JP2001264255A5 - - Google Patents

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Publication number
JP2001264255A5
JP2001264255A5 JP2000078723A JP2000078723A JP2001264255A5 JP 2001264255 A5 JP2001264255 A5 JP 2001264255A5 JP 2000078723 A JP2000078723 A JP 2000078723A JP 2000078723 A JP2000078723 A JP 2000078723A JP 2001264255 A5 JP2001264255 A5 JP 2001264255A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000078723A
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Japanese (ja)
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JP4673953B2 (ja
JP2001264255A (ja
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Publication date
Application filed filed Critical
Priority to JP2000078723A priority Critical patent/JP4673953B2/ja
Priority claimed from JP2000078723A external-priority patent/JP4673953B2/ja
Publication of JP2001264255A publication Critical patent/JP2001264255A/ja
Publication of JP2001264255A5 publication Critical patent/JP2001264255A5/ja
Application granted granted Critical
Publication of JP4673953B2 publication Critical patent/JP4673953B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000078723A 2000-03-21 2000-03-21 マクロ照明装置 Expired - Fee Related JP4673953B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000078723A JP4673953B2 (ja) 2000-03-21 2000-03-21 マクロ照明装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000078723A JP4673953B2 (ja) 2000-03-21 2000-03-21 マクロ照明装置

Publications (3)

Publication Number Publication Date
JP2001264255A JP2001264255A (ja) 2001-09-26
JP2001264255A5 true JP2001264255A5 (enrdf_load_stackoverflow) 2007-05-17
JP4673953B2 JP4673953B2 (ja) 2011-04-20

Family

ID=18596096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000078723A Expired - Fee Related JP4673953B2 (ja) 2000-03-21 2000-03-21 マクロ照明装置

Country Status (1)

Country Link
JP (1) JP4673953B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5006024B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621775B2 (ja) * 1986-04-04 1994-03-23 日産自動車株式会社 表面検査装置
JP2960978B2 (ja) * 1991-03-29 1999-10-12 マツダ株式会社 表面状態検査用照明装置
JP3095856B2 (ja) * 1992-02-19 2000-10-10 オリンパス光学工業株式会社 外観検査用投光装置
JP3657694B2 (ja) * 1995-03-31 2005-06-08 リンテック株式会社 照明装置
JPH09231832A (ja) * 1996-02-23 1997-09-05 Asahi Glass Co Ltd ガラス物品検査用照明装置
JP3782525B2 (ja) * 1996-10-09 2006-06-07 オリンパス株式会社 基板検査装置
JP3944285B2 (ja) * 1997-09-24 2007-07-11 オリンパス株式会社 基板検査装置
JPH11166901A (ja) * 1997-12-03 1999-06-22 Nikon Corp 検査装置及び方法
JP2000066164A (ja) * 1998-08-25 2000-03-03 Toshiba Electronic Engineering Corp 基板外観検査装置

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