disclosed in the above-mentioned publication, it is necessary to mount an inspection object in the hollow portion of the annular prism. For this reason,
It is necessary to insert inspection objects one by one into the ring and load them, and the time required for this loading is longer than the time required for inspection using image processing technology. Is difficult.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and provides an inspection apparatus and an inspection lens having high inspection accuracy and high processing capability for an inspection object having a side surface. That is.

[0007]

According to a first aspect of the present invention, there is provided an inspection apparatus for inspecting a surface of an inspection object having a front surface and a side surface in a direction intersecting the front surface. A mounting table on which the inspection object is mounted so that the front faces in a predetermined direction, an illumination device that illuminates the side surface of the inspection object mounted on the mounting table, and a position of the mounting table that is predetermined. Optical path changing means for changing the optical path of the reflected light from the side surface in a predetermined direction by refracting the reflected light from the side surface illuminated by the illumination of the lighting device, Imaging means for imaging reflected light from the side surface output from the changing means, and image processing means connected to the imaging means for performing image processing of a video signal of reflected light from the side imaged by the imaging means; including.

According to the first invention, the illumination device illuminates the side surface of the inspection object mounted on the mounting table. The optical path changing means is installed at a position having a predetermined relationship with the position of the mounting table, and refracts light reflected from the side illuminated by the illumination of the illumination device to change the optical path to a predetermined direction.
The imaging unit captures the reflected light from the side surface changed in the predetermined direction. The image processing means performs image processing on the video signal of the reflected light from the side surface imaged by the imaging means. Thereby, the optical path changing means is installed at a position which is in a predetermined relationship (for example, a relation distant from the mounting table) from the position of the mounting table, and the imaging means is set in a predetermined direction (for example, inspection) by the optical path converting means. The reflected light from the side of the inspection target converted into a direction different from the direction in which the object is sent to the mounting table and the direction in which the object is sent out from the mounting table can be imaged, so that the inspection object is sent to the mounting table at a high speed. Thus, the side inspection can be performed. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface.

According to a second aspect of the present invention, in addition to the configuration of the first aspect, the predetermined direction is a predetermined direction in which the front when the inspection object is mounted on the mounting table is oriented. The position where the optical path changing means is installed is a position remote from the mounting table and opposed to the mounting table.

[0010] According to the second aspect, the optical path changing means provided at a position facing the mounting table transmits the optical path of the reflected light from the side surface of the inspection object mounted on the mounting table to the mounting table. It is converted to the direction in which the front faces when the object is placed. Thereby, the optical path conversion means is installed at a position distant from the inspection object mounted on the mounting table, and the imaging means faces forward when the inspection object is mounted on the mounting table by the optical path conversion means. Imaging the reflected light from the side of the inspection object converted in the direction (for example, a direction perpendicular to the mounting table, which is different from the direction of sending the inspection object to the mounting table and sending it out of the mounting table) Since the inspection target can be sent to the mounting table at a high speed, the side inspection can be performed. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface.

According to a third aspect of the present invention, in the inspection apparatus, in addition to the configuration of the first or second aspect, the optical path changing means includes a bottom surface,
A solid transparent lens having an upper surface having an area smaller than the area of the bottom surface and a slope connecting the periphery of the bottom surface and the periphery of the upper surface, wherein the lens is installed so that the upper surface faces the mounting table. .

According to the third aspect, the reflected light from the side surface of the inspection object mounted on the mounting table is incident on the inclined surface of the lens, and is directed in a predetermined direction by the refractive index of the material constituting the lens. Bend. The reflected light from the refracted side surface is imaged by the imaging means. Accordingly, the reflected light from the entire periphery of the side surface of the inspection target is different from the light reflected from the entire circumference of the side surface of the inspection target depending on the refractive index of the material constituting the lens. The lens to be refracted in the (direction) is installed at a position that is in a predetermined relationship (for example, a relationship distant from the mounting table) from the position of the mounting table, so that the inspection target is sent to the mounting table at a high speed. be able to. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface.

According to a fourth aspect of the present invention, in addition to the configuration of the third aspect, the lens comprises: a refractive index of a material constituting the lens; an angle formed by a slope and a side surface of the inspection object; Based on a function determined by the distance between the upper surface of the lens and the object to be inspected, the optical path of the reflected light from the side incident from the slope is refracted.

According to the fourth aspect, the reflected light from the entire periphery of the side surface of the inspection object mounted on the mounting table is incident on the slope of the lens, and the refractive index of the material constituting the lens and the slope are determined. The light reflected from the side surface of the inspection object is refracted in a predetermined direction based on a function determined by an angle formed by the side surface of the inspection object and the distance between the upper surface of the lens and the inspection object. Thus, a lens that refracts the reflected light from the side surface of the inspection target in a predetermined direction (for example, a direction in which the inspection target is sent to the mounting table or different from the transmission from the mounting table) based on the predetermined function. Is installed at a position having a predetermined relationship from the position of the mounting table (for example, a relationship distant from the mounting table), the inspection object can be sent to the mounting table at a high speed. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface.

According to a fifth aspect of the present invention, in addition to the configuration of the third or fourth aspect, the lens has a hollow portion penetrating from the bottom surface to the upper surface, and the lens is hollow from the inside of the hollow portion. The camera may further include a blocking unit configured to block light incident on the inside of the lens through the inner surface of the unit.

According to the fifth aspect, the blocking means blocks light incident on the inside of the lens through the inner surface of the hollow portion provided in the lens. Accordingly, light other than the reflected light from the entire periphery of the side surface of the inspection target does not enter the inside of the lens, and thus the imaging unit can capture only the reflected light from the side surface of the inspection target object. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface and a high inspection accuracy.

According to a sixth aspect of the present invention, in addition to the configuration of the fifth aspect, the cross-sectional shape of the hollow portion is such that the entire front surface of the inspection object can be observed through the hollow portion.
The imaging means includes means for imaging reflected light from the side of the test object output from the optical path changing means, and reflected light from the front of the test object incident through the hollow portion,
The image processing means includes means for performing image processing on a video signal of light reflected from the side and a video signal of light reflected from the front, which are captured by the imaging means.

According to the sixth aspect, the cross-sectional shape of the hollow portion is such that the entire front surface of the inspection object can be observed.
Thereby, the imaging unit can image the reflected light from the entire periphery of the side surface of the inspection object output from the optical path changing unit and the reflected light from the entire front surface of the inspection object incident through the hollow portion at one time. . As a result, it is possible to provide an inspection apparatus having a high throughput capable of inspecting the entire periphery of the side surface and the entire front surface of the inspection object having the side surface.

The inspection apparatus according to the seventh invention comprises first to sixth inspection apparatuses.
In addition to the configuration of any one of the inventions, a first polarizing filter installed at a position between the lighting device and the inspection object, and a second polarizing filter installed at a position between the inspection object and the imaging unit And the polarization plane of the first polarization filter is shifted from the polarization plane of the second polarization filter by 90 degrees.

According to the seventh aspect, the first polarizing filter transmits the illumination light from the illumination device only in a specific vibration direction and converts the illumination light into plane polarized light. Since the polarization plane of the second polarization filter is shifted by 90 degrees from the polarization plane of the first polarization filter, the second polarization filter does not transmit specularly reflected light from the inspection object whose polarization is maintained. Transmits scattered light from the inspection object whose deflection is not maintained. As a result, even when the inspection object is glossy and causes halation, it is possible to avoid specular reflection light that causes halation from being incident on the imaging camera, and it is possible to perform an inspection with high accuracy.

The inspection lens according to the eighth invention is a solid transparent lens having a bottom surface, an upper surface having an area smaller than the area of the bottom surface, and a slope connecting the periphery of the bottom surface and the periphery of the upper surface. The lens has a hollow portion penetrating from the bottom surface to the upper surface, and the lens includes blocking means for blocking light incident from the inside of the hollow portion to the inside of the lens through the inner surface of the hollow portion.

According to the eighth aspect, the light incident from the inclined surface of the lens is refracted in a predetermined direction (for example, a direction perpendicular to the bottom surface of the lens) by the refractive index of the material constituting the lens, and is output from the bottom surface. I do. The blocking means blocks light that enters the inside of the lens through the inner surface of the hollow portion provided in the lens. Thereby, the optical path of the light incident from the slope is refracted in a predetermined direction by the refractive index of the material constituting the lens,
Further, light other than light incident from the slope is not made to enter the inside of the lens. As a result, it is possible to provide a lens capable of refracting only light incident from a slope in a predetermined direction, and to provide an inspection apparatus having a high processing capability by using this lens, for example, for a side inspection of an inspection object having a side surface. can do.

[0023]

Embodiments of the present invention will be described below with reference to the drawings. In the following description, the same components are denoted by the same reference numerals. Their names and functions are the same. Therefore, repetition of detailed description thereof will be appropriately omitted.

Referring to FIGS. 1 and 2, inspection apparatus 100 according to the present embodiment has a first front face 610, a first side face 604 in a direction perpendicular to first front face 610, and a bottom face 6.
16 is an inspection apparatus for inspecting the surface of the inspection object 600 having the inspection object 16. The detailed shape of the inspection object 600 will be described later.

The inspection apparatus 100 includes a conveyor 650 for transporting the inspection object 600 with the bottom surface 616 of the inspection object 600 down, and an inspection object 600 placed on the transportation conveyor 650 and transported to a predetermined inspection position. The ring illumination device 300 illuminating the side surface of the ring illumination device 300 is installed above the conveyor 650 and the ring illumination device 300, and refracts light reflected from the first side surface 604 illuminated by the illumination of the ring illumination device 300. The first side 60
A lens 200 that changes the optical path of the reflected light from the light source 4 and the like in a vertical direction, an imaging camera 400 that captures the reflected light from the entire circumference of the first side surface 604 output from the bottom surface 202 of the lens 200, and an imaging device. An image processing device 50 connected to the camera 400 and performing image processing of a video signal such as light reflected from the first side surface 604 captured by the imaging camera 400
0 is included.

The inspection device 100 is further provided at a position between the ring illumination device 300 and the inspection object 600, and transmits only the light of the specific vibration direction of the illumination light from the ring illumination device 300, and First to make the plane polarized light
And the second polarizing filter 9 installed between the inspection object 600 and the lens 200 at a position between the inspection object 600 and the imaging camera 400.
02. The polarization plane of the first polarization filter 900 is shifted by 90 degrees from the polarization plane of the second polarization filter 902. The first polarizing filter 900 has a ring shape, and an optical path from the second polarizing filter 902 to the imaging camera 400 is set inside the ring, so that the optical path to the imaging camera 400 is not blocked.

The lens 200 has a circular bottom surface 202 and a circular upper surface 2 having an area smaller than the area of the bottom surface 202.
08, and a solid transparent lens having a slope 204 connecting the periphery of the bottom surface 202 and the periphery of the top surface 208. The material of the lens 200 of the inspection apparatus 100 according to the present embodiment is quartz glass. The refractive index of quartz glass is air refractive index 1
1.5163. Also, the circular bottom surface 202
And the position of the center of the circular upper surface 208 coincide with each other. Further, the lens 200 has a cylindrical hollow portion 206 penetrating the bottom surface 202 and the upper surface 208, and the center position of the bottom surface 202 and the center of the upper surface 208 coincides with the center position of the hollow portion 206. The hollow portion 206 has a blocking surface on its inner surface that blocks light that enters the lens 200 from the hollow portion 206 through the inner surface of the hollow portion 206. For example, a black sheet that blocks visible light or a black paint that blocks visible light is applied to the blocking surface. The cross-sectional area of the hollow portion 206 is
The entire front surface of the inspection object 600 has a diameter that can be observed.

The ring illuminating device 300 is a ring-shaped illuminating device, and illuminates the side and the front of the inspection object 600 uniformly. The imaging camera 400 has a two-dimensional CC
A D (charge coupled device) camera or the like is used. The imaging camera 400 converts the image data based on a synchronization signal output from an inspection target detection sensor (not shown) that detects that the inspection target 600 has arrived at a predetermined position, provided on the conveyor 650. Take in. The captured image data includes an image of the front of the inspection object 600 observed through the hollow portion of the lens 200 and the lens 20.
0 output from the bottom surface 202 of the inspection object 600.

The image processing device 500 includes an imaging camera 500
Performs image processing on the data of the front image and the side image of the inspection object 600 taken by the camera, and detects the front and side flaws of the inspection object 600. In addition, based on the size and the number of the detected scratches, the pass / fail of the inspection of the inspection object 600 is determined.
The inspection object 600 determined to have failed the inspection is removed from the conveyor 600 by, for example, blowing air from a defective product discharge air nozzle (not shown) provided on the conveyor 650.

The inspection object 600 has a first front face 610,
A second front face 612 and a third front face 614, and a first side face 604 and a second side face 606 in a direction perpendicular to the front faces.
And a third side surface 608. In addition, the first side surface 604 has a cutout portion 602 in which the side surface is partially missing.
Having. Further, as described later, a slope 605 is provided on a part of the first side surface. The inspection object 600 is transported by the transport conveyor 650 in the X direction of FIG. 1 and the Y direction of FIG. 2, and the surface of the inspection object 600 is automatically inspected during the transportation.

Next, the optical path of the illumination light of the ring illumination device 300 and the optical path of the reflected light from the side surface of the inspection object 600 reflected by the illumination light of the ring illumination device 300 will be described. The ring illumination device 300 has a ring shape as described above, and a large number of optical fiber bundles are provided inside the ring of the ring illumination device 300 so that the front and side surfaces of the inspection object 600 can be uniformly illuminated. It has an illumination line 302 arranged. The illumination line 302 has an angle such that the front and side surfaces of the inspection object 600 can be illuminated.

Referring to FIG. 3 showing a section taken along line 3-3 in FIG. 1, the illumination light emitted from illumination line 302 of ring illumination device 300 draws illumination light trajectories 304 to 310, and Light the sides. At this time, part of the illumination light (trajectory not shown) emitted from the illumination line 302 of the ring illumination device 300 is
0 illuminates the first front 610 and the like.

As shown in FIG. 3, a part of the illumination light emitted from the illumination line 302 draws an illumination light trajectory 908 and irradiates the slope 605 of the inspection object 600. If the surface of the inspection object 600 is glossy, halation occurs due to specularly reflected light from the slope 605. Referring to FIG. 4, illumination light drawn by illumination light trajectory 908 is applied to slope 605. Due to the reflection characteristic close to the total reflection of the inspection object 600, the reflected light trajectory 918 is generated from the slope 605.
And specularly reflected light is incident on the imaging camera 400.
As a result, halation occurs. This is the slope 60
This is because the imaging camera 400 is installed on an optical path having a reflection angle equal to the incident angle of the illumination light with respect to the perpendicular at 5. If the inspection object has such a shape and reflection characteristics, the inspection becomes difficult due to the halation. Therefore, the first polarized light filter 900 converts the light into plane-polarized illumination light. The specularly reflected light maintains its polarization, while the scattered light due to foreign matter or the like is almost non-polarized. Second polarizing filter 9
Since the polarization plane of No. 02 is shifted by 90 degrees from the polarization plane of the first polarization filter 900, the specularly reflected light whose polarization is maintained cannot pass through the second polarization filter 902. As a result, light other than the specularly reflected light is transmitted through the second polarizing filter 902, and it is possible to prevent the imaging camera 400 from capturing halation.

First side 604 and second side 606 of inspection object 600 illuminated by ring illumination device 300
And the reflected light from the third side surface 608 is reflected light trajectory 3
14 to 320 are incident on the inclined surface 204 of the lens 200. The optical path represented by the reflected light trajectories 314 to 320 incident on the slope 204 of the lens 200 is
Is converted into a vertically upward light path. Hereinafter, the conversion of the optical path will be described.

With reference to FIGS. 5 and 6, first, the incidence of reflected light from the side surface of the inspection object 600 on the lens 200 will be described. The reflected light from the side surface 604 or the like of the inspection object 600 generates as much as possible the slope 2 of the lens 200.
The incident angle θ is determined so that the light enters the inside of the lens from the position 04. A lot of reflected light enters the lens 200,
By refracting this and inputting it to the imaging camera 400, a brighter and clearer side image of the inspection object 600 can be obtained, and the inspection accuracy can be improved. The incident angle θ is low in reflectance (that is, high in the lens 200) from the relationship between the incident angle and the reflectance (FIG. 6) determined by the air and the quartz glass that is a material constituting the lens 200. ) And up to 70 degrees. In the present embodiment, θ = about 65 degrees. Based on the angle of incidence θ, in order to refract the reflected light from the side surface of the inspection object 600 incident on the inclined surface 204 of the lens 200 in the vertical direction, an inclined angle α indicating the inclination of the inclined surface 204 and the angle of the lens 200 Upper surface 208 and inspection object 600
And an optical path inclination angle β indicating the inclination of the optical path of the reflected light, which is determined by the distance from the optical path. These angles include θ = α + β
There is a relationship. The slope angle α and the optical path inclination angle β are determined so as to satisfy the relationship. After the reflection angle θ is set as described above, when the slope angle α of the lens 200 is determined, the optical path inclination angle β is determined, and the distance between the lens 200 and the inspection object 600 is determined. Thus, the shape of the lens 200 and
The distance between the lens 200 and the inspection object 600 is determined.

Referring to FIG. 7, lens 200 has hollow portion 2.
The optical path of disturbance light other than the light reflected from the side surface of the inspection object 600 when the inspection object 600 is not provided will be described. Of the disturbance light incident from the bottom surface 202 of the lens 200, disturbance light as shown in the optical path 330 is refracted as shown in the optical path 332 on the slope 204 on the incident side of the lens 200,
The optical path 334 on the slope 204 on the output side of the lens 200
It is reflected as shown in FIG. The optical path of the disturbance light shown in the optical path 334 is the optical path 3 of the reflected light from the side surface of the inspection object 600.
20 overlaps the optical path after being refracted, and the imaging camera 400
Is input to When such disturbance light is input to the imaging camera 400, the disturbance light and the reflected light from the side surface of the inspection object 600 are superimposed, and the inspection cannot be performed correctly. In order to prevent such disturbance light from being input to the imaging camera 400, the lens 200 has a hollow portion 206. Further, the hollow portion 206 has a blocking surface on its inner surface that blocks light that enters the lens 200 from the hollow portion 206 through the inner surface of the hollow portion 206.

The operation of the inspection apparatus 100 according to the present embodiment having the above-described structure will be described. 1 and 2, inspection object 600 is transported by transport conveyor 650 in the X direction shown in FIG. When the inspection object 600 arrives at a predetermined position on the conveyor 650, the inspection object detection sensor detects the inspection object 600. At this time, the side and front of the inspection object 300 are illuminated by the ring illumination device 300. The inspection object detection sensor transmits a synchronization signal to the imaging camera 400. The imaging camera 400 that has received the synchronization signal
00 through the hollow portion 206 of the first inspection object 600.
Front face 610, second front face 612 and third front face 61
4 and the reflected light from the first side 604, the second side 606, and the third side 608 output from the bottom surface 202 of the lens 200.

Referring to FIG. 5, the first of inspection object 600
Side 604, second side 606 and third side 60
90% (in FIG. 6, the incident angle θ = 6
(Because the reflectance at 5 degrees is about 10%), the light enters from the inclined surface 204 of the lens 200. The light incident on the lens 200 is vertically refracted. This is the lens 20
Based on a function determined by the refractive index of quartz glass, which is a material of No. 0, the slope angle α of the lens 200, and the distance between the lens 200 and the inspection object 600, the optical path of the reflected light after refraction is directed vertically upward. This is because the shape of the lens 200 and the position where the lens 200 is installed are determined. Further, visible light from the inside of the hollow portion 206 is blocked by the blocking surface and does not enter the inclined surface 204 of the lens 200, so that disturbance light is not input to the imaging camera 400.

Referring to FIG. 8, an example of an image captured by imaging camera 400 of inspection apparatus 100 according to the present embodiment will be described. The images of the reflected light from the first front face 610, the second front face 612, and the third front face 614 of the inspection object 600, which are imaged through the hollow portion 206, are the image areas 710 and the second front face of the first front, respectively. Corresponding to the images of the front image area 712 and the third front image area 714. The image of the reflected light from the first side surface 604, the second side surface 606, and the third side surface 608 of the inspection object 600, which is output from the bottom surface 202 of the lens 200 and captured, is
The images correspond to the image area 704 on the first side, the image area 706 on the second side, and the image area 708 on the third side, respectively. Since there is no reflection from the notch 602, no image of the inspection object 600 is displayed in the image area 702 corresponding to the notch 602.

In this manner, the first object 600
Front face 610, second front face 612 and third front face 61
4, the first side 604, the second side 606 and the third side.
Can be imaged at one time by the imaging camera 400.

As described above, the inspection apparatus according to the present embodiment is applicable to an inspection object having a front surface and a side surface.
With the lens installed at a position away from the inspection object,
The reflected light from the side surface can be changed upward in the inspection object.
The converted reflected light from the side of the inspection object and the reflected light from the front of the inspection object can be imaged at once by an imaging camera arranged above, and an image processing technology based on the captured image data. The test used can be performed. Further, since the lens is installed at a position distant from the inspection object, there is no need to insert and load the lens into the lens ring, and the inspection object is sent to the inspection device at a high speed and sent out from the inspection device. be able to. As a result, it is possible to provide an inspection apparatus having a high processing capability for an inspection object having a side surface and a high inspection accuracy.

As shown in FIG. 9, a second polarizing filter 904 may be provided in place of the second polarizing filter 902. This polarization filter 904 is used for the inspection object 500.
Between the camera and the imaging camera 400 and the lens 20
0 and the camera 400. The polarization plane of the second polarization filter 904 is the same as that of the second polarization filter 902 described above.
And 90 °. Even in this case, halation of the inspection object can be avoided.

The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an outline of an inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing an outline of the inspection apparatus shown in FIG.

FIG. 3 is a sectional view (part 1) showing a section taken along line 3-3 in the perspective view shown in FIG. 1;

FIG. 4 is an explanatory diagram illustrating an optical path of reflected light from a slope of an inspection object.

FIG. 5 is an explanatory diagram (part 1) illustrating an optical path of light reflected from a side surface of the inspection object.

FIG. 6 is a diagram showing a relationship between an incident angle and a reflectance when light is incident on glass from air.

FIG. 7 is an explanatory diagram (part 2) illustrating an optical path of light reflected from a side surface of the inspection object.

FIG. 8 is a diagram illustrating an example of a captured image.

FIG. 9 is a sectional view (part 2) showing a section taken along line 3-3 in the perspective view shown in FIG. 1;

FIG. 10 is an explanatory diagram illustrating a conventional inspection device.

[Explanation of symbols]

100 inspection device, 200 lens, 300 ring illumination device, 400 imaging camera, 500 transport conveyor,
600 inspection object, 900, 902 polarizing filter

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) G03B 15/02 G03B 15/02 RS H04N 5/225 H04N 5/225 CD

Claims (8)

[Claims] 1. An inspection apparatus for inspecting a surface of an inspection object having a front surface and a side surface in a direction intersecting the front surface, wherein the front surface of the inspection object is oriented in a predetermined direction. A mounting table on which the inspection object is mounted, a lighting device that illuminates the side surface of the inspection object mounted on the mounting table, and a position in a predetermined relationship with the position of the mounting table. An optical path changing means for changing the optical path of the reflected light from the side surface in a predetermined direction by refracting the reflected light from the side surface illuminated by the illumination of the illumination device; Imaging means for imaging reflected light from the side surface output from the image processing apparatus; and image processing for image processing a video signal of the reflected light from the side face imaged by the imaging means, the image signal being connected to the imaging means. Means Including, inspection equipment. 2. The method according to claim 1, wherein the predetermined direction is the predetermined direction in which the front surface faces when the inspection object is mounted on the mounting table, and the position where the optical path changing unit is installed is: The inspection device according to claim 1, wherein the inspection device is located at a position away from the mounting table and facing the mounting table. 3. The solid-state transparent lens according to claim 1, wherein the optical path changing unit is a solid transparent lens having a bottom surface, an upper surface having an area smaller than the area of the bottom surface, and a slope connecting the periphery of the bottom surface and the periphery of the upper surface. The inspection apparatus according to claim 1, wherein the inspection apparatus is installed so that the upper surface faces the mounting table. 4. The lens has a refractive index of a material constituting the lens, an angle formed by the inclined surface of the lens and the side surface of the inspection object, and an upper surface of the lens and the inspection object. The inspection apparatus according to claim 3, wherein an optical path of the reflected light from the side surface incident from the slope is refracted based on a function determined by the distance of the inspection device. 5. The lens has a hollow portion penetrating from the bottom surface to the upper surface, and the lens blocks light that enters the lens from the inside of the hollow portion through the inner surface of the hollow portion. The inspection apparatus according to claim 3, further comprising a blocking unit. 6. The cross-sectional shape of the hollow portion is a shape through which the entire front surface of the inspection object can be observed through the hollow portion. The imaging unit outputs the inspection object output from the optical path changing unit. The image processing means includes means for imaging reflected light from the side surface of the object and reflected light from the front surface of the inspection object incident through the hollow portion, wherein the image processing means is imaged by the imaging means The inspection apparatus according to claim 5, further comprising means for performing image processing on a video signal of the reflected light from the side surface and a video signal of the reflected light from the front. 7. The inspection device is provided at a position between the illumination device and the inspection object, a first polarizing filter installed at a position between the illumination device and the inspection object, and at a position between the inspection object and the imaging unit. And a second polarization filter, wherein the polarization plane of the first polarization filter is shifted by 90 degrees from the polarization plane of the second polarization filter.
7. The inspection device according to any one of claims 1 to 6. 8. A solid transparent lens having a bottom surface, an upper surface having an area smaller than the area of the bottom surface, and a slope connecting the periphery of the bottom surface and the periphery of the upper surface, wherein the lens is: An inspection lens having a hollow portion penetrating from the bottom surface to the upper surface, wherein the lens includes a blocking unit for blocking light incident on the lens from the inside of the hollow portion through the inner surface of the hollow portion. .