JP2001274198A - Mounting method of electronic component - Google Patents

Mounting method of electronic component

Info

Publication number
JP2001274198A
JP2001274198A JP2000090738A JP2000090738A JP2001274198A JP 2001274198 A JP2001274198 A JP 2001274198A JP 2000090738 A JP2000090738 A JP 2000090738A JP 2000090738 A JP2000090738 A JP 2000090738A JP 2001274198 A JP2001274198 A JP 2001274198A
Authority
JP
Japan
Prior art keywords
conductive adhesive
hole
electronic component
protruding electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000090738A
Other languages
Japanese (ja)
Other versions
JP4114299B2 (en
Inventor
Yuji Otani
祐司 大谷
Hirokazu Imai
今井  博和
Takashi Nagasaka
長坂  崇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2000090738A priority Critical patent/JP4114299B2/en
Publication of JP2001274198A publication Critical patent/JP2001274198A/en
Application granted granted Critical
Publication of JP4114299B2 publication Critical patent/JP4114299B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/14Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To enable a conductive adhesive agent, transferred onto a protuberant electrode, to be increased in amount independently of its shape in a part mounting method, through which an electronic part is mounted on a board through the intermediary of a conductive adhesive agent after a conductive adhesive agent is transferred onto a protuberant electrode formed on one surface of an electronic component. SOLUTION: A mold member 20 that is provided with a hole 21, in which the protuberant electrode 11 of an electronic component 10 is inserted and adheres to the conductive adhesive agent 3 with capability lower than the protuberant electrode 11 is prepared as a case which houses a conductive adhesive agent 30, the hole 21 is filled up with the conductive adhesive agent 30, and continuingly, the tip of the protuberant electrode 11 is inserted into the hole 21 and then pulled out, by which the conductive adhesive agent 30 is transferred to the protuberant electrode 11.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品の一面側
に形成された突起状電極に導電性接着剤を転写した後、
この導電性接着剤を介して、電子部品を基板上に搭載す
る電子部品の実装方法、及び、突起状電極に導電性接着
剤を転写するのに用いて好適な型部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for transferring a conductive adhesive to a protruding electrode formed on one surface of an electronic component.
The present invention relates to a method of mounting an electronic component on a substrate via the conductive adhesive, and a mold member suitable for transferring the conductive adhesive to a protruding electrode.

【0002】[0002]

【従来の技術】従来より、この種の電子部品の実装方法
としては、例えばフリップチップ実装方法がある。これ
は、電子部品としてのICチップの一面に突起状電極を
形成しておき、搭載する基板表面に半田ペーストを印刷
した後、ICチップを、突起状電極を下にして(フェー
スダウン)基板表面上に搭載し、加熱して半田を溶融さ
せ、接続するものである。
2. Description of the Related Art Conventionally, as a mounting method of this kind of electronic component, there is, for example, a flip chip mounting method. In this method, a protruding electrode is formed on one surface of an IC chip as an electronic component, a solder paste is printed on the surface of the substrate to be mounted, and then the IC chip is placed with the protruding electrode down (face down). It is mounted on top, heated to melt the solder, and connected.

【0003】近年、フリップチップ実装において半田に
よる接続に代わる手法として、導電性接着剤による接続
方法が採用されてきている。導電性接着剤による接続
は、半田接続に比べて、Pb(鉛)を使用しないため環
境問題に対応可能なこと、洗浄を廃止できること、コス
トを低減できること等の利点がある。
In recent years, a connection method using a conductive adhesive has been adopted as an alternative to the connection using solder in flip-chip mounting. Connection using a conductive adhesive has advantages over solder connection in that Pb (lead) is not used, so that environmental problems can be addressed, cleaning can be eliminated, and costs can be reduced.

【0004】しかしながら、導電性接着剤は、半田のよ
うに、加熱時に溶融することはなく、また、特定の金属
に濡れるという特性も併せ持たないため、フリップチッ
プ実装における印刷精度は、半田接続よりも高精度が要
求される。そのため、突起状電極のピッチが狭くなって
くると、基板への導電性接着剤の印刷精度を確保するこ
とが困難となり、導電性接着剤を基板側へ印刷して供給
する方法は、もはや採用できなくなる。
[0004] However, the conductive adhesive does not melt when heated, unlike solder, and does not have the property of being wetted by a specific metal. Therefore, the printing accuracy in flip-chip mounting is lower than that of solder connection. Also requires high precision. Therefore, when the pitch of the protruding electrodes becomes narrow, it becomes difficult to secure the printing accuracy of the conductive adhesive on the substrate, and the method of printing and supplying the conductive adhesive on the substrate side is no longer employed. become unable.

【0005】このような場合、基板側へ導電性接着剤を
供給するのではなく、突起状電極側へ導電性接着剤を転
写する方法が採用される。この転写を採用した従来の一
般的な実装方法を、図6に概略断面にて示す。まず、導
電性接着剤J1を容器等に入れて、表面が水平となるよ
うにならす。そして、フリップチップJ2を、突起状電
極J3を下向きにして導電性接着剤J1の水平面に降ろ
し、突起状電極J3の先端側を導電性接着剤J1内に埋
め込む(図6(a)及び(b))。
In such a case, a method of transferring the conductive adhesive to the protruding electrode side instead of supplying the conductive adhesive to the substrate side is adopted. FIG. 6 is a schematic cross-sectional view showing a conventional general mounting method employing this transfer. First, the conductive adhesive J1 is put in a container or the like, and the surface is leveled. Then, the flip chip J2 is lowered onto the horizontal surface of the conductive adhesive J1 with the protruding electrode J3 facing downward, and the tip side of the protruding electrode J3 is embedded in the conductive adhesive J1 (FIGS. 6A and 6B). )).

【0006】続いて、フリップチップJ2を引き上げる
ことにより、突起状電極J3に導電性接着剤J1が転写
され付着する(図6(c))。しかる後、導電性接着剤
J1が付着した突起状電極J3の先端側を、基板J4の
ランド(導体部)J5上に降ろし(図6(d))、突起
状電極J3とランドJ5とを、導電性接着剤J1を介し
て接着する。こうして、チップJ2と基板J4のランド
J5とが電気的に接続される。
Subsequently, by pulling up the flip chip J2, the conductive adhesive J1 is transferred and adhered to the protruding electrode J3 (FIG. 6C). Thereafter, the tip side of the protruding electrode J3 to which the conductive adhesive J1 is attached is lowered onto the land (conductor portion) J5 of the substrate J4 (FIG. 6D), and the protruding electrode J3 and the land J5 are separated. The bonding is performed via the conductive adhesive J1. Thus, the chip J2 and the land J5 of the substrate J4 are electrically connected.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、本発明
者等の検討によれば、上記図6に示したような転写によ
る実装方法においては、次のような問題が生じることが
わかった。即ち、例えば、突起状電極J3と導電性接着
剤J1との密着性が低い場合、あるいは、導電性接着剤
J1として粘度が低いものを使用する場合には、突起状
電極J3に付着する導電性接着剤J1の量が少なくなっ
てしまう。
However, according to the study of the present inventors, it has been found that the following problems occur in the mounting method by transfer as shown in FIG. That is, for example, when the adhesiveness between the protruding electrode J3 and the conductive adhesive J1 is low, or when the conductive adhesive J1 has a low viscosity, the conductive adhesive adhering to the protruding electrode J3 is used. The amount of the adhesive J1 becomes small.

【0008】また、図7(a)に示す様に、基板J4に
反り等による高さのばらつきが発生した場合には、ラン
ドJ5と導電性接着剤J1との接触面積が少ない部分に
おいて、電気的な接続が不十分となったりする。これら
の不具合に対して、図7(b)に示す様に、突起状電極
J3の形状を工夫して、転写の際に導電性接着剤J1を
すくい易くし、転写量を多くすることも考えられるが、
突起状電極J3の形状を所望のものとするために、余分
な工程が必要となる。
As shown in FIG. 7 (a), when the substrate J4 has a variation in height due to warpage or the like, the electric contact is reduced in a portion where the contact area between the land J5 and the conductive adhesive J1 is small. Connection may be insufficient. To solve these problems, as shown in FIG. 7B, it is considered that the shape of the protruding electrode J3 is devised so that the conductive adhesive J1 is easily scooped at the time of transfer, and the transfer amount is increased. But
An extra step is required to make the shape of the projecting electrode J3 desired.

【0009】そこで、本発明は上記問題に鑑み、電子部
品の一面側に形成された突起状電極に導電性接着剤を転
写した後、この導電性接着剤を介して、電子部品を基板
上に搭載する電子部品の実装方法において、突起状電極
の形状に依存することなく、突起状電極への導電性接着
剤の転写量を増加させることを目的とする。
In view of the above problems, the present invention transfers a conductive adhesive to a protruding electrode formed on one side of an electronic component, and then places the electronic component on a substrate via the conductive adhesive. In a mounting method of an electronic component to be mounted, it is an object to increase an amount of a conductive adhesive transferred to a protruding electrode without depending on a shape of the protruding electrode.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するた
め、請求項1記載の発明においては、導電性接着剤(3
0)を収納する容器として、電子部品(10)の突起状
電極(11)に対応した位置に突起状電極を挿入可能な
穴部(21)が形成され、且つ、この穴部の内面が突起
状電極よりも導電性接着剤との密着性の低い型部材(2
0)を用意し、この穴部内に導電性接着剤を充填し、続
いて、突起状電極の先端側を穴部へ挿入した後引き出す
ことにより、導電性接着剤の転写を行うことを特徴とし
ている。
In order to achieve the above object, according to the first aspect of the present invention, a conductive adhesive (3
As a container for accommodating the protruding electrode (11) of the electronic component (10), a hole (21) into which the protruding electrode can be inserted is formed, and the inner surface of the hole has a protrusion. Mold member (2) having lower adhesion to the conductive adhesive than the electrode.
0) is prepared, the hole is filled with a conductive adhesive, and then the tip of the protruding electrode is inserted into the hole and then pulled out to transfer the conductive adhesive. I have.

【0011】それによれば、導電性接着剤が充填された
穴部へ突起状電極を穴部へ挿入した後、突起状電極を穴
部から引き出す際に、穴部の内面は、突起状電極よりも
導電性接着剤との密着性が低いため、導電性接着剤の多
くが突起状電極に密着した状態で、穴部から離れる。
According to this, when the protruding electrode is inserted into the hole filled with the conductive adhesive and then the protruding electrode is pulled out from the hole, the inner surface of the hole is more protruded than the protruding electrode. Also, since the adhesiveness with the conductive adhesive is low, most of the conductive adhesive is separated from the hole in a state of being in close contact with the protruding electrode.

【0012】ちなみに、従来では、導電性接着剤から突
起状電極を引き上げる際には、突起状電極に接触した導
電性接着剤の一部が、同じ導電性接着剤から引きちぎら
れることにより、突起状電極に付着する。それに比べ
て、本発明では、導電性接着剤が穴部内に留まろうとす
る力は極めて弱くなる。
Conventionally, when the protruding electrode is pulled up from the conductive adhesive, a part of the conductive adhesive in contact with the protruding electrode is torn off from the same conductive adhesive. Attaches to electrodes. In contrast, according to the present invention, the force of the conductive adhesive to stay in the hole becomes extremely weak.

【0013】よって、本発明によれば、突起状電極の形
状に依存することなく、突起状電極への導電性接着剤の
転写量を増加させることができる。このような型部材
(20)としては、請求項2の発明のように、突起状電
極(11)よりも導電性接着剤(30)との密着性が低
いフッ素系樹脂よりなるものを用いることができる。
Therefore, according to the present invention, it is possible to increase the transfer amount of the conductive adhesive to the protruding electrodes without depending on the shape of the protruding electrodes. As such a mold member (20), a member made of a fluorine-based resin having lower adhesion to the conductive adhesive (30) than the protruding electrode (11) is used, as in the invention of claim 2. Can be.

【0014】また、請求項3の発明では、電子部品(1
0)の一面側に形成された突起状電極(11)の先端側
に導電性接着剤(30)を転写することにより付着させ
るための型部材であって、突起状電極に対応した位置に
突起状電極を挿入可能な穴部(21)を形成し、この穴
部の内面が突起状電極よりも導電性接着剤との密着性が
低い型部材を提供するものである。
According to the invention of claim 3, the electronic component (1)
0) A mold member for transferring and attaching a conductive adhesive (30) to the front end side of the protruding electrode (11) formed on one surface side, the protrusion being provided at a position corresponding to the protruding electrode. The present invention is to provide a mold member in which a hole (21) into which a shape electrode can be inserted is formed, and the inner surface of the hole has lower adhesion to the conductive adhesive than the protruding electrode.

【0015】それによれば、上記請求項1の実装方法に
おいて、突起状電極に導電性接着剤を転写するのに用い
て好適な型部材を提供することができる。なお、上記各
手段の括弧内の符号は、後述する実施形態に記載の具体
的手段との対応関係を示す一例である。
According to this, in the mounting method of the first aspect, it is possible to provide a mold member suitable for transferring the conductive adhesive to the protruding electrodes. It should be noted that reference numerals in parentheses of the above-described units are examples showing the correspondence with specific units described in the embodiments described later.

【0016】[0016]

【発明の実施の形態】以下、本発明を図に示す実施形態
について説明する。図1は、本発明の実施形態に係る電
子部品の実装方法を示す工程図(概略断面図)である。
以下、本実装方法について、図1を参照しながら工程順
に説明する。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a first embodiment of the present invention. FIG. 1 is a process diagram (schematic sectional view) showing a method for mounting an electronic component according to an embodiment of the present invention.
Hereinafter, this mounting method will be described in the order of steps with reference to FIG.

【0017】まず、図1(a)に示す様に、電子部品1
0及び型部材20を用意する。電子部品10としては、
ICチップ、フリップチップ等を採用できる。この電子
部品10の一面10a側には、ボールボンディング法等
を用いて形成された金バンプ等よりなる突起状電極11
が形成されている。図示例の突起状電極11は、導電性
接着剤30をすくい易くするために、くびれ部を持った
形状となっている。
First, as shown in FIG.
0 and a mold member 20 are prepared. As the electronic component 10,
IC chips, flip chips and the like can be adopted. On one surface 10a side of the electronic component 10, a protruding electrode 11 made of a gold bump or the like formed by using a ball bonding method or the like.
Are formed. The protruding electrode 11 in the illustrated example has a shape having a constricted portion so that the conductive adhesive 30 is easily scooped.

【0018】型部材20は、導電性接着剤30を収納す
る容器としての役目を担うものであり、転写の際に電子
部品10の一面10aと対向する面には、電子部品10
の突起状電極11に対応した位置に、開口した穴部21
が形成されている。この穴部21の内径は、突起状電極
11の先端側の外径よりも大きく、穴部21内へ突起状
電極11の先端側が挿入可能となっている。
The mold member 20 serves as a container for accommodating the conductive adhesive 30. The surface of the electronic component 10 facing the one surface 10a at the time of transfer is provided with the electronic component 10.
In the position corresponding to the protruding electrode 11 of FIG.
Are formed. The inner diameter of the hole 21 is larger than the outer diameter of the tip of the projecting electrode 11, and the tip of the projecting electrode 11 can be inserted into the hole 21.

【0019】また、穴部21は、図1のように底のある
もの(つまり凹部)でも、無いもの(つまり貫通穴)で
もよく、突起状電極11の先端側を挿入可能な開口部で
あればよい。この穴部21の内面を含む型部材20の表
面は、突起状電極11よりも導電性接着剤30との密着
性が低い離型材層22により、被覆されている。そし
て、穴部21内には、導電性接着剤30が充填されてい
る。
The hole 21 may have a bottom (that is, a concave portion) as shown in FIG. 1 or may not have a bottom (that is, a through hole), and may be an opening into which the tip side of the protruding electrode 11 can be inserted. I just need. The surface of the mold member 20 including the inner surface of the hole 21 is covered with a release material layer 22 having lower adhesion to the conductive adhesive 30 than the protruding electrodes 11. The hole 21 is filled with a conductive adhesive 30.

【0020】ここで、例えば、型部材20の本体は樹脂
や金属等よりなり、離型材層22はフッ素系の樹脂等よ
りなる。また、導電性接着剤30は、例えばエポキシ等
の熱硬化性樹脂中に、Ag、Ag/Pd、Ag/Pt、
Au、Cu、Ni等を導電性フィラーとして混入し、こ
れらの物理的接触によって導電性を得るようにした接着
剤である。
Here, for example, the main body of the mold member 20 is made of a resin, a metal or the like, and the release material layer 22 is made of a fluorine-based resin or the like. Further, the conductive adhesive 30 may be made of, for example, Ag, Ag / Pd, Ag / Pt, or the like in a thermosetting resin such as epoxy.
An adhesive in which Au, Cu, Ni, or the like is mixed as a conductive filler so as to obtain conductivity by physical contact with these.

【0021】この型部材20は、例えば、本体に対し切
削加工や穴あけ加工を施すことにより、穴部21を形成
した後、フッ素系の樹脂等を塗布することにより、離型
材層22を形成することで、製造することができる。こ
のようにして製造された型部材20の穴部21内に、マ
スクを用いた印刷法等により、導電性接着剤30を充填
する。
The mold member 20 forms a mold release material layer 22 by forming a hole portion 21 by, for example, cutting or drilling a body, and then applying a fluorine-based resin or the like. Thus, it can be manufactured. The conductive adhesive 30 is filled in the hole 21 of the mold member 20 manufactured as described above by a printing method using a mask or the like.

【0022】なお、穴部21が底のあるものである場合
には、導電性接着剤30を充填しやすくするために、図
1(a)に示す様に、穴部21の内面から外気へ通じる
空気抜き穴23を穴あけ加工等により形成しても良い。
この空気抜き穴23は、導電性接着剤30が比較的充填
しやすい材料(粘度の低い接着剤等)の場合は、不要で
ある。なお、図1(b)及び(c)では、空気抜き穴2
3は省略してある。
In the case where the hole 21 has a bottom, as shown in FIG. 1 (a), the hole 21 is exposed from the inner surface to the outside air in order to easily fill the conductive adhesive 30. The communicating air vent hole 23 may be formed by drilling or the like.
The air vent hole 23 is unnecessary when the conductive adhesive 30 is made of a material that is relatively easy to fill (such as a low-viscosity adhesive). In FIGS. 1B and 1C, the air vent holes 2
3 is omitted.

【0023】また、離型材層22は、型部材20の表面
のうち少なくとも穴部21の内面に、全体的もしくは部
分的に形成されていればよい。さらには、型部材20の
本体を、離型材層22と同様の性能を持つ樹脂(以下、
離型性樹脂という)により形成しても良い。この場合、
離型材層22は不要となり、形成しなくても良い。
The release material layer 22 may be formed entirely or partially on at least the inner surface of the hole 21 on the surface of the mold member 20. Further, the main body of the mold member 20 is made of a resin (hereinafter, referred to as a resin) having the same performance as the release material layer 22.
(Referred to as a release resin). in this case,
The release material layer 22 becomes unnecessary and need not be formed.

【0024】このように、突起状電極11を有する電子
部品10、及び、穴部21を有する型部材20を用意
し、穴部21内に導電性接着剤30を充填した後、図1
(b)及び(c)に示す転写工程を行う。即ち、型部材
20の穴部形成面と電子部品10の一面(突起状電極形
成面)10aとを対向させた状態で、電子部品10を型
部材20に近づけ、突起状電極11の先端側を穴部21
へ挿入して導電性接着剤30に埋め込む。このとき、電
子部品10の一面10aへの導電性接着剤30の付着を
防止すべく、該一面10aと型部材20とが接触しない
ようにする。
As described above, the electronic component 10 having the protruding electrodes 11 and the mold member 20 having the holes 21 are prepared, and the holes 21 are filled with the conductive adhesive 30.
The transfer step shown in (b) and (c) is performed. That is, with the hole forming surface of the mold member 20 and one surface (projection electrode formation surface) 10 a of the electronic component 10 facing each other, the electronic component 10 is brought close to the mold member 20, and the tip side of the projection electrode 11 is Hole 21
And embedded in the conductive adhesive 30. At this time, in order to prevent the conductive adhesive 30 from adhering to the one surface 10a of the electronic component 10, the one surface 10a and the mold member 20 do not come into contact with each other.

【0025】続いて、電子部品10を型部材20から離
すことにより、突起状電極11を穴部21から引き出
す。この引き出しの際、穴部21の内面は、突起状電極
11よりも導電性接着剤30との密着性が低いため、導
電性接着剤30の多くが突起状電極に密着した状態で、
穴部21から離れる。こうして、導電性接着剤30の突
起状電極11への転写が終了する。
Then, the protruding electrode 11 is pulled out from the hole 21 by separating the electronic component 10 from the mold member 20. At the time of this drawing, since the inner surface of the hole 21 has lower adhesion to the conductive adhesive 30 than the protruding electrode 11, most of the conductive adhesive 30 adheres to the protruding electrode.
Move away from the hole 21. Thus, the transfer of the conductive adhesive 30 to the protruding electrodes 11 is completed.

【0026】次に、図1(d)に示す様に、電子部品1
0の一面10aを、用意された基板(回路基板)40の
一面40aと対向させる。ここで、基板40は、セラミ
ック基板、プリント基板等を採用することができる。ま
た、基板40の一面40aには、銅や銀等よりなる電子
部品接続用のランド(導体部)41が、電子部品10の
突起状電極11に対応して形成されている。
Next, as shown in FIG.
The one surface 10a of the substrate 0 faces the one surface 40a of the prepared substrate (circuit board) 40. Here, as the substrate 40, a ceramic substrate, a printed substrate, or the like can be employed. On one surface 40 a of the substrate 40, lands (conductor portions) 41 for connecting electronic components made of copper, silver, or the like are formed corresponding to the protruding electrodes 11 of the electronic component 10.

【0027】そして、図1(e)に示す様に、導電性接
着剤30が付着した突起状電極11の先端側を、基板4
0の一面40a側に形成されたランド41に接触させ
る。次に、この接触状態を維持したまま加熱処理等を行
うことによって、導電性接着剤30を硬化させ、突起状
電極11とランド41とを接着する。こうして、電子部
品10は、突起状電極11及び導電性接着剤30を介し
て、基板40のランド41に電気的に接続される。以上
が、本実施形態の電子部品の実装方法である。
Then, as shown in FIG. 1E, the tip side of the protruding electrode 11 to which the conductive adhesive 30 has adhered is
0 is brought into contact with the land 41 formed on the one surface 40a side. Next, by performing a heat treatment or the like while maintaining this contact state, the conductive adhesive 30 is cured, and the protruding electrode 11 and the land 41 are bonded. Thus, the electronic component 10 is electrically connected to the land 41 of the substrate 40 via the protruding electrode 11 and the conductive adhesive 30. The above is the mounting method of the electronic component of the present embodiment.

【0028】ここで、図2は、本実施形態の効果を示す
説明図である。図2において、(a)に本実施形態、
(b)に比較例として従来の転写の様子を示す。従来で
は、導電性接着剤J1から突起状電極J3を引き上げる
際には、突起状電極J3に接触した導電性接着剤J1の
一部が、同じ導電性接着剤J1から引きちぎられること
により、突起状電極J3に付着する。そのため、導電性
接着剤J1がちぎれる箇所は、突起状電極J3近傍とな
り易い。
FIG. 2 is an explanatory diagram showing the effect of the present embodiment. In FIG. 2, (a) shows the present embodiment,
(B) shows a conventional transfer state as a comparative example. Conventionally, when the protruding electrode J3 is pulled up from the conductive adhesive J1, a part of the conductive adhesive J1 in contact with the protruding electrode J3 is torn off from the same conductive adhesive J1 to form the protruding electrode J3. It adheres to the electrode J3. Therefore, the portion where the conductive adhesive J1 is torn off tends to be near the protruding electrode J3.

【0029】それに比べて、本実施形態では、穴部21
の内面に離型材層22を形成したり、型部材20自体を
上記離型性樹脂で形成することにより、導電性接着剤3
0が穴部21内に留まろうとする力は、従来に比して極
めて弱くなるため、、穴部21内の導電性接着剤30の
殆どが突起状電極11に付着して、穴部21から離れ
る。
In contrast, in the present embodiment, the hole 21
By forming a mold release material layer 22 on the inner surface of the mold, or by forming the mold member 20 itself with the above-described mold release resin, the conductive adhesive 3
Since the force of the conductive adhesive 30 in the hole 21 is extremely weak compared to the conventional art, most of the conductive adhesive 30 in the hole 21 adheres to the protruding electrode 11 and Move away from

【0030】よって、本実施形態によれば、突起状電極
11の形状が、従来の一般的なバンプ形状、または、ボ
ールボンディング法で形成された場合のようにワイヤル
ープを有する形状等であっても良く、突起状電極11の
形状に依存することなく、突起状電極11への導電性接
着剤30の転写量を増加させることができる。
Therefore, according to the present embodiment, the shape of the projecting electrode 11 is a conventional general bump shape, or a shape having a wire loop as formed by a ball bonding method. Alternatively, the amount of the conductive adhesive 30 transferred to the protruding electrode 11 can be increased without depending on the shape of the protruding electrode 11.

【0031】なお、穴部21の容積が大きすぎて、充填
された導電性接着剤30の量が多すぎる場合には、従来
の転写に近い形で、上記突起状電極の引き出しが行われ
ることとなる。そのため、上記離型効果が発揮されなく
なるので、穴部21の大きさや穴部21内への導電性接
着剤30の充填量は、適宜調節されたものとすることは
勿論である。
If the volume of the hole 21 is too large and the amount of the filled conductive adhesive 30 is too large, the protruding electrode is drawn out in a manner similar to the conventional transfer. Becomes For this reason, since the above-mentioned releasing effect is not exhibited, the size of the hole 21 and the filling amount of the conductive adhesive 30 in the hole 21 are of course appropriately adjusted.

【0032】また、図1(b)では、電子部品10が上
側、型部材20が下側に位置しているが、穴部21内へ
突起状電極11を挿入する工程においては、電子部品1
0及び型部材20の上下の位置関係は問わない。むし
ろ、上記図1(b)とは逆に、電子部品10を下側にし
た方が、導電性接着剤30の自重によって、より多くの
導電性接着剤30を突起状電極11に供給することがで
きる。なお、この場合、導電性接着剤30は、その付着
力によって穴部21から落ちることはない。
In FIG. 1B, the electronic component 10 is located on the upper side, and the mold member 20 is located on the lower side.
The positional relationship between the 0 and the mold member 20 in the upper and lower directions does not matter. Rather, contrary to FIG. 1B, when the electronic component 10 is on the lower side, more conductive adhesive 30 is supplied to the protruding electrodes 11 by the weight of the conductive adhesive 30. Can be. In this case, the conductive adhesive 30 does not fall from the hole 21 due to the adhesive force.

【0033】さらに、突起状電極11に付着する導電性
接着剤30の量は、図3(a)に示す各パラメータを考
慮して、決定することが必要である。図3(a)におい
て、Hは突起状電極11の高さ(電極高さ)、Dはラン
ド41の厚さ(ランド厚さ)、Lは導電性接着剤30の
付着後の高さ(接着剤高さ)、dは基板40の反りであ
る。
Further, the amount of the conductive adhesive 30 adhering to the protruding electrodes 11 needs to be determined in consideration of each parameter shown in FIG. In FIG. 3A, H is the height of the protruding electrode 11 (electrode height), D is the thickness of the land 41 (land thickness), and L is the height after the conductive adhesive 30 is attached (adhesion). Agent height) and d are the warpage of the substrate 40.

【0034】ここで、電極高さHのばらつきをσ1、ラ
ンド厚さDのばらつきをσ2、接着剤高さLのばらつき
をσ3、基板の反りdのばらつきをσ4とし、電子部品
10の搭載時の荷重による突起状電極11及び導電性接
着剤30の潰れ量の最大値をhとすると、接着剤高さL
は、次の数式1を満足することが必要となる。
Here, the variation in electrode height H is σ1, the variation in land thickness D is σ2, the variation in adhesive height L is σ3, and the variation in substrate warp d is σ4. When the maximum value of the crush amount of the protruding electrode 11 and the conductive adhesive 30 due to the load of h is h, the adhesive height L
Needs to satisfy the following expression (1).

【0035】[0035]

【数1】 (Equation 1)

【0036】ここで、最後の項の20μmは、電子部品
10を搭載した後、導電性接着剤30がランド41と十
分な接続面積を確保するためのものである。最小限、こ
の数式1を満足するだけの接着剤高さLとなるように、
導電性接着剤30の量は調整される。この数式1は次の
ような理由から導出されたものである。
Here, the last item of 20 μm is for securing a sufficient connection area between the conductive adhesive 30 and the land 41 after the electronic component 10 is mounted. At a minimum, an adhesive height L that satisfies Equation 1 is given by
The amount of the conductive adhesive 30 is adjusted. Equation 1 is derived for the following reason.

【0037】即ち、図3(b)に示す様に、電子部品1
0の搭載時、突起状電極11が潰れる前は、基板40の
反りによって離れた状態にある突起状電極11の先端と
ランド41との隙間(電極−ランド隙間)は、dであ
る。ここで、図3(c)に示す様に、突起状電極11を
h分潰し込むと、上記電極−ランド隙間は(d−h)と
なる。
That is, as shown in FIG.
At the time of mounting 0, before the protruding electrode 11 is crushed, the gap (electrode-land gap) between the tip of the protruding electrode 11 and the land 41 which are separated by the warpage of the substrate 40 is d. Here, as shown in FIG. 3 (c), when the protruding electrode 11 is crushed by h, the electrode-land gap becomes (dh).

【0038】しかし、各構造体の上記ばらつきσ1等が
存在するため、実際の上記電極−ランド隙間の最大値
は、上記数式1の右辺に示す様に、(d−h)に対して
更にσ1等を含むルートの項が加わった値となる。そし
て、この電極−ランド隙間を導電性接着剤30にて埋め
る必要がある。従って、数式1を満足するように上記高
さLは決定される。
However, since there is the above-mentioned variation σ1 of each structure, the actual maximum value of the electrode-land gap is further increased by σ1 with respect to (dh) as shown on the right side of the above equation (1). It is the value to which the term of the route including etc is added. It is necessary to fill the electrode-land gap with the conductive adhesive 30. Therefore, the height L is determined so as to satisfy Equation 1.

【0039】次に、本実施形態について、以下の図4を
参照し、各部の寸法や条件等の一例を挙げながら、より
具体的に述べる。図4(a)、(b)、(c)は、本実
施形態における各部材の断面寸法を示す図である。本例
では、電子部品10として、チップサイズS1が4mm
□、突起状電極11のピッチS2が0.4mmのICチ
ップを用い、ランド幅S3が0.3mmであるランド4
1を有する基板40に実装した(図4(a)参照)。
Next, this embodiment will be described more specifically with reference to FIG. FIGS. 4A, 4B, and 4C are diagrams showing the cross-sectional dimensions of each member in the present embodiment. In this example, the electronic component 10 has a chip size S1 of 4 mm.
□ land 4 having a land width S3 of 0.3 mm using an IC chip having a pitch S2 of the projection-like electrodes 11 of 0.4 mm.
1 (see FIG. 4A).

【0040】突起状電極11は、金ワイヤを用いた通常
のワイヤボンディング手法にて、1段目を形成し、更
に、その上に同条件でワイヤボンディングを行うことに
より、くびれ部を有する2段型の突起状電極形状とし
た。図4(b)に示す様に、このときの電極高さHは1
50±15μmであり、その根元部分の径S4は100
μm、根元からくびれ部までの高さS5は70〜90μ
mとした。
The protruding electrode 11 is formed in the first stage by a normal wire bonding method using a gold wire, and is further subjected to wire bonding under the same conditions to form a two-stage having a constricted portion. The shape of the protruding electrode of the mold was used. As shown in FIG. 4B, the electrode height H at this time is 1
50 ± 15 μm, and the diameter S4 of the root portion is 100
μm, the height S5 from the root to the constriction is 70 to 90 μm
m.

【0041】次に、型部材20は、図4(c)に示す様
に、板状の本体に、貫通穴としての穴部21が形成され
たものを用いた。また、その材質は、導電性接着剤30
と離型性の良いフッ素系樹脂とした。ここで、穴部21
は、樹脂製の板に針材を用いて、印刷・注入面側から穴
あけすることで作製した。穴部21のピッチS6は、上
記突起状電極11のピッチS2に対応して400μmと
した。
Next, as shown in FIG. 4C, a mold member 20 having a plate-shaped main body and a hole 21 as a through hole formed therein was used. The material is a conductive adhesive 30
And a fluororesin having good mold release properties. Here, the hole 21
Was prepared by making a hole from the printing / injection surface side using a needle material on a resin plate. The pitch S6 of the holes 21 was 400 μm corresponding to the pitch S2 of the protruding electrodes 11.

【0042】また、上述したように、充填された導電性
接着剤30の量が多すぎると離型効果がなくなる。突起
状電極11のうち穴部21へ挿入される部分の最大径を
120μmとした場合において検討したところ、穴部2
1の内径S7が220μmよりも大きいと、上記離型効
果が無くなり、150μmよりも小さいと十分な量の導
電性接着剤30が転写されないことがわかった。なお、
使用した導電性接着剤30の粘度は1200Pa・s
(1回転粘度)である。そこで、本例では、該内径S7
を150μmとした。
As described above, if the amount of the conductive adhesive 30 filled is too large, the releasing effect is lost. When the maximum diameter of the portion of the protruding electrode 11 to be inserted into the hole 21 was 120 μm, the hole 2
It was found that when the inner diameter S7 of No. 1 was larger than 220 μm, the above-mentioned releasing effect was lost, and when it was smaller than 150 μm, a sufficient amount of the conductive adhesive 30 was not transferred. In addition,
The viscosity of the conductive adhesive 30 used is 1200 Pa · s
(1 rotation viscosity). Therefore, in this example, the inner diameter S7
Was set to 150 μm.

【0043】また、穴部21の深さ(本例では、型部材
20の板厚)S8は、突起状電極11の最大長さ(電極
高さHの最大値)よりも30μm以上長くしないと、特
に、上下方向に十分な量の導電性接着剤30が確保でき
ない。そこで、本例では、穴部21の深さS8を1mm
とした。また、本例では、穴部21が貫通穴であるので
空気の抜け性が良く、印刷時に導電性接着剤30が未充
填となるのを防止できる。なお、図4(c)において、
50は受け皿である。
The depth S8 of the hole 21 (the plate thickness of the mold member 20 in this example) must be longer than the maximum length of the protruding electrode 11 (the maximum value of the electrode height H) by at least 30 μm. Particularly, a sufficient amount of the conductive adhesive 30 cannot be secured in the vertical direction. Therefore, in this example, the depth S8 of the hole 21 is set to 1 mm
And Further, in this example, since the hole 21 is a through hole, air can be easily removed, and the conductive adhesive 30 can be prevented from being unfilled during printing. In FIG. 4C,
50 is a saucer.

【0044】この図4に示すようなICチップ(電子部
品)10、基板40、型部材20を用意した後、型部材
20の穴部21へ導電性接着剤30を、印刷・注入する
ことで充填した。図5は、この充填工程の説明図(概略
断面図)である。使用した導電性接着剤30は、エポキ
シ樹脂にAgフィラーを分散させたものを用いた。金属
スキージ60により、導電性接着剤30を型部材20の
上で移動させ、穴部21へ充填した。
After preparing an IC chip (electronic component) 10, a substrate 40 and a mold member 20 as shown in FIG. 4, a conductive adhesive 30 is printed and injected into the hole 21 of the mold member 20. Filled. FIG. 5 is an explanatory diagram (schematic sectional view) of this filling step. The used conductive adhesive 30 used was an epoxy resin in which an Ag filler was dispersed. The conductive adhesive 30 was moved on the mold member 20 by the metal squeegee 60 and was filled in the hole 21.

【0045】次に、部品搭載機(図示せず)により、I
Cチップ10の突起状電極11の形成面とは反対側の面
を吸着し、上方からICチップ10の突起状電極11
を、穴部21へ挿入した。この挿入は、ICチップ10
自体が型部材20と接触しないように、予め決められた
適切な挿入荷重(挿入距離)及び挿入時間にて行った。
Next, a component mounting machine (not shown) uses the
The surface of the C chip 10 opposite to the surface on which the projecting electrodes 11 are formed is attracted, and the projecting electrodes 11 of the IC chip 10 are
Was inserted into the hole 21. This insertion is performed by the IC chip 10
The test was performed with a predetermined appropriate insertion load (insertion distance) and insertion time so that the die itself did not come into contact with the mold member 20.

【0046】次に、導電性接着剤30が突起状電極11
の先端側に付着したICチップ10を、上記部品搭載機
によって、基板40のランド41上に搭載した。本例で
は、搭載荷重(搭載時の加圧)は1Nとした。そして、
ICチップ10を載せた基板40をオーブンに入れ、導
電性接着剤30の硬化を、150℃、10分間の条件に
て行った。なお、本例における転写された後の接着剤高
さLは、60μmであり、基板40のランド41との接
続は良好であった。
Next, the conductive adhesive 30 is applied to the protruding electrode 11.
Was mounted on the land 41 of the substrate 40 by the above-mentioned component mounting machine. In this example, the mounting load (pressurization during mounting) was 1N. And
The substrate 40 on which the IC chip 10 was mounted was placed in an oven, and the conductive adhesive 30 was cured at 150 ° C. for 10 minutes. The height L of the adhesive after the transfer in this example was 60 μm, and the connection with the land 41 of the substrate 40 was good.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施形態に係る電子部品の実装方法を
示す工程図である。
FIG. 1 is a process chart showing a method for mounting an electronic component according to an embodiment of the present invention.

【図2】上記実施形態における転写量増加の効果を説明
するための説明図である。
FIG. 2 is an explanatory diagram for explaining an effect of increasing a transfer amount in the embodiment.

【図3】(a)は突起状電極に付着する導電性接着剤の
量に関わるパラメータを示す図、(b)は電子部品搭載
時における突起状電極が潰れる前の電極−ランド隙間の
様子を示す図、(c)は電子部品搭載時における突起状
電極が潰れた後の電極−ランド隙間の様子を示す図であ
る。
3A is a diagram showing parameters relating to the amount of conductive adhesive adhering to a protruding electrode, and FIG. 3B is a view showing the state of an electrode-land gap before the protruding electrode is crushed when an electronic component is mounted. FIG. 3C is a diagram showing a state of an electrode-land gap after a protruding electrode is crushed when an electronic component is mounted.

【図4】上記実施形態における各部材の断面寸法を示す
図である。
FIG. 4 is a diagram showing a cross-sectional dimension of each member in the embodiment.

【図5】型部材の穴部への導電性接着剤の充填工程を説
明するための説明図である。
FIG. 5 is an explanatory diagram for explaining a step of filling a hole of a mold member with a conductive adhesive.

【図6】導電性接着剤を転写する方法を採用した従来の
一般的な実装方法を示す工程図である。
FIG. 6 is a process diagram showing a conventional general mounting method employing a method of transferring a conductive adhesive.

【図7】(a)は、基板に反り等による高さのばらつき
が発生した様子を示す概略断面図である。(b)は、導
電性接着剤をすくい易くした突起状電極形状を示す概略
断面図である。
FIG. 7A is a schematic cross-sectional view illustrating a state in which a variation in height due to warpage or the like has occurred in a substrate. (B) is a schematic sectional view showing a protruding electrode shape in which a conductive adhesive is easily scooped.

【符号の説明】[Explanation of symbols]

10…電子部品(ICチップ)、11…突起状電極、2
0…型部材、21…穴部、30…導電性接着剤、40…
基板、41…ランド(導体部)。
10 electronic components (IC chip), 11 projecting electrodes, 2
0: mold member, 21: hole, 30: conductive adhesive, 40:
Substrate, 41 ... land (conductor part).

───────────────────────────────────────────────────── フロントページの続き (72)発明者 長坂 崇 愛知県刈谷市昭和町1丁目1番地 株式会 社デンソー内 Fターム(参考) 5E319 AA03 AB05 BB11 CC03 CC61 CD25 GG01 5F044 KK01 LL07 QQ01  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Takashi Nagasaka 1-1-1, Showa-cho, Kariya-shi, Aichi F-term in DENSO Corporation (reference) 5E319 AA03 AB05 BB11 CC03 CC61 CD25 GG01 5F044 KK01 LL07 QQ01

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 一面側に突起状電極(11)が形成され
た電子部品(10)を用意し、前記突起状電極の先端側
に導電性接着剤(30)を転写することにより付着させ
る工程と、 続いて、前記電子部品の一面を基板(40)の一面と対
向させ、前記導電性接着剤が付着した前記突起状電極の
先端側を、前記基板の一面側に形成された導体部(4
1)に電気的に接続する工程とを実行する電子部品の実
装方法において、 前記突起状電極に対応した位置に前記突起状電極を挿入
可能な穴部(21)が形成され、且つ、この穴部の内面
が前記突起状電極よりも前記導電性接着剤との密着性の
低い型部材(20)を用意し、 この穴部内に前記導電性接着剤を充填し、 続いて、前記突起状電極の先端側を前記穴部へ挿入した
後引き出すことにより、前記導電性接着剤の転写を行う
ことを特徴とする電子部品の実装方法。
1. A step of preparing an electronic component (10) having a protruding electrode (11) formed on one surface side, and attaching a conductive adhesive (30) to the tip side of the protruding electrode by transfer. Then, one surface of the electronic component is opposed to one surface of the substrate (40), and the tip side of the protruding electrode to which the conductive adhesive is attached is connected to the conductor portion ( 4
1) A method of mounting an electronic component, the method comprising: a step of electrically connecting the electronic component to the electronic component, wherein a hole (21) into which the projecting electrode can be inserted is formed at a position corresponding to the projecting electrode; A mold member (20) having an inner surface of a portion having lower adhesion to the conductive adhesive than the protruding electrode is prepared, and the conductive adhesive is filled in the hole; A method of mounting the electronic component, wherein the conductive adhesive is transferred by inserting the leading end of the conductive adhesive into the hole and then pulling out the conductive adhesive.
【請求項2】 前記型部材(20)は、フッ素系樹脂よ
りなることを特徴とする請求項1に記載の電子部品の実
装方法。
2. The method according to claim 1, wherein the mold member is made of a fluorine resin.
【請求項3】 電子部品(10)の一面側に形成された
突起状電極(11)の先端側に導電性接着剤(30)を
転写することにより付着させるために用いられる型部材
であって、 前記突起状電極に対応した位置に前記突起状電極を挿入
可能な穴部(21)を備えており、この穴部の内面は、
前記突起状電極よりも前記導電性接着剤との密着性が低
いことを特徴とする型部材。
3. A mold member used for transferring and attaching a conductive adhesive (30) to a tip end of a protruding electrode (11) formed on one surface of an electronic component (10). A hole (21) into which the projecting electrode can be inserted at a position corresponding to the projecting electrode;
A mold member having lower adhesion to the conductive adhesive than the protruding electrode.
JP2000090738A 2000-03-27 2000-03-27 Electronic component mounting method Expired - Fee Related JP4114299B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000090738A JP4114299B2 (en) 2000-03-27 2000-03-27 Electronic component mounting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000090738A JP4114299B2 (en) 2000-03-27 2000-03-27 Electronic component mounting method

Publications (2)

Publication Number Publication Date
JP2001274198A true JP2001274198A (en) 2001-10-05
JP4114299B2 JP4114299B2 (en) 2008-07-09

Family

ID=18606305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000090738A Expired - Fee Related JP4114299B2 (en) 2000-03-27 2000-03-27 Electronic component mounting method

Country Status (1)

Country Link
JP (1) JP4114299B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8551275B2 (en) 2005-03-30 2013-10-08 Brother Kogyo Kabushiki Kaisha Adhesive application method and terminal joining method
JP2021077796A (en) * 2019-11-12 2021-05-20 日亜化学工業株式会社 Method for manufacturing semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8551275B2 (en) 2005-03-30 2013-10-08 Brother Kogyo Kabushiki Kaisha Adhesive application method and terminal joining method
JP2021077796A (en) * 2019-11-12 2021-05-20 日亜化学工業株式会社 Method for manufacturing semiconductor device
JP7060809B2 (en) 2019-11-12 2022-04-27 日亜化学工業株式会社 Manufacturing method of semiconductor device

Also Published As

Publication number Publication date
JP4114299B2 (en) 2008-07-09

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