JP2001267376A - Manufacturing method of fpc and display - Google Patents

Manufacturing method of fpc and display

Info

Publication number
JP2001267376A
JP2001267376A JP2000070654A JP2000070654A JP2001267376A JP 2001267376 A JP2001267376 A JP 2001267376A JP 2000070654 A JP2000070654 A JP 2000070654A JP 2000070654 A JP2000070654 A JP 2000070654A JP 2001267376 A JP2001267376 A JP 2001267376A
Authority
JP
Japan
Prior art keywords
tin plating
pattern
solder resist
resist
fpc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000070654A
Other languages
Japanese (ja)
Inventor
Tsutomu Matsudaira
努 松平
Nobukazu Koizumi
信和 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Maruwa Seisakusho KK
Original Assignee
Seiko Instruments Inc
Maruwa Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc, Maruwa Seisakusho KK filed Critical Seiko Instruments Inc
Priority to JP2000070654A priority Critical patent/JP2001267376A/en
Publication of JP2001267376A publication Critical patent/JP2001267376A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To achieve an inexpensive FPC and a display that prevent lead burnout caused through tin plating, and the occurrence of resist peel-off in a soldering process. SOLUTION: First tin plating is formed on a copper pattern is subjected to patterning. After that, resist is formed, and second tin plating is made on the copper pattern of a part where the resist is not formed, thus achieving an inexpensive flexible substrate having a fine pattern.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ファインパターン
回路(パターンが100μmピッチ以下のもの)を形成
したフイルム基板の製造方法と携帯機器等や、電子手帳
に使用されている表示装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a film substrate on which a fine pattern circuit (having a pattern of 100 .mu.m pitch or less) is formed, and a display device used for portable equipment and an electronic organizer.

【0002】[0002]

【従来の技術】液晶表示装置はドライバIC実装とC、
R等のチップ部品やパッケージIC等の電子部品をフイ
ルム基板に混在実装したCOF(Chip On FP
C)を液晶パネルに実装した製品が量産され始めてい
る。
2. Description of the Related Art A liquid crystal display device has a driver IC mounting and C,
COF (Chip On FP) in which chip parts such as R and electronic parts such as package ICs are mixedly mounted on a film substrate.
A product in which C) is mounted on a liquid crystal panel has begun to be mass-produced.

【0003】従来、フイルム基板はポリイミドフイルム
にフイルム状の接着剤をつけ、圧延や電解等の製法のC
u箔を貼りつけてパターニングして形成し、レジストコ
ートや表面保護のための電解メッキや無電解メッキをし
ていた。
[0003] Conventionally, a film substrate is prepared by applying a film-like adhesive to a polyimide film and forming a film by a method such as rolling or electrolysis.
It was formed by applying a u-foil and patterning it, and was subjected to electrolytic plating or electroless plating for resist coating and surface protection.

【0004】このような3層の構成のフイルム基板は、
接着剤が熱や湿度によって変形するため、100μmピ
ッチ以下のファインパターンには寸法安定性の面で不向
きであった。
A film substrate having such a three-layer structure is:
Since the adhesive was deformed by heat and humidity, it was not suitable for fine patterns having a pitch of 100 μm or less in terms of dimensional stability.

【0005】そのため、この接着剤を取り除いたフイル
ム基板が開発させるようになった。接着剤層のない2層
フイルム基板には、2つの製法がある。
Therefore, a film substrate from which the adhesive has been removed has been developed. There are two manufacturing methods for a two-layer film substrate without an adhesive layer.

【0006】一つはCu箔にポリアミック酸ワニスを塗
り溶媒を除去した後に硬化するキャスティング法と、ポ
リイミドフイルムに例えば、ニクロム合金、モリブデ
ン、チタン、ニッケル、コバルト、クロム、パラジュー
ム、ジルコニューム、モリブデン、タングステンなどの
密着性改善のため金属薄膜を形成し、Cuをスパッタリ
ングもしくは蒸着してCu薄膜を形成した後、さらに電
解メッキでCuを積層する蒸着法がある。
[0006] One is a casting method in which a polyamic acid varnish is applied to a Cu foil and cured after the solvent is removed. For example, there is a vapor deposition method in which a metal thin film is formed to improve adhesion, and Cu is sputtered or vapor deposited to form a Cu thin film, and then Cu is laminated by electrolytic plating.

【0007】これら製法におけるフイルム基板の違い
は、Cuの厚みである。キャスティング法に使われるC
uの厚みは、一般的には35μmや18μmであり、最
近では12μmが量産化されている。また、9μmが開
発中である。蒸着法では、Cuの厚みが1から18μm
まで量産可能である。
[0007] The difference between the film substrates in these manufacturing methods is the thickness of Cu. C used for casting method
The thickness of u is generally 35 μm or 18 μm, and recently 12 μm has been mass-produced. 9 μm is under development. In the vapor deposition method, the thickness of Cu is 1 to 18 μm
Mass production is possible.

【0008】ファインパターンを形成するために、キャ
スティング法には電解Cu箔をハーフエッチングしてか
らパターニングする方法があるが、Cu箔の表面粗さが
比較的大きいため、安定した歩留まりを得るのは容易で
ない。パターンが100μmピッチ以下では、Cuの厚
みが均一に薄くできる蒸着法のフイルム基板の方が適し
ていた。
In order to form a fine pattern, there is a casting method in which an electrolytic Cu foil is half-etched and then patterned. However, since the surface roughness of the Cu foil is relatively large, a stable yield cannot be obtained. Not easy. When the pattern has a pitch of 100 μm or less, a film substrate formed by a vapor deposition method that can uniformly reduce the thickness of Cu is more suitable.

【0009】また、ICのベアチップ実装は、接着を用
いて接続する場合、ICのパットにAuからなるバンプ
をメッキで形成したメッキバンプやワイヤーボンディン
グを応用したスタッドバンプを用いて、回路基板に異方
性導電膜で圧着するか、または銀ペーストをバンプに転
写して基板と接続し、その間にアンダーフィルを充填し
接続していた。
[0009] In the bare chip mounting of the IC, when connection is performed by using an adhesive, a different bump is applied to the circuit board by using a plating bump formed by plating a bump made of Au on the IC pad or a stud bump applying wire bonding. It has been press-bonded with an isotropic conductive film or transferred to a substrate by transferring a silver paste to a bump, and an underfill has been filled and connected between them.

【0010】また、金属拡散接続を用いた場合、ICの
バンプに半田を用い、基板の電極に半田付けしアンダー
フィルを充填する工法とICのバンプにAuを用い基板
側の電極にSnメッキを行ない、Au−Sn拡散接続を
行いアンダーフィルを充填していた。
When metal diffusion connection is used, solder is used for the bumps of the IC, soldering is performed on the electrodes of the substrate, and underfill is filled. Au is used for the bumps of the IC, and Sn plating is performed on the electrodes on the substrate side. Then, Au-Sn diffusion connection was performed to fill the underfill.

【0011】ICの外部接続電極のバンプピッチは、例
えば液晶駆動用のICでは80μmピッチが量産をされ
ているが、ICのプロセス開発が進み小型化へ進んでい
る。そのため、ICの外部接続電極のバンプピッチは5
0μmピッチが量産始まり、40μmピッチが開発され
ている。
The bump pitch of the external connection electrode of the IC is, for example, 80 μm in the mass for the liquid crystal driving IC, but the process development of the IC is progressing and the miniaturization is progressing. Therefore, the bump pitch of the external connection electrode of the IC is 5
Mass production of 0 μm pitch has begun, and 40 μm pitch has been developed.

【0012】一方、液晶表示装置はフイルム基板にICを
接続したCOFを液晶パネルに接続して液晶表示装置を
製造していた。COFは液晶駆動ICやC、Rのチップ
部品更に電源ICやオペアンプなどのパッケージを高密
度に実装できるため、液晶表示装置を小型化薄型化に出
来る。この液晶表示装置は携帯機器に多く使用されてお
り、中でも携帯電話やPDAに代表される携帯情報端末
の需要が近年大きく伸びつつある。
On the other hand, a liquid crystal display device has been manufactured by connecting a COF having an IC connected to a film substrate to a liquid crystal panel. Since the COF can package packages such as a liquid crystal driving IC, C and R chip components, a power supply IC and an operational amplifier at a high density, the liquid crystal display device can be reduced in size and thickness. This liquid crystal display device is widely used in portable devices, and in particular, the demand for portable information terminals represented by portable telephones and PDAs has been increasing significantly in recent years.

【0013】[0013]

【発明が解決しようとする課題】40μmピッチの液晶
駆動ICを用いるためには、接続するフイルム基板のパ
ターンの幅は10から15μmとなる。
In order to use a liquid crystal driving IC having a pitch of 40 μm, the width of the pattern of the film substrate to be connected is 10 to 15 μm.

【0014】このパターンとICのバンプを接続するに
は、金とスズの共晶接続がもっとも安定した接続を得る
事が出来る。
In order to connect this pattern to the bump of the IC, the most stable connection can be obtained by eutectic connection of gold and tin.

【0015】FPCのフィルムにはファインパターンを
形成するのには蒸着法のフィルムを使用するが、この蒸
着法のフィルムを用いて製造する工程は、銅箔をフォト
法でパターンを形成し、感光性等のソルダーレジストを
フォト法で形成し、更に無電界スズメッキをおこなっ
た。
For forming a fine pattern on an FPC film, a film formed by a vapor deposition method is used. In the process of manufacturing using the film formed by the vapor deposition method, a pattern is formed on a copper foil by a photo method, and a photosensitive film is formed. A solder resist having properties and the like was formed by a photo method, and further, electroless tin plating was performed.

【0016】このスズメッキの工程において、特に40
μmピッチで連続したパターンを形成した部分のレジス
トの境界部で断線が多発した。
In this tin plating step, in particular,
Disconnection occurred frequently at the boundary of the resist in a portion where a continuous pattern was formed at a pitch of μm.

【0017】このFPCの断線は、無電界スズメッキは
Cuとチオ尿酸と置換し、チオ尿酸とスズが置換してス
ズがメッキされるが、特に隙間においてスズが入り込ま
ずチオ尿酸とCuのみの置換が促進するためにパターン
にクワレが発生する。
In the disconnection of the FPC, the electroless tin plating is substituted with Cu and thiouric acid, and the thiouric acid is substituted with tin and plated with tin. Cracks occur in the pattern due to the promotion of

【0018】このような断線に至るクワレは、2つの個
所で発生しやすい。第一のクワレはレジストとパターン
の境界で、第二のクワレはパターンとポリイミドフィル
ムが剥がれた部分である。
[0018] Such cracking leading to disconnection is likely to occur in two places. The first crack is a boundary between the resist and the pattern, and the second crack is a portion where the pattern and the polyimide film are peeled off.

【0019】この第一のクワレは、TAB(Tape Autom
ated Bonding)テープの製造上においても同様の現象が
発生しており、特開2000−36521号公報に公開
されている。この場合、TABはユーピレツクスなどの
ポリイミドフィルムに18μmの電解銅箔をエポキシ接
着剤で貼りつけた原料を使用する。断線の個所は、レジ
ストとパターンの界面で発生している。この対処とし
て、スズメッキ工程をレジスト形成前と後の2つに分け
ることで解決している。根本的には、レジスト形成前に
スズメッキを行なうことが処置であり、特開平6−34
2969号公報にそのプロセスが公開されている。
This first quarry is made of TAB (Tape Autom
A similar phenomenon has occurred in the production of an ated bonding tape, which is disclosed in JP-A-2000-36521. In this case, TAB uses a raw material in which 18 μm electrolytic copper foil is adhered to a polyimide film such as Iupirex by an epoxy adhesive. The disconnection occurs at the interface between the resist and the pattern. To solve this problem, the tin plating process is divided into two parts, one before and after the resist is formed. Basically, tin plating is performed before forming a resist.
No. 2,969, discloses the process.

【0020】第二のクワレはポリイミドとパターンの剥
がれにより、レジストの境界部に集中しており、メッキ
前のFPCのハンドリングにより、FPCはポリイミド
が50μm以下と銅箔が12μm以下であれば簡単に曲
がるためこのレジスト境界部にストレスが集中しパター
ンがポリイミドより剥がれるため、この隙間でクワレが
発生する。そのため、スズメッキの工程が基本的にレジ
スト形成後は不可である。
The second crack is concentrated on the boundary of the resist due to the peeling of the polyimide and the pattern. By handling the FPC before plating, the FPC can be easily prepared if the polyimide is 50 μm or less and the copper foil is 12 μm or less. Due to bending, stress concentrates on the resist boundary portion, and the pattern is peeled off from the polyimide. Therefore, the tin plating process is basically impossible after the formation of the resist.

【0021】第一のクワレと第二のクワレを防止するた
めにはレジスト形成前にスズメツキを行なうことが良い
が、スズメツキはレジストの下にもあるため、半田付け
工程で半田がレジスト下に入り込み、レジストが剥がれ
る不具合が多発した。スズメッキの厚みはICを金とス
ズの共晶接続するために薄く出来ない。
In order to prevent the first cracking and the second cracking, it is preferable to perform a tin plate before forming the resist. However, since the tin plate is also under the resist, the solder enters under the resist in the soldering process. In many cases, the resist was peeled off. The thickness of the tin plating cannot be reduced because the IC is connected to the eutectic of gold and tin.

【0022】つまり本発明は、スズメッキによるリード
断線のないまた、半田工程でレジスト剥がれの発生しな
いの安価なFPC及び表示装置を得る事にある。
That is, an object of the present invention is to provide an inexpensive FPC and display device which does not have lead disconnection due to tin plating and does not cause peeling of resist in a soldering process.

【0023】[0023]

【問題が解決するための手段】上記問題を解決するため
に少なくとも50μm以下の厚みのポリイミドフィルム
に銅を蒸着とメッキにより10μm以下の厚みに形成し
たフィルムにパターンを形成しスズメッキした金属配線
とソルダーレジストを形成したFPCの製造方法におい
て、少なくとも銅をパターニングする工程と第一の
スズメッキをする工程とソルダーレジストを形成する
工程と第二のスズメッキをする工程としたことで解決
をした。
Means for Solving the Problems To solve the above problems, tin-plated metal wiring and solder are formed by depositing copper on a polyimide film having a thickness of at least 50 μm or less and forming a pattern on the film having a thickness of 10 μm or less by plating and plating. The problem has been solved by at least a step of patterning copper, a step of performing first tin plating, a step of forming a solder resist, and a step of performing second tin plating in a method of manufacturing an FPC having a resist formed thereon.

【0024】更に、はんだ工程でのレジスト剥がれを防
止するために、第一のスズメッキ工程の後とソルダーレ
ジストを形成する工程の間に、第一のスズメッキのはん
だ濡れ性を抑えるための処理工程を行なうこととした。
Further, in order to prevent the resist from peeling off in the soldering step, a processing step for suppressing the solder wettability of the first tin plating is provided between the step of forming the solder resist and the step of forming the solder resist. I decided to do it.

【0025】更に、第二のクワレを防止するために10
0μmピッチ以下の連続したパターンには、ソルダーレ
ジストの境界は、斜めまたは山形の形状を連続して形成
とする事で応力を分散して、ポリイミドとパターンの密
着性を確保した。
Further, in order to prevent the second cracking, 10
In a continuous pattern having a pitch of 0 μm or less, the boundary between the solder resists was formed by continuously forming an oblique or chevron shape to disperse stress and secure adhesion between the polyimide and the pattern.

【0026】また、スズメッキを2回行なう事で、メッ
キ界面の強度を高めるために第一のスズメッキ後及び第
二のスズメッキ後には、それぞれウィスカ防止のための
アニール処理を行なう事により第一のスズメッキ層と第
二のスズメッキ層にはCuとの拡散層を形成する事でメ
ッキの境界を無くし、強度を確保した。
In addition, by performing tin plating twice, after the first tin plating and after the second tin plating, an annealing process for preventing whiskers is performed to increase the strength of the plating interface, so that the first tin plating is performed. By forming a diffusion layer with Cu on the layer and the second tin plating layer, the boundaries of plating were eliminated, and the strength was secured.

【0027】また、少なくとも50μm以下の厚みのポ
リイミドフィルムに銅を蒸着とメッキで10μm以下に
形成したフィルムにパターンとソルダーレジストを形成
したFPCとSMDと半導体と表示体からなる表示装置
において、該銅パターンの全面もしくは一部分にスズメ
ッキがされており、ソルダーレジストがコートされてい
る部分のスズメツキの厚みよりパターンが露出している
部分のスズメッキを厚くすることで、前記問題を解決し
た安価な表示装置を得る事が出来た。
Further, in a display device comprising an FPC, an SMD, a semiconductor, and a display body, in which a pattern and a solder resist are formed on a film formed to a thickness of at least 10 μm by depositing and plating copper on a polyimide film having a thickness of at least 50 μm, An inexpensive display device that solves the above-described problem by tinning the entire surface or a part of the pattern and increasing the thickness of the tin plating where the pattern is exposed from the thickness of the tinplate in the portion where the solder resist is coated. I got it.

【0028】更に、100μmピッチ以下の連続したパ
ターンには、ソルダーレジストの境界は、斜めまたは山
形の形状を連続して形成していることで同様に安価な表
示装置を実現することが出来た。
Further, in a continuous pattern having a pitch of 100 μm or less, the boundary between the solder resists is formed in a diagonal or mountain-like shape continuously, so that an inexpensive display device can be realized.

【0029】[0029]

【発明の実施の形態】以下に本発明の実施例を図面に基
づいて説明する。 (実施例1)本発明の実施例1の製造工程を図1を用いて
説明する。(a)に示すように、25μmの厚みのポリ
イミドフィルム1にCuを8μmの厚みに蒸着とメッキ
により形成する。次に、(b)に示す様にこのフィルム
をフォト法によりエッチングを行ないパターニングす
る。次に、(c)に示すように、パターニングされたパ
ターン2の全面に第一のスズメッキ3を形成する。この
第1のスズメッキ形成はメッキ液50℃に30秒の条件
で行なう。部分的に金めっきをする場合はメッキマスク
で保護してメッキを行なう。次に(d)に示すように、
ソルダーレジスト4を感光性レジストを用いて形成す
る。ソルダーレジストは、約10μmの厚みで形成後、
密着性を改善するために170℃60分の熱処理をおこ
なう。この時レジストに応力がかからないように搬送を
行なう。そして、(e)に示すように第二のスズメッキ
5を形成する。第二のスズメッキ5はメッキ液50℃で
7分の条件で形成される。そして、ウィスカを防止する
ため120℃60分のアニール処理を行ない、Cuとの
拡散層と純スズ層を形成する。この時拡散層は第一のス
ズメッキと第二のスズメッキの一部であり、第二のスズ
メッキの拡散層以外が純スズ層となる。この拡散層を第
一のスズメッキと第二のスズメッキにより形成させる事
で、第一のスズメッキと第二のスズメッキの密着性が向
上する。
Embodiments of the present invention will be described below with reference to the drawings. (Example 1) A manufacturing process of Example 1 of the present invention will be described with reference to FIG. As shown in (a), Cu is formed on a polyimide film 1 having a thickness of 25 μm by vapor deposition and plating to a thickness of 8 μm. Next, this film is etched by a photo method and patterned as shown in FIG. Next, as shown in (c), the first tin plating 3 is formed on the entire surface of the patterned pattern 2. The formation of the first tin plating is performed at a plating solution temperature of 50 ° C. for 30 seconds. In the case of partially plating with gold, plating is performed with protection by a plating mask. Next, as shown in (d),
The solder resist 4 is formed using a photosensitive resist. After forming the solder resist with a thickness of about 10 μm,
A heat treatment at 170 ° C. for 60 minutes is performed to improve the adhesion. At this time, the resist is conveyed so that no stress is applied to the resist. Then, the second tin plating 5 is formed as shown in FIG. The second tin plating 5 is formed at a plating solution of 50 ° C. for 7 minutes. Then, annealing is performed at 120 ° C. for 60 minutes to prevent whiskers, thereby forming a diffusion layer with Cu and a pure tin layer. At this time, the diffusion layer is a part of the first tin plating and the second tin plating, and the layers other than the diffusion layer of the second tin plating become pure tin layers. By forming this diffusion layer by the first tin plating and the second tin plating, the adhesion between the first tin plating and the second tin plating is improved.

【0030】FPCは片面配線にこだわるものではな
く、両面配線基板でも多層配線基板でも同様である。ま
た、金などと二色メッキを行う場合は、スズメッキの前
後にその部分にメッキマスクでカバーして金メッキをお
こなう。 (実施例2)実施例1の工程で、第一のスズメッキを形成
後、半田が濡れにくくする為にスズと銅の合金を形成す
る。窒素雰囲気中で約180℃1時間の熱処理によりお
よそスズと銅の合金比率が9:1で融点が約380℃と
なり半田に対し濡れが悪くなる。また、表面酸化膜を形
成することでスズの濡れを悪くすることも可能である。
上述した熱処理を大気中で行うことで表面酸化膜を形成
することができるので、更に半田濡れを悪くすることが
できる。 (実施例3)図2は本発明の実施例3によるレジストと
パターンの境界部の上面図である。パターン3は40μ
mピッチでパターン幅10μmで形成してある。曲げに
より1ラインにかかる応力を緩和する為にレジスト4を
山形の形状で形成した。形状は山形にこだわるものでは
なく、応力が緩和できるものであれば良い。 (実施例4)実施例1の工程で、第一のスズメッキ工程
後に熱処理により銅との合金層を形成し、更に第二のス
ズメッキの工程後にも熱処理することで、第一のスズメ
ッキに拡散した銅が第二のスズメッキにも拡散し第一の
スズメッキと第二のスズメッキとの境界の密着性が向上
する。更に拡散を進めるには加熱と共に加圧する方法が
ある。 (実施例5)本発明による表示装置の断面図を図3に示
す。実施例1〜4で説明したFPCを用いており、25
μmの厚みのポリイミドフィルム1に8μmの銅箔を蒸
着とメッキにより形成したパターンが設けられている。
ソルダーレジスト4は、端子部以外に形成されており、
ソルダーレジスト4でコートされている電極には銅と合
金を形成したスズメツキが0.05μm被覆してある。
その他の露出してある端子5には0.17μmの拡散層
と0.17μmの純スズ層を形成している。純スズ層の
厚みはIC6の金バンプとの接続の為の厚みで、厚い場
合はブリッジによるショートが発生し、薄いと強度が弱
い。IC6との接続だけではなく、コンデンサ7等のチ
ップ部品との半田接続及び表示パネル8との接続端子も
同じ構成のメッキ処理である。半田接続部では、ソルダ
ーレジスト下にもスズメッキがあるが、スズメッキが薄
くかつ銅との合金が形成してあるため、半田がレジスト
下に潜ることが無く安定した半田付け加工が可能とな
る。表示パネル8との接続は従来のように異方性導電膜
(図示しない)により特に問題無く接続できる。
The FPC is not limited to single-sided wiring, and the same applies to double-sided wiring boards and multilayer wiring boards. In the case of performing two-color plating with gold or the like, gold plating is performed by covering the portion with a plating mask before and after tin plating. (Example 2) In the process of Example 1, after forming the first tin plating, an alloy of tin and copper is formed in order to make the solder hard to wet. Heat treatment at about 180 ° C. for 1 hour in a nitrogen atmosphere causes the alloy ratio of tin to copper to be about 9: 1, the melting point to be about 380 ° C., and poor solder wetting. In addition, it is also possible to make tin less wet by forming a surface oxide film.
By performing the above-described heat treatment in the air, a surface oxide film can be formed, so that solder wettability can be further reduced. (Embodiment 3) FIG. 2 is a top view of a boundary portion between a resist and a pattern according to Embodiment 3 of the present invention. Pattern 3 is 40μ
It is formed with a pattern width of 10 μm at m pitches. The resist 4 was formed in a chevron shape in order to reduce the stress applied to one line due to bending. The shape is not limited to a mountain shape, but may be any shape that can relieve stress. (Example 4) In the process of Example 1, an alloy layer with copper was formed by heat treatment after the first tin plating step, and further heat treatment was performed after the second tin plating step, so that the alloy layer was diffused into the first tin plating. Copper is also diffused into the second tin plating, and the adhesion between the first tin plating and the second tin plating is improved. In order to further promote diffusion, there is a method of applying pressure together with heating. (Embodiment 5) FIG. 3 is a sectional view of a display device according to the present invention. The FPC described in Examples 1 to 4 is used, and 25
A pattern formed by depositing and plating 8 μm copper foil on a polyimide film 1 having a thickness of μm is provided.
The solder resist 4 is formed other than the terminal portion,
The electrode coated with the solder resist 4 is covered with a tin plate formed of an alloy with copper by 0.05 μm.
On the other exposed terminals 5, a diffusion layer of 0.17 μm and a pure tin layer of 0.17 μm are formed. The thickness of the pure tin layer is a thickness for connection with the gold bump of the IC 6, and when it is thick, a short circuit occurs due to a bridge, and when it is thin, the strength is weak. Not only the connection with the IC 6 but also the solder connection with a chip component such as the capacitor 7 and the connection terminal with the display panel 8 are plated with the same configuration. At the solder connection part, there is tin plating under the solder resist. However, since the tin plating is thin and an alloy with copper is formed, the solder can be stably soldered without dipping under the resist. The connection with the display panel 8 can be made without any particular problem by using an anisotropic conductive film (not shown) as in the related art.

【0031】[0031]

【発明の効果】以上説明したように、本発明によれば、
スズメッキ工程による断線と半田付け工程でのレジスト
の剥がれの無い安価なFPC及び表示装置を提供できる
ようになった。
As described above, according to the present invention,
It has become possible to provide an inexpensive FPC and a display device which are free from disconnection by a tin plating process and peeling of a resist in a soldering process.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のフイルム基板の製造工程を示した模式
図。
FIG. 1 is a schematic view showing a process for manufacturing a film substrate of the present invention.

【図2】本発明のフイルム基板のレジスト形状を示した
上面図。
FIG. 2 is a top view showing a resist shape of the film substrate of the present invention.

【図3】本発明による表示装置の構成を模式的に示す断
面図。
FIG. 3 is a cross-sectional view schematically showing a configuration of a display device according to the present invention.

【符号の説明】[Explanation of symbols]

1 ポリイミドフィルム 2 パターン 3 第一のスズメッキ 4 ソルダーレジスト 5 第二のスズメッキ 6 IC 7 コンデンサ 8 表示パネル DESCRIPTION OF SYMBOLS 1 Polyimide film 2 Pattern 3 First tin plating 4 Solder resist 5 Second tin plating 6 IC 7 Capacitor 8 Display panel

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C25D 5/50 C25D 5/50 5E343 5/56 5/56 B 5F044 7/00 7/00 J G02F 1/1345 G02F 1/1345 H01R 4/02 H01R 4/02 Z H05K 3/18 H05K 3/18 D 3/24 3/24 D (72)発明者 小泉 信和 神奈川県藤沢市村岡東1丁目18番地の2 株式会社丸和製作所内 Fターム(参考) 2H092 GA50 GA60 MA11 MA34 NA15 NA18 NA27 NA29 PA06 4K022 AA02 AA15 AA42 BA21 BA31 BA35 DA01 EA01 4K024 AA07 AA09 AB03 AB04 AB06 AB08 AB15 AB17 BA14 BB11 DB01 DB10 FA05 GA14 GA16 4K044 AA16 AB02 BA06 BA10 BB04 BB05 BC08 CA13 CA15 CA18 CA62 5E085 BB09 BB26 CC01 DD01 EE23 JJ27 JJ35 5E343 AA18 BB14 BB18 BB23 BB24 BB34 BB54 DD21 DD23 DD32 DD76 ER18 GG03 5F044 MM03 MM04 MM23 MM48 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) C25D 5/50 C25D 5/50 5E343 5/56 5/56 B 5F044 7/00 7/00 J G02F 1 / 1345 G02F 1/1345 H01R 4/02 H01R 4/02 Z H05K 3/18 H05K 3/18 D 3/24 3/24 D (72) Inventor Nobukazu Koizumi 1-18-18 Muraoka Higashi, Fujisawa City, Kanagawa Prefecture F-term (reference) 2H092 GA50 GA60 MA11 MA34 NA15 NA18 NA27 NA29 PA06 4K022 AA02 AA15 AA42 BA21 BA31 BA35 DA01 EA01 4K024 AA07 AA09 AB03 AB04 AB06 AB08 AB15 AB17 BA14 BB11 DB01 DB10 FA05 GA16 BA10 A04 BB05 BC08 CA13 CA15 CA18 CA62 5E085 BB09 BB26 CC01 DD01 EE23 JJ27 JJ35 5E343 AA18 BB14 BB18 BB23 BB24 BB34 BB54 DD21 DD23 DD32 DD76 ER18 GG03 5F044 MM03 MM04 MM23 MM48

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 50μm以下の厚みのポリイミドフィル
ムに銅を12μm以下の厚みに形成する工程と、前記銅
をパターニングしてパターンを形成する工程と、前記パ
ターン上に第一のスズメッキをする工程と、選択的にソ
ルダーレジストを形成する工程と、第二のスズメッキを
する工程と、を有することを特徴とするFPCの製造方
法。
A step of forming copper on a polyimide film having a thickness of 50 μm or less to a thickness of 12 μm or less; a step of patterning the copper to form a pattern; and a step of performing first tin plating on the pattern. A method of selectively forming a solder resist and a step of performing second tin plating.
【請求項2】 前記第一のスズメッキ工程と前記ソルダ
ーレジストを形成する工程の間に、第一のスズメッキ層
のはんだ濡れ性を抑えるための処理工程を行なうことを
特徴とする請求項1に記載のFPCの製造方法。
2. The method according to claim 1, wherein a processing step for suppressing solder wettability of the first tin plating layer is performed between the first tin plating step and the step of forming the solder resist. FPC manufacturing method.
【請求項3】 100μmピッチ以下の連続したパター
ンには、ソルダーレジストの境界が、斜めまたは山形や
波型の形状で連続して形成されていることを特徴とする
請求項1に記載のFPCの製造方法。
3. The FPC according to claim 1, wherein the boundary of the solder resist is continuously formed in a continuous pattern having a pitch of 100 μm or less in an oblique, chevron, or wavy shape. Production method.
【請求項4】 前記第二のスズメッキを形成した後、第
一のスズメッキ層と第二のスズメッキ層の境界に銅との
合金層を形成することを特徴とする請求項1または2に
記載のFPCの製造方法。
4. The method according to claim 1, wherein after forming the second tin plating, an alloy layer with copper is formed at a boundary between the first tin plating layer and the second tin plating layer. Manufacturing method of FPC.
【請求項5】 表示素子と、駆動用の電子部品と、前記
表示素子と前記電子部品を電気的に接続するFPCを備
える表示装置において、 前記FPCは、50μm以下の厚みのポリイミドフィル
ムと、前記ポリイミドフィルム上に設けられた10μm
以下の銅パターンと、前記銅パターンに設けられたスズ
メッキと、前記ポリイミドフィルム及び前記銅パターン
の一部に設けられたソルダーレジストと、を備え、 前記ソルダーレジストが設けられた部分の銅パターンの
スズメッキの厚みよりも、前記ソルダーレジストが設け
られていない部分の銅パターンのスズメッキが厚いこと
を特徴とする表示装置。
5. A display device comprising a display element, a driving electronic component, and an FPC for electrically connecting the display element and the electronic component, wherein the FPC comprises: a polyimide film having a thickness of 50 μm or less; 10μm provided on polyimide film
The following copper pattern, tin plating provided on the copper pattern, and a solder resist provided on a part of the polyimide film and the copper pattern, tin plating of the copper pattern of the portion provided with the solder resist A display device characterized in that tin plating of a copper pattern in a portion where the solder resist is not provided is thicker than a thickness of the solder resist.
【請求項6】 前記銅パターンの100μmピッチ以下
の部分に設けられたソルターレジストは、該ソルダーレ
ジストの境界が斜めまたは山形の連続した形状で形成さ
れていることを特徴とする請求項5に記載の表示装置。
6. The solder resist provided in a portion having a pitch of 100 μm or less of the copper pattern, wherein the boundary of the solder resist is formed in a continuous shape having an oblique or chevron shape. Display device.
JP2000070654A 2000-03-14 2000-03-14 Manufacturing method of fpc and display Pending JP2001267376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000070654A JP2001267376A (en) 2000-03-14 2000-03-14 Manufacturing method of fpc and display

Publications (1)

Publication Number Publication Date
JP2001267376A true JP2001267376A (en) 2001-09-28

Family

ID=18589359

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2001267376A (en)

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