JP4846521B2 - Morphological abnormality detection device - Google Patents

Morphological abnormality detection device Download PDF

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JP4846521B2
JP4846521B2 JP2006288014A JP2006288014A JP4846521B2 JP 4846521 B2 JP4846521 B2 JP 4846521B2 JP 2006288014 A JP2006288014 A JP 2006288014A JP 2006288014 A JP2006288014 A JP 2006288014A JP 4846521 B2 JP4846521 B2 JP 4846521B2
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prism
abnormality detection
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JP2008107420A (en
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洋己 渡部
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Sumita Optical Glass Manufacturing Co Ltd
Eisai Machinery Co Ltd
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Eisai Machinery Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a prism for observing at least a half of the surface of an article as one image and an apparatus for detecting an abnormal shape at high speed. <P>SOLUTION: The prism 1 for observing an object (an electrical component S) obliquely is provided with: a first mirror 11 which has a reflection surface having a quadrangular frustum-like shape on the side face and reflects measurement light L entering from below toward the inside of the prism; and a second mirror 12 which is coaxially arranged inside the first mirror 11, has a reflection surface having a cone-like shape on the side face and reflects the measurement light reflected by the first mirror 11 toward an imaging apparatus arranged above the prism. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

本発明は、電気部品(抵抗、トランジスタ、コンデンサ、リアクトル等)、機械部品(螺子、ボルト、ナット)等の小さな物品を斜視観測するためのプリズムおよび形態異常検出装置に関し、前記物品の表面の少なくとも半分を一画像として観測することができる前記プリズムおよび形態異常を高速検出できる前記形態異常検出装置に関する。   The present invention relates to a prism for observing small articles such as electrical parts (resistors, transistors, capacitors, reactors, etc.), mechanical parts (screws, bolts, nuts) and the like, and a morphological abnormality detection device, and at least on the surface of the article. The present invention relates to the prism capable of observing half as one image and the morphological abnormality detection device capable of detecting morphological abnormality at high speed.

従来、電気部品や機械部品等の物品の形態異常(射出部分の欠けやヒビ等)の検査においては、物品の周囲を、ひとつずつカメラにより撮影し、画像処理装置により、撮影画像を基準画像と比較して形態異常を発見することが行われている。   Conventionally, in the inspection of morphological abnormalities (such as missing or cracked injection parts) of articles such as electrical parts and mechanical parts, the surroundings of the article are photographed one by one with a camera, and the photographed image is used as a reference image by an image processing device. In comparison, morphological abnormalities are discovered.

このような画像処理による検査は、電気部品や機械部品等の物品の形態異常を人が判断する場合に比べて、信頼性が高いうえ、処理効率の面でも優れている。   Such inspection by image processing is more reliable and superior in terms of processing efficiency than a case where a person judges a form abnormality of an article such as an electrical component or a mechanical component.

しかし、これらのカメラにより撮影された画像について別々処理(5種類の画像処理)が必要となるため、検査に時間がかかるという問題がある。   However, since separate processing (five types of image processing) is required for images taken by these cameras, there is a problem that inspection takes time.

本発明の目的は、電気部品や機械部品等の物品の表面の少なくとも半分を一画像として観測することができるプリズム、および形態異常を高速検出できる形態異常検出装置を提供することにある。   An object of the present invention is to provide a prism capable of observing at least half of the surface of an article such as an electrical component or a mechanical component as an image, and a morphological abnormality detection device capable of detecting morphological abnormality at high speed.

本発明の形態異常検出装置は(1)〜()を要旨とする。
)「斜視観測の対象である物品の形態異常を検出する形態異常検出装置であって、
四角錘台側面形状の反射面を持ち、下方からの測定光を内側に反射する第1ミラーと、前記第1ミラーの内側に同軸配置され、四角錘台側面形状または四角錘側面形状の反射面を持ち、前記第1ミラーにより反射された測定光を上方に反射する第2ミラーと、を備え、
前記物品の平面視輪郭の最大長よりも大きい径の第1ミラーをそれぞれが有する、前記物品を挟んで対向する位置に設けた2つのプリズムと、
前記2つのプリズム間を落下する前記物品を、前記2つのプリズムを介して撮影する2つの撮像装置と、
前記2つの撮像装置により撮影した画像から、前記物品に形態異常があるか否かを判別する判別装置と、
を備えたことを特徴とする形態異常検出装置。」
)「前記判別装置は、前記物品の画像を当該物品の基準形態と比較することを特徴とする()に記載の形態異常検出装置。」
)「前記物品が電気部品または機械部品であることを特徴とする()に記載の形態異常検出装置。」

The morphological abnormality detection device of the present invention is summarized as (1) to ( 3 ).
( 1 ) “A morphological abnormality detection device for detecting a morphological abnormality of an article that is an object of perspective observation,
A first mirror having a rectangular frustum side surface reflecting surface and reflecting measurement light from below to the inside, and coaxially disposed inside the first mirror, and having a quadrangular frustum side shape or a quadratic frustum side shape reflecting surface And a second mirror that reflects upward the measurement light reflected by the first mirror,
Two prisms each provided with a first mirror having a diameter larger than the maximum length of the outline of the article in plan view, provided at positions facing each other across the article;
It said article to fall between the two prisms, and two imaging devices for photographing through the two prisms,
A discriminating device for discriminating whether or not the article has a morphological abnormality from images taken by the two imaging devices;
A morphological abnormality detection device comprising: "
( 2 ) “The abnormality determination device according to ( 1 ), wherein the determination device compares an image of the article with a reference form of the article.”
( 3 ) "The form abnormality detecting device according to ( 2 ), wherein the article is an electrical component or a mechanical component."

本発明のプリズムでは、物品の表面の少なくとも半分を一画像として斜視観測することができる。また、本発明の形態異常検出装置では、上記プリズムを使用することで、パターン比較等を短時間で行うことができる。
本発明のプリズムは、2つの反射面を持つので、像の反転を起こさずに斜視観測ができるので、撮像装置を使用しない観察(目視による観察)に好適である。
In the prism of the present invention, at least half of the surface of the article can be observed as a perspective image. In the morphological abnormality detection device of the present invention, pattern comparison and the like can be performed in a short time by using the prism.
Since the prism of the present invention has two reflecting surfaces, it is possible to perform perspective observation without causing inversion of the image, which is suitable for observation without using an imaging device (visual observation).

図1は本発明のプリズムの第1実施形態を示す説明図であり、(A)はプリズム1の平面図、(B)は(A)におけるF−F線の断面図である。
図1(A),(B)においてプリズム1は、ガラスまたは合成樹脂により接合または一体に形成されたもので、第1ミラー11と第2ミラー12と入射面13と出射面14とを有している。
1A and 1B are explanatory views showing a first embodiment of a prism according to the present invention. FIG. 1A is a plan view of the prism 1 and FIG. 1B is a cross-sectional view taken along line FF in FIG.
1A and 1B, a prism 1 is joined or integrally formed of glass or synthetic resin, and has a first mirror 11, a second mirror 12, an entrance surface 13, and an exit surface 14. ing.

第1ミラー11は、四角錐台側面形状の反射面111〜114を持ち、これらの反射面は外側表面からアルミニウム等の金属膜を蒸着することにより形成されている。第2ミラー12は、第1ミラー11の内側に同軸配置されるもので、四角錐台側面形状または四角錐側面形状(図1では四角錐側面形状)の反射面121〜124を持つ。これらの反射面は、全反射条件を満足するので、アルミニウム等により形成する必要はない。   The 1st mirror 11 has the reflective surfaces 111-114 of a quadrangular frustum side shape, and these reflective surfaces are formed by vapor-depositing metal films, such as aluminum, from an outer surface. The second mirror 12 is coaxially arranged on the inner side of the first mirror 11 and has reflecting surfaces 121 to 124 having a quadrangular pyramid side surface shape or a quadrangular pyramid side surface shape (a quadrangular pyramid side surface shape in FIG. 1). Since these reflecting surfaces satisfy the total reflection conditions, it is not necessary to form them with aluminum or the like.

第1ミラー11の反射面111〜114の中心軸に対する傾斜角は、第2ミラー12の反射面121〜124の中心軸に対する傾斜角よりも小さくなるように設計されている。第1ミラー11の反射面111〜114の中心軸に対する傾斜角は22.5°であり、第2ミラー12の反射面121〜124の中心軸に対する傾斜角は45°である。すなわち、プリズム1では、電気部品や機械部品等の物品を斜め上45°方向から斜視観察することで、正面および側面を、同じ縮尺(すなわち、正面から見た長さの1/21/2倍)で表示することができ、これにより、パターンマッチング等により形態異常を検出する際の画像処理が容易となる。 The inclination angle with respect to the central axis of the reflecting surfaces 111 to 114 of the first mirror 11 is designed to be smaller than the inclination angle with respect to the central axis of the reflecting surfaces 121 to 124 of the second mirror 12. The inclination angle with respect to the central axis of the reflecting surfaces 111 to 114 of the first mirror 11 is 22.5 °, and the inclination angle with respect to the central axis of the reflecting surfaces 121 to 124 of the second mirror 12 is 45 °. That is, in the prism 1, by observing an article such as an electrical component or a mechanical component obliquely from an obliquely upward 45 ° direction, the front surface and the side surface have the same scale (that is, 1/2 1/2 of the length viewed from the front surface). The image processing when detecting a morphological abnormality by pattern matching or the like is facilitated.

入射面13は、四角錐台側面形状の透過面131〜134からなり、第1ミラー11の下方かつ内側に同軸配置され、第1ミラー11の反射面111〜114への測定光Lを透過させることができる。なお、図1のプリズム1では、入射面13に測定光Lが直角に入射するので色分散が生じにくくなる。   The incident surface 13 includes transmission surfaces 131 to 134 having a quadrangular frustum side shape, is coaxially disposed below and inside the first mirror 11, and transmits the measurement light L to the reflection surfaces 111 to 114 of the first mirror 11. be able to. In the prism 1 of FIG. 1, since the measurement light L is incident on the incident surface 13 at a right angle, chromatic dispersion is less likely to occur.

なお、図1では、第2ミラー12の反射面121と、透過面131とは同一平面上に存在している。同様に第2ミラー12の反射面122,123,124と、入射面13の透過面132,133,134とは同一平面上に存在している。   In FIG. 1, the reflection surface 121 and the transmission surface 131 of the second mirror 12 exist on the same plane. Similarly, the reflecting surfaces 122, 123, and 124 of the second mirror 12 and the transmitting surfaces 132, 133, and 134 of the incident surface 13 are on the same plane.

第1ミラー11の各稜と第2ミラー12の各稜と入射面13の各稜とは、平面視したときにそれぞれ同一直線上に配置されるように構成されている。なお、図1では第1ミラー11の反射面111〜114の境界には稜が形成されていないが、このときの稜は、反射面111〜114を側面に含む四角錐における稜である。   Each ridge of the first mirror 11, each ridge of the second mirror 12, and each ridge of the incident surface 13 are configured to be arranged on the same straight line when viewed in plan. In FIG. 1, no ridge is formed at the boundary between the reflecting surfaces 111 to 114 of the first mirror 11, but the ridge at this time is a ridge in a quadrangular pyramid including the reflecting surfaces 111 to 114 on the side surface.

これにより、第1ミラー11の反射面111〜114は、下方からの測定光L(Sからの光)を内側に反射することができ、第2ミラー12の反射面121〜124は、第1ミラー11の反射面111〜114により反射された測定光Lを受光して上方に反射し、出射面14から測定光Lを図示しない撮像装置に出射することができる。   Thereby, the reflective surfaces 111-114 of the 1st mirror 11 can reflect the measurement light L (light from S) from the inside, and the reflective surfaces 121-124 of the 2nd mirror 12 are 1st. The measurement light L reflected by the reflection surfaces 111 to 114 of the mirror 11 is received and reflected upward, and the measurement light L can be emitted from the emission surface 14 to an imaging device (not shown).

図2および図3により、プリズム1による電気部品の観察画像を説明する。
図2(A)は斜視観測対象である電気部品Sの斜視図であり、(B−1),(B−2),(B−3),(B−4)はプリズム1の上方から電気部品Sを見たときの第2ミラー12の反射面121〜124に現れる第1画像G1,第2画像G2,第3画像G3,第4画像G4を示す図、(C)は、撮像装置により撮影される撮影画像G0を示す図である。
The observation image of the electrical component by the prism 1 will be described with reference to FIGS.
FIG. 2A is a perspective view of the electrical component S that is a perspective observation target, and (B-1), (B-2), (B-3), and (B-4) are electrical from above the prism 1. The figure which shows the 1st image G1, the 2nd image G2, the 3rd image G3, and the 4th image G4 which appear on the reflective surfaces 121-124 of the 2nd mirror 12 when seeing the components S, (C) is by imaging device It is a figure which shows the picked-up image G0 image | photographed.

図2(B−1),(B−2),(B−3),(B−4)では、第1〜第4画像G1〜G4は、互いに重畳部分が生じない位置に電気部品Sが存在している。第1ミラー11の反射面111〜114の境界、第2ミラー12の反射面121〜124の境界は、プリズム1を接合によりを接合した場合には接着材の影響や、チッピング(角欠け)等の影響で、形態異常を正常に検出できない可能性がある。なお、プリズム1を一体に形成した場合にも境界に現れる線の影響で、やはり形態異常を正常に検出できない場合がある。   2 (B-1), (B-2), (B-3), and (B-4), the first to fourth images G1 to G4 have the electrical component S at a position where no overlapping portion is generated between them. Existing. The boundary between the reflecting surfaces 111 to 114 of the first mirror 11 and the boundary between the reflecting surfaces 121 to 124 of the second mirror 12 are influenced by the adhesive, chipping (corner missing), etc. when the prism 1 is joined by joining. It is possible that morphological abnormalities cannot be detected normally due to the effects of. Even when the prism 1 is integrally formed, there may be a case where the morphological abnormality cannot be normally detected due to the influence of the line appearing at the boundary.

このような場合には、図3(A)に示すように、電気部品Sをプリズム1からやや離して配置する。電気部品Sをこのような配置とすることで、図3(B−1),(B−2),(B−3),(B−4)に示すように、第1〜第4画像G1〜G4が互いに重畳部分を持つようになる。なお、図3(A)では、互いに重畳部分が生じない電気部品Sの位置を破線で示してある。図3(C)は、撮像装置により撮影される撮影画像G0を示す図である。   In such a case, as shown in FIG. 3 (A), the electrical component S is arranged slightly apart from the prism 1. By arranging the electrical component S in such a manner, as shown in FIGS. 3B-1, B-2, B-3, and B-4, the first to fourth images G1 are used. ... G4 have overlapping portions. In FIG. 3A, the positions of the electrical components S where no overlapping portions are generated are indicated by broken lines. FIG. 3C is a diagram illustrating a captured image G0 captured by the imaging device.

図4(A),(B)、図5(A),(B)は、図1に示したプリズム1の設計変更例である。
図1(A),(B)のプリズム1では、第2ミラー12の各反射面121〜124と入射面13の各透過面131〜134とは同一平面上に形成されているが、図4(A),(B)のプリズム1では、これらは異なる平面上に形成されている。すなわち、透過面131〜134を、反射面121〜124よりも外側に位置させることで、透過面領域を確保しつつ、プリズム1の全体の光軸方向のサイズを小さくすることができる。
4A, 4B, 5A, and 5B are examples of design changes of the prism 1 shown in FIG.
In the prism 1 of FIGS. 1A and 1B, the reflecting surfaces 121 to 124 of the second mirror 12 and the transmitting surfaces 131 to 134 of the incident surface 13 are formed on the same plane. In the prisms 1 (A) and (B), these are formed on different planes. That is, by positioning the transmission surfaces 131 to 134 outside the reflection surfaces 121 to 124, the size of the entire prism 1 in the optical axis direction can be reduced while securing the transmission surface region.

図5(A),(B)のプリズム1は、第1ミラー11と第2ミラー12とのミラーセットにより構成されている。図5では、第1ミラー11の反射面111〜114と、第2ミラー12(反射面121〜124)とは、空中に浮いた状態で示してあるが、実際には各ミラーは適宜の手段で固定される。第1ミラー11の反射面111〜114は透明板にアルミニウム等を蒸着することにより構成され、第2ミラー12は四角推状に組み立てた透明板にアルミニウム等を蒸着することにより構成されている。なお、図5(A),(B)では、入射面13および出射面14は存在しない。   The prism 1 in FIGS. 5A and 5B is configured by a mirror set of a first mirror 11 and a second mirror 12. In FIG. 5, the reflecting surfaces 111 to 114 of the first mirror 11 and the second mirror 12 (reflecting surfaces 121 to 124) are shown floating in the air. It is fixed with. The reflective surfaces 111 to 114 of the first mirror 11 are configured by vapor-depositing aluminum or the like on a transparent plate, and the second mirror 12 is configured by vapor-depositing aluminum or the like on a transparent plate assembled in a quadrilateral shape. 5A and 5B, the entrance surface 13 and the exit surface 14 do not exist.

なお、プリズム1として、第1ミラー11,第2ミラー12,入射面13が三角推台形状のものを使用することができる。
図6は本発明のプリズムの第2実施形態を示す説明図であり、(A)はプリズム2の平面図、(B)は(A)におけるF−F線の断面図である。
In addition, as the prism 1, the first mirror 11, the second mirror 12, and the incident surface 13 having a triangular thrust trapezoidal shape can be used.
6A and 6B are explanatory views showing a second embodiment of the prism of the present invention. FIG. 6A is a plan view of the prism 2, and FIG. 6B is a cross-sectional view taken along line FF in FIG.

図6(A),(B)においてプリズム2は、ガラスまたは合成樹脂により一体に形成されたもので、第1ミラー21と第2ミラー22と入射面23と出射面24とを有している。
第1ミラー21は、円角錐台側面形状の反射面を持ち、この反射面は外側表面からアルミニウム等の金属膜を蒸着することにより形成されている。第2ミラー22は、第1ミラー21の内側に同軸配置されるもので、円角錐台側面形状の反射面を持つ。この反射面は、全反射条件を満足するので、アルミニウム等により形成する必要はない。
6A and 6B, the prism 2 is integrally formed of glass or synthetic resin, and has a first mirror 21, a second mirror 22, an entrance surface 23, and an exit surface 24. .
The first mirror 21 has a reflecting surface in the shape of a circular truncated pyramid, and this reflecting surface is formed by evaporating a metal film such as aluminum from the outer surface. The second mirror 22 is coaxially arranged on the inner side of the first mirror 21 and has a reflecting surface having a side surface of a circular truncated pyramid. Since this reflecting surface satisfies the total reflection condition, it is not necessary to form the reflecting surface with aluminum or the like.

第1ミラー21の中心軸に対する傾斜角は、第2ミラー22の中心軸に対する傾斜角よりも小さくなるように設計されている。第1ミラー21の中心軸に対する傾斜角は22.5°であり、第2ミラー22の中心軸に対する傾斜角は45°である。   The tilt angle with respect to the central axis of the first mirror 21 is designed to be smaller than the tilt angle with respect to the central axis of the second mirror 22. The inclination angle with respect to the central axis of the first mirror 21 is 22.5 °, and the inclination angle with respect to the central axis of the second mirror 22 is 45 °.

このような構成をとることにより、第1ミラー21は下方からの測定光Lを内側に反射し、第2ミラー22は、第1ミラー21により反射された測定光Lを上方に反射することができ、接合部分の線がない画像を得ることができる。なお、プリズム2は、図7(A),(B)に示すように、第1ミラー21は四角錐台側面形状の反射面を持ち、第2ミラー22は円錐錐台側面形状の4つの反射面221〜224を持つように構成することもできる。   By adopting such a configuration, the first mirror 21 reflects the measurement light L from below inward, and the second mirror 22 reflects the measurement light L reflected by the first mirror 21 upward. It is possible to obtain an image having no joint line. In the prism 2, as shown in FIGS. 7A and 7B, the first mirror 21 has a reflecting surface having a side surface shape of a quadrangular frustum, and the second mirror 22 has four reflecting surfaces having a side shape of a truncated cone shape. It can also be configured to have surfaces 221-224.

図8により、本発明の形態異常検出装置の一実施形態を説明する。図8の形態異常検出装置3は、上述したプリズムを用いて構成されるもので、斜視観測の対象である物品(電気部品や機械部品)の形態異常を検出することができる。第1ミラーの径は、物品の平面視輪郭の最大長よりも大きいものが使用される。   With reference to FIG. 8, an embodiment of the configuration abnormality detection apparatus of the present invention will be described. The morphological abnormality detection device 3 in FIG. 8 is configured using the prism described above, and can detect a morphological abnormality of an article (electrical component or mechanical component) that is an object of perspective observation. The diameter of the first mirror is larger than the maximum length of the outline of the article in plan view.

形態異常検出装置3は、プリズム311,312と、撮像装置(本実施形態では2つの撮像装置321,322)と、プリズム311,312と撮像装置321,322との間に配置されたレンズ系331,332と、判別装置を含む画像処理装置34と、物品の形態を記憶した形態記憶装置35とを備えている。   The morphological abnormality detection device 3 includes a prism 311, 312, an imaging device (two imaging devices 321, 322 in the present embodiment), and a lens system 331 disposed between the prisms 311, 312 and the imaging devices 321, 322. 332, an image processing device 34 including a discrimination device, and a form storage device 35 that stores the form of an article.

プリズム311,312は、本実施形態では図1に示したプリズム1である。
撮像装置321,322は、プリズム311,312を介して物品を撮影することができる。図8では落下する物品(ここでは、電気部品S)の形態異常を、2つの撮像装置321,322により撮影して検出する場合を示すが、たとえば真空吸着マニピュレータにより電気部品Sを吸着して、第1の撮像装置によりある角度から撮影し、次に真空吸着マニピュレータにより吸着箇所を変えて電気部品Sを吸着して、第2の撮像装置により別の角度から撮影するようにしてもよい。
In this embodiment, the prisms 311 and 312 are the prism 1 shown in FIG.
The imaging devices 321 and 322 can photograph an article through the prisms 311 and 312. FIG. 8 shows a case where a morphological abnormality of a falling article (here, electrical component S) is detected by photographing with two imaging devices 321 and 322. For example, the electrical component S is sucked by a vacuum suction manipulator, Images may be taken from a certain angle by the first imaging device, then the suction part may be changed by a vacuum suction manipulator, and the electrical component S may be sucked and taken from another angle by the second imaging device.

なお、図8では、図示省略してあるが、電気部品Sの落下タイミングが検出されており、このタイミングに合わせて、撮像装置321,322が駆動(シャッターがオン)される。
レンズ系331,332は、図8では1つの凸レンズにより示してあるが、実際には焦点調製機能が付属した複数のレンズの組により構成することができる。
Although not shown in FIG. 8, the drop timing of the electrical component S is detected, and the imaging devices 321 and 322 are driven (the shutter is turned on) in accordance with this timing.
Although the lens systems 331 and 332 are shown as a single convex lens in FIG. 8, they can actually be configured by a plurality of lens sets with a focus adjustment function.

判別装置34は、撮像装置321,322により撮影した画像から、物品に形態異常があるか否かを判別することができる。典型的には、判別装置34は、電気部品Sの画像を、形態記憶装置35に記憶してある電気部品Sの基準形態と比較し、比較結果を出力する。
図9は判別装置34をより詳しく示した説明図である。判別装置34は、画像取得手段341と、重畳部分カット手段342と、パターン比較手段343とからなる。画像取得手段341は、撮像装置321,322から撮影画像G01,G02を取得すると、重畳部分カット手段342によりそれぞれの重畳部分をカットする。パターン比較手段343は、これらの画像と、予め形態記憶装置35から呼び出してあるパターンとを比較する。電気部品Sに欠損が生じている場合、電気部品Sにヒビが入っているような場合には、パターンマッチングの結果は「フェイル」となる。
The discrimination device 34 can discriminate whether or not the article has a morphological abnormality from the images taken by the imaging devices 321 and 322. Typically, the determination device 34 compares the image of the electrical component S with the reference configuration of the electrical component S stored in the configuration storage device 35, and outputs a comparison result.
FIG. 9 is an explanatory diagram showing the discrimination device 34 in more detail. The determination device 34 includes an image acquisition unit 341, a superimposed portion cut unit 342, and a pattern comparison unit 343. When the image acquisition unit 341 acquires the captured images G01 and G02 from the imaging devices 321 and 322, the overlapped portion cutting unit 342 cuts each overlapped portion. The pattern comparison unit 343 compares these images with a pattern that has been called from the form storage device 35 in advance. When the electrical component S is defective or the electrical component S is cracked, the pattern matching result is “fail”.

図9では、電気部品Sの表面パターンP01と、重畳部分カット済みの撮像装置321の撮影画像G01′とを比較するとともに、電気部品Sの裏面パターンP02と、重畳部分カット済みの撮像装置322の撮影画像G02′とを比較している。
本実施形態では、電気部品Sの表面パターンP01や裏面パターンP02は、それぞれ一画像として扱われるので、パターン照合を短時間で行われる。
In FIG. 9, the surface pattern P01 of the electrical component S is compared with the captured image G01 ′ of the imaging device 321 with the overlapped portion cut, and the back surface pattern P02 of the electrical component S and the imaging device 322 with the overlapped portion cut are compared. The captured image G02 ′ is compared.
In the present embodiment, the front surface pattern P01 and the back surface pattern P02 of the electrical component S are each handled as one image, so that pattern matching is performed in a short time.

本発明のプリズムの第1実施形態を示す説明図であり、(A)はプリズムの平面図、(B)は(A)におけるF−F線の断面図である。It is explanatory drawing which shows 1st Embodiment of the prism of this invention, (A) is a top view of a prism, (B) is sectional drawing of the FF line | wire in (A). (A)は斜視観測対象である電気部品の斜視図であり、(B−1),(B−2),(B−3),(B−4)は、プリズムの上方から電気部品を見たときの第1ミラーの各反射面に現れる第1〜第4画像を示す図、(C)は撮像装置により撮影される撮影画像を示す図である。(A) is a perspective view of an electrical component that is an object of perspective observation. (B-1), (B-2), (B-3), and (B-4) are electrical components viewed from above the prism. The figure which shows the 1st-4th image which appears on each reflective surface of the 1st mirror at the time, (C) is a figure which shows the picked-up image image | photographed with an imaging device. (A)は電気部品をプリズムからやや離して配置した状態を示す図、(B−1),(B−2),(B−3),(B−4)は第1〜第4画像が互いに重畳部分を持った様子を示す図、(C)は撮像装置により撮影される撮影画像を示す図である。(A) is the figure which shows the state which has arrange | positioned the electrical components a little away from the prism, (B-1), (B-2), (B-3), (B-4) are the 1st-4th images. The figure which shows a mode that it has a mutually overlapping part, (C) is a figure which shows the picked-up image image | photographed with an imaging device. 第1実施形態の設計変更例を示す図であり、(A)は異なる平面上に第1ミラーと入射面が形成されているプリズムを示す平面図、(B)は(A)におけるF−F線の断面図である。It is a figure which shows the example of a design change of 1st Embodiment, (A) is a top view which shows the prism in which the 1st mirror and the entrance plane are formed on a different plane, (B) is FF in (A). It is sectional drawing of a line. 第1実施形態の設計変更例を示す図であり、(A)は第1ミラーと第2ミラーとのミラーセットにより構成されているプリズムを示す図、(B)は(A)におけるF−F線の断面図である。It is a figure which shows the example of a design change of 1st Embodiment, (A) is a figure which shows the prism comprised by the mirror set of a 1st mirror and a 2nd mirror, (B) is FF in (A). It is sectional drawing of a line. 本発明のプリズムの第2実施形態を示す説明図であり、(A)はプリズム2の平面図、(B)は(A)におけるF−F線の断面図である。It is explanatory drawing which shows 2nd Embodiment of the prism of this invention, (A) is a top view of the prism 2, (B) is sectional drawing of the FF line | wire in (A). 第1ミラーが四角錐台側面形状の反射面を持ち、第2ミラーが円錐錐台側面形状の4つの反射面を持つプリズムの説明図であり、(A)は平面図、(B)は(A)におけるF−F線の断面図である。The first mirror has a quadrangular frustum side surface reflecting surface, and the second mirror is an explanatory diagram of a prism having a frustum frustum side shape four reflecting surface, (A) is a plan view, (B) is ( It is sectional drawing of the FF line in A). 本発明の形態異常検出装置の一実施形態を示す図である。It is a figure which shows one Embodiment of the form abnormality detection apparatus of this invention. 判別装置をより詳しく示した説明図である。It is explanatory drawing which showed the discrimination device in more detail. 従来技術の説明図であり、電気部品を検査を行う場合の撮像装置の配置を示す図である。It is explanatory drawing of a prior art and is a figure which shows arrangement | positioning of the imaging device in the case of test | inspecting an electrical component.

符号の説明Explanation of symbols

1,2,311,312 プリズム
3 形態異常検出装置
11,21 第1ミラー
12,22 第2ミラー
13,23 入射面
14,24 出射面
34 画像処理装置
35 形態記憶装置
111〜114 第1ミラーの反射面
121〜124 第2ミラーの反射面
131〜134 透過面
321,322 撮像装置
331,332 レンズ系
S 電気部品
1, 2, 311, 312 Prism 3 Morphological abnormality detection device 11, 21 First mirror 12, 22 Second mirror 13, 23 Entrance surface 14, 24 Exit surface 34 Image processing device 35 Configuration storage device 111 to 114 of the first mirror Reflective surfaces 121 to 124 Reflective surfaces of the second mirror 131 to 134 Transmitting surfaces 321 and 322 Imaging devices 331 and 332 Lens system S Electrical component

Claims (3)

斜視観測の対象である物品の形態異常を検出する形態異常検出装置であって、
四角錘台側面形状の反射面を持ち、下方からの測定光を内側に反射する第1ミラーと、前記第1ミラーの内側に同軸配置され、四角錘台側面形状または四角錘側面形状の反射面を持ち、前記第1ミラーにより反射された測定光を上方に反射する第2ミラーと、を備え、
前記物品の平面視輪郭の最大長よりも大きい径の第1ミラーをそれぞれが有する、前記物品を挟んで対向する位置に設けた2つのプリズムと、
前記2つのプリズム間を落下する前記物品を、前記2つのプリズムを介して撮影する2つの撮像装置と、
前記2つの撮像装置により撮影した画像から、前記物品に形態異常があるか否かを判別する判別装置と、
を備えたことを特徴とする形態異常検出装置。
A morphological abnormality detection device that detects morphological abnormality of an article that is an object of perspective observation,
A first mirror having a rectangular frustum side surface reflecting surface and reflecting measurement light from below to the inside, and coaxially disposed inside the first mirror, and having a quadrangular frustum side shape or a quadratic frustum side shape reflecting surface And a second mirror that reflects upward the measurement light reflected by the first mirror,
Two prisms each provided with a first mirror having a diameter larger than the maximum length of the outline of the article in plan view, provided at positions facing each other across the article;
It said article to fall between the two prisms, and two imaging devices for photographing through the two prisms,
A discriminating device for discriminating whether or not the article has a morphological abnormality from images taken by the two imaging devices;
A morphological abnormality detection device comprising:
前記判別装置は、前記物品の画像を当該物品の基準形態と比較することを特徴とする請求項に記載の形態異常検出装置。 The form abnormality detection apparatus according to claim 1 , wherein the discrimination device compares an image of the article with a reference form of the article. 前記物品が電気部品または機械部品であることを特徴とする請求項に記載の形態異常検出装置。 The form abnormality detection apparatus according to claim 2 , wherein the article is an electrical component or a mechanical component.
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