M425273 • 五、新型說明： 【新型所屬之技術領域】 本創作係關於一輪光學檢驗裝置，尤其是一種具有可切換光 學路徑之複檢機。 【先前技術】 於現今电子裝置當中，通常具有諸多電子元件組裝於印刷電 路板上。在印刷電路板（Printed Circuit Board，PCB )的組裝生產 •線上，因為印刷電路板上的電子元件已朝向微型化和密集化之趨 勢發展，故於印刷電路板上所分佈之細密電子元件，已不能再依 罪作業人㈣人工目檢去辨識缺陷。目此，印刷電路板的裝配廠 商通常會於其生產線上裝設自動光學檢測設備，藉以進行精確的 檢測。 —自動光學檢測設備（AutGmatie ，⑽丨Μ 精由電腦程式之驅動，並透過攝像鏡頭（如CCD、相機、攝影相 f其他光學感測織）對—待檢測物進行自轉聪，並收集經封 後之®像’再將圖像與資料庫中的標準參數進行比對及分和 =理’並且在圖像上找出待檢測物的缺陷。自動光學檢測可以抬 2缺陷，包含檢測電子树接腳是否漏焊、短路、確實 $不均，从電子元件是否偏移、變色變㈣絲漏等情开/。 ，再將電腦檢測出來的缺陷結果，透過自動光學 ㈤υ自身顯示器或傳送至下剩複 = i、後，.，的維修人員進行複判、整修，並且儲存、分折和 M425273 管理缺陷結果。 自動光學檢測她於傳統檢财式，具有精密度高與不受元 件微小化之關。此外，自動光學檢測的檢測速度較快，既能夠 有效即省人力成本’還具有收集缺陷類型之資料以供維修人員後 續分析管理之魏。因此，自動光學檢·備已普遍應用在各種 產業的檢辦業上，尤料應齡碰祕（Inte㈣ed arcuit， 1C)、平面顯示面板（FlatDisplayPand，FDp)、印刷電路板（池ted Qmnt Board ’ PCB)、印刷電路板組裝（prfnted㈤此B〇ard Assembly’PCBA)等相關領域中。 在-般印刷電路板的檢測流程中，通f藉由輸送帶之運轉來 傳送印刷電路板’進行―連串的加卫步驟處理 之後，再經過一 道檢測流程，將印路板制自動光學檢測設備進行缺陷檢 測，以判定焊接的電子元件有無缺陷。若檢查出來的結果是有缺 陷時，則將具有缺陷的印刷電路板送人複檢機以進行後續的複檢 流程。 於複檢流財’複檢難與自動光學制設備連線以接受光 學檢測設備下傳之魏之#訊數據，根據自動光學檢測設備之檢 測資料’複檢機可移至缺陷位[針對其缺陷部分進行各個角度 及作大倍率的觀察。藉此，㈣觀察到造成缺陷部分之真正現象。 Γί除了麵於維修人員進行正確欺及便於確^不良點進行整 彳’更能詳細且正顧計製程中造成缺陷部分的因素 八 析進而修改製程以減少缺關發生和 、刀 M425273 …請參照「第1圖」，緣示習知複檢機1之立體圖。-般而言， 複檢機1包严光學組件10、工作基台2〇及傳送機構％。複檢 利用傳运機構3G將所要檢測之印刷電路板傳送至工作基台20 上’=傳=光學組件下方，以利光學組件1Q進行感‘ ---------月—h二—第2圖」，繪示習知複檢機Ϊ之光學組件10之立體 圖。光學組件10中具有第1像鏡頭⑴、第二攝像翻112及 魂且件12〇第—光學路徑⑽沿垂直方向從印刷電路板行進至 第旦攝像鏡頭ill ’而使第—攝像鏡頭m能拍攝_電路板的正 面影像。第二光學路徑刚沿傾斜方向從印刷電路板行進至第二 A象見頭112’而使第二攝像鏡頭112能拍攝印刷電路板的斜向面 办像。傾斜方向與水平方向之爽角約為⑻度。第—攝像鏡頭HI 位才，視野較大，放大倍率較低，通常用以協助印刷電路板之定 ^第—攝像鏡頭112的放大倍率較高，拍攝視野較小，通常用 :σ取檢測印刷電路板用之影像。旋轉組件⑽能沿軸心Μ旋轉 7攝像鏡頭II2’使第二攝像鏡頭出能相對於印刷電路板水平 A轉因此能從各個角度拍攝印刷電路板的斜向面影像。 及然而，由於第-攝像鏡頭1U及第二攝像鏡頭m其電源線 產傳輪線的配置，而使旋轉崎⑽的旋轉範圍受舰制，因而 確拍攝角度之死角’進而可能造成複檢機1之檢測結果不夠準 叫參照「第3圖」，繪示另一習知之複檢機之光學組件20之 _ °光學組件20 +包含第一攝像鏡頭211、第二攝像鏡頭 M425273 212、旋轉組件220及反射鏡組250。第一攝像鏡頭211設置成偏 離於旋轉組件220之軸心A2。第二攝像鏡頭212設置於旋轉組件 220之軸心A2上。第一及第二攝像鏡頭211、212皆朝下拍攝。 反射鏡組250包含第一反射鏡25卜第二反射鏡252、第三反射鏡 253、第四反射鏡254及連接件255。第一反射鏡251位於第一攝 像鏡頭211下方，第二反射鏡252位於第一反射鏡251之水平側， 大約於第二攝像鏡頭212下方。連接件255連接第一反射鏡251 及第二反射鏡252’第三反射鏡253及第四反射鏡254則安裝於旋 轉組件220之内部。第一光學路徑230沿垂直方向從印刷電路板 行進至第二反射鏡252，再經由第一反射鏡251 ,反射至第一攝像 鏡頭211，而使第一攝像鏡頭211能拍攝印刷電路板的正面影像。 第二反射鏡253位於第二攝像鏡頭212下方，第四反射鏡254則 偏離第一攝像鏡頭212之拍攝方向。第二光學路徑240沿傾斜方 向從印刷電路板行進至第四反射鏡254，再經由第三反射鏡253， 反射至第二攝像鏡頭212’而使第二攝像鏡頭212能抬攝印刷電路 板的斜向面影像。傾斜方向與水平方向之夫角約為62度。第一攝 像鏡頭211 _攝視野妓，放大倍報低，通㈣以協助印刷 電路板之定位。第.二__ 212的放大倍率較高，拍攝視野較 小’通常⑽擷取制_電路_之影像。旋轉組件22〇能旋 轉第三反射鏡253及第四反射鏡2M ’使第三反射鏡253及第四反 射鏡254能沿軸心A2彳目對於印路板水平旋轉，因此能從各個 角度拍攝印刷電路板的斜向面影像。 M425273 如此一來，.由於僅須旋轉第三反射鏡Μ3及第四反射鏡254， 便能從各個角度__轉板的斜向面影像，而能增加拍攝角 度的範圍至約0〜330度。然而，由於連接件255的遮擔，造成拍 攝角度330〜·度之蘭，因而還是有可能造成複檢機之檢測結 果不夠準確。 【新型内容】 < 於上述問題’本創作提供_種視覺檢查複檢機，藉由反 鬌射鏡組的配置提供光學路徑之切換，使單一光學感測裝置能拍攝 正面與斜向面之影像，解決拍攝死角的問題。 本創作提供-種視覺檢查複檢機，用以再次確認經自動光學 檢測設備檢曝之受檢工件。視覺檢查複檢機包含用財載受檢 工件之工作基台、光學感測裝置及切換鏡組。設置於工作基台上 方之光學感測裝置朝向工作基台感測。切換鏡組設置於工作基台 及光學感測裝置之間。切換鏡組提供第一光學路徑及第二光學路 .φ徑。第一光學路徑提供光學感測裝置感測垂直於受檢工件的正面 視角影像。第二光學路徑提供光學感測裝置感測傾斜於受檢工件 - 之斜向面視角影像。正面視角影像及斜向面視角影像能提供為再 次確認之用。 根據本創作之視覺檢查複檢機，藉由切換鏡組提供垂直於與 傾斜於受檢工件之光學路徑，使單一光學感測裝置得以感測正面 視角影像及斜向面視角影像’而能降低製造視覺檢查複檢機之造 價成本。本創作之視覺檢查複檢機還能藉由旋轉元件旋轉切換鏡 7 而此在無死角的情況下，檢測受檢工件於各個方向上之斜向 視角’y像達到提升檢測受檢工件缺陷狀態之準確度。 -=上之關於本新型内容之說明及以下之實施方式之說明係用 =不祀與轉摘作之精神絲理，並且频本創作之專利申請 範圍更進一步之解釋。 【實施方式】 乂下在貫轭方式中詳細敘述本創作之詳細特徵以及優點，其 内备足以使任何熟習相關技藝者了解本·之技術内容並據以實 二' 且根據本5棚書所揭露之内容'申請專利範圍及圖式，任何 二白相關技时可㈣地卿本創作相關之目的及優點。以下之 貫係it步詳細說明本創作之觀點，但非以任何觀點限制本 創作之範疇。 月多…、第4圖」’繪示依照本創作之實施例之視覺檢查複檢 機3之立麵。於工件檢查流程巾，受檢工件經自動光學檢測設 ，檢查過後’會將有雜之受檢讀送人視覺檢查複檢機3，以再 人確〜、經自動光學檢測判定為不合格之受檢工件。受檢工件例如 為積體電路、平面顯示面板及印刷電路憾經組裝之電子元件。 視見仏查;^機3包含工作基台3lG、光學感測錢挪及光學系 統工作基台用以承載受檢工件。光學感測裝置320設置 於工作基台310上方。光學感測錢32()具有朝向工作基台31〇 之感測方向A3朝向工作基台，感測方向A3垂直於工作基台 310之表面。 M425273 向第二反射面331b及第二光程反射面333b之間。第二光程反射 面333b之法線方向N32朝向第一光程反射面333a及第三反射面 331c之間。 其中，第二反射面331b及第一光程反射面333a彼此實質上 平行，第三反射面331c及第二光程反射面333b彼此實質上平行。 第二反射面331b及第一光程反射面333a與感測方向A3之夾角實 質上為45度。第三反射面331c及第二光程反射面幻北與感測方 向A3之夾角實質上為45度。 菖切換菱鏡331位於「第6圖」所示之第一位置時，切換鏡 組330所提供之第一光學路徑pi，是從工作基台31〇所承載之受 檢工件40沿感測方向Α3，行經第三反射面331c、第二光程反射 面333b、第一光程反射面333a及第二反射面331b，再反射至光 學感測裝置320。從工作基台310中央至第三反射面331(：之距離， 加上第二反射面331c至第二光程反射面333b之距離，加上第二 φ光程反射面333b至第一光程反射面333a之距離，加上第一光程 反射面333a至第二反射面331b之距離，再加上第二反射面33比 至光學感測裝置320之距離，總共為第一光學路徑p丨之第—光程 距離。由於從受檢工件40所發出之光線是沿著垂直於工作基台 310之感測方向A3發出，而由光學感測裝置32〇所感測，因此光 學感測裝置320能於此時拍攝到受檢工件之正面視角影像。如 此之正面視角影像能協助檢查系統進行受檢工件4〇之定位，亦能 供檢查系統進行受檢工件40檢測。 M425273 請參照第「第7圖」，缚示依照本創作之實施例中，視覺檢查 複檢機3之切換鏡組330提供第二光學路徑p2之示意立體圖。於 「第7圖」_，切換菱鏡33 ^沿χ方向切換至第二位置。於此時， 切換菱鏡331位於感測方向Α3上。詳言之，當切換菱鏡331切換 於第二位置時，切換菱鏡331之第一反射面331a位於感測方向 A3上，以將來自斜向反射鏡332之光線反射至光學感測裝置伽。 斜向反射鏡332之鏡面法線方向犯朝向切換菱鏡331及工作基台 310之間’藉此能將承載於工作基纟31〇之受檢工件之光線反 射至切換菱鏡331之第-反射面331a。第一反射面3犯之法線方 向>m朝向斜向反職332及光學感測裝置32〇之間，藉此能將 斜向反射鏡332之光線反射至光學感測裝置32〇。 因此，當切換菱鏡331位於「第7圖」所示之第二位置時， 切換鏡組330所提供之第二光學路徑p2，是從工作基台训所承 載之受檢工件4〇傾斜於感測方向A3，行經斜向反射鏡332反射 至切換菱鏡33i之第-反射面331a，再反射至光學感職置创。 從工作基台310中央至斜向反射鏡332之距離，加上斜向反射鏡 332至第-反射面331a之距離，再加上第一反射面现至光學感 測裝置320之雜，總共為第二光學路徑p2之第二光程距離。其 中，第-光程麟與第二光程距離相等。由於從受檢I件所發 出之光線是沿著傾斜於感測方向A3發出，而由光學感測裝置挪 所感測’因此光學感崎置32〇能於此時拍攝到受檢工件奶之斜 向面視角影像。如此之斜向面視角影像能供檢查系統進行受檢工 12 M425273 件40之檢測。此外，由於不論如何旋轉切換鏡組33〇所包含的切 .換菱鏡33卜斜向反射鏡332及正面反射鏡333,皆不會有元件遮 蔽第-光學路徑P1及第二光學路徑P2，因此能在不具死角之情 況下，使光學感測裝置320從各個角度拍攝受檢工件4〇的正面及 斜向面視角影像。 射’祕第—光學路徑ρι之第—光程轉及第二光學路徑 P2之第二絲轉綱，而在切鮮—光學路徑Μ及第二光學 ♦路徑1>2時，能不改變光學感測裝置32〇之焦距。此外，沿 學路徑P2之中線’從受檢工件40發出至斜向反射鏡222之方向 相對於水平方向之偏斜角度θ約為6〇度至7〇度。於本實施例中， 偏斜角度Θ設定為62度。 綜上所述’本創作之視覺檢查複 ^ 1田於镨由切換鏡組切換 弟一光學路徑及第二光學路徑，即使 、 , . d 使用早一光學感測裝置， 影像， 查複檢機之 ，、月匕感測文檢工件各個角度之正面視角影像及斜向面視角 :而能提升檢測受檢工件之準確度，還能節省視覺檢 製作成本。 雖然本創作以前述之實施例揭露如 創作。然其並非用以限定本 •1作在不脫縣創作之精神和範圍内 屬本創作之直剎徂今T為之更動與潤倚，均 蜀不幻作之專聰_圍。關於本創作A ‘ 所附之中請專職圍。 <之保護範圍請參考 【圖式簡單說明】 「第1圖」繪示習知複檢機之立體圖。 ^/^273 「第2圖」繪示習知複檢機之光學組件之立體圖。 第3圖」繪示另一習知之複檢機之光學組件之立體圖。 「第4圖」繪示依照本創作之實施例之視覺檢查複檢機之立 體圖。 「第5圖」繪示依照本創作之實施例之視覺檢查複檢機之切 換鏡組之立體圖。 第6圖」繪示依照本創作之實施例中，視覺檢查複檢機之 切換鏡組提供第—光學路徑之示意立體圖。 「第7圖」繪示依照本創作之實施例中’視覺檢查複檢機之 切換鏡組提供第二光學路徑之示意立體圖。 【主要元件符號說明】 1 複檢機 10'20 光學組件 111 '211第一攝像鏡頭 112'212弟二攝像鏡頭 120、220 旋轉組件 130、230 第一光學路徑 140、240 第二光學路經 250 反射鏡組 251 第一反射鏡 252 第二反射鏡 第三反射鏡 253 M425273M425273 • V. New description: [New technical field] This creation is about a round of optical inspection equipment, especially a rechecking machine with a switchable optical path. [Prior Art] In today's electronic devices, there are usually many electronic components assembled on a printed circuit board. On the assembly and production line of Printed Circuit Board (PCB), because the electronic components on the printed circuit board have been trending toward miniaturization and densification, the fine electronic components distributed on the printed circuit board have been It is no longer possible to identify the defect by manual visual inspection by the operator (4). As a result, assembly manufacturers of printed circuit boards typically install automated optical inspection equipment on their production lines for accurate inspection. - Automatic optical inspection equipment (AutGmatie, (10) is driven by a computer program, and through the camera lens (such as CCD, camera, photography, other optical sensing weaving) - the object to be tested is self-rotating, and collected The posterior® image will then compare and standardize the image with the standard parameters in the database and find the defects of the object to be detected on the image. Automated optical detection can raise 2 defects, including the detection electron tree. Whether the pin is leak-welded, short-circuited, or not, whether it is offset from the electronic component, discoloration (4) wire leakage, etc., and then the defect result detected by the computer is transmitted through the automatic optical (5) υ self-display or to the next Remaining = i, after, ., maintenance personnel to re-judgment, refurbishment, and storage, distribution and M425273 management defect results. Automatic optical detection of her traditional detection type, with high precision and no component miniaturization In addition, the automatic optical inspection has a faster detection speed, which can effectively save labor costs. It also has the information of collecting defect types for maintenance personnel to analyze and manage the management. Automatic optical inspection and preparation has been widely used in the inspection industry of various industries, especially in the age of the secret (Inte (four) ed arcuit, 1C), flat display panel (FlatDisplayPand, FDp), printed circuit board (pool ted Qmnt Board 'PCB) , printed circuit board assembly (prfnted (5) this B〇ard Assembly 'PCBA) and other related fields. In the inspection process of the general printed circuit board, through the operation of the conveyor belt to transport the printed circuit board 'to carry out a series of After the processing step is processed, the automatic optical detecting device of the printed circuit board is subjected to defect detection through a detection process to determine whether the soldered electronic component has defects. If the result of the inspection is defective, the printing will be defective. The circuit board is sent to the re-examination machine for the subsequent re-inspection process. In the re-examination of the re-examination, it is difficult to connect with the automatic optical equipment to receive the optical data from the optical inspection equipment. According to the automatic optical inspection equipment. The inspection data 're-inspection machine can be moved to the defect position [for all the angles of the defect part and the observation of large magnification. By this, (4) observing the defect part The real phenomenon. Γί In addition to the maintenance personnel to carry out the correct bullying and easy to make sure that the bad points to carry out the whole process, the details of the defects caused by the process are further detailed and the process is modified to reduce the occurrence of defects and the knife. M425273 ... Please refer to "1st picture", which shows a perspective view of the conventional reexamination machine 1. In general, the inspection machine 1 packs the optical component 10, the working base 2, and the transmission mechanism %. The transport mechanism 3G transmits the printed circuit board to be tested to the working base 20 on the underside of the optical component, so as to facilitate the optical component 1Q to sense ' --------- month - h 2 - 2 A perspective view of the optical component 10 of the conventional rechecking machine is shown. The optical module 10 has a first image lens (1), a second image pickup 112, and a soul member 12, wherein the optical path (10) travels from the printed circuit board to the first image pickup lens ill' in the vertical direction, so that the first image pickup lens m can Shooting_front image of the board. The second optical path has just traveled from the printed circuit board to the second A-like head 112' in the oblique direction to enable the second imaging lens 112 to capture the oblique surface of the printed circuit board. The angle of the tilt and the horizontal direction are about (8) degrees. The first camera lens has a large field of view and a low magnification. It is usually used to assist the fixed circuit board of the printed circuit board. The magnification of the camera lens 112 is relatively high, and the field of view is small. Image for the board. The rotating assembly (10) can be rotated along the axis. The imaging lens II2' enables the second imaging lens to be rotated relative to the horizontal A of the printed circuit board so that the oblique image of the printed circuit board can be taken from various angles. And, however, since the first camera lens 1U and the second camera lens m have their power line transmission transmission line arrangement, the rotation range of the rotation (10) is controlled by the ship, and thus the angle of the shooting angle is determined, which may cause the inspection machine. The detection result of 1 is not enough. Referring to "3rd figure", the optical component 20 of another conventional rechecking machine is shown as having a first imaging lens 211, a second imaging lens M425273 212, and a rotating component. 220 and mirror set 250. The first imaging lens 211 is disposed to be offset from the axis A2 of the rotating assembly 220. The second imaging lens 212 is disposed on the axis A2 of the rotating assembly 220. The first and second imaging lenses 211, 212 are all photographed downward. The mirror group 250 includes a first mirror 25, a second mirror 252, a third mirror 253, a fourth mirror 254, and a connector 255. The first mirror 251 is located below the first camera lens 211, and the second mirror 252 is located on the horizontal side of the first mirror 251, approximately below the second camera lens 212. The connecting member 255 is connected to the first reflecting mirror 251 and the second reflecting mirror 252'. The third reflecting mirror 253 and the fourth reflecting mirror 254 are mounted inside the rotating assembly 220. The first optical path 230 travels from the printed circuit board to the second mirror 252 in the vertical direction, and then is reflected to the first imaging lens 211 via the first mirror 251, so that the first imaging lens 211 can capture the front side of the printed circuit board. image. The second mirror 253 is located below the second imaging lens 212, and the fourth mirror 254 is offset from the imaging direction of the first imaging lens 212. The second optical path 240 travels from the printed circuit board to the fourth mirror 254 in the oblique direction, and then to the second imaging lens 212 ′ via the third mirror 253 to enable the second imaging lens 212 to lift the printed circuit board. Oblique image. The angle between the tilt direction and the horizontal direction is about 62 degrees. The first camera lens 211 _ camera field 妓, the magnification is low, and (4) to assist in the positioning of the printed circuit board. The second __212 has a higher magnification and a smaller field of view. 'Normally (10) captures the image of the circuit_. The rotating component 22 can rotate the third mirror 253 and the fourth mirror 2M′ so that the third mirror 253 and the fourth mirror 254 can be horizontally rotated along the axis A2 for the printing board, so that the angle can be photographed from various angles. An oblique image of a printed circuit board. M425273 In this way, since only the third mirror Μ3 and the fourth mirror 254 have to be rotated, the oblique surface image of the __ turntable can be increased from various angles, and the range of the shooting angle can be increased to about 0 to 330 degrees. . However, due to the covering of the connecting member 255, the shooting angle is 330 to δ, which may cause the detection result of the rechecking machine to be inaccurate. [New content] < In the above question, 'this creation provides a kind of visual inspection and rechecking machine, which provides the optical path switching by the configuration of the anti-mirror group, so that the single optical sensing device can shoot the front and the oblique surface. Image, solve the problem of shooting dead ends. This creation provides a visual inspection re-inspector to reconfirm the workpiece being inspected by the automated optical inspection equipment. The visual inspection rechecking machine includes a working base, an optical sensing device, and a switching mirror set for the workpiece to be inspected for the load. The optical sensing device disposed above the working base is sensed toward the working base. The switching mirror set is disposed between the working base and the optical sensing device. The switching mirror group provides a first optical path and a second optical path. The first optical path provides an optical sensing device to sense a front view image that is perpendicular to the workpiece being inspected. The second optical path provides an optical sensing device that senses an oblique view image that is oblique to the workpiece being inspected. The front view image and the oblique view image can be provided for reconfirmation. According to the visual inspection and rechecking machine of the present invention, by switching the mirror group to provide an optical path perpendicular to and oblique to the workpiece to be inspected, the single optical sensing device can sense the front view image and the oblique view image. The cost of manufacturing a visual inspection reexamination machine. The visual inspection and rechecking machine of the present invention can also rotate the switching mirror 7 by the rotating element, thereby detecting the oblique viewing angle of the inspected workpiece in various directions without the dead angle. The accuracy. The description of this new content and the description of the following embodiments are used in the spirit of the singularity and the scope of the patent application. [Embodiment] The detailed features and advantages of the present invention are described in detail in the yoke mode, which is sufficient for any familiar artisan to understand the technical content of the present and according to the facts. The content of the disclosure 'application patent scope and schema, any two white related skills can (4) the purpose and advantages associated with the creation of this. The following steps are detailed to illustrate the idea of this creation, but do not limit the scope of this creation by any point of view. More than a month, the fourth figure "" shows the façade of the visual inspection rechecking machine 3 according to the embodiment of the present invention. In the workpiece inspection process towel, the workpiece to be inspected is automatically optically detected. After the inspection, the inspection will be performed by the visual inspection re-examination machine 3, which will be judged as unqualified by automatic optical inspection. The workpiece being inspected. The workpiece to be inspected is, for example, an integrated circuit of an integrated circuit, a flat display panel, and a printed circuit. The machine 3 includes a working base 3lG, an optical sensing money and an optical system working base for carrying the workpiece to be inspected. Optical sensing device 320 is disposed above working base 310. The optical sensing money 32() has a sensing direction A3 toward the working base 31A toward the working base, and the sensing direction A3 is perpendicular to the surface of the working base 310. M425273 is between the second reflecting surface 331b and the second optical path reflecting surface 333b. The normal direction N32 of the second optical path reflecting surface 333b faces between the first optical path reflecting surface 333a and the third reflecting surface 331c. The second reflecting surface 331b and the first optical path reflecting surface 333a are substantially parallel to each other, and the third reflecting surface 331c and the second optical path reflecting surface 333b are substantially parallel to each other. The angle between the second reflecting surface 331b and the first optical path reflecting surface 333a and the sensing direction A3 is substantially 45 degrees. The angle between the third reflecting surface 331c and the second optical path reflecting surface and the sensing direction A3 is substantially 45 degrees. When the switching mirror 331 is located at the first position shown in FIG. 6, the first optical path pi provided by the switching mirror group 330 is in the sensing direction from the workpiece 40 carried by the working substrate 31A. Then, the third reflecting surface 331c, the second optical path reflecting surface 333b, the first optical path reflecting surface 333a, and the second reflecting surface 331b are reflected and reflected to the optical sensing device 320. From the center of the working base 310 to the third reflecting surface 331 (the distance from the second reflecting surface 331c to the second optical path reflecting surface 333b, plus the second φ optical path reflecting surface 333b to the first optical path) The distance between the reflective surface 333a, the distance from the first optical path reflecting surface 333a to the second reflecting surface 331b, and the distance from the second reflecting surface 33 to the optical sensing device 320 are the first optical path p丨. The optical path distance is determined by the optical sensing device 32A, since the light emitted from the workpiece 40 is emitted along the sensing direction A3 perpendicular to the working base 310, and thus the optical sensing device 320 At this time, the front view image of the workpiece to be inspected can be photographed. Such a front view image can assist the inspection system in positioning the workpiece to be inspected, and can also be used by the inspection system to detect the workpiece 40 to be inspected. M425273 Please refer to the In the embodiment of the present invention, the switching mirror group 330 of the visual inspection rechecking machine 3 provides a schematic perspective view of the second optical path p2. In "Fig. 7", the switching mirror 33 The direction is switched to the second position. At this time, The change mirror 331 is located in the sensing direction Α 3. In detail, when the switching mirror 331 is switched to the second position, the first reflecting surface 331a of the switching mirror 331 is located in the sensing direction A3 to be obliquely reflected. The light of the mirror 332 is reflected to the optical sensing device gamma. The mirror normal direction of the oblique mirror 332 is directed toward the switching mirror 331 and the working base 310 'by being able to be carried on the working substrate 31〇 The light of the workpiece is reflected to the first-reflecting surface 331a of the switching mirror 331. The normal direction of the first reflecting surface 3 is between the oblique anti-position 332 and the optical sensing device 32, thereby enabling the tilt The light from the mirror 332 is reflected to the optical sensing device 32. Therefore, when the switching mirror 331 is in the second position shown in FIG. 7, the second optical path p2 provided by the switching mirror group 330 is The inspected workpiece 4 carried from the working platform training is inclined to the sensing direction A3, and is reflected by the oblique reflecting mirror 332 to the first reflecting surface 331a of the switching mirror 33i, and then reflected to the optical sensory creation. The distance from the center of the base 310 to the oblique mirror 332, plus the diagonal mirror 332 to The distance from the first reflecting surface 331a, together with the first reflecting surface to the optical sensing device 320, is the second optical path distance of the second optical path p2. The first optical path and the second light The path distance is equal. Since the light emitted from the inspected I piece is emitted along the oblique direction in the sensing direction A3, and is sensed by the optical sensing device, the optical sensing is 32. An oblique view image of the workpiece milk. Such an oblique view image can be used by the inspection system to inspect the 12 M425273 piece 40. In addition, since the rotation of the mirror set 33〇 is included, the cut mirror is included. The 33 oblique mirror 332 and the front mirror 333 do not have the components to shield the first optical path P1 and the second optical path P2, so that the optical sensing device 320 can be photographed from various angles without a dead angle. Front and oblique viewing angle images of the workpiece 4〇. Shooting 'secret - optical path ρι - the second path of the optical path and the second optical path P2, while in the cutting-optical path Μ and the second optical ♦ path 1 > 2, can not change the optical The focal length of the sensing device 32〇. Further, the skew angle θ of the line ' from the inspection workpiece 40 to the oblique mirror 222 in the direction along the horizontal path P2 is about 6 至 to 7 。 degrees with respect to the horizontal direction. In the present embodiment, the skew angle Θ is set to 62 degrees. In summary, the visual inspection of the creation is performed by the switching mirror group to switch the optical path and the second optical path, even if , . . d uses the early optical sensing device, the image, and the inspection machine. The front view image and the oblique view angle of each angle of the workpiece are detected: the accuracy of detecting the detected workpiece can be improved, and the visual inspection production cost can be saved. Although the present invention is disclosed as a creation in the foregoing embodiments. However, it is not intended to limit the scope of this creation in the spirit and scope of the creation of the county. It is the direct brake of this creation. Now T is the more dynamic and reliant, and it is not the illusion of the genius. About this creation A ‘attachment please full-time. <The scope of protection please refer to [Simplified illustration of the drawing] "1st picture" shows the perspective view of the conventional rechecking machine. ^/^273 "Fig. 2" shows a perspective view of the optical components of the conventional rechecking machine. Figure 3 is a perspective view showing another optical component of a conventional inspection machine. Fig. 4 is a perspective view showing a visual inspection and rechecking machine in accordance with an embodiment of the present invention. Fig. 5 is a perspective view showing a cutting mirror group of a visual inspection rechecking machine according to an embodiment of the present invention. Fig. 6 is a schematic perspective view showing the first optical path of the switching mirror set of the visual inspection rechecking machine in accordance with an embodiment of the present invention. Fig. 7 is a schematic perspective view showing the second optical path provided by the switching mirror group of the visual inspection rechecking machine in the embodiment of the present invention. [Description of main component symbols] 1 Rechecking machine 10'20 Optical component 111 '211 First imaging lens 112'212 Second camera lens 120, 220 Rotating component 130, 230 First optical path 140, 240 Second optical path 250 Mirror group 251 First mirror 252 Second mirror Third mirror 253 M425273
254 第四反射鏡 255 連接件 20 工作基台 30 傳送機構 A1 > A2 轴心 3 視覺檢查複檢機 310 工作基台 320 光學感測裝置 33 光學系統 330 切換鏡組 331 切換菱鏡 331a 第一反射面 331b 第二反射面 331c 第三反射面 332 斜向反射鏡 333 正面反射鏡 333a 第一光程反射面 333b 第二光程反射面 340 旋轉元件 350 拼圖相機 360 滑塊 370 光盤 15 380M425273 40 A3 PI P2 Nil X Θ 光源 受檢工件 感測方向 第一光學路徑 第二光學路徑 N12、N13、N2、N31、N32 法線方向 方向 偏斜角度 16254 Fourth mirror 255 Connector 20 Working base 30 Transfer mechanism A1 > A2 Axis 3 Visual inspection rechecking machine 310 Working base 320 Optical sensing device 33 Optical system 330 Switching mirror group 331 Switching mirror 331a First Reflecting surface 331b Second reflecting surface 331c Third reflecting surface 332 Diagonal mirror 333 Front mirror 333a First path reflecting surface 333b Second path reflecting surface 340 Rotating element 350 Jigsaw camera 360 Slider 370 Disc 15 380M425273 40 A3 PI P2 Nil X Θ Light source subject to be inspected direction of the first optical path Second optical path N12, N13, N2, N31, N32 Normal direction direction skew angle 16