JP2001213516A - Device and method for conveying electro-optical panel and method of manufacturing electro-optical device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the working efficiency for changing a size of an electro- optical panel in a method of manufacturing an electro-optical device by alternately supplying plural kinds of electro-optical panels of different sizes to a manufacturing line. SOLUTION: This electro-optical panel conveying method for conveying a liquid crystal panel 5 including liquid crystal uses a conveying device comprising an suction head 32 comprising plural suction ports 40 for circulating the air, and a sealing member 41 for sealing one of the suction ports 40, and a liquid crystal panel 5 is sucked to a bottom of the suction head 32 by the air sucked from the suction port 40 and conveyed by moving the suction head 32. By selecting the suction port 40 to be sealed by the sealing member 41, the liquid crystal panels 5 of different sizes can be conveyed by one suction head 32.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a transfer device for transferring an electro-optical panel such as a liquid crystal panel. The present invention also relates to a method of manufacturing an electro-optical device such as a liquid crystal device, and more particularly to a method of manufacturing an electro-optical device performed by using the above-described transport device.

[0002]

2. Description of the Related Art At present, electro-optical devices are widely used in electronic devices such as portable telephones and portable information terminals.
The electro-optical device is used for displaying an image such as a character, a number, a figure, and the like.

This electro-optical device is constructed using various electro-optical materials. For example, a liquid crystal device using a liquid crystal as the electro-optical material, or an electroluminescent (EL) device including a light emitting polymer is used. A self-luminous optical device using an element as an electro-optical material, a plasma display (PDP) using an inert gas such as a phosphor and xenon as an electro-optical material, and a field emission device (FED) as an electro-optical material Various electro-optical devices such as an optical device used are known.

In the above-described electro-optical device, an electro-optical panel, which is a panel structure, is generally formed by supporting an electro-optical material on a substrate, and additional processing, such as mounting of an IC chip, is performed on the electro-optical panel. It is formed by applying. When such an electro-optical device is manufactured, the electro-optical panel is transported by a transport device, so that the electro-optical panel is supplied to a manufacturing apparatus in which each of the auxiliary processing steps is performed.

Conventionally, the above-described transfer device has been configured using, for example, a robot hand. At the end of this robot hand, a suction head for sucking the electro-optical panel is equipped, and after sucking the electro-optical panel by the suction head, the robot hand is moved,
The electro-optical panel was being transported.

[0006]

In general, various types of electro-optical panels having different sizes are manufactured. When the electro-optical panels of various sizes are conveyed by using the above-described conventional conveying apparatus, the electro-optical panels are generally manufactured in the following manner. After the suction head was replaced with one adapted to various panel sizes, the transfer operation was performed. However, replacing the suction head each time the model of the electro-optical panel changes changes the working efficiency of the entire manufacturing process of the electro-optical device significantly.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and is intended to manufacture an electro-optical device while alternately supplying a plurality of types of electro-optical panels having different sizes to a manufacturing line. In a manufacturing method, an object is to improve work efficiency when changing the size of an electro-optical panel.

[0008]

(1) In order to achieve the above object, a transporting apparatus for an electro-optical panel according to the present invention is a transporting apparatus for transporting an electro-optical panel containing an electro-optical material, comprising: It has a suction head provided with a plurality of suction ports for allowing the air to flow therethrough, and a closing member for closing any one of the suction ports. Note that air or other gases can be used as the suction gas.

According to this transport device, a plurality of types of electro-optical panels having different sizes can be suctioned to the same suction head by appropriately selecting a suction port to be closed by the closing member. For this reason, when changing the size of the electro-optical panel to be supplied to the production line, the operation for adjusting the transport device to the size can be performed extremely easily.

(2) In the transfer device according to the above (1), the electro-optical material can be a liquid crystal, and the electro-optical panel can be a liquid crystal panel in which the liquid crystal is sandwiched between a pair of substrates. . The size of the liquid crystal panel is variously changed according to the requirements of a device using the liquid crystal panel, for example, a mobile phone or a personal digital assistant. Therefore, when transporting such various sizes of liquid crystal panels, a transport device having a structure capable of transporting liquid crystal panels of different sizes with one suction head like the transport device according to the present invention is very suitable. .

(3) Next, according to a method of transporting an electro-optical panel according to the present invention, in the transport method of transporting an electro-optical panel containing an electro-optical material, any one of the plurality of suction ports provided in the suction head may be used. The electro-optical panel is adsorbed on the suction head by flowing gas through a suction port which is closed by the closing member and not closed by the closing member, and the electro-optical panel is transported by moving the suction head. It is characterized by.

According to this transport method, a plurality of types of electro-optical panels having different sizes can be suctioned to the same suction head by appropriately selecting the suction port to be closed by the closing member. For this reason, when changing the size of the electro-optical panel to be supplied to the production line, the operation for adjusting the transport device to the size can be performed extremely easily.

(4) In the transport method described in the above item (3), the electro-optical substance can be a liquid crystal, and the electro-optical panel can be a liquid crystal panel in which the liquid crystal is sandwiched between a pair of substrates. The size of the liquid crystal panel varies in accordance with the requirements of the equipment using the liquid crystal panel. Therefore, when transporting such liquid crystal panels of various sizes, a transport method in which liquid crystal panels of different sizes are transported by one suction head as in the transport device according to the present invention is very suitable. is there.

(5) In the transport method described in the above item (3) or (4), it is desirable to adjust the pressure of the gas according to the number of suction ports that are not closed by the closing member. Thus, various electro-optical panels having different sizes can be sucked with an appropriate suction force according to the size, and thus, the electro-optical panel can be reliably prevented from being damaged during transportation and from being dropped.

(6) Next, a method of manufacturing an electro-optical device according to the present invention is a method of manufacturing an electro-optical device by manufacturing an electro-optical device by subjecting an electro-optical panel containing an electro-optical material to ancillary processing. The transporting step of transporting the electro-optical panel is configured by using the transport method having the configuration described in at least one of the above items (3) to (5).

As the additional processing, for example, when a liquid crystal panel is considered as an electro-optical panel, a processing for mounting a driving IC on the liquid crystal panel, a processing for connecting an external circuit such as a flexible printed circuit board to the liquid crystal panel, and the like. ,
A process of attaching an optical element such as a polarizing plate or a transflective plate to a liquid crystal panel can be considered.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a liquid crystal panel will be exemplified as an electro-optical panel, and a liquid crystal device will be exemplified as an electro-optical device. A method for manufacturing the device will be described.

First, a liquid crystal device manufactured by using the manufacturing method according to the present invention will be described.
Has a pair of substrates 2a and 2b opposed to each other, and these substrates are bonded to each other by a sealing material 3. As shown in FIG. 5, the liquid crystal 1 is placed in a space between the pair of substrates 2a and 2b in a portion surrounded by the sealing material 3.
4 is pinched. The conductive material 4 is provided inside the seal material 3.
And a liquid crystal injection port 3a is formed in a part of the sealing material 3 as shown in FIG.

In FIG. 5, the first substrate 2a is a substrate material 6
a, a plurality of first electrodes 7a acting as one of a common electrode or a segment electrode are formed in a predetermined pattern on the liquid crystal side surface of the substrate material 6a, that is, the surface facing the second substrate 2b. An overcoat layer 8a is formed thereon, and an alignment film 9a is further formed thereon.

A polarizing plate 11a as an optical element is mounted on the outer surface of the substrate material 6a, for example, by sticking, and a reflecting plate 12 as an optical element is mounted on the outside thereof, for example, by sticking. Is done. That is, in the liquid crystal device 1 of the present embodiment, the upper side surface of FIG. 1 is an image display surface.

The polarizing plate is an optical element having a function of transmitting only a specific polarized light component to incident light and absorbing or reflecting other polarized light components. Alternatively, they are arranged outside both substrates of the liquid crystal panel.

The second substrate 2b facing the first substrate 2a has a substrate material 6b, and the liquid crystal side surface of the substrate material 6b, that is, the surface facing the first substrate 6a, has the other of the common electrode or the segment electrode. Plurality of second electrodes 7 acting as
b is formed in a predetermined pattern, an overcoat layer 8b is formed thereon, and an alignment film 9b is further formed thereon.

On the outer surface of the substrate material 6b, a retardation plate 10 is mounted as an optical element, for example, by sticking.
Further, a polarizing plate 11b as an optical element is mounted thereon, for example, by sticking.

A retardation plate is a polymer film having a uniaxial or biaxial optical anisotropy, and is a STN (Super Twist).
optics that are used by being stacked on a liquid crystal panel, such as isted Nematic, etc., and compensating for the polarization characteristics of the transmitted light modulated by the liquid crystal layer, that is, eliminating the coloring of the display color and improving the viewing angle characteristics by remodulating. Element. This retardation plate is usually arranged on the outer surface of each of the two substrates of the liquid crystal panel, or is arranged so as to overlap a plurality of layers.

As the optical element provided on both or one of the first substrate 2a and the second substrate 2b, other elements, such as a light diffusing plate, can be considered as necessary other than the above. This light diffusion plate is arranged on the viewing side of the liquid crystal device to diffuse the incident light to widen the viewing angle, or is arranged on the light source side of the liquid crystal device to diffuse the light from the light source to provide uniform light to the liquid crystal panel. And the like.

Further, the retardation plate 10 may be disposed on both outer surfaces of the first substrate 2a and the second substrate 2b, or the polarizing plate 11a may be a polarizing plate that reflects or transmits according to the polarization axis. The twelve members may be light absorbing layers. Further, on one inner surface of the substrate materials 6a and 6b, other optical elements, for example, a color filter or the like can be provided as necessary.

The substrate materials 6a and 6b are formed in a predetermined shape, for example, a rectangular shape or a square shape, from a hard light-transmitting material such as glass, or a flexible light-transmitting material such as plastic. Also, the first electrode 7
a and the second electrode 7b are made of, for example, ITO (Indium Tin Oxi).
de) and the like, and the overcoat layers 8a and 8b are made of, for example, silicon oxide, titanium oxide, or a mixture thereof.
The alignment films 9a and 9
b is formed of, for example, a polyimide resin to a thickness of about 800 °.

As shown in FIG. 1, the first electrode 7a is formed by arranging a plurality of linear patterns parallel to each other.
It is formed in a so-called stripe shape. On the other hand, the second electrode 7
b is also formed in a stripe shape by arranging a plurality of linear patterns in parallel so as to cross the first electrode 7a. A plurality of points where these electrodes 7a and 7b intersect in a dot matrix with the liquid crystal layer interposed therebetween are:
A pixel for displaying an image is formed. An area defined by the plurality of pixels is a display area for displaying an image such as a character.

The first substrate 2a formed as described above
As shown in FIG. 5, a plurality of spacers 13 are dispersed on either one of the liquid crystal side surfaces of the second substrate 2b and the sealing material 3 is further formed on the liquid crystal side surface of one of the substrates by, for example, printing. It is provided in a frame shape as shown in FIG.
As described above, the liquid crystal injection port 3a is formed at an appropriate position of the sealing material 3.

A spacer 13 is provided between the substrates 2a and 2b.
A uniform gap, for example, a gap of about 5 μm, that is, a so-called cell gap held by the liquid crystal injection port 3a is formed.
The liquid crystal 14 is injected into the cell gap through the through hole, and after the injection is completed, the liquid crystal injection port 3a is sealed with a resin or the like.

In FIG. 1, the first substrate 2a has a substrate overhang 2c that extends outside the second substrate 2b and outside the seal material 3. The first electrode 7a on the first substrate 2a extends directly to the substrate overhang portion 2c to
It has become. Further, on the second substrate 2b, the second electrode 7b is connected to the wiring 15 on the substrate extension 2c via the conductive material 4 (see FIG. 5) included in the sealing material 3. The code is 2
Reference numeral 0 denotes an external connection terminal for making an electrical connection with an external circuit (not shown).

A large number of the electrodes 7a, 7b, the wiring 15 on the substrate overhang 2c connected to them, and the external connection terminals 20 are actually formed on the surfaces of the substrates 2a and 2b at extremely narrow intervals. In FIG. 1, the electrodes and the like are schematically illustrated at intervals wider than the actual intervals in order to clearly show the structure, and some of the electrodes are not illustrated. Further, the electrodes 7a and 7b are not limited to being formed in a straight line, but may be formed as a pattern such as an appropriate character or graphic.

A drive IC 16 is directly mounted on the substrate overhang 2c by an ACF (Anisotropic Conductive Film) 17 as an anisotropic conductive connection element, and a so-called COG mounting structure is formed. You. As shown in FIG. 5, the driving IC 16 has a plurality of terminals or bumps 21 on its active surface, that is, on the lower surface of FIG.

As is well known, the ACF 17 is a conductive polymer film that is scattered so as to provide an anisotropy between a pair of terminals and electrically connect them together. It is formed by dispersing a plurality of conductive particles in a conductive resin film.

The substrate overhang 2c with the ACF 17 interposed therebetween
And the driving IC 16 are thermocompression-bonded, that is, pressurized while heating, so that the driving IC 16 is
And between the bump 21 of the driving IC 16 and the wiring 15 on the substrate overhang 2c and between the bump 21 of the driving IC 16 and the external connection terminal 20 on the substrate overhang 2c in one direction. Realize a connection with sexuality.

The above-described liquid crystal device 1 produces, for example, a liquid crystal panel 5 having a panel structure in which a liquid crystal 14 is sandwiched between a pair of substrates 2a and 2b, that is, an electro-optical panel.
Next, the driving IC 16 is mounted on the surface of the substrate overhang portion 2c, and thereafter, the optical element, that is, the polarizing plates 11a and 11b, the reflecting plate 12, and the phase difference plate 10 in this embodiment are mounted on both the front and back surfaces of the liquid crystal panel 5. Then, it is manufactured by connecting an external circuit to the external connection terminal 20.

In the liquid crystal device 1 configured as described above, the driving IC 16 applies a scanning voltage to either the first electrode 7a or the second electrode 7b for each row, and further applies the other of the electrodes. , A data voltage based on the display image is applied to each pixel. As a result, a difference voltage between the two voltages is applied to the liquid crystal layer at each pixel position, light passing through each pixel portion is modulated by the difference voltage, and this light is supplied to a polarizing plate or the like on the light emission side. Images such as characters and numerals are displayed outside the substrate 2a or 2b, in the present embodiment, outside the substrate 2b.

In manufacturing the liquid crystal device 1 as described above, first, in FIG. 5, a liquid crystal panel 5 is manufactured, and a driving IC 16 is mounted on the surface of the substrate overhang portion 2c of the liquid crystal panel 5.
And a polarizing plate 1 on the outside of the front and back of the liquid crystal panel 5.
Various processes such as mounting of optical elements such as 1, 11b, the phase difference plate 10, the reflection plate 12, and the like are executed.

Now, considering the process of mounting the driving IC 16 on the liquid crystal panel 5, an operation as schematically shown in FIG. 3, for example, is performed. FIG. 3 shows the working device in a plan view. In FIG. 3, a plurality of liquid crystal panels 5 are placed on a pallet 26 and arranged at predetermined positions, and the liquid crystal panels 5 are sequentially supplied to the bonder device 28 one by one by a transport device 27a. As described above, the liquid crystal panel 5 includes the polarizing plates 11a,
11B shows a panel structure in which the optical element such as 11b and the driving IC 16 are not mounted.

In FIG. 3, the transfer device 27a has a hand 31 which can be moved in parallel as indicated by an arrow A along a rail 29 and which can be extended and contracted as indicated by an arrow B.
A suction head 32 is provided at the tip of the hand 31.

As shown in FIG. 1, the suction head 32 includes a first head 33 fixed to the hand 31 and a second head 34 fixed to the first head 33. Double head 3
Although any method can be considered as a method for fixing 3 and 34, for example, screw connection using a bolt or the like can be used. As shown in FIG. 2, the fixing surface of the first head 33 has
A concave portion 36 formed by connecting two horizontal lines with one vertical line is formed, and an air inlet 37 connected to the concave portion 36 is open to the outside. The air inlet 37 is connected to an air suction device 39 constituted by, for example, an air compressor or an exhaust pump.

The second head 34 is provided with a plurality of through holes 38, in this embodiment, five through holes 38.
The suction port 40 of the suction member 35 communicates with the outside opening of the suction member 8.
The inner opening of the through hole 38 communicates with the recess 36 when the second head 34 is fixed to the first head 33.

In the case of the present embodiment, the suction member 35 is
It is formed in a conical suction cup shape by an elastic member such as rubber, plastic or the like, and the suction port 40 is provided as a through hole penetrating the suction member 35. In addition,
The suction port 40 does not necessarily need to be provided separately from the through-hole 38, and in some cases, the through-hole 38 itself may be connected to the suction port 40.
Can also be used.

When the air suction device 39 connected to the air inlet 37 is operated, air is sucked through the air inlet 37, the concave portion 36, the through hole 38, and the suction port 40.
Thus, the liquid crystal panel 5 (see FIG. 1) can be sucked to the second head 34 via the suction member 35.

In FIG. 1, each of the plurality of suction ports 40 can be closed by a closing member 41 made of, for example, rubber, plastic, or the like. The embodiment shown in FIG. 1 is a case where the liquid crystal panel 5 having a relatively small size is sucked and conveyed to the second head 34, and not all the suction ports 40 are necessarily required. Therefore, the three unnecessary suction ports 40 on one side are closed by the closing member 41.

The size of the suction pressure of the air suction device 39 can be adjusted in advance, and when the suction is performed using some of the suction ports 40 as now considered. , The suction pressure of the air suction device 39 is set to a smaller pressure than in the case where suction is performed using all the suction ports 40. This is to prevent problems such as damage to the sucked liquid crystal panel 5 due to excessive suction pressure when air suction is performed using a small number of suction ports 40.

Since the suction head 32 is configured as described above, when the air suction device 39 operates, the closing member 4
Through two suction ports 40 not blocked by 1
The air is sucked by a relatively small suction pressure, and the air flow causes the liquid crystal panel 5 placed on the pallet 26 of FIG. 3 to be sucked by the second head 34 of the suction head 32 as shown in FIG.

When the suction head 32 sucks the liquid crystal panel 5 via the suction member 35, the hand 31 moves to the right in FIG. 3 in FIG. The user carries the liquid crystal panel 5 to a stage for performing the operation 42, and places the liquid crystal panel 5 in an appropriate position on the stage. In this ACF mounting step 42, as shown in FIG.
The ACF 17 is adhered to the surface of the substrate overhang portion 2c of the liquid crystal panel 5 on the area where the driving IC 16 is to be mounted.

Thereafter, the liquid crystal panel 5 is transported to a temporary pressure bonding step 43 in FIG. In the temporary pressure bonding step 43, the relative position of the driving IC 16 with respect to the substrate overhang 2c is determined using an alignment device, and in this state, the driving IC 16 sandwiches the ACF 17 with the substrate overhang 2c.
The driving IC 16 is temporarily fixed at an appropriate position.

Thereafter, the liquid crystal panel 5 is conveyed to the main pressure bonding step 44 in FIG. In the final pressure bonding step, the liquid crystal panel 5 is fixed to the substrate overhanging portion 2c by pressing the driving IC 16 against the substrate overhanging portion 2c at a predetermined pressure for a predetermined time by a pressure bonding head heated to a predetermined temperature.
Thus, the pressure bonding of the driving IC 16 to the liquid crystal panel 5 is completed.

Thereafter, the liquid crystal panel 5 for which the operation in the final pressure bonding step 44 has been completed is sucked by the suction head 32 of the transfer device 27b by the transfer device 27b disposed downstream of the bonder device 28, and the hand 31 is further moved by an arrow. The liquid crystal panel 5 is removed from the bonder device 28 by moving it to the right in FIG. The structure of the transfer device 27b provided on the downstream side of the bonder device 28 is the same as the structure of the transfer device 27a provided on the upstream side of the bonder device 28, and the description thereof will be omitted.

The removed liquid crystal panel 5 is then conveyed to an optical element attaching step (not shown). In the attaching step, as shown in FIG. 5, the polarizing plates 11a and 11b, the retardation plate 10, and the reflecting plate are provided. Twelve elements are attached, and the liquid crystal device 1 is completed as described above.

The operation described above relates to the liquid crystal panel 5 having a relatively small size. Therefore, as shown in FIG. 4, three of the five suction ports 40 are closed by the closing member 41. The liquid crystal panel 5 is moved to the second head 34 of the suction head 32 by using the two suction ports 40 that are not closed.
Adsorbed.

Incidentally, the size of the liquid crystal panel is various, and in an actual manufacturing operation, a liquid crystal panel having a larger size may be manufactured. For example, when a liquid crystal panel 25 having a size larger than the suction head 32 is provided,
In FIG. 4, the three closing members 41 are removed from the suction ports 40, and all the suction ports 40 are set to the open state. Further, after adjusting the suction pressure of the air suction device 39 to a large value, the large-sized liquid crystal panel 25 is sucked. The reason why the suction pressure is increased is to secure a suction force enough to suck and hold the large-sized liquid crystal panel 25 and prevent the liquid crystal panel 25 from dropping during transportation.

As described above, according to the liquid crystal panel transport method according to the present embodiment, in FIG. 4, by appropriately selecting the suction port 40 to be closed by the closing member 41, a plurality of types of liquid crystal panels having different sizes are provided. 5 or 25 can be suctioned to the same suction head 32. For this reason, when changing the size of the liquid crystal panel to be supplied to the production line, it is possible to extremely easily perform the operation for adjusting the transport device to the size.

(Other Embodiments) Although the present invention has been described with reference to the preferred embodiments, the present invention is not limited to the embodiments, and various modifications may be made within the scope of the invention described in the claims. Can be modified.

For example, FIG. 3 illustrates a case where the transport method and the like according to the present invention are applied when transporting the liquid crystal panel 5 to the bonder device 28 for mounting the driving IC on the liquid crystal panel. Can be applied to any process that needs to transport the liquid crystal panel.

In the embodiment shown in FIG. 1, a passive matrix type liquid crystal device is exemplified as a liquid crystal device. However, an active matrix type liquid crystal using a three-terminal active element or a two-terminal type active element as a pixel switching element is used. It can also be applied to devices.

Further, in the embodiment shown in FIG. 1, a liquid crystal device is exemplified as an electro-optical device to which the present invention is applied. However, the present invention relates to a self-luminous type such as an EL panel using an EL element as an electro-optical material. The present invention can be applied to general electro-optical devices such as an optical device, a plasma display panel (PDP) using plasma emission, and a field emission display (FED) panel using a phosphor.

[0060]

According to the electro-optical panel conveying apparatus, the electro-optical panel conveying method and the electro-optical device manufacturing method of the present invention, the size of the electro-optical panel is different by appropriately selecting the suction port to be closed by the closing member. A plurality of types of electro-optical panels can be suctioned to the same suction head. For this reason, when changing the size of the electro-optical panel to be supplied to the production line, the operation for adjusting the transport device to the size can be performed extremely easily.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a transport device for an electro-optical panel according to the present invention.

FIG. 2 is an exploded view of the structure shown in FIG.

FIG. 3 is a plan view for explaining a method for manufacturing an electro-optical device according to the present invention.

FIG. 4 is a bottom view of the structure shown in FIG. 1;

FIG. 5 is a cross-sectional view illustrating an example of a liquid crystal device that is an example of an electro-optical device.

[Explanation of symbols]

 Reference Signs List 1 liquid crystal device (electro-optical device) 2a, 2b substrate 3 sealing material 3a liquid crystal injection port 5 liquid crystal panel (electro-optical panel) 6a, 6b substrate material 7a, 7b electrode 14 liquid crystal 26 pallet 27a, 27b transport device 28 bonder device 29 rail 31 Hand 32 Suction Head 33 First Head 34 Second Head 35 Suction Member 36 Recess 37 Air Inlet 38 Through Hole 39 Air Suction Device 40 Suction Port 41 Closure Member

Claims (6)

[Claims] 1. A transport device for transporting an electro-optical panel containing an electro-optical material, wherein a suction head having a plurality of suction ports for allowing a suction gas to flow therethrough, and a closing port for closing any one of the suction ports. A transfer device comprising: 2. The transport device according to claim 1, wherein the electro-optical material is a liquid crystal, and the electro-optical panel is a liquid crystal panel having the liquid crystal sandwiched between a pair of substrates. 3. A transporting method for transporting an electro-optical panel containing an electro-optical substance, wherein one of a plurality of suction ports provided in the suction head is closed by a closing member, and a gas is supplied to the suction port not closed by the closing member. A method of transporting the electro-optical panel by adsorbing the electro-optical panel on the suction head by flowing the electro-optical panel, and transporting the electro-optical panel by moving the suction head. 4. The method according to claim 3, wherein the electro-optical material is a liquid crystal, and the electro-optical panel is a liquid crystal panel in which the liquid crystal is sandwiched between a pair of substrates. 5. The method according to claim 3, wherein the pressure of the gas is adjusted according to the number of suction ports that are not closed by the closing member. 6. A method for manufacturing an electro-optical device by manufacturing an electro-optical device by performing ancillary processing on an electro-optical panel containing an electro-optical material, wherein the transporting step of transporting the electro-optical panel is performed. 6. A method for manufacturing an electro-optical device, comprising using at least one of the transfer methods according to claim 1.