JP2001255153A5 - - Google Patents
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- JP2001255153A5 JP2001255153A5 JP2001042440A JP2001042440A JP2001255153A5 JP 2001255153 A5 JP2001255153 A5 JP 2001255153A5 JP 2001042440 A JP2001042440 A JP 2001042440A JP 2001042440 A JP2001042440 A JP 2001042440A JP 2001255153 A5 JP2001255153 A5 JP 2001255153A5
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- JP
- Japan
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/507.583 | 2000-02-19 | ||
| US09/507,583 US6443008B1 (en) | 2000-02-19 | 2000-02-19 | Decoupled multi-disk gyroscope |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001255153A JP2001255153A (ja) | 2001-09-21 |
| JP2001255153A5 true JP2001255153A5 (enExample) | 2008-05-08 |
| JP4898010B2 JP4898010B2 (ja) | 2012-03-14 |
Family
ID=24019224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001042440A Expired - Fee Related JP4898010B2 (ja) | 2000-02-19 | 2001-02-19 | 分離された多ディスク・ジャイロスコープ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6443008B1 (enExample) |
| EP (1) | EP1126242A3 (enExample) |
| JP (1) | JP4898010B2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6715352B2 (en) * | 2001-06-26 | 2004-04-06 | Microsensors, Inc. | Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method |
| KR100503472B1 (ko) * | 2003-03-06 | 2005-07-25 | 삼성전자주식회사 | 회전형 자이로스코프 |
| US7514283B2 (en) | 2003-03-20 | 2009-04-07 | Robert Bosch Gmbh | Method of fabricating electromechanical device having a controlled atmosphere |
| US6936491B2 (en) | 2003-06-04 | 2005-08-30 | Robert Bosch Gmbh | Method of fabricating microelectromechanical systems and devices having trench isolated contacts |
| US7075160B2 (en) | 2003-06-04 | 2006-07-11 | Robert Bosch Gmbh | Microelectromechanical systems and devices having thin film encapsulated mechanical structures |
| US6952041B2 (en) | 2003-07-25 | 2005-10-04 | Robert Bosch Gmbh | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| FR2864226B1 (fr) * | 2003-12-19 | 2006-06-09 | Commissariat Energie Atomique | Structure vibrante micro-usinee et microgyrometre associe |
| US7068125B2 (en) | 2004-03-04 | 2006-06-27 | Robert Bosch Gmbh | Temperature controlled MEMS resonator and method for controlling resonator frequency |
| US7102467B2 (en) | 2004-04-28 | 2006-09-05 | Robert Bosch Gmbh | Method for adjusting the frequency of a MEMS resonator |
| US7426859B2 (en) * | 2004-10-29 | 2008-09-23 | Archangel Systems, Inc. | Motion sensor and method for detecting motion |
| FI116544B (fi) * | 2004-12-31 | 2005-12-15 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
| US20070170528A1 (en) | 2006-01-20 | 2007-07-26 | Aaron Partridge | Wafer encapsulated microelectromechanical structure and method of manufacturing same |
| WO2007105211A2 (en) * | 2006-03-13 | 2007-09-20 | Yishay Sensors Ltd. | Dual-axis resonator gyroscope |
| DE102008041028B4 (de) * | 2008-08-06 | 2017-05-24 | Robert Bosch Gmbh | Rotationssensorvorrichtung und Verfahren zum Betreiben einer Rotationssensorvorrichtung |
| WO2012004825A1 (ja) * | 2010-07-05 | 2012-01-12 | パイオニア株式会社 | 回転振動型ジャイロ |
| JP5884603B2 (ja) | 2012-03-30 | 2016-03-15 | 株式会社デンソー | ロールオーバージャイロセンサ |
| US20140013845A1 (en) * | 2012-07-13 | 2014-01-16 | Robert E. Stewart | Class ii coriolis vibratory rocking mode gyroscope with central fixed post |
| JP6176001B2 (ja) | 2012-11-29 | 2017-08-09 | 株式会社デンソー | ジャイロセンサ |
| WO2015106270A1 (en) * | 2014-01-13 | 2015-07-16 | Qualtre, Inc. | Method and apparatus for decoupling environmental and modal dependencies in inertial measurement devices |
| CN105043370B (zh) | 2014-04-29 | 2019-01-22 | 财团法人工业技术研究院 | 具有支点元件的微型电机装置 |
| EP3908803A4 (en) * | 2019-01-08 | 2022-07-20 | Panasonic Intellectual Property Management Co., Ltd. | MEASURING DEVICE |
| RU2761764C1 (ru) * | 2021-01-28 | 2021-12-13 | Акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" | Микромеханический вибрационный гироскоп |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2113842B (en) * | 1982-01-27 | 1985-07-24 | Marconi Co Ltd | A sensor for detecting rotational movement |
| JPH0711532B2 (ja) * | 1988-07-27 | 1995-02-08 | 日本航空電子工業株式会社 | 角速度計 |
| US5359893A (en) * | 1991-12-19 | 1994-11-01 | Motorola, Inc. | Multi-axes gyroscope |
| JP3332460B2 (ja) * | 1993-04-16 | 2002-10-07 | キヤノン株式会社 | 角速度検出方法および振動ジャイロ |
| US5987986A (en) * | 1994-07-29 | 1999-11-23 | Litton Systems, Inc. | Navigation grade micromachined rotation sensor system |
| JP3265138B2 (ja) * | 1994-10-26 | 2002-03-11 | キヤノン株式会社 | 振動ジャイロおよび補正装置 |
| US5635640A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
| DE19523895A1 (de) * | 1995-06-30 | 1997-01-02 | Bosch Gmbh Robert | Beschleunigungssensor |
| EP0851212B1 (en) * | 1996-07-10 | 2005-04-06 | Wacoh Corporation | Angular velocity sensor |
| US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
| DE19831594C1 (de) * | 1998-07-14 | 2000-01-27 | Litef Gmbh | Mikromechanischer Drehratensensor mit Koppelstruktur |
| AU5241599A (en) * | 1998-07-31 | 2000-02-21 | Litton Systems, Incorporated | Micromachined rotation sensor with modular sensor elements |
-
2000
- 2000-02-19 US US09/507,583 patent/US6443008B1/en not_active Expired - Lifetime
-
2001
- 2001-02-13 EP EP01103334A patent/EP1126242A3/en not_active Withdrawn
- 2001-02-19 JP JP2001042440A patent/JP4898010B2/ja not_active Expired - Fee Related