JP2001188319A - End face protected photoresist film roll - Google Patents

End face protected photoresist film roll

Info

Publication number
JP2001188319A
JP2001188319A JP2000000550A JP2000000550A JP2001188319A JP 2001188319 A JP2001188319 A JP 2001188319A JP 2000000550 A JP2000000550 A JP 2000000550A JP 2000000550 A JP2000000550 A JP 2000000550A JP 2001188319 A JP2001188319 A JP 2001188319A
Authority
JP
Japan
Prior art keywords
photoresist film
sheet
film roll
face
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000000550A
Other languages
Japanese (ja)
Inventor
Nobuhiro Shimamura
信広 島村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nichigo Morton Co Ltd
Original Assignee
Nichigo Morton Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichigo Morton Co Ltd filed Critical Nichigo Morton Co Ltd
Priority to JP2000000550A priority Critical patent/JP2001188319A/en
Publication of JP2001188319A publication Critical patent/JP2001188319A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an end face protected photoresist film roll in which the lowering of the function of a sheetlike drying agent due to dew condensation is suppressed even when the roll is exposed to low temperature and returned to room temperature and the exudation of the resist from the end faces is suppressed even in long-term storage at room temperature and even under an external temperature change. SOLUTION: A photoresist film is rolled up on a cylindrical core 6 to obtain a photoresist film roll 5 and a thermoplastic resin sheet 1 having holes which pierce through the core and a sheetlike drying agent 2 are successively disposed on each end face of the photoresist film roll 5.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はフォトレジストフィ
ルムロールに関し、詳しくはフォトレジストフィルムロ
ールを低温にさらした後に室温に戻しても端部での急激
な結露現象が防止され、また、室温で長期間保存しても
端部でのレジストのしみ出しがない品質の改善されたフ
ォトレジストフィルムロールに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photoresist film roll, and more particularly to a photoresist film roll which is exposed to a low temperature and then returned to room temperature. The present invention relates to a photoresist film roll having improved quality in which the resist does not exude at the edge even after storage for a period.

【0002】[0002]

【従来の技術】従来、プリント配線板を形成するために
は、一般に銅張積層板にフォトレジストフィルムをラミ
ネートし、パターンマスクを通して露光、現像及びメッ
キ又はエッチングする方法が実施されてきた。かかるフ
ォトレジストフィルムは光透過性支持体フィルム、感光
性樹脂組成物層、保護フィルムの三層構成よりなり、こ
れを用いて画像形成するには、先ず保護フィルムを剥離
した後、感光性樹脂組成物層を銅張積層板上に圧着、光
透過性支持体フィルム上にパターンマスクを密着し、活
性光(通常は紫外線)を照射し(露光)、次いでアルカ
リ水溶液又は有機溶剤を噴霧又は浸漬してレジストパタ
ーンを形成し(現像)、更に露呈した銅箔部分に金属メ
ッキを施した後、アルカリ水溶液又は有機溶剤で硬化レ
ジスト部を剥離し(レジスト剥離)、最後に塩化鉄、塩
化銅、過酸化水素/硫酸、アルカリ性アンモニア等の溶
液で露呈している銅箔部分を除去(エッチング)する方
法、又は逆パターンにて現像後にエッチング及びレジス
ト剥離する方法がとられてきた。
2. Description of the Related Art Conventionally, in order to form a printed wiring board, generally, a method of laminating a photoresist film on a copper-clad laminate, exposing, developing, plating or etching through a pattern mask has been carried out. Such a photoresist film has a three-layer structure of a light-transmitting support film, a photosensitive resin composition layer, and a protective film. To form an image using this, first, after removing the protective film, the photosensitive resin composition The product layer is pressed on a copper-clad laminate, the pattern mask is adhered to the light-transmitting support film, and active light (usually ultraviolet light) is irradiated (exposure), and then an alkali aqueous solution or an organic solvent is sprayed or dipped. After forming a resist pattern (development) and applying metal plating to the exposed copper foil portion, the cured resist portion is peeled off with an aqueous alkali solution or an organic solvent (resist peeling). A method of removing (etching) a copper foil portion exposed with a solution of hydrogen oxide / sulfuric acid, alkaline ammonia, or the like, or etching and resist peeling after development with a reverse pattern. Methods have been taken.

【0003】このようなフォトレジストフィルムは、通
常は、ロール状に巻かれて製品化され、市場に流通して
いるが、かかるフォトレジストフィルム中の感光性樹脂
組成物層は粘着性、流動性を有するものであり、保存中
に感光性樹脂組成物(レジスト)がロール端面からしみ
出し、ロール端部で層間が接着してしまい使用時にロー
ルが巻き戻せなかったり、巻き戻せても巻き戻し作業性
を著しく悪くする問題があった。
[0003] Such a photoresist film is usually rolled into a product and commercialized, and is distributed on the market. However, the photosensitive resin composition layer in the photoresist film has adhesiveness and fluidity. During storage, the photosensitive resin composition (resist) exudes from the end face of the roll, and the layers adhere to each other at the end of the roll, so that the roll cannot be rewound during use, or even if it can be rewound, it is rewound. There was a problem that the property was significantly deteriorated.

【0004】かかる問題点を解決するため、特許第27
30630号公報では、フォトレジストフィルムのロー
ル端部にシート状乾燥剤を接触させて覆った積層体エレ
メントが提案され、かかる方法により巻き取り保存時の
感光性樹脂組成物層の端部からのしみ出しを防止するこ
とが記載されている。
[0004] In order to solve such a problem, Patent No. 27
Japanese Patent No. 30630 proposes a laminated element in which a sheet-like desiccant is brought into contact with a roll end of a photoresist film to cover the roll, and such a method is used to stain the photosensitive resin composition layer from the end during winding and storage. It is described to prevent dispensing.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、近年、
海外へのフォトレジストフィルムロールの輸出等ではフ
ォトレジストフィルムの保証期間を延ばすために、かか
るロールが低温にさらされる、例えば−20℃の程度の
極めて低温度での輸送等が行われており、上記特許第2
730630号公報開示の方法では、室温での感光性樹
脂組成物のしみだしはある程度防止されるものの、シー
ト状乾燥剤がパルプ等の親水性材料を素材とし、これに
塩化カルシウム等の乾燥剤を付着させたものである故
に、低温で保存された該ロールを室温に戻すと、端面で
の多量の結露(水滴)を短時間のうちに吸収してしまう
ため乾燥剤の機能が極度に低下して、しみ出しが発生す
る危険性があった。また、室温においても保存中の雰囲
気の温度変化によって、少量の感光性樹脂組成物のしみ
出しが起こりやすいという欠点があった。
However, in recent years,
In the export of photoresist film rolls overseas, in order to extend the warranty period of the photoresist film, such rolls are exposed to a low temperature, for example, transport at an extremely low temperature of about -20 ° C. Patent No. 2 above
In the method disclosed in the publication No. 730630, although exudation of the photosensitive resin composition at room temperature is prevented to some extent, a sheet-like desiccant is made of a hydrophilic material such as pulp, and a desiccant such as calcium chloride is added thereto. When the roll stored at low temperature is returned to room temperature because it is adhered, a large amount of condensation (water droplets) on the end face is absorbed in a short time, and the function of the desiccant is extremely reduced. And there was a risk of oozing. Further, even at room temperature, there is a disadvantage that a small amount of the photosensitive resin composition easily exudes due to a temperature change of the atmosphere during storage.

【0006】[0006]

【課題を解決するための手段】本発明者はかかる課題に
ついて鋭意研究をした結果、フォトレジストフィルムを
円筒状の巻芯(6)に巻き取ったフォトレジストフィル
ムロール(5)の端面に、貫通孔を有する熱可塑性樹脂
シート(1)及びシート状乾燥剤(2)を順次設けてな
る端面を保護されたフォトレジストフィルムロールは、
ロール端部で急激な結露現象が防止され、シート状乾燥
剤の機能が維持されるため端部でのしみ出しが従来法以
上に防止できること、室温で長期間保管した時に外界の
温度が変化してもしみ出しが起こらないことを見いだ
し、本発明を完成するに至った。
The inventor of the present invention has made intensive studies on such problems and found that a photoresist film was wound around a cylindrical core (6) through an end face of a photoresist film roll (5). A photoresist film roll having an end face protected by sequentially providing a thermoplastic resin sheet (1) having a hole and a sheet-like desiccant (2) comprises:
Sudden dew condensation is prevented at the end of the roll, and the function of the sheet-like desiccant is maintained, so that exudation at the end can be prevented more than conventional methods. They found that no bleeding occurred and completed the present invention.

【0007】[0007]

【発明の実施の形態】以下本発明を図1を中心に詳細に
説明する。本発明の端面保護フォトレジストフィルムロ
ールはフォトレジストフィルムを円筒状の巻芯(6)に
巻き取ったフォトレジストフィルムロール(5)の端面
に、巻芯貫通孔を有する熱可塑性樹脂シート(1)及び
シート状乾燥剤(2)を順次設けてなるもので、かかる
フォトレジストフィルムとは、ポリエステルフィルム、
ポリエチレンフィルム、ポリプロピレンフィルム、テフ
ロンフィルム、ポリビニルアルコールフィルム等の支持
体フィルム上に、感光性樹脂組成物層を形成させたもの
で、更に必要に応じて感光性樹脂組成物層の上にポリエ
ステルフィルム、ポリエチレンフィルム、ポリプロピレ
ンフィルム等の保護フィルムを積層したものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to FIG. The end face protecting photoresist film roll of the present invention is a thermoplastic resin sheet (1) having a core through-hole on an end face of a photoresist film roll (5) obtained by winding a photoresist film around a cylindrical core (6). And a sheet-like desiccant (2) are sequentially provided. Such a photoresist film is a polyester film,
A polyethylene film, a polypropylene film, a Teflon film, a support film such as a polyvinyl alcohol film, a photosensitive resin composition layer is formed on the photosensitive resin composition layer, if necessary, a polyester film on the photosensitive resin composition layer, It is a laminate of protective films such as polyethylene film and polypropylene film.

【0008】該感光性樹脂組成物層としては、特に制限
されることなく、一般的に知られているフィルム性付与
ポリマー、エチレン性不飽和化合物及び光重合開始剤、
必要に応じて更に熱重合禁止剤、可塑剤、染料(色素、
変色剤)、密着付与剤、酸化防止剤、溶剤、表面張力改
質剤、安定剤、連鎖移動剤、消泡剤、難燃剤等の添加剤
を配合したものである。
The photosensitive resin composition layer is not particularly limited, and is generally known as a film-imparting polymer, an ethylenically unsaturated compound, a photopolymerization initiator,
If necessary, a thermal polymerization inhibitor, a plasticizer, a dye (dye,
(Color changing agent), an adhesion promoter, an antioxidant, a solvent, a surface tension modifier, a stabilizer, a chain transfer agent, an antifoaming agent, a flame retardant, and other additives.

【0009】上記フォトレジストフィルムは円筒状の巻
芯(6)に巻き取られ、フォトレジストフィルムロール
となり、かかるフォトレジストフィルムロール(5)の
端面に巻芯貫通孔を有する熱可塑性樹脂シート(1)及
びシート状乾燥剤(2)が順次設けられるのである。
The photoresist film is wound around a cylindrical core (6) to form a photoresist film roll. The thermoplastic resin sheet (1) having a core through hole at the end face of the photoresist film roll (5). ) And a sheet-like desiccant (2) are sequentially provided.

【0010】かかる熱可塑性樹脂シート(1)は上記の
フォトレジストフィルムロール(5)の端面に密着して
配置されることが好ましく、素材としてはポリスチレ
ン、ポリオレフィン、ポリエステル、ポリ塩化ビニル等
の熱可塑性樹脂が挙げられ、好ましくは低温から室温に
戻してもフォトレジストフィルムロール(5)端面での
急激な結露状態を防止できる断熱材的効果があり、吸水
率も低いポリスチレン、ポリエステル、ポリ塩化ビニル
が用いられる。また、該シートは上記の熱可塑性樹脂を
シート状に成形したものであれば特に制限はなく、更に
かかる熱可塑性樹脂の繊維状物を固めてシート状にした
ものや上記樹脂に発泡剤を加えてシート状気泡体として
もよい。
The thermoplastic resin sheet (1) is preferably disposed in close contact with the end face of the photoresist film roll (5), and may be made of a thermoplastic material such as polystyrene, polyolefin, polyester, or polyvinyl chloride. Resins, preferably having the effect of a heat insulating material capable of preventing a rapid condensation state at the end face of the photoresist film roll (5) even when the temperature is returned from low temperature to room temperature, and polystyrene, polyester and polyvinyl chloride having low water absorption. Used. Further, the sheet is not particularly limited as long as the above-mentioned thermoplastic resin is formed into a sheet shape, and further a foaming agent is added to a sheet obtained by solidifying such a thermoplastic resin fibrous material or a sheet-like material. To form a sheet-like foam.

【0011】また、熱可塑性樹脂シート(1)の厚みは
フォトレジストフィルムロール(5)の層の厚みによっ
ても異なるが0.1mm以上が好ましく、更には0.1
〜5mmである。0.1mm未満では、フォトレジスト
フィルムロール(5)の端部に結露が急激に発生して乾
燥剤の機能が失われるので好ましくない。また、その形
状は、巻芯貫通孔(3)を有する形状であれば特に制限
はなく、かかる貫通孔(3)の形状としては、円型、非
円型等が挙げられるが、円型とした形状が、該シート
(1)を脱着する際に、後述するシート状乾燥剤(2)
の脱着時に巻芯(6)に付着したくずを除去できるので
好ましい。
The thickness of the thermoplastic resin sheet (1) depends on the thickness of the photoresist film roll (5), but is preferably 0.1 mm or more, more preferably 0.1 mm or more.
55 mm. If the thickness is less than 0.1 mm, dew condensation occurs rapidly at the end of the photoresist film roll (5), and the function of the desiccant is lost. The shape is not particularly limited as long as it has a core through-hole (3). Examples of the shape of the through-hole (3) include a circular shape and a non-circular shape. When the sheet (1) is detached, the sheet-shaped desiccant (2) described below
This is preferable because debris attached to the winding core (6) can be removed when attaching and detaching the core.

【0012】次に、上記熱可塑性樹脂シート(1)の外
側にシート状乾燥剤(2)が設けられる。該シート状乾
燥剤(2)は、吸湿能を有する物質を含有してなるもの
であり、かかる物質としては例えば、塩化カルシウム、
シリカゲル、モレキュラーシーブス、糖類、特に浸透圧
の高い糖類、吸水性樹脂等の吸湿剤又は吸水剤を天然セ
ルロース類、合成セルロース類、ガラスクロス、不織布
等の成形可能な材料に分散、含浸、塗布乾燥した吸湿層
としたり、これらの吸湿剤又は吸水剤をこれらの成形可
能な材料やビニロンフィルム、ポリエステルフィルム、
ポリエチレンフィルム、ポリプロピレンフィルム、テフ
ロンフィルム等の熱可塑性樹脂フィルムでサンドイッチ
状に挟んで作られる。中でも、特に好ましい層構成とし
ては、熱可塑性樹脂フィルム/吸湿層/熱可塑性樹脂フ
ィルムの層構成よりなるものである。ここで、熱可塑性
樹脂フィルムは吸湿層の吸湿効果をより発現するため、
多孔性フィルムであることが望まれる。又、上記の成形
可能な材料と吸湿剤又は吸水剤の混合物を成形してシー
ト状乾燥剤(2)としてもよい。
Next, a sheet desiccant (2) is provided outside the thermoplastic resin sheet (1). The sheet-like desiccant (2) contains a substance having a hygroscopic ability, such as calcium chloride,
Disperse, impregnate, coat and dry silica gel, molecular sieves, saccharides, especially saccharides with high osmotic pressure, and moisture-absorbing or water-absorbing agents such as water-absorbing resins in moldable materials such as natural celluloses, synthetic celluloses, glass cloth, and nonwoven fabrics. Or a moisture-absorbing layer, these moisture-absorbing agents or water-absorbing agents can be formed from these moldable materials, vinylon films, polyester films,
It is sandwiched between thermoplastic resin films such as polyethylene film, polypropylene film, and Teflon film. Among them, a particularly preferred layer configuration is a layer configuration of thermoplastic resin film / moisture absorbing layer / thermoplastic resin film. Here, the thermoplastic resin film more expresses the moisture absorbing effect of the moisture absorbing layer,
It is desired that the film be a porous film. Further, a mixture of the above-mentioned moldable material and a moisture absorbing agent or a water absorbing agent may be formed into a sheet-like desiccant (2).

【0013】また、シート状乾燥剤(2)の厚みはフォ
トレジストフィルムロール(5)の層の厚みによっても
異なるが0.5mm以上が好ましく、更には0.8〜
1.5mmである。0.5mm未満ではしみ出しを抑え
る効果が弱くなり好ましくない。該シート状乾燥剤
(2)の形状は巻芯貫通孔(4)を有しているものであ
れば特に制限されず、該貫通孔(4)の形状としては円
型、非円型のいずれでもよい。該貫通孔(4)の形状も
巻芯部表面との間に少なくとも1カ所空隙部を形成する
ように非円型とすることが、該乾燥剤を装着又は脱着す
る際に、ごみ等の異物の発生がなく、また作業性が向上
するので好ましい。例えば、一例を示すと図3に示すよ
うに、シート状乾燥剤(2)を、ドーナツ状の内側に凸
部を設けた形状にすることが好ましく、更には該凸部を
2個以上(特に好ましくは3個)設けることが好まし
い。
The thickness of the sheet-like desiccant (2) varies depending on the thickness of the layer of the photoresist film roll (5), but is preferably 0.5 mm or more, and more preferably 0.8 to 0.8 mm.
1.5 mm. If it is less than 0.5 mm, the effect of suppressing seepage is weakened, which is not preferable. The shape of the sheet-like desiccant (2) is not particularly limited as long as it has a core through-hole (4), and the shape of the through-hole (4) may be either circular or non-circular. May be. The shape of the through hole (4) may be non-circular so that at least one void is formed between the through hole (4) and the surface of the core portion. This is preferable because no generation occurs and workability is improved. For example, as shown in FIG. 3, as an example, it is preferable that the sheet-like desiccant (2) has a shape in which a convex portion is provided on the inner side of a donut shape. Preferably, three) are provided.

【0014】本発明では、シート状乾燥剤(2)とロー
ル端部の間に熱可塑性樹脂シート(1)を介在させてい
るので低温にさらした後、室温に戻しても端面では急激
に結露が起らず、また長期間室温においても、温度変化
によってしみ出しがないといった効果を奏するものであ
る。
According to the present invention, since the thermoplastic resin sheet (1) is interposed between the sheet-like desiccant (2) and the end of the roll, after being exposed to a low temperature, even if the temperature is returned to room temperature, dew condensation is sharply formed on the end face. No effect occurs, and there is an effect that there is no exudation due to a temperature change even at room temperature for a long time.

【0015】[0015]

【実施例】以下、実施例を挙げて本発明を具体的に説明
する。 実施例1 感光性樹脂組成物層としてフィルム性付与アクリルポリ
マー、エチレン性不飽和化合物、光重合開始剤からなる
感光性樹脂組成物を用い、ポリエチレンテレフタレート
フィルム(膜厚20μm)上に該感光性樹脂組成物層
(膜厚40μm)、更にポリエチレンフィルム(膜厚2
6μm)を形成したフォトレジストフィルム(ニチゴー
・モートン社製『801Y40』)を用いて、長さ12
0mの該フォトレジストフィルムを、幅330mmにス
リットしながら、直径76.2mmのABS製巻芯にフ
ィルム端部を揃えて巻き取ったフォトレジストフィルム
ロール(5)の両端面に、図2に示される如き貫通孔
(3)が円型の形状を有するポリスチレン製の熱可塑性
樹脂シート(1)〔厚さ0.18mm、内径84mm、
外径169mm〕を端面に密着させるように設置し、更
にその熱可塑性樹脂シート(1)を覆うように図3に示
される如き貫通孔(4)が非円型の形状を有するシート
状乾燥剤(2)〔日本低温乾燥工業(株)製『アイディ
シート』、厚さ1.0mm、外径169mm〕を設けて
端面が保護されたフォトレジストフィルムロールを作製
し、以下のように評価した。
The present invention will be specifically described below with reference to examples. Example 1 A photosensitive resin composition comprising a film-providing acrylic polymer, an ethylenically unsaturated compound, and a photopolymerization initiator was used as a photosensitive resin composition layer, and the photosensitive resin was formed on a polyethylene terephthalate film (film thickness: 20 μm). The composition layer (film thickness 40 μm) and the polyethylene film (film thickness 2
Using a photoresist film ("801Y40" manufactured by Nichigo Morton Co., Ltd.) on which
While slitting the photoresist film having a width of 0 m to a width of 330 mm, the photoresist film roll (5) was wound on an ABS core having a diameter of 76.2 mm with the film edges aligned, as shown in FIG. Polystyrene thermoplastic resin sheet (1) having a circular through hole (3) [thickness 0.18 mm, inner diameter 84 mm,
Outer diameter 169 mm] is attached to the end face, and the through hole (4) as shown in FIG. 3 has a non-circular shape so as to cover the thermoplastic resin sheet (1). (2) A photoresist film roll having an end face protected by providing [ID SHEET, manufactured by Japan Low Temperature Drying Co., Ltd., thickness 1.0 mm, outer diameter 169 mm] was prepared and evaluated as follows.

【0016】(しみ出し)以下の2種の評価をした。 (1)低温放置後のしみ出し 上記で作製したフォトレジストフィルムロールを−20
℃で3日間放置した後、23℃、60RH%の環境下に
10時間さらして端面のしみ出しの様子を以下のように
評価した。 ○・・・しみ出しが全く観察されない △・・・しみ出しがすこし観察される ×・・・多量のしみ出しが観察される (2)常温長期放置後のしみ出し 上記で作製したフォトレジストフィルムロールを23
℃、60RH%の環境下に1週間放置した後、20℃、
80RH%の環境下1週間放置し、このサイクルを2回
繰返した後の端部のしみ出しを以下のように評価した。 ○・・・しみ出しが全く観察されない △・・・しみ出しがすこし観察される ×・・・多量のしみ出しが観察される また、上記フォトレジストフィルムをロールを使用する
際に上記とシート状乾燥剤(2)、熱可塑性樹脂シート
(1)を脱着しても巻芯(6)にごみ等の異物の付着は
全く無かった。
(Exudation) The following two types of evaluations were made. (1) Exudation after leaving at low temperature The photoresist film roll prepared above was -20
After leaving it at 30 ° C. for 3 days, it was exposed to an environment of 23 ° C. and 60 RH% for 10 hours, and the state of exudation of the end face was evaluated as follows. ○: no exudation is observed at all △: exudation is observed a little × ・ ・ ・ a large amount of exudation is observed (2) Exudation after long-term standing at room temperature The photoresist film prepared above Roll 23
After leaving for 1 week in an environment of 60 ° C. and 60 RH%,
After leaving for 1 week in an environment of 80 RH% and repeating this cycle twice, the exudation of the end portion was evaluated as follows. ○: No exudation is observed at all △: Exudation is observed a little ×: A large amount of exudation is observed Also, when using a roll of the above photoresist film, Even when the desiccant (2) and the thermoplastic resin sheet (1) were removed, no foreign matter such as dust adhered to the core (6).

【0017】実施例2 実施例1において、熱可塑性樹脂シート(1)とシート
状乾燥剤(2)のいずれについても貫通孔(3)および
(4)が巻芯に完全にはまる円型のもの(内径84m
m、外径169mm)に変更して同様に端面が保護され
たフォトレジストフィルムロールを製造して同様に評価
した。
Example 2 In Example 1, for both the thermoplastic resin sheet (1) and the sheet-like desiccant (2), the through-holes (3) and (4) were completely circular so as to completely fit in the core. (84m inside diameter
m, the outer diameter was 169 mm), and a photoresist film roll whose end face was similarly protected was manufactured and evaluated in the same manner.

【0018】比較例1 実施例1において熱可塑性樹脂シート(1)を省略して
同様にフォトレジストフィルムロールを製造して同様に
評価した。
Comparative Example 1 A photoresist film roll was produced in the same manner as in Example 1 except that the thermoplastic resin sheet (1) was omitted, and the same evaluation was performed.

【0019】比較例2 実施例1においてシート状乾燥剤(2)を省略して同様
にフォトレジストフィルムロールを製造して同様に評価
した。実施例1、2、比較例1、2の評価結果を以下の
表1に示した。
Comparative Example 2 A photoresist film roll was manufactured in the same manner as in Example 1 except that the sheet-like drying agent (2) was omitted, and the same evaluation was performed. The evaluation results of Examples 1 and 2 and Comparative Examples 1 and 2 are shown in Table 1 below.

【0020】 [0020]

【0021】[0021]

【発明の効果】本発明の端面が保護されたフォトレジス
トフィルムロールは、フォトレジストフィルムを円筒状
の巻芯に巻き取ったフォトレジストフィルムロール
(5)の端面に、巻芯貫通孔(3)及び(4)を有する
熱可塑性樹脂シート(1)及びシート状乾燥剤(2)を
順次設けてなるので、低温にさらした後に室温に戻して
も急激な結露現象が防止され、また室温で長期間保存し
て外界温度が変化してもしみ出しが起らないといった効
果を奏するものである。
According to the present invention, there is provided a photoresist film roll having a protected end face, wherein a photoresist film roll (5) obtained by winding a photoresist film around a cylindrical core has a core through-hole (3). And (4), the thermoplastic resin sheet (1) and the sheet-like desiccant (2) are sequentially provided, so that even if the film is exposed to a low temperature and then returned to room temperature, a rapid condensation phenomenon can be prevented, and the room temperature can be maintained for a long time. This has the effect of preventing oozing even if the ambient temperature changes after storage for a period.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明のフォトレジストフィルムロールの正
面図
FIG. 1 is a front view of a photoresist film roll of the present invention.

【図2】 熱可塑性シートの正面図、中央断面図FIG. 2 is a front view and a center cross-sectional view of a thermoplastic sheet.

【図3】 シート状乾燥剤の正面図、中央断面図FIG. 3 is a front view and a central sectional view of a sheet-like desiccant.

【図4】 本発明のフォトレジストフィルムロールの構
FIG. 4 is a configuration of a photoresist film roll of the present invention.

【符号の説明】[Explanation of symbols]

1・・・熱可塑性樹脂シート 2・・・シート状乾燥剤 3・・・熱可塑性樹脂シートの貫通孔 4・・・シート状乾燥剤の貫通孔 5・・・フォトレジストフィルムロール 6・・・巻芯 DESCRIPTION OF SYMBOLS 1 ... Thermoplastic resin sheet 2 ... Sheet-shaped desiccant 3 ... Through-hole of thermoplastic resin sheet 4 ... Through-hole of sheet-shaped desiccant 5 ... Photoresist film roll 6 ... Core

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G03F 7/004 512 G03F 7/004 512 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) G03F 7/004 512 G03F 7/004 512

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 フォトレジストフィルムを円筒状の巻芯
(6)に巻き取ったフィルムロール(5)の端面に、巻
芯貫通孔を有する熱可塑性樹脂シート(1)及びシート
状乾燥剤(2)を順次設けてなることを特徴とする端面
が保護されたフォトレジストフィルムロール。
1. A thermoplastic resin sheet (1) having a core through-hole on an end face of a film roll (5) obtained by winding a photoresist film around a cylindrical core (6), and a sheet desiccant (2). ), A photoresist film roll having a protected end face.
【請求項2】 熱可塑性樹脂シート(1)がポリスチレ
ン、ポリエステル、ポリ塩化ビニルのいずれかよりなる
ことを特徴とする請求項1記載の端面が保護されたフォ
トレジストフィルムロール。
2. The photoresist film roll according to claim 1, wherein the thermoplastic resin sheet (1) is made of any one of polystyrene, polyester, and polyvinyl chloride.
【請求項3】 シート状乾燥剤(2)の貫通孔の形状を
巻芯部表面との間に少なくとも1カ所空隙部を形成する
ように非円型としたことを特徴とする請求項1あるいは
2記載の端面が保護されたフォトレジストフィルムロー
ル。
3. The sheet-shaped desiccant (2) is non-circular in shape so that at least one void is formed between the core and the surface of the core. 2. The photoresist film roll according to 2, wherein the end face is protected.
【請求項4】 シート状乾燥剤(2)がドーナツ状の内
側に少なくとも1個以上の凸部を設けた形状を有するこ
とを特徴とする請求項1〜3いずれか記載の端面が保護
されたフォトレジストフィルムロール。
4. The end face is protected according to claim 1, wherein the sheet-like desiccant (2) has a shape in which at least one projection is provided inside a donut. Photoresist film roll.
JP2000000550A 2000-01-06 2000-01-06 End face protected photoresist film roll Pending JP2001188319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000000550A JP2001188319A (en) 2000-01-06 2000-01-06 End face protected photoresist film roll

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000000550A JP2001188319A (en) 2000-01-06 2000-01-06 End face protected photoresist film roll

Publications (1)

Publication Number Publication Date
JP2001188319A true JP2001188319A (en) 2001-07-10

Family

ID=18529884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000000550A Pending JP2001188319A (en) 2000-01-06 2000-01-06 End face protected photoresist film roll

Country Status (1)

Country Link
JP (1) JP2001188319A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1816088A1 (en) * 2004-11-24 2007-08-08 Kuraray Co., Ltd., Kurashiki Plant Water-soluble film roll and method for paying out water-soluble film
JP2014106374A (en) * 2012-11-27 2014-06-09 Nissha Printing Co Ltd Dry film resist roll with seal

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1816088A1 (en) * 2004-11-24 2007-08-08 Kuraray Co., Ltd., Kurashiki Plant Water-soluble film roll and method for paying out water-soluble film
EP1816088A4 (en) * 2004-11-24 2009-06-24 Kuraray Co Ltd Kurashiki Plant Water-soluble film roll and method for paying out water-soluble film
CN104309935A (en) * 2004-11-24 2015-01-28 可乐丽股份有限公司 Water-soluble film roll and method for paying out water-soluble film
US9340352B2 (en) 2004-11-24 2016-05-17 Kuraray Co., Ltd. Water-soluble film roll and method for paying out water-soluble film
CN104309935B (en) * 2004-11-24 2016-11-30 可乐丽股份有限公司 The method for paying out of water-soluble film
JP2014106374A (en) * 2012-11-27 2014-06-09 Nissha Printing Co Ltd Dry film resist roll with seal

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