JP2001308372A - Reflection optical sensor - Google Patents

Reflection optical sensor

Info

Publication number
JP2001308372A
JP2001308372A JP2000117114A JP2000117114A JP2001308372A JP 2001308372 A JP2001308372 A JP 2001308372A JP 2000117114 A JP2000117114 A JP 2000117114A JP 2000117114 A JP2000117114 A JP 2000117114A JP 2001308372 A JP2001308372 A JP 2001308372A
Authority
JP
Japan
Prior art keywords
light
substrate
light emitting
receiving element
optical sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000117114A
Other languages
Japanese (ja)
Inventor
Megumi Horiuchi
恵 堀内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Electronics Co Ltd
Original Assignee
Citizen Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Electronics Co Ltd filed Critical Citizen Electronics Co Ltd
Priority to JP2000117114A priority Critical patent/JP2001308372A/en
Publication of JP2001308372A publication Critical patent/JP2001308372A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To solve the problems that an optical path length is extended for a wire-bonding loop and the efficiency of light is reduced in a reflection optical sensor and, if the sensor is miniaturized by reverse bonding, diffuiculty is increased in mounting of the sensor, and moreover, a light shading member is required between a light emitting element and a light-receiving element and the number of components is increased. SOLUTION: A light emitting element 32 and a light receiving element 33 are respectively mounted on both surfaces of a substrate 31 close to the ends of the substrate 31. Hereby, both elements 32 and 33 are separated from each other via the substrate and a special light shading member for the elements 32 and 33 is unnecessary. The element 32 is laid sideways so that a light emitting layer 32a is formed vertically to the substrate without wire-bonding to mount the element 32 on the substrate by soldering or with a conductive bonding agent 36, and bumps 35 are formed on the element 33 to mount the element 33 on the substrate. The element 33 is formed one side of its sides into a mesa structure and contrives to receive light on slanted surfaces 33b to enhance its sensitivity.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は被検出物の表面から
の反射光を検出する反射型光センサに関する。
[0001] 1. Field of the Invention [0002] The present invention relates to a reflection type optical sensor for detecting light reflected from the surface of an object to be detected.

【0002】[0002]

【従来の技術】反射型光センサは非接触で物体の有無を
検出するセンサであり、モータ等の回転体の制御や、
紙、フィルム等の位置、端部の検出などに使用される。
図4は反射型光センサの原理的な構成を示すもので、パ
ッケージ1に、発光素子2(例えば赤外LED)と受光
素子3(例えばフォト・トランジスタ)を収容してあ
り、発光素子2から光が矢印のように出て検出対象の物
体4で反射するのを、受光素子3で検知する。これによ
って、反射型光センサの近傍における物体4の有無や位
置に応じて受光素子3からの出力が変化し、これを検出
信号として用いる。
2. Description of the Related Art A reflection type optical sensor is a sensor for detecting the presence or absence of an object in a non-contact manner.
It is used to detect the position of paper, film, etc., and the edge.
FIG. 4 shows a principle configuration of a reflection type optical sensor. A package 1 contains a light emitting element 2 (for example, an infrared LED) and a light receiving element 3 (for example, a phototransistor). The light receiving element 3 detects that the light emerges as shown by the arrow and is reflected by the object 4 to be detected. As a result, the output from the light receiving element 3 changes according to the presence or absence and the position of the object 4 in the vicinity of the reflection type optical sensor, and this is used as a detection signal.

【0003】図5と図6に、発明者らがこれまでに提案
した反射型光センサの例を示す。図5のものは(A)が
斜視図、(B)が(A)のB−B断面図で、ガラス繊維
入りエポキシ樹脂等で作った基板9上の導電パターンに
発光素子2と受光素子3をダイボンドし、金属線13で
ワイヤボンドして、これを透光性の封止樹脂11で封止
してある。封止樹脂11は台形で、側面に金属のメッキ
層などの遮光膜14を被覆してある。封止樹脂11の上
面は遮光膜がなく、光が出入りする窓であり、この窓の
面積を小さくすることにより検出精度を上げることがで
きる。基板9の側面の導電部12はスルーホール技術に
より円弧状の窪みに導電層を形成したもので、これによ
り基板9上面の導電パターンを基板下面の端子電極に接
続している。
FIGS. 5 and 6 show examples of a reflection type optical sensor proposed by the inventors. 5A is a perspective view, and FIG. 5B is a cross-sectional view taken along the line BB of FIG. 5A. A light emitting element 2 and a light receiving element 3 are formed on a conductive pattern on a substrate 9 made of epoxy resin containing glass fiber or the like. Is die-bonded, wire-bonded with a metal wire 13, and sealed with a light-transmitting sealing resin 11. The sealing resin 11 has a trapezoidal shape, and has a side surface covered with a light-shielding film 14 such as a metal plating layer. The upper surface of the sealing resin 11 has no light-shielding film and is a window through which light enters and exits. By reducing the area of this window, detection accuracy can be increased. The conductive portion 12 on the side surface of the substrate 9 is formed by forming a conductive layer in an arc-shaped depression by a through-hole technique, thereby connecting the conductive pattern on the upper surface of the substrate 9 to the terminal electrode on the lower surface of the substrate.

【0004】図6のものは(A)が斜視図、(B)が
(A)のB−B断面図である。基板9に、遮光性樹脂の
遮光枠10を接合してあり、遮光枠10には貫通した窓
8が二つある。それぞれの窓8の内側で発光素子2と受
光素子3を基板9上の導電パターンにダイボンドし、金
属線13でワイヤボンドして、窓8に透光性の封止樹脂
11を充填し両素子を封止してある。ワイヤボンドは、
通常、金属線13の先端にボールを形成してこれを発光
素子2や受光素子3の表面に接合するが、図4では逆に
ボールを基板側に接合する逆ボンディングを行い、金属
線13がループを生じて部品高さを増すのを押さえてい
る。
FIG. 6A is a perspective view, and FIG. 6B is a sectional view taken along line BB of FIG. A light-shielding frame 10 made of a light-shielding resin is joined to a substrate 9, and the light-shielding frame 10 has two windows 8 penetrating therethrough. The light emitting element 2 and the light receiving element 3 are die-bonded to the conductive pattern on the substrate 9 inside each of the windows 8 and wire-bonded with the metal wires 13, and the window 8 is filled with a translucent sealing resin 11. Is sealed. Wire bonds are
Normally, a ball is formed at the tip of the metal wire 13 and bonded to the surface of the light emitting element 2 or the light receiving element 3, but in FIG. 4, reverse bonding is performed to bond the ball to the substrate side. It suppresses the increase in component height due to a loop.

【0005】発光素子2と受光素子3は、図6(B)に
見るように遮光枠10の中央の仕切り壁に接触させて設
けてある。素子を壁から離してそれぞれ窓8の中央部で
基板9にボンディングすることもできるが、その場合は
素子間の距離がばらつきやすく、従って光路長、ひいて
は光センサの性能がばらつきやすい。その点、素子を壁
に接触させれば位置決めが容易である。基板9の側面の
導電部12により、基板上面の導電パターンを下面の端
子電極に接続してある。発光素子2から出た光は発光素
子側の窓8から出て被検出物体を照射し、反射光が受光
素子側の窓8から戻って受光素子3に達して検出され
る。
The light emitting element 2 and the light receiving element 3 are provided in contact with a central partition wall of the light shielding frame 10 as shown in FIG. The elements can be bonded to the substrate 9 at the center of the window 8 away from the wall. However, in this case, the distance between the elements tends to vary, and the optical path length, and thus the performance of the optical sensor, tends to vary. In that respect, positioning is easy if the element is brought into contact with the wall. The conductive pattern on the upper surface of the substrate is connected to the terminal electrode on the lower surface by the conductive portion 12 on the side surface of the substrate 9. The light emitted from the light emitting element 2 exits through the window 8 on the light emitting element side and irradiates the object to be detected, and the reflected light returns from the window 8 on the light receiving element side to reach the light receiving element 3 and is detected.

【0006】[0006]

【発明が解決しようとする課題】上記のような従来の反
射型光センサは、それぞれ有用ではあるが問題もある。
図5のものは、光素子をワイヤボンディングしているこ
とと、封止樹脂11が台形であることなどから、部品高
さがある程度以上となり、発光素子2を出て被検出物で
反射して受光素子3に戻ってくる光の光路長を短くでき
ない。光のエネルギーは光路長の2乗に反比例するの
で、光路長が長いと光の利用効率が下がって不利であ
る。
Each of the above-mentioned conventional reflection-type optical sensors is useful but has problems.
In FIG. 5, since the optical element is wire-bonded and the sealing resin 11 has a trapezoidal shape, the height of the component is more than a certain level. The optical path length of the light returning to the light receiving element 3 cannot be shortened. Since the energy of light is inversely proportional to the square of the optical path length, a long optical path length is disadvantageous because the light use efficiency is reduced.

【0007】図6のものは上面が平らであって図5のも
のより薄型化に適するが、実装方法が金属線13の端部
にボールを作って素子に接合する通常のワイヤボンディ
ングであると、金属線13にループができて部品高さす
なわち光路長が増し、別法の逆ボンディングを行って高
さを減らそうとすると、素子側がウエッジボンディング
になって素子を損傷する傾向を生じ、ボンディング作業
が困難になる。本発明はこれらの問題を解決して、簡単
な構造で高性能、低価格の反射型光センサを実現するも
のである。
FIG. 6 has a flat upper surface and is more suitable for thinning than that of FIG. 5. However, if the mounting method is a normal wire bonding in which a ball is formed at the end of the metal wire 13 and bonded to the element. If the height of the component, that is, the optical path length is increased due to the formation of a loop in the metal wire 13 and the height is reduced by performing reverse bonding by another method, the device side tends to be wedge bonded and the device tends to be damaged. Work becomes difficult. The present invention solves these problems and realizes a high-performance, low-cost reflective optical sensor with a simple structure.

【0008】[0008]

【課題を解決するための手段】本発明においては、発光
素子と受光素子を前記の各従来例のように基板の同一面
に配置するのでなく、基板の端部に近い箇所で基板を挟
んで両面にそれぞれ実装する。これにより両素子が基板
で隔離されるので、素子間に特別の遮光手段を設けなく
てよい。そしてワイヤボンディングを行わず、発光素子
はpn接合による発光層が基板に垂直になるように横倒
しにして、半田または導電性ペーストで基板に実装し、
一方、受光素子は表面にバンプを形成して実装する。こ
れによりワイヤボンディングの金属線がループを作るた
めに光路長が増すということがなくなる。受光素子は1
辺をメサ構造にして受光に適する斜面を設け、受光の感
度を上げる。
According to the present invention, the light emitting element and the light receiving element are not arranged on the same surface of the substrate as in each of the above-mentioned prior arts, but are sandwiched between the substrates near the ends of the substrate. Mount on both sides. As a result, the two elements are isolated from each other by the substrate, so that there is no need to provide a special light shielding means between the elements. Then, without performing wire bonding, the light emitting element is laid down on the substrate with solder or conductive paste, with the light emitting layer formed by the pn junction lying down so as to be perpendicular to the substrate,
On the other hand, the light receiving element is mounted with bumps formed on the surface. This eliminates an increase in the optical path length due to the formation of a loop by the metal wire for wire bonding. The light receiving element is 1
The side has a mesa structure and a slope suitable for light reception is provided to increase the light reception sensitivity.

【0009】[0009]

【発明の実施の形態】以下、図面に基づいて本発明の実
施形態を説明する。図1は本発明の反射型光センサの実
施形態を透視的に描いた斜視図である。基板31の一方
の面にLEDなどの発光素子32を実装し、反対側の面
にフォトトランジスタなどの受光素子33をそれぞれ実
装して、透光性の封止樹脂34で両素子を封止してあ
る。発光素子32は半田や導電接着剤によって基板31
に実装し、受光素子33にはバンプ35を形成して基板
31に実装する。基板31には組込先回路との接続用の
端子パターン36が設けてある。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view illustrating an embodiment of the reflection type optical sensor of the present invention in a perspective view. A light emitting element 32 such as an LED is mounted on one surface of a substrate 31, and a light receiving element 33 such as a phototransistor is mounted on the opposite surface, and both elements are sealed with a light-transmitting sealing resin 34. It is. The light emitting element 32 is formed on the substrate 31 by soldering or conductive adhesive.
The bumps 35 are formed on the light receiving element 33 and mounted on the substrate 31. The substrate 31 is provided with a terminal pattern 36 for connection to a target circuit.

【0010】図2(A)は図1の反射型光センサの平面
図、同図(B)は正面図である。図(B)のように発光
素子32と受光素子33は基板31の上縁に近い箇所で
基板の表と裏にそれぞれ実装して、封止樹脂34で封止
してある。発光素子32は例えばLEDであってpn接
合である発光層32aから発光し、通常のワイヤボンデ
ィング実装の場合は、発光層32aを基板31に平行に
して半導体基部を基板31にダイボンドし、ワイヤボン
ディングを施すのであるが、本発明では発光層32aが
基板表面に垂直になるように発光素子32を横倒しに
し、半田、あるいは銀ペーストなどの導電接着剤36に
より基板31に実装する。
FIG. 2A is a plan view of the reflection type optical sensor of FIG. 1, and FIG. 2B is a front view. As shown in FIG. 2B, the light emitting element 32 and the light receiving element 33 are respectively mounted on the front and back of the substrate at a position near the upper edge of the substrate 31, and are sealed with a sealing resin. The light emitting element 32 is, for example, an LED and emits light from the light emitting layer 32a which is a pn junction. In the case of normal wire bonding mounting, the light emitting layer 32a is parallel to the substrate 31 and the semiconductor base is die-bonded to the substrate 31 to perform wire bonding. In the present invention, the light emitting element 32 is turned over so that the light emitting layer 32a is perpendicular to the substrate surface, and the light emitting element 32 is mounted on the substrate 31 with a conductive adhesive 36 such as solder or silver paste.

【0011】一方、受光素子33は発光素子32と反対
側の基板面に実装するが、同じくワイヤボンディングに
よらず、素子表面に所要の数のバンプ35を設けて基板
31の接続パッドに接合する。受光素子33が例えばフ
ォトトランジスタの場合、ベース領域が受光層となる
が、図2(B)に見るように、受光素子33は上縁側を
メサ構造にして斜面33bを形成してあり、受光層33
aが斜面33bに露出している。
On the other hand, the light receiving element 33 is mounted on the substrate surface on the side opposite to the light emitting element 32. Similarly, a required number of bumps 35 are provided on the element surface and bonded to connection pads on the substrate 31 without using wire bonding. . When the light receiving element 33 is, for example, a phototransistor, the base region becomes a light receiving layer. As shown in FIG. 2B, the light receiving element 33 has a mesa structure on the upper edge side to form an inclined surface 33b. 33
a is exposed on the slope 33b.

【0012】上記の反射型光センサの動作時の光の経路
は、図2(B)に矢印で示したごとくである。すなわち
発光素子32から出た光は、被検出物体4の表面で反射
して基板31の反対側に回り、受光素子33の斜面33
bに入射するが、この部分には受光層33aの端部が位
置している。受光素子33の表面を基板31に密着させ
てしまうと受光層33aに光が届かなくなるが、バンプ
35を用いた実装によって受光素子表面が基板面から若
干浮くことと、素子の上縁にメサ構造の斜面33bを設
けたことにより、受光層33aが光の経路に対し適切な
位置を取る。
The path of light during operation of the above-mentioned reflection type optical sensor is as shown by an arrow in FIG. That is, the light emitted from the light emitting element 32 is reflected on the surface of the detection target object 4 and turns to the opposite side of the substrate 31 to the slope 33 of the light receiving element 33.
b, the end of the light receiving layer 33a is located in this portion. When the surface of the light receiving element 33 is brought into close contact with the substrate 31, light does not reach the light receiving layer 33a. However, the light receiving element surface slightly floats from the substrate surface by mounting using the bump 35, and a mesa structure is provided on the upper edge of the element. Is provided, the light receiving layer 33a takes an appropriate position with respect to the light path.

【0013】本発明の構造では、発光素子32と受光素
子33が基板31の両側にあって基板で隔てられるの
で、従来例のように両光素子間に遮光のための特別の部
材を設ける必要がない。また、光素子の実装がワイヤボ
ンディングでないから、金属線がループを作って樹脂封
止部がかさばるということがなく、光路が短くなって性
能が上がる。
In the structure of the present invention, since the light emitting element 32 and the light receiving element 33 are on both sides of the substrate 31 and are separated by the substrate, it is necessary to provide a special member for shielding light between the two optical elements as in the conventional example. There is no. Further, since the mounting of the optical element is not wire bonding, the metal wire does not form a loop and the resin sealing portion is not bulky, so that the optical path is shortened and the performance is improved.

【0014】なお、基板31としては可撓性の樹脂薄板
に導電パターンを設けたフレキシブル回路基板を用いる
こともできる。また、封止樹脂34の上面以外の外面
に、メッキや蒸着で金属の遮光膜を被覆するなどして、
光の損失を小さくすることもできる。
As the substrate 31, a flexible circuit board having a conductive pattern provided on a flexible resin thin plate can be used. Also, the outer surface other than the upper surface of the sealing resin 34 is coated with a metal light-shielding film by plating or vapor deposition, etc.
Light loss can also be reduced.

【0015】図3は本発明の第2の実施形態で、図2の
ものに対し、発光素子32を基板31の面に垂直な軸の
回りに90°回転した向きにしてある。これにより、図
2では発光素子32の発光層32aが物体4の表面に垂
直であったが、図3では発光層32aが物体4の表面に
平行になる。
FIG. 3 shows a second embodiment of the present invention, in which the light emitting element 32 is rotated by 90 ° around an axis perpendicular to the surface of the substrate 31 with respect to that of FIG. Thus, the light emitting layer 32a of the light emitting element 32 is perpendicular to the surface of the object 4 in FIG. 2, but the light emitting layer 32a is parallel to the surface of the object 4 in FIG.

【0016】[0016]

【発明の効果】本発明の反射型光センサによれば次のよ
うな効果が得られる。すなわち 1.発光素子と受光素子を基板の縁に近い位置に実装す
るので、被検出物に近づけて配置でき、光路長を最短に
して光の結合効率やS/N比を上げられる。 2.ワイヤボンディングによらないので実装の信頼性が
上がる。 3.光路長が短くなるので光の拡がりが小さくなり、そ
のため受光部すなわち受光素子を小さくできて接合容量
が小さくなり、検出の周波数特性を向上できる。 4.素子を小さくし、基板を薄板にし、封止がかさばら
ないようにできるので、製品の小型化、薄型化が容易で
ある。 5.基板が光素子間を隔離するので、遮光部材を別に設
ける必要がなく、製造コストの低減が図れる。 このように本発明によれば、小型、高性能で信頼性の高
い反射型光センサを廉価に提供できる。
According to the reflection type optical sensor of the present invention, the following effects can be obtained. That is, 1. Since the light emitting element and the light receiving element are mounted near the edge of the substrate, the light emitting element and the light receiving element can be arranged close to the object to be detected, and the optical path length can be minimized to increase the light coupling efficiency and the S / N ratio. 2. Since it does not rely on wire bonding, mounting reliability is increased. 3. Since the optical path length is shortened, the spread of light is reduced, so that the light receiving portion, that is, the light receiving element can be reduced, the junction capacitance can be reduced, and the frequency characteristics of detection can be improved. 4. Since the element can be made smaller, the substrate can be made thinner and the sealing can be made less bulky, it is easy to make the product smaller and thinner. 5. Since the substrate separates the optical elements from each other, it is not necessary to separately provide a light-blocking member, and the manufacturing cost can be reduced. As described above, according to the present invention, a small-sized, high-performance, and highly reliable reflection-type optical sensor can be provided at low cost.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の反射型光センサの斜視図である。FIG. 1 is a perspective view of a reflection type optical sensor of the present invention.

【図2】図1の実施形態の図面で、(A)が上面図、
(B)が正面図である。
FIG. 2 is a drawing of the embodiment of FIG. 1, wherein (A) is a top view,
(B) is a front view.

【図3】本発明の別の実施形態の図面で、(A)が上面
図、(B)が正面図である。
3A and 3B are drawings of another embodiment of the present invention, wherein FIG. 3A is a top view and FIG. 3B is a front view.

【図4】反射型光センサの原理的構成図である。FIG. 4 is a view showing the principle configuration of a reflection type optical sensor.

【図5】反射型光センサの従来例で、(A)が斜視図、
(B)が(A)のB−B断面図である。
5A is a perspective view of a conventional example of a reflection type optical sensor, FIG.
(B) is BB sectional drawing of (A).

【図6】反射型光センサの別の従来例で、(A)が斜視
図、(B)が(A)のB−B断面図である。
6A is a perspective view and FIG. 6B is a cross-sectional view taken along the line BB of FIG.

【符号の説明】[Explanation of symbols]

2、32 発光素子 3、33 受光素子 8 窓 9、31 基板 10 遮光枠 11、34 封止樹脂 14 遮光膜 32a 発光層 33a 受光層 33b 斜面 35 バンプ 36 半田、導電接着剤 2, 32 light emitting element 3, 33 light receiving element 8 window 9, 31 substrate 10 light shielding frame 11, 34 sealing resin 14 light shielding film 32a light emitting layer 33a light receiving layer 33b slope 35 bump 36 solder, conductive adhesive

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 発光素子と受光素子を、基板の縁に近い
位置で基板の両面にそれぞれ実装し、樹脂封止したもの
であって、 発光素子は発光層を基板に垂直にして半田、導電接着剤
等で基板に実装し、 受光素子は1辺をメサ構造にしてバンプを設け、メサ構
造の斜面を基板の縁に向けるとともに、受光層を基板側
に向けてバンプで基板に実装したことを特徴とする反射
型光センサ。
1. A light-emitting element and a light-receiving element are mounted on both sides of a substrate at positions close to an edge of the substrate, respectively, and are sealed with a resin. The light-receiving element was mounted on the board with an adhesive or the like, and the light-receiving element was mounted on the board with bumps with the mesa structure on one side, the slope of the mesa structure facing the edge of the board, and the light-receiving layer facing the board side. The reflection type optical sensor characterized by the above-mentioned.
【請求項2】 請求項1に記載の反射型光センサにおい
て、 基板はフレキシブル回路基板であることを特徴とする反
射型光センサ。
2. The reflection type optical sensor according to claim 1, wherein the substrate is a flexible circuit board.
JP2000117114A 2000-04-18 2000-04-18 Reflection optical sensor Pending JP2001308372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000117114A JP2001308372A (en) 2000-04-18 2000-04-18 Reflection optical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000117114A JP2001308372A (en) 2000-04-18 2000-04-18 Reflection optical sensor

Publications (1)

Publication Number Publication Date
JP2001308372A true JP2001308372A (en) 2001-11-02

Family

ID=18628480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000117114A Pending JP2001308372A (en) 2000-04-18 2000-04-18 Reflection optical sensor

Country Status (1)

Country Link
JP (1) JP2001308372A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013191235A1 (en) * 2012-06-20 2013-12-27 アオイ電子株式会社 Light source-integrated optical sensor
CN106463569A (en) * 2014-06-16 2017-02-22 日东电工株式会社 Optical sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013191235A1 (en) * 2012-06-20 2013-12-27 アオイ電子株式会社 Light source-integrated optical sensor
CN104396026A (en) * 2012-06-20 2015-03-04 青井电子株式会社 Light source-integrated optical sensor
CN106463569A (en) * 2014-06-16 2017-02-22 日东电工株式会社 Optical sensor
US10446709B2 (en) 2014-06-16 2019-10-15 Nitto Denko Corporation Optical sensor

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