JP2001185975A - 表面弾性波素子 - Google Patents
表面弾性波素子Info
- Publication number
- JP2001185975A JP2001185975A JP36495499A JP36495499A JP2001185975A JP 2001185975 A JP2001185975 A JP 2001185975A JP 36495499 A JP36495499 A JP 36495499A JP 36495499 A JP36495499 A JP 36495499A JP 2001185975 A JP2001185975 A JP 2001185975A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric material
- substrate
- acoustic wave
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000013078 crystal Substances 0.000 claims description 20
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 239000010409 thin film Substances 0.000 abstract description 68
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 22
- 239000010408 film Substances 0.000 description 16
- 238000010030 laminating Methods 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000608 laser ablation Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36495499A JP2001185975A (ja) | 1999-12-22 | 1999-12-22 | 表面弾性波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36495499A JP2001185975A (ja) | 1999-12-22 | 1999-12-22 | 表面弾性波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001185975A true JP2001185975A (ja) | 2001-07-06 |
| JP2001185975A5 JP2001185975A5 (enExample) | 2004-10-14 |
Family
ID=18483077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP36495499A Withdrawn JP2001185975A (ja) | 1999-12-22 | 1999-12-22 | 表面弾性波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001185975A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6995634B2 (en) | 2003-01-29 | 2006-02-07 | Seiko Epson Corporation | Surface-acoustic-wave component adapted to electronic circuit and device, and manufacturing method therefor |
| JPWO2005050836A1 (ja) * | 2003-11-19 | 2007-06-14 | 株式会社村田製作所 | 端面反射型弾性表面波装置及びその製造方法 |
| WO2016185772A1 (ja) * | 2015-05-15 | 2016-11-24 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
| JP2023060058A (ja) * | 2019-01-30 | 2023-04-27 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびマルチプレクサ |
-
1999
- 1999-12-22 JP JP36495499A patent/JP2001185975A/ja not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6995634B2 (en) | 2003-01-29 | 2006-02-07 | Seiko Epson Corporation | Surface-acoustic-wave component adapted to electronic circuit and device, and manufacturing method therefor |
| JPWO2005050836A1 (ja) * | 2003-11-19 | 2007-06-14 | 株式会社村田製作所 | 端面反射型弾性表面波装置及びその製造方法 |
| WO2016185772A1 (ja) * | 2015-05-15 | 2016-11-24 | 株式会社村田製作所 | 弾性表面波装置及びその製造方法 |
| US10910546B2 (en) | 2015-05-15 | 2021-02-02 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device and method of manufacturing the same |
| JP2023060058A (ja) * | 2019-01-30 | 2023-04-27 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびマルチプレクサ |
| JP7553622B2 (ja) | 2019-01-30 | 2024-09-18 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびマルチプレクサ |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050701 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050719 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20050809 |