JP2001308678A5 - - Google Patents

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Publication number
JP2001308678A5
JP2001308678A5 JP2001047398A JP2001047398A JP2001308678A5 JP 2001308678 A5 JP2001308678 A5 JP 2001308678A5 JP 2001047398 A JP2001047398 A JP 2001047398A JP 2001047398 A JP2001047398 A JP 2001047398A JP 2001308678 A5 JP2001308678 A5 JP 2001308678A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001047398A
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JP2001308678A (ja
Filing date
Publication date
Priority claimed from US09/484,803 external-priority patent/US6441703B1/en
Application filed filed Critical
Publication of JP2001308678A publication Critical patent/JP2001308678A/ja
Publication of JP2001308678A5 publication Critical patent/JP2001308678A5/ja
Abandoned legal-status Critical Current

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JP2001047398A 2000-01-18 2001-01-18 共振器用の多重周波数音響反射器アレイ及びモノリシック・カバー、及び方法 Abandoned JP2001308678A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US484803 2000-01-18
US09/484,803 US6441703B1 (en) 2000-01-18 2000-01-18 Multiple frequency acoustic reflector array and monolithic cover for resonators and method

Publications (2)

Publication Number Publication Date
JP2001308678A JP2001308678A (ja) 2001-11-02
JP2001308678A5 true JP2001308678A5 (ja) 2008-03-06

Family

ID=23925666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001047398A Abandoned JP2001308678A (ja) 2000-01-18 2001-01-18 共振器用の多重周波数音響反射器アレイ及びモノリシック・カバー、及び方法

Country Status (4)

Country Link
US (1) US6441703B1 (ja)
EP (1) EP1120910B1 (ja)
JP (1) JP2001308678A (ja)
DE (1) DE60137985D1 (ja)

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DE10163462A1 (de) * 2001-12-21 2003-07-03 Epcos Ag Symmetrisch arbeitendes Reaktanzfilter
DE10239317A1 (de) * 2002-08-27 2004-03-11 Epcos Ag Resonator und Bauelement mit hermetischer Verkapselung
DE10258422A1 (de) * 2002-12-13 2004-06-24 Epcos Ag Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
DE10301261B4 (de) * 2003-01-15 2018-03-22 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement und Verfahren zur Herstellung
JP4937495B2 (ja) * 2003-12-25 2012-05-23 新光電気工業株式会社 キャパシタ装置、電子部品実装構造及びキャパシタ装置の製造方法
US6995622B2 (en) 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
DE602004013534D1 (de) * 2004-03-09 2008-06-19 Infineon Technologies Ag Akustischer Volumenwellen - Filter und Verfahren zur Vermeidung unerwünschter Seitendurchgänge
FR2889374A1 (fr) * 2005-07-29 2007-02-02 Michelin Soc Tech Structure resonnante hybride pour verifier des parametres d'un pneumatique
DE102005061344A1 (de) * 2005-12-21 2007-06-28 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
JP2008085562A (ja) * 2006-09-27 2008-04-10 Renesas Technology Corp 弾性波フィルタおよびその製造方法
US7684109B2 (en) * 2007-02-28 2010-03-23 Maxim Integrated Products, Inc. Bragg mirror optimized for shear waves
JP5136134B2 (ja) * 2008-03-18 2013-02-06 ソニー株式会社 バンドパスフィルタ装置、その製造方法、テレビジョンチューナおよびテレビジョン受信機
WO2010004534A1 (en) * 2008-07-11 2010-01-14 Nxp B.V. Bulk acoustic wave resonator using acoustic reflector layers as inductive or capacitive circuit element
FR2947398B1 (fr) * 2009-06-30 2013-07-05 Commissariat Energie Atomique Dispositif resonant a ondes acoustiques guidees et procede de realisation du dispositif
US8830012B2 (en) * 2010-09-07 2014-09-09 Wei Pang Composite bulk acoustic wave resonator
US8409875B2 (en) 2010-10-20 2013-04-02 Rapid Diagnostek, Inc. Measurement of binding kinetics with a resonating sensor
DE112012007237T5 (de) * 2012-12-21 2015-10-15 Epcos Ag BAW-Bauelement, Schichtsystem für ein BAW-Bauelement und Verfahren zur Herstellung eines BAW-Bauelements
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
CN110694700A (zh) 2013-05-23 2020-01-17 Qorvo美国公司 两部分总成
ES2864666T3 (es) 2013-05-23 2021-10-14 Qorvo Us Inc Sensor piezoeléctrico
KR102029503B1 (ko) * 2014-12-08 2019-11-08 삼성전기주식회사 체적 음향 공진기 및 필터
KR102588800B1 (ko) * 2016-02-22 2023-10-13 삼성전기주식회사 음향파 필터 장치 및 이의 제조방법
US10038422B2 (en) * 2016-08-25 2018-07-31 Qualcomm Incorporated Single-chip multi-frequency film bulk acoustic-wave resonators
US10601398B2 (en) * 2018-04-13 2020-03-24 Qorvo Us, Inc. BAW structure having multiple BAW transducers over a common reflector, which has reflector layers of varying thicknesses
US10727811B2 (en) * 2018-06-01 2020-07-28 Akoustis, Inc. Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
US11211918B2 (en) * 2018-06-01 2021-12-28 Akoustis, Inc. Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
CN112384797A (zh) 2018-07-06 2021-02-19 Qorvo美国公司 动态范围增加的体声波谐振器
DE102018132890B4 (de) * 2018-12-19 2020-08-06 RF360 Europe GmbH Mikroakustische Vorrichtung und Herstellungsverfahren
WO2021003699A1 (zh) * 2019-07-10 2021-01-14 开元通信技术（厦门）有限公司 体声波滤波器及其制作方法
CN116671013A (zh) * 2020-12-31 2023-08-29 华为技术有限公司 滤波器以及滤波器的制备方法
IT202100013004A1 (it) * 2021-05-19 2022-11-19 Spectron Microsystems S R L Dispositivo risonatore

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