JP2001244253A5 - - Google Patents

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Publication number
JP2001244253A5
JP2001244253A5 JP2000381801A JP2000381801A JP2001244253A5 JP 2001244253 A5 JP2001244253 A5 JP 2001244253A5 JP 2000381801 A JP2000381801 A JP 2000381801A JP 2000381801 A JP2000381801 A JP 2000381801A JP 2001244253 A5 JP2001244253 A5 JP 2001244253A5
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
substrate
processing chamber
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000381801A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001244253A (ja
JP4450983B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000381801A priority Critical patent/JP4450983B2/ja
Priority claimed from JP2000381801A external-priority patent/JP4450983B2/ja
Publication of JP2001244253A publication Critical patent/JP2001244253A/ja
Publication of JP2001244253A5 publication Critical patent/JP2001244253A5/ja
Application granted granted Critical
Publication of JP4450983B2 publication Critical patent/JP4450983B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000381801A 1999-12-22 2000-12-15 液晶表示体基板用プラズマ処理装置 Expired - Fee Related JP4450983B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000381801A JP4450983B2 (ja) 1999-12-22 2000-12-15 液晶表示体基板用プラズマ処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-363801 1999-12-22
JP36380199 1999-12-22
JP2000381801A JP4450983B2 (ja) 1999-12-22 2000-12-15 液晶表示体基板用プラズマ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2002260922A Division JP3924721B2 (ja) 1999-12-22 2002-09-06 シールドリングの分割部材、シールドリング及びプラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2001244253A JP2001244253A (ja) 2001-09-07
JP2001244253A5 true JP2001244253A5 (enExample) 2009-01-08
JP4450983B2 JP4450983B2 (ja) 2010-04-14

Family

ID=26581513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000381801A Expired - Fee Related JP4450983B2 (ja) 1999-12-22 2000-12-15 液晶表示体基板用プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP4450983B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100626279B1 (ko) * 1999-12-30 2006-09-22 엘지.필립스 엘시디 주식회사 드라이 에칭장치
JP4916220B2 (ja) * 2006-05-31 2012-04-11 東京エレクトロン株式会社 プラズマ処理装置及びそれに用いられる電極
JP4450106B1 (ja) * 2008-03-11 2010-04-14 東京エレクトロン株式会社 載置台構造及び処理装置
JP5560909B2 (ja) * 2010-05-31 2014-07-30 東京エレクトロン株式会社 蓋体保持治具
JP5631114B2 (ja) * 2010-08-24 2014-11-26 株式会社日本マイクロニクス 平板状被検査体の検査装置
US10892180B2 (en) * 2014-06-02 2021-01-12 Applied Materials, Inc. Lift pin assembly

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